JP2010032484A5 - - Google Patents
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- Publication number
- JP2010032484A5 JP2010032484A5 JP2008238938A JP2008238938A JP2010032484A5 JP 2010032484 A5 JP2010032484 A5 JP 2010032484A5 JP 2008238938 A JP2008238938 A JP 2008238938A JP 2008238938 A JP2008238938 A JP 2008238938A JP 2010032484 A5 JP2010032484 A5 JP 2010032484A5
- Authority
- JP
- Japan
- Prior art keywords
- magnetic sensor
- magnetoresistive
- sensor according
- magnetoresistive effect
- fixed layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000694 effects Effects 0.000 claims 12
- 230000005415 magnetization Effects 0.000 claims 8
- 230000001154 acute effect Effects 0.000 claims 3
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008238938A JP5170679B2 (ja) | 2008-01-29 | 2008-09-18 | 磁気センサおよび回転角度検出装置 |
| DE102009006144A DE102009006144A1 (de) | 2008-01-29 | 2009-01-26 | Magnetischer Sensor und Drehwinkel-Erfassungsvorrichtung |
| US12/359,684 US8054067B2 (en) | 2008-01-29 | 2009-01-26 | Magnetic sensor and rotation-angle-detecting apparatus with a bridge circuit |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008018031 | 2008-01-29 | ||
| JP2008018031 | 2008-01-29 | ||
| JP2008164644 | 2008-06-24 | ||
| JP2008164644 | 2008-06-24 | ||
| JP2008238938A JP5170679B2 (ja) | 2008-01-29 | 2008-09-18 | 磁気センサおよび回転角度検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010032484A JP2010032484A (ja) | 2010-02-12 |
| JP2010032484A5 true JP2010032484A5 (https=) | 2012-11-22 |
| JP5170679B2 JP5170679B2 (ja) | 2013-03-27 |
Family
ID=40898559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008238938A Expired - Fee Related JP5170679B2 (ja) | 2008-01-29 | 2008-09-18 | 磁気センサおよび回転角度検出装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8054067B2 (https=) |
| JP (1) | JP5170679B2 (https=) |
| DE (1) | DE102009006144A1 (https=) |
Families Citing this family (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8779764B2 (en) | 2009-07-13 | 2014-07-15 | Hitachi Metals, Ltd. | Method for producing magnetoresistive effect element, magnetic sensor, rotation-angle detection device |
| JP5476518B2 (ja) * | 2010-03-12 | 2014-04-23 | アルプス電気株式会社 | 磁気センサの製造方法 |
| US11506732B2 (en) | 2010-10-20 | 2022-11-22 | Infineon Technologies Ag | XMR sensors with serial segment strip configurations |
| JP5131339B2 (ja) * | 2010-11-17 | 2013-01-30 | Tdk株式会社 | 回転磁界センサ |
| CN102540112B (zh) * | 2011-04-06 | 2014-04-16 | 江苏多维科技有限公司 | 单一芯片推挽桥式磁场传感器 |
| CN102226836A (zh) | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器及其制备方法 |
| CN202013413U (zh) | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
| TWI510768B (zh) * | 2011-06-21 | 2015-12-01 | Ind Tech Res Inst | 力感測裝置及其力感測系統 |
| JP5802565B2 (ja) * | 2012-01-18 | 2015-10-28 | アルプス電気株式会社 | 磁気センサ |
| DE102012209232A1 (de) * | 2012-05-31 | 2013-12-05 | Robert Bosch Gmbh | Magnetfeldsensor |
| JP5590349B2 (ja) | 2012-07-18 | 2014-09-17 | Tdk株式会社 | 磁気センサシステム |
| JP6080555B2 (ja) * | 2013-01-11 | 2017-02-15 | アルプス電気株式会社 | 回転検出装置及びその製造方法 |
| US9240546B2 (en) * | 2013-03-26 | 2016-01-19 | Infineon Technologies Ag | Magnetoresistive devices and methods for manufacturing magnetoresistive devices |
| US9377327B2 (en) * | 2013-06-28 | 2016-06-28 | Analog Devices Global | Magnetic field direction sensor |
| JP6127271B2 (ja) * | 2013-09-19 | 2017-05-17 | パナソニックIpマネジメント株式会社 | 巨大磁気抵抗素子 |
| CN103645448A (zh) * | 2013-12-20 | 2014-03-19 | 叶友忠 | 改型惠斯通半桥电路及传感器 |
| US9529060B2 (en) | 2014-01-09 | 2016-12-27 | Allegro Microsystems, Llc | Magnetoresistance element with improved response to magnetic fields |
| US9625281B2 (en) * | 2014-12-23 | 2017-04-18 | Infineon Technologies Ag | Fail-safe operation of an angle sensor with mixed bridges having separate power supplies |
| JP2016166748A (ja) * | 2015-03-09 | 2016-09-15 | Tdk株式会社 | 磁気センサ |
| JP6763887B2 (ja) | 2015-06-05 | 2020-09-30 | アレグロ・マイクロシステムズ・エルエルシー | 磁界に対する応答が改善されたスピンバルブ磁気抵抗効果素子 |
| JP6430565B2 (ja) | 2016-03-23 | 2018-11-28 | アナログ・デヴァイシズ・グローバル | 磁界検出器 |
| US10620279B2 (en) | 2017-05-19 | 2020-04-14 | Allegro Microsystems, Llc | Magnetoresistance element with increased operational range |
| US11022661B2 (en) | 2017-05-19 | 2021-06-01 | Allegro Microsystems, Llc | Magnetoresistance element with increased operational range |
| US10739165B2 (en) | 2017-07-05 | 2020-08-11 | Analog Devices Global | Magnetic field sensor |
| US10557726B2 (en) * | 2018-01-31 | 2020-02-11 | Allegro Microsystems, Llc | Systems and methods for reducing angle error for magnetic field angle sensors |
| US11199424B2 (en) | 2018-01-31 | 2021-12-14 | Allegro Microsystems, Llc | Reducing angle error in a magnetic field angle sensor |
| JP6597820B2 (ja) * | 2018-03-12 | 2019-10-30 | Tdk株式会社 | 磁気センサおよび位置検出装置 |
| JP6900936B2 (ja) * | 2018-06-08 | 2021-07-14 | Tdk株式会社 | 磁気検出装置 |
| EP3667347B1 (en) * | 2018-12-13 | 2021-09-08 | Crocus Technology S.A. | Magnetoresistive-based sensing circuit for two-dimensional sensing of high magnetic fields |
| WO2021041093A1 (en) * | 2019-08-28 | 2021-03-04 | Allegro Microsystems, Llc | Reducing angle error in a magnetic field angle sensor |
| US11175359B2 (en) | 2019-08-28 | 2021-11-16 | Allegro Microsystems, Llc | Reducing voltage non-linearity in a bridge having tunneling magnetoresistance (TMR) elements |
| JP2021047083A (ja) * | 2019-09-18 | 2021-03-25 | 株式会社東海理化電機製作所 | 磁気センサ |
| JP7070532B2 (ja) | 2019-11-19 | 2022-05-18 | Tdk株式会社 | 磁気センサ |
| US11467233B2 (en) | 2020-03-18 | 2022-10-11 | Allegro Microsystems, Llc | Linear bridges having nonlinear elements |
| US11408948B2 (en) | 2020-03-18 | 2022-08-09 | Allegro Microsystems, Llc | Linear bridge having nonlinear elements for operation in high magnetic field intensities |
| EP4012431B1 (en) * | 2020-12-11 | 2025-07-02 | Allegro MicroSystems, LLC | Magnetoresistive element for sensing a magnetic field in a z-axis |
| US11630168B2 (en) | 2021-02-03 | 2023-04-18 | Allegro Microsystems, Llc | Linear sensor with dual spin valve element having reference layers with magnetization directions different from an external magnetic field direction |
| JP7837343B2 (ja) * | 2021-03-19 | 2026-03-30 | アレグロ・マイクロシステムズ・エルエルシー | 高感度かつ低ゼロ磁場オフセットシフトを持つ磁気抵抗素子及び磁気センサ装置 |
| US11719771B1 (en) | 2022-06-02 | 2023-08-08 | Allegro Microsystems, Llc | Magnetoresistive sensor having seed layer hysteresis suppression |
| US12320870B2 (en) | 2022-07-19 | 2025-06-03 | Allegro Microsystems, Llc | Controlling out-of-plane anisotropy in an MR sensor with free layer dusting |
| US12359904B2 (en) | 2023-01-26 | 2025-07-15 | Allegro Microsystems, Llc | Method of manufacturing angle sensors including magnetoresistance elements including different types of antiferromagnetic materials |
| US12352832B2 (en) | 2023-01-30 | 2025-07-08 | Allegro Microsystems, Llc | Reducing angle error in angle sensor due to orthogonality drift over magnetic-field |
| CN117250571B (zh) * | 2023-09-18 | 2024-08-30 | 苏州纳芯微电子股份有限公司 | 高精度磁场感测装置及运动传感器 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0333934A (ja) | 1989-06-29 | 1991-02-14 | Nec Corp | レジスタ退避復帰方式 |
| JPH1097709A (ja) * | 1996-09-20 | 1998-04-14 | Fujitsu Ltd | スピンバルブ磁気抵抗効果ヘッドとその製造方法及び磁気記録再生装置 |
| JP3587678B2 (ja) | 1998-03-20 | 2004-11-10 | Tdk株式会社 | 磁界センサ |
| JP3623367B2 (ja) * | 1998-07-17 | 2005-02-23 | アルプス電気株式会社 | 巨大磁気抵抗効果素子を備えたポテンショメータ |
| US6501678B1 (en) * | 1999-06-18 | 2002-12-31 | Koninklijke Philips Electronics N.V. | Magnetic systems with irreversible characteristics and a method of manufacturing and repairing and operating such systems |
| JP4543350B2 (ja) | 1999-12-03 | 2010-09-15 | 日立金属株式会社 | 回転角度センサー及び回転角度センサーユニット |
| US6633462B2 (en) * | 2000-07-13 | 2003-10-14 | Koninklijke Philips Electronics N.V. | Magnetoresistive angle sensor having several sensing elements |
| JP2004296000A (ja) | 2003-03-27 | 2004-10-21 | Hitachi Ltd | 磁気抵抗効果型ヘッド、及びその製造方法 |
| JP4259937B2 (ja) | 2003-06-30 | 2009-04-30 | アルプス電気株式会社 | 角度検出センサ |
| TWI361503B (en) * | 2005-03-17 | 2012-04-01 | Yamaha Corp | Three-axis magnetic sensor and manufacturing method therefor |
| JP4458103B2 (ja) * | 2007-02-27 | 2010-04-28 | Tdk株式会社 | 磁気センサ、磁気方位センサ、磁界検出方法および磁気方位検出方法 |
| US8203332B2 (en) * | 2008-06-24 | 2012-06-19 | Magic Technologies, Inc. | Gear tooth sensor (GTS) with magnetoresistive bridge |
-
2008
- 2008-09-18 JP JP2008238938A patent/JP5170679B2/ja not_active Expired - Fee Related
-
2009
- 2009-01-26 DE DE102009006144A patent/DE102009006144A1/de not_active Ceased
- 2009-01-26 US US12/359,684 patent/US8054067B2/en not_active Expired - Fee Related
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