DE102009006144A1 - Magnetischer Sensor und Drehwinkel-Erfassungsvorrichtung - Google Patents
Magnetischer Sensor und Drehwinkel-Erfassungsvorrichtung Download PDFInfo
- Publication number
- DE102009006144A1 DE102009006144A1 DE102009006144A DE102009006144A DE102009006144A1 DE 102009006144 A1 DE102009006144 A1 DE 102009006144A1 DE 102009006144 A DE102009006144 A DE 102009006144A DE 102009006144 A DE102009006144 A DE 102009006144A DE 102009006144 A1 DE102009006144 A1 DE 102009006144A1
- Authority
- DE
- Germany
- Prior art keywords
- angle
- elements
- layer
- magnetoresistive
- magnetoresistive elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 106
- 238000001514 detection method Methods 0.000 title claims description 6
- 230000005415 magnetization Effects 0.000 claims abstract description 74
- 230000001154 acute effect Effects 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 129
- 230000000052 comparative effect Effects 0.000 description 41
- 230000000694 effects Effects 0.000 description 24
- 230000008859 change Effects 0.000 description 18
- 238000004458 analytical method Methods 0.000 description 8
- 238000004088 simulation Methods 0.000 description 8
- 230000005294 ferromagnetic effect Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 230000005290 antiferromagnetic effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009813 interlayer exchange coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005293 ferrimagnetic effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000007652 sheet-forming process Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-018031 | 2008-01-29 | ||
| JP2008018031 | 2008-01-29 | ||
| JP2008164644 | 2008-06-24 | ||
| JP2008-164644 | 2008-06-24 | ||
| JP2008238938A JP5170679B2 (ja) | 2008-01-29 | 2008-09-18 | 磁気センサおよび回転角度検出装置 |
| JP2008-238938 | 2008-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102009006144A1 true DE102009006144A1 (de) | 2009-10-08 |
Family
ID=40898559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102009006144A Ceased DE102009006144A1 (de) | 2008-01-29 | 2009-01-26 | Magnetischer Sensor und Drehwinkel-Erfassungsvorrichtung |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8054067B2 (https=) |
| JP (1) | JP5170679B2 (https=) |
| DE (1) | DE102009006144A1 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013102165A1 (de) | 2012-07-18 | 2014-02-06 | Tdk Corporation | Magnetsensorsystem |
| DE102017106322B4 (de) * | 2016-03-23 | 2020-01-30 | Analog Devices Global | Magnetfelddetektor |
| US10739165B2 (en) | 2017-07-05 | 2020-08-11 | Analog Devices Global | Magnetic field sensor |
| US11656301B2 (en) | 2019-11-19 | 2023-05-23 | Tdk Corporation | Magnetic sensor including magnetoresistive effect element and sealed chip |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8779764B2 (en) | 2009-07-13 | 2014-07-15 | Hitachi Metals, Ltd. | Method for producing magnetoresistive effect element, magnetic sensor, rotation-angle detection device |
| JP5476518B2 (ja) * | 2010-03-12 | 2014-04-23 | アルプス電気株式会社 | 磁気センサの製造方法 |
| US11506732B2 (en) | 2010-10-20 | 2022-11-22 | Infineon Technologies Ag | XMR sensors with serial segment strip configurations |
| JP5131339B2 (ja) * | 2010-11-17 | 2013-01-30 | Ｔｄｋ株式会社 | 回転磁界センサ |
| CN102540112B (zh) * | 2011-04-06 | 2014-04-16 | 江苏多维科技有限公司 | 单一芯片推挽桥式磁场传感器 |
| CN102226836A (zh) | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器及其制备方法 |
| CN202013413U (zh) | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
| TWI510768B (zh) * | 2011-06-21 | 2015-12-01 | Ind Tech Res Inst | 力感測裝置及其力感測系統 |
| JP5802565B2 (ja) * | 2012-01-18 | 2015-10-28 | アルプス電気株式会社 | 磁気センサ |
| DE102012209232A1 (de) * | 2012-05-31 | 2013-12-05 | Robert Bosch Gmbh | Magnetfeldsensor |
| JP6080555B2 (ja) * | 2013-01-11 | 2017-02-15 | アルプス電気株式会社 | 回転検出装置及びその製造方法 |
| US9240546B2 (en) * | 2013-03-26 | 2016-01-19 | Infineon Technologies Ag | Magnetoresistive devices and methods for manufacturing magnetoresistive devices |
| US9377327B2 (en) * | 2013-06-28 | 2016-06-28 | Analog Devices Global | Magnetic field direction sensor |
| JP6127271B2 (ja) * | 2013-09-19 | 2017-05-17 | パナソニックＩｐマネジメント株式会社 | 巨大磁気抵抗素子 |
| CN103645448A (zh) * | 2013-12-20 | 2014-03-19 | 叶友忠 | 改型惠斯通半桥电路及传感器 |
| US9529060B2 (en) | 2014-01-09 | 2016-12-27 | Allegro Microsystems, Llc | Magnetoresistance element with improved response to magnetic fields |
| US9625281B2 (en) * | 2014-12-23 | 2017-04-18 | Infineon Technologies Ag | Fail-safe operation of an angle sensor with mixed bridges having separate power supplies |
| JP2016166748A (ja) * | 2015-03-09 | 2016-09-15 | Tdk株式会社 | 磁気センサ |
| JP6763887B2 (ja) | 2015-06-05 | 2020-09-30 | アレグロ・マイクロシステムズ・エルエルシー | 磁界に対する応答が改善されたスピンバルブ磁気抵抗効果素子 |
| US10620279B2 (en) | 2017-05-19 | 2020-04-14 | Allegro Microsystems, Llc | Magnetoresistance element with increased operational range |
| US11022661B2 (en) | 2017-05-19 | 2021-06-01 | Allegro Microsystems, Llc | Magnetoresistance element with increased operational range |
| US10557726B2 (en) * | 2018-01-31 | 2020-02-11 | Allegro Microsystems, Llc | Systems and methods for reducing angle error for magnetic field angle sensors |
| US11199424B2 (en) | 2018-01-31 | 2021-12-14 | Allegro Microsystems, Llc | Reducing angle error in a magnetic field angle sensor |
| JP6597820B2 (ja) * | 2018-03-12 | 2019-10-30 | Ｔｄｋ株式会社 | 磁気センサおよび位置検出装置 |
| JP6900936B2 (ja) * | 2018-06-08 | 2021-07-14 | Tdk株式会社 | 磁気検出装置 |
| EP3667347B1 (en) * | 2018-12-13 | 2021-09-08 | Crocus Technology S.A. | Magnetoresistive-based sensing circuit for two-dimensional sensing of high magnetic fields |
| WO2021041093A1 (en) * | 2019-08-28 | 2021-03-04 | Allegro Microsystems, Llc | Reducing angle error in a magnetic field angle sensor |
| US11175359B2 (en) | 2019-08-28 | 2021-11-16 | Allegro Microsystems, Llc | Reducing voltage non-linearity in a bridge having tunneling magnetoresistance (TMR) elements |
| JP2021047083A (ja) * | 2019-09-18 | 2021-03-25 | 株式会社東海理化電機製作所 | 磁気センサ |
| US11467233B2 (en) | 2020-03-18 | 2022-10-11 | Allegro Microsystems, Llc | Linear bridges having nonlinear elements |
| US11408948B2 (en) | 2020-03-18 | 2022-08-09 | Allegro Microsystems, Llc | Linear bridge having nonlinear elements for operation in high magnetic field intensities |
| EP4012431B1 (en) * | 2020-12-11 | 2025-07-02 | Allegro MicroSystems, LLC | Magnetoresistive element for sensing a magnetic field in a z-axis |
| US11630168B2 (en) | 2021-02-03 | 2023-04-18 | Allegro Microsystems, Llc | Linear sensor with dual spin valve element having reference layers with magnetization directions different from an external magnetic field direction |
| JP7837343B2 (ja) * | 2021-03-19 | 2026-03-30 | アレグロ・マイクロシステムズ・エルエルシー | 高感度かつ低ゼロ磁場オフセットシフトを持つ磁気抵抗素子及び磁気センサ装置 |
| US11719771B1 (en) | 2022-06-02 | 2023-08-08 | Allegro Microsystems, Llc | Magnetoresistive sensor having seed layer hysteresis suppression |
| US12320870B2 (en) | 2022-07-19 | 2025-06-03 | Allegro Microsystems, Llc | Controlling out-of-plane anisotropy in an MR sensor with free layer dusting |
| US12359904B2 (en) | 2023-01-26 | 2025-07-15 | Allegro Microsystems, Llc | Method of manufacturing angle sensors including magnetoresistance elements including different types of antiferromagnetic materials |
| US12352832B2 (en) | 2023-01-30 | 2025-07-08 | Allegro Microsystems, Llc | Reducing angle error in angle sensor due to orthogonality drift over magnetic-field |
| CN117250571B (zh) * | 2023-09-18 | 2024-08-30 | 苏州纳芯微电子股份有限公司 | 高精度磁场感测装置及运动传感器 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0333934A (ja) | 1989-06-29 | 1991-02-14 | Nec Corp | レジスタ退避復帰方式 |
| JP2001159542A (ja) | 1999-12-03 | 2001-06-12 | Hitachi Metals Ltd | 回転角度センサー及び回転角度センサーユニット |
| JP2003502876A (ja) | 1999-06-18 | 2003-01-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 不可逆特性を持つ磁気システムおよびこの種システムを作成し修理し操作する方法 |
| JP2004296000A (ja) | 2003-03-27 | 2004-10-21 | Hitachi Ltd | 磁気抵抗効果型ヘッド、及びその製造方法 |
| JP3587678B2 (ja) | 1998-03-20 | 2004-11-10 | Ｔｄｋ株式会社 | 磁界センサ |
| JP2005024287A (ja) | 2003-06-30 | 2005-01-27 | Alps Electric Co Ltd | 角度検出センサ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1097709A (ja) * | 1996-09-20 | 1998-04-14 | Fujitsu Ltd | スピンバルブ磁気抵抗効果ヘッドとその製造方法及び磁気記録再生装置 |
| JP3623367B2 (ja) * | 1998-07-17 | 2005-02-23 | アルプス電気株式会社 | 巨大磁気抵抗効果素子を備えたポテンショメータ |
| US6633462B2 (en) * | 2000-07-13 | 2003-10-14 | Koninklijke Philips Electronics N.V. | Magnetoresistive angle sensor having several sensing elements |
| TWI361503B (en) * | 2005-03-17 | 2012-04-01 | Yamaha Corp | Three-axis magnetic sensor and manufacturing method therefor |
| JP4458103B2 (ja) * | 2007-02-27 | 2010-04-28 | Ｔｄｋ株式会社 | 磁気センサ、磁気方位センサ、磁界検出方法および磁気方位検出方法 |
| US8203332B2 (en) * | 2008-06-24 | 2012-06-19 | Magic Technologies, Inc. | Gear tooth sensor (GTS) with magnetoresistive bridge |
-
2008
- 2008-09-18 JP JP2008238938A patent/JP5170679B2/ja not_active Expired - Fee Related
-
2009
- 2009-01-26 DE DE102009006144A patent/DE102009006144A1/de not_active Ceased
- 2009-01-26 US US12/359,684 patent/US8054067B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0333934A (ja) | 1989-06-29 | 1991-02-14 | Nec Corp | レジスタ退避復帰方式 |
| JP3587678B2 (ja) | 1998-03-20 | 2004-11-10 | Ｔｄｋ株式会社 | 磁界センサ |
| JP2003502876A (ja) | 1999-06-18 | 2003-01-21 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 不可逆特性を持つ磁気システムおよびこの種システムを作成し修理し操作する方法 |
| JP2001159542A (ja) | 1999-12-03 | 2001-06-12 | Hitachi Metals Ltd | 回転角度センサー及び回転角度センサーユニット |
| JP2004296000A (ja) | 2003-03-27 | 2004-10-21 | Hitachi Ltd | 磁気抵抗効果型ヘッド、及びその製造方法 |
| JP2005024287A (ja) | 2003-06-30 | 2005-01-27 | Alps Electric Co Ltd | 角度検出センサ |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013102165A1 (de) | 2012-07-18 | 2014-02-06 | Tdk Corporation | Magnetsensorsystem |
| DE102013102165B4 (de) * | 2012-07-18 | 2014-11-20 | Tdk Corporation | Magnetsensorsystem |
| DE102017106322B4 (de) * | 2016-03-23 | 2020-01-30 | Analog Devices Global | Magnetfelddetektor |
| US11187763B2 (en) | 2016-03-23 | 2021-11-30 | Analog Devices International Unlimited Company | Offset compensation for magnetic field detector |
| US11294003B2 (en) | 2016-03-23 | 2022-04-05 | Analog Devices International Unlimited Company | Magnetic field detector |
| US12025683B2 (en) | 2016-03-23 | 2024-07-02 | Analog Devices International Unlimited Company | Length detector with magnetoresitive elements |
| US10739165B2 (en) | 2017-07-05 | 2020-08-11 | Analog Devices Global | Magnetic field sensor |
| US11656301B2 (en) | 2019-11-19 | 2023-05-23 | Tdk Corporation | Magnetic sensor including magnetoresistive effect element and sealed chip |
| US11965941B2 (en) | 2019-11-19 | 2024-04-23 | Tdk Corporation | Magnetic sensor |
| US12298363B2 (en) | 2019-11-19 | 2025-05-13 | Tdk Corporation | Magnetic sensor having magnetoresistive effect element with inclined magnetization direction of pinned layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010032484A (ja) | 2010-02-12 |
| US20090189601A1 (en) | 2009-07-30 |
| JP5170679B2 (ja) | 2013-03-27 |
| US8054067B2 (en) | 2011-11-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed |
Effective date: 20121213 |
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| R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: G01R0033090000 Ipc: H01L0043080000 Effective date: 20130305 |
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| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R002 | Refusal decision in examination/registration proceedings | ||
| R003 | Refusal decision now final |