JP5168002B2 - 振動子及び発振器 - Google Patents

振動子及び発振器 Download PDF

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Publication number
JP5168002B2
JP5168002B2 JP2008188663A JP2008188663A JP5168002B2 JP 5168002 B2 JP5168002 B2 JP 5168002B2 JP 2008188663 A JP2008188663 A JP 2008188663A JP 2008188663 A JP2008188663 A JP 2008188663A JP 5168002 B2 JP5168002 B2 JP 5168002B2
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JP
Japan
Prior art keywords
film
base
elastic arm
vibrator
piezoelectric
Prior art date
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Expired - Fee Related
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JP2008188663A
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English (en)
Japanese (ja)
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JP2010028536A (ja
JP2010028536A5 (enrdf_load_stackoverflow
Inventor
司 舩坂
剛夫 舟川
博則 鈴木
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2008188663A priority Critical patent/JP5168002B2/ja
Publication of JP2010028536A publication Critical patent/JP2010028536A/ja
Publication of JP2010028536A5 publication Critical patent/JP2010028536A5/ja
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Publication of JP5168002B2 publication Critical patent/JP5168002B2/ja
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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2008188663A 2008-07-22 2008-07-22 振動子及び発振器 Expired - Fee Related JP5168002B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008188663A JP5168002B2 (ja) 2008-07-22 2008-07-22 振動子及び発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008188663A JP5168002B2 (ja) 2008-07-22 2008-07-22 振動子及び発振器

Publications (3)

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JP2010028536A JP2010028536A (ja) 2010-02-04
JP2010028536A5 JP2010028536A5 (enrdf_load_stackoverflow) 2011-09-01
JP5168002B2 true JP5168002B2 (ja) 2013-03-21

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ID=41733925

Family Applications (1)

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JP2008188663A Expired - Fee Related JP5168002B2 (ja) 2008-07-22 2008-07-22 振動子及び発振器

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JP (1) JP5168002B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10756670B2 (en) 2016-12-19 2020-08-25 Seiko Epson Corporation Resonator, oscillator, electronic apparatus, and vehicle

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011199453A (ja) * 2010-03-18 2011-10-06 Seiko Epson Corp 振動体および振動デバイス
JP5552878B2 (ja) * 2010-04-14 2014-07-16 セイコーエプソン株式会社 振動片、振動デバイスおよび電子機器
JP5533349B2 (ja) * 2010-06-30 2014-06-25 セイコーエプソン株式会社 屈曲振動片、屈曲振動子、発振器、および電子機器
JP5581931B2 (ja) * 2010-09-17 2014-09-03 セイコーエプソン株式会社 振動片、振動片の製造方法、振動子、振動デバイスおよび電子機器
JP2012147347A (ja) * 2011-01-14 2012-08-02 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP2013062643A (ja) * 2011-09-13 2013-04-04 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5923862B2 (ja) * 2011-03-18 2016-05-25 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5942582B2 (ja) * 2012-05-15 2016-06-29 セイコーエプソン株式会社 振動子の製造方法
CN105210295B (zh) * 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6395008B2 (ja) 2014-12-26 2018-09-26 株式会社村田製作所 共振子の製造方法
JP6836180B2 (ja) * 2017-05-30 2021-02-24 セイコーエプソン株式会社 Ｍｅｍｓ素子、電子機器および移動体
JP2017216753A (ja) * 2017-09-15 2017-12-07 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57199312A (en) * 1981-06-02 1982-12-07 Citizen Watch Co Ltd Piezoelectric oscillator
JPH0783671A (ja) * 1993-07-22 1995-03-28 Yoshiro Tomikawa 振動型ジャイロスコープ
JPH085382A (ja) * 1994-06-23 1996-01-12 Nippondenso Co Ltd 角速度センサ
JP3322153B2 (ja) * 1997-03-07 2002-09-09 セイコーエプソン株式会社 音叉型水晶振動片
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4404218B2 (ja) * 2006-03-29 2010-01-27 セイコーエプソン株式会社 音叉振動子およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10756670B2 (en) 2016-12-19 2020-08-25 Seiko Epson Corporation Resonator, oscillator, electronic apparatus, and vehicle

Also Published As

Publication number Publication date
JP2010028536A (ja) 2010-02-04

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