JP5170679B2 - 磁気センサおよび回転角度検出装置 - Google Patents

磁気センサおよび回転角度検出装置 Download PDF

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Publication number
JP5170679B2
JP5170679B2 JP2008238938A JP2008238938A JP5170679B2 JP 5170679 B2 JP5170679 B2 JP 5170679B2 JP 2008238938 A JP2008238938 A JP 2008238938A JP 2008238938 A JP2008238938 A JP 2008238938A JP 5170679 B2 JP5170679 B2 JP 5170679B2
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Japan
Prior art keywords
magnetic sensor
magnetoresistive effect
magnetoresistive
elements
fixed layer
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Expired - Fee Related
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JP2008238938A
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Japanese (ja)
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JP2010032484A (ja
JP2010032484A5 (https=
Inventor
泰行 岡田
千春 三俣
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Proterial Ltd
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Hitachi Metals Ltd
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Priority to JP2008238938A priority Critical patent/JP5170679B2/ja
Priority to DE102009006144A priority patent/DE102009006144A1/de
Priority to US12/359,684 priority patent/US8054067B2/en
Publication of JP2010032484A publication Critical patent/JP2010032484A/ja
Publication of JP2010032484A5 publication Critical patent/JP2010032484A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2008238938A 2008-01-29 2008-09-18 磁気センサおよび回転角度検出装置 Expired - Fee Related JP5170679B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008238938A JP5170679B2 (ja) 2008-01-29 2008-09-18 磁気センサおよび回転角度検出装置
DE102009006144A DE102009006144A1 (de) 2008-01-29 2009-01-26 Magnetischer Sensor und Drehwinkel-Erfassungsvorrichtung
US12/359,684 US8054067B2 (en) 2008-01-29 2009-01-26 Magnetic sensor and rotation-angle-detecting apparatus with a bridge circuit

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2008018031 2008-01-29
JP2008018031 2008-01-29
JP2008164644 2008-06-24
JP2008164644 2008-06-24
JP2008238938A JP5170679B2 (ja) 2008-01-29 2008-09-18 磁気センサおよび回転角度検出装置

Publications (3)

Publication Number Publication Date
JP2010032484A JP2010032484A (ja) 2010-02-12
JP2010032484A5 JP2010032484A5 (https=) 2012-11-22
JP5170679B2 true JP5170679B2 (ja) 2013-03-27

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JP2008238938A Expired - Fee Related JP5170679B2 (ja) 2008-01-29 2008-09-18 磁気センサおよび回転角度検出装置

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US (1) US8054067B2 (https=)
JP (1) JP5170679B2 (https=)
DE (1) DE102009006144A1 (https=)

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CN102540112B (zh) * 2011-04-06 2014-04-16 江苏多维科技有限公司 单一芯片推挽桥式磁场传感器
CN102226836A (zh) 2011-04-06 2011-10-26 江苏多维科技有限公司 单一芯片桥式磁场传感器及其制备方法
CN202013413U (zh) 2011-04-06 2011-10-19 江苏多维科技有限公司 单一芯片桥式磁场传感器
TWI510768B (zh) * 2011-06-21 2015-12-01 Ind Tech Res Inst 力感測裝置及其力感測系統
JP5802565B2 (ja) * 2012-01-18 2015-10-28 アルプス電気株式会社 磁気センサ
DE102012209232A1 (de) * 2012-05-31 2013-12-05 Robert Bosch Gmbh Magnetfeldsensor
JP5590349B2 (ja) 2012-07-18 2014-09-17 Ｔｄｋ株式会社 磁気センサシステム
JP6080555B2 (ja) * 2013-01-11 2017-02-15 アルプス電気株式会社 回転検出装置及びその製造方法
US9240546B2 (en) * 2013-03-26 2016-01-19 Infineon Technologies Ag Magnetoresistive devices and methods for manufacturing magnetoresistive devices
US9377327B2 (en) * 2013-06-28 2016-06-28 Analog Devices Global Magnetic field direction sensor
JP6127271B2 (ja) * 2013-09-19 2017-05-17 パナソニックＩｐマネジメント株式会社 巨大磁気抵抗素子
CN103645448A (zh) * 2013-12-20 2014-03-19 叶友忠 改型惠斯通半桥电路及传感器
US9529060B2 (en) 2014-01-09 2016-12-27 Allegro Microsystems, Llc Magnetoresistance element with improved response to magnetic fields
US9625281B2 (en) * 2014-12-23 2017-04-18 Infineon Technologies Ag Fail-safe operation of an angle sensor with mixed bridges having separate power supplies
JP2016166748A (ja) * 2015-03-09 2016-09-15 Tdk株式会社 磁気センサ
JP6763887B2 (ja) 2015-06-05 2020-09-30 アレグロ・マイクロシステムズ・エルエルシー 磁界に対する応答が改善されたスピンバルブ磁気抵抗効果素子
JP6430565B2 (ja) 2016-03-23 2018-11-28 アナログ・デヴァイシズ・グローバル 磁界検出器
US10620279B2 (en) 2017-05-19 2020-04-14 Allegro Microsystems, Llc Magnetoresistance element with increased operational range
US11022661B2 (en) 2017-05-19 2021-06-01 Allegro Microsystems, Llc Magnetoresistance element with increased operational range
US10739165B2 (en) 2017-07-05 2020-08-11 Analog Devices Global Magnetic field sensor
US10557726B2 (en) * 2018-01-31 2020-02-11 Allegro Microsystems, Llc Systems and methods for reducing angle error for magnetic field angle sensors
US11199424B2 (en) 2018-01-31 2021-12-14 Allegro Microsystems, Llc Reducing angle error in a magnetic field angle sensor
JP6597820B2 (ja) * 2018-03-12 2019-10-30 Ｔｄｋ株式会社 磁気センサおよび位置検出装置
JP6900936B2 (ja) * 2018-06-08 2021-07-14 Tdk株式会社 磁気検出装置
EP3667347B1 (en) * 2018-12-13 2021-09-08 Crocus Technology S.A. Magnetoresistive-based sensing circuit for two-dimensional sensing of high magnetic fields
WO2021041093A1 (en) * 2019-08-28 2021-03-04 Allegro Microsystems, Llc Reducing angle error in a magnetic field angle sensor
US11175359B2 (en) 2019-08-28 2021-11-16 Allegro Microsystems, Llc Reducing voltage non-linearity in a bridge having tunneling magnetoresistance (TMR) elements
JP2021047083A (ja) * 2019-09-18 2021-03-25 株式会社東海理化電機製作所 磁気センサ
JP7070532B2 (ja) 2019-11-19 2022-05-18 Tdk株式会社 磁気センサ
US11467233B2 (en) 2020-03-18 2022-10-11 Allegro Microsystems, Llc Linear bridges having nonlinear elements
US11408948B2 (en) 2020-03-18 2022-08-09 Allegro Microsystems, Llc Linear bridge having nonlinear elements for operation in high magnetic field intensities
EP4012431B1 (en) * 2020-12-11 2025-07-02 Allegro MicroSystems, LLC Magnetoresistive element for sensing a magnetic field in a z-axis
US11630168B2 (en) 2021-02-03 2023-04-18 Allegro Microsystems, Llc Linear sensor with dual spin valve element having reference layers with magnetization directions different from an external magnetic field direction
JP7837343B2 (ja) * 2021-03-19 2026-03-30 アレグロ・マイクロシステムズ・エルエルシー 高感度かつ低ゼロ磁場オフセットシフトを持つ磁気抵抗素子及び磁気センサ装置
US11719771B1 (en) 2022-06-02 2023-08-08 Allegro Microsystems, Llc Magnetoresistive sensor having seed layer hysteresis suppression
US12320870B2 (en) 2022-07-19 2025-06-03 Allegro Microsystems, Llc Controlling out-of-plane anisotropy in an MR sensor with free layer dusting
US12359904B2 (en) 2023-01-26 2025-07-15 Allegro Microsystems, Llc Method of manufacturing angle sensors including magnetoresistance elements including different types of antiferromagnetic materials
US12352832B2 (en) 2023-01-30 2025-07-08 Allegro Microsystems, Llc Reducing angle error in angle sensor due to orthogonality drift over magnetic-field
CN117250571B (zh) * 2023-09-18 2024-08-30 苏州纳芯微电子股份有限公司 高精度磁场感测装置及运动传感器

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Publication number Publication date
JP2010032484A (ja) 2010-02-12
US20090189601A1 (en) 2009-07-30
DE102009006144A1 (de) 2009-10-08
US8054067B2 (en) 2011-11-08

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