JP5173945B2 - クーラント再生方法およびスラリー再生方法 - Google Patents

クーラント再生方法およびスラリー再生方法 Download PDF

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Publication number
JP5173945B2
JP5173945B2 JP2009146448A JP2009146448A JP5173945B2 JP 5173945 B2 JP5173945 B2 JP 5173945B2 JP 2009146448 A JP2009146448 A JP 2009146448A JP 2009146448 A JP2009146448 A JP 2009146448A JP 5173945 B2 JP5173945 B2 JP 5173945B2
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JP
Japan
Prior art keywords
coolant
slurry
distillation
regeneration method
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009146448A
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English (en)
Japanese (ja)
Other versions
JP2010030033A (ja
JP2010030033A5 (enExample
Inventor
公彦 梶本
義之 北條
哲啓 奥野
康博 山田
吉隆 勝川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Sanyo Chemical Industries Ltd
Original Assignee
Sharp Corp
Sanyo Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp, Sanyo Chemical Industries Ltd filed Critical Sharp Corp
Priority to JP2009146448A priority Critical patent/JP5173945B2/ja
Priority to PCT/JP2009/062126 priority patent/WO2010001961A1/ja
Publication of JP2010030033A publication Critical patent/JP2010030033A/ja
Publication of JP2010030033A5 publication Critical patent/JP2010030033A5/ja
Application granted granted Critical
Publication of JP5173945B2 publication Critical patent/JP5173945B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007—Use, recovery or regeneration of abrasive mediums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2009146448A 2008-07-02 2009-06-19 クーラント再生方法およびスラリー再生方法 Expired - Fee Related JP5173945B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009146448A JP5173945B2 (ja) 2008-07-02 2009-06-19 クーラント再生方法およびスラリー再生方法
PCT/JP2009/062126 WO2010001961A1 (ja) 2008-07-02 2009-07-02 クーラント再生方法およびスラリー再生方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008173355 2008-07-02
JP2008173355 2008-07-02
JP2009146448A JP5173945B2 (ja) 2008-07-02 2009-06-19 クーラント再生方法およびスラリー再生方法

Publications (3)

Publication Number Publication Date
JP2010030033A JP2010030033A (ja) 2010-02-12
JP2010030033A5 JP2010030033A5 (enExample) 2011-02-03
JP5173945B2 true JP5173945B2 (ja) 2013-04-03

Family

ID=41466052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009146448A Expired - Fee Related JP5173945B2 (ja) 2008-07-02 2009-06-19 クーラント再生方法およびスラリー再生方法

Country Status (2)

Country Link
JP (1) JP5173945B2 (enExample)
WO (1) WO2010001961A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5332914B2 (ja) * 2009-05-29 2013-11-06 信越半導体株式会社 シリコンインゴットの切断方法
JP5640260B2 (ja) * 2010-06-25 2014-12-17 日本碍子株式会社 クーラント回収方法
JP5844135B2 (ja) * 2010-12-24 2016-01-13 花王株式会社 研磨液組成物の製造方法
JP5756423B2 (ja) * 2011-09-07 2015-07-29 ジー・フォースジャパン株式会社 分離回収装置
JPWO2013054577A1 (ja) * 2011-10-12 2015-03-30 株式会社村田製作所 加工廃液循環装置及び加工廃液循環方法
JPWO2013099595A1 (ja) * 2011-12-27 2015-04-30 旭硝子株式会社 研磨剤用添加剤および研磨方法
JP2013248706A (ja) * 2012-05-31 2013-12-12 Panasonic Corp クーラント廃液の再生方法、クーラント廃液の処理方法、クーラント廃液の処理システム、及び再生クーラント液の製造方法
JP5860026B2 (ja) * 2013-12-12 2016-02-16 アミタ株式会社 シリコンスラリー廃液の全量リサイクルシステム、クーラント回収液、回収砥粒、及び回収切削粉

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4497767B2 (ja) * 2001-09-06 2010-07-07 ユシロ化学工業株式会社 固定砥粒ワイヤソー用水溶性加工液組成物
JP2005313030A (ja) * 2004-04-27 2005-11-10 Sharp Corp スラリ再生方法
JP4493454B2 (ja) * 2004-09-22 2010-06-30 株式会社カサタニ シリコン加工用水溶性切削剤組成物及び加工方法
ITRM20050329A1 (it) * 2005-06-24 2006-12-25 Guido Fragiacomo Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto.
JP2007246366A (ja) * 2006-03-17 2007-09-27 Sharp Corp シリコン含有材料の回収方法

Also Published As

Publication number Publication date
JP2010030033A (ja) 2010-02-12
WO2010001961A1 (ja) 2010-01-07

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