JP5159609B2 - 高性能CMOS用途のためのHfドープされた極薄の酸窒化シリコン膜及び製造方法 - Google Patents
高性能CMOS用途のためのHfドープされた極薄の酸窒化シリコン膜及び製造方法 Download PDFInfo
- Publication number
- JP5159609B2 JP5159609B2 JP2008507818A JP2008507818A JP5159609B2 JP 5159609 B2 JP5159609 B2 JP 5159609B2 JP 2008507818 A JP2008507818 A JP 2008507818A JP 2008507818 A JP2008507818 A JP 2008507818A JP 5159609 B2 JP5159609 B2 JP 5159609B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- gate dielectric
- gate
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 58
- 229910052710 silicon Inorganic materials 0.000 title claims description 21
- 239000010703 silicon Substances 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title description 17
- 229910052751 metal Inorganic materials 0.000 claims description 103
- 239000002184 metal Substances 0.000 claims description 103
- 239000004065 semiconductor Substances 0.000 claims description 39
- 238000009792 diffusion process Methods 0.000 claims description 36
- 238000000137 annealing Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 28
- 229910052735 hafnium Inorganic materials 0.000 claims description 20
- 239000003989 dielectric material Substances 0.000 claims description 17
- 229910052726 zirconium Inorganic materials 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 229910052721 tungsten Inorganic materials 0.000 claims description 10
- 239000010937 tungsten Substances 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 229910052732 germanium Inorganic materials 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 7
- 150000002736 metal compounds Chemical class 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 7
- -1 tungsten nitride Chemical class 0.000 claims description 7
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical group 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910003811 SiGeC Inorganic materials 0.000 claims description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 206
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 31
- 230000008569 process Effects 0.000 description 29
- 239000010408 film Substances 0.000 description 28
- 238000005229 chemical vapour deposition Methods 0.000 description 20
- 229910052757 nitrogen Inorganic materials 0.000 description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 16
- 150000003624 transition metals Chemical group 0.000 description 14
- 239000000126 substance Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000005240 physical vapour deposition Methods 0.000 description 11
- 230000008901 benefit Effects 0.000 description 9
- 230000006911 nucleation Effects 0.000 description 9
- 238000010899 nucleation Methods 0.000 description 9
- 230000009467 reduction Effects 0.000 description 9
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 229910004129 HfSiO Inorganic materials 0.000 description 7
- 230000006870 function Effects 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 229910021332 silicide Inorganic materials 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005527 interface trap Effects 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 150000004760 silicates Chemical class 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000003949 trap density measurement Methods 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910003077 Ti−O Inorganic materials 0.000 description 1
- CEPICIBPGDWCRU-UHFFFAOYSA-N [Si].[Hf] Chemical compound [Si].[Hf] CEPICIBPGDWCRU-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000012686 silicon precursor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 229910000326 transition metal silicate Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28185—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation with a treatment, e.g. annealing, after the formation of the gate insulator and before the formation of the definitive gate conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28097—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a metallic silicide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28229—Making the insulator by deposition of a layer, e.g. metal, metal compound or poysilicon, followed by transformation thereof into an insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823857—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
- H01L29/4975—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2 being a silicide layer, e.g. TiSi2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4966—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a composite material, e.g. organic material, TiN, MoSi2
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Formation Of Insulating Films (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Description
a)半導体基板を準備するステップと、
b)半導体基板の上に誘電体材料層を形成するステップと、
c)誘電体材料の上に拡散制御バッファ層を形成するステップと、
d)バッファ層の上に金属含有材料層を形成して、スタックを形成するステップと、
e)スタックをアニールし、金属含有層からの金属原子を、バッファ層を通して誘電層に拡散させて、基板の上に高kゲート誘電体層を形成するステップであって、高kゲート誘電体層は、高kゲート誘電体層の上部領域に向かってより高い金属濃度と、高kゲート誘電体層の下部領域に向かってより低い金属濃度とを有する、ステップと、
を含む方法が提供される。
Claims (10)
- 半導体基板と、
前記基板の上に形成されたゲート誘電体層と、を含み、
前記ゲート誘電体層は、MがHf、Ti、Zr、又はLaからなる金属であり、xが0.03から0.3の範囲にあるM x Si 1−x O 2 からなる金属酸化物を含み、0.5nmから2nmの範囲にある厚さを有し、さらに、7×1014cm−2を超えない金属原子の表面濃度を有する、半導体構造体。 - 前記半導体基板は、Si、Ge、SiGe、SiGeC、Ga、GaAs、InAs、InP、他のIII/V族の化合物半導体或いはII/VI族の化合物半導体、有機半導体、積層半導体、シリコン・オン・インシュレータ、又はシリコン・ゲルマニウム・オン・インシュレータを含む、請求項1に記載の半導体構造体。
- 前記金属原子はHf原子を含み、前記表面濃度は、5×1013cm−2から7×1014cm−2 の範囲にある、請求項1または2に記載の半導体構造体。
- 前記金属原子はTi原子を含み、前記表面濃度は、3×1013cm−2から2×1014cm−2 の範囲にある、請求項1または2に記載の半導体構造体。
- 前記ゲート誘電体層は、前記ゲート誘電体層の上方領域に向かってより高い金属濃度と、前記ゲート誘電体層の下方領域に向かってより低い金属濃度とを有する、請求項1〜4のいずれか1項に記載の半導体構造体。
- 半導体構造体を製造する方法であって、
半導体基板を準備するステップと、
前記半導体基板の上に少なくともシリコンと酸素とを含む誘電体材料層を形成するステップと、
前記誘電体材料層上に拡散制御バッファ層を形成するステップと、
前記拡散制御バッファ層の上にHf、Ti、Zr、又はLaを含む金属含有層を形成して、スタックを形成するステップと、
前記スタックをアニールし、前記金属含有層からの金属原子を、前記拡散制御バッファ層を通して前記誘電体材料層に拡散させて、前記半導体基板の上にゲート誘電体層を形成するステップと、を含み、
前記ゲート誘電体層は、MがHf、Ti、Zr、又はLaからなる金属であり、xが0.03から0.3の範囲にあるM x Si 1−x O 2 からなる金属酸化物を含み、0.5nmから2nmの範囲にある厚さを有し、さらに、7×10 14 cm −2 を超えない金属原子の表面濃度を有する、方法。 - 前記拡散制御バッファ層は、前記金属含有層の金属に対して化学的に不活性な半導体または金属からなり、前記不活性な半導体はゲルマニウムを含み、前記不活性な金属は、タングステン、モリブデン、タングステン窒化物、またはモリブデン窒化物を含む、請求項6に記載の方法。
- 前記拡散制御バッファ層は、前記金属含有層の金属に対して化学的に不活性である金属化合物からなり、前記金属化合物は、窒化タングステンまたは窒化タンタルを含む、請求項6に記載の方法。
- 前記拡散制御バッファ層は、前記アニールにより前記金属含有層の金属と反応してゲート電極を形成する材料からなり、当該材料はシリコンを含む、請求項6に記載の方法。
- 前記ゲート誘電体層は、前記ゲート誘電体層の上方領域に向かってより高い金属濃度と、前記ゲート誘電体層の下方領域に向かってより低い金属濃度とを有する、請求項6〜9のいずれか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/907,935 | 2005-04-21 | ||
US10/907,935 US7504700B2 (en) | 2005-04-21 | 2005-04-21 | Method of forming an ultra-thin [[HfSiO]] metal silicate film for high performance CMOS applications and semiconductor structure formed in said method |
PCT/US2006/014622 WO2006115914A1 (en) | 2005-04-21 | 2006-04-19 | Ultra-thin hf-doped silicon oxynitride film for high performance cmos applications and method of manufacture |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008538655A JP2008538655A (ja) | 2008-10-30 |
JP2008538655A5 JP2008538655A5 (ja) | 2009-02-19 |
JP5159609B2 true JP5159609B2 (ja) | 2013-03-06 |
Family
ID=37185981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008507818A Expired - Fee Related JP5159609B2 (ja) | 2005-04-21 | 2006-04-19 | 高性能CMOS用途のためのHfドープされた極薄の酸窒化シリコン膜及び製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7504700B2 (ja) |
EP (1) | EP1872409A4 (ja) |
JP (1) | JP5159609B2 (ja) |
CN (1) | CN100550422C (ja) |
TW (1) | TW200727479A (ja) |
WO (1) | WO2006115914A1 (ja) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7588988B2 (en) | 2004-08-31 | 2009-09-15 | Micron Technology, Inc. | Method of forming apparatus having oxide films formed using atomic layer deposition |
EP1880409B1 (en) * | 2005-04-21 | 2014-03-26 | Freescale Semiconductor, Inc. | Method of fabricating a mos device with a high-k or sion gate dielectric |
US7662729B2 (en) | 2005-04-28 | 2010-02-16 | Micron Technology, Inc. | Atomic layer deposition of a ruthenium layer to a lanthanide oxide dielectric layer |
US7927948B2 (en) | 2005-07-20 | 2011-04-19 | Micron Technology, Inc. | Devices with nanocrystals and methods of formation |
US7799668B2 (en) * | 2005-08-17 | 2010-09-21 | Texas Instruments Incorporated | Formation of uniform silicate gate dielectrics |
US8110469B2 (en) * | 2005-08-30 | 2012-02-07 | Micron Technology, Inc. | Graded dielectric layers |
US8053849B2 (en) | 2005-11-09 | 2011-11-08 | Advanced Micro Devices, Inc. | Replacement metal gate transistors with reduced gate oxide leakage |
JP5039396B2 (ja) * | 2007-02-19 | 2012-10-03 | ローム株式会社 | 半導体装置の製造方法 |
KR100877100B1 (ko) * | 2007-04-16 | 2009-01-09 | 주식회사 하이닉스반도체 | 비휘발성 메모리 소자 제조 방법 |
JP2008288364A (ja) * | 2007-05-17 | 2008-11-27 | Sony Corp | 半導体装置および半導体装置の製造方法 |
US8940645B2 (en) | 2007-05-25 | 2015-01-27 | Cypress Semiconductor Corporation | Radical oxidation process for fabricating a nonvolatile charge trap memory device |
US20090179253A1 (en) | 2007-05-25 | 2009-07-16 | Cypress Semiconductor Corporation | Oxide-nitride-oxide stack having multiple oxynitride layers |
US8063434B1 (en) | 2007-05-25 | 2011-11-22 | Cypress Semiconductor Corporation | Memory transistor with multiple charge storing layers and a high work function gate electrode |
US8283261B2 (en) * | 2007-05-25 | 2012-10-09 | Cypress Semiconductor Corporation | Radical oxidation process for fabricating a nonvolatile charge trap memory device |
US8633537B2 (en) | 2007-05-25 | 2014-01-21 | Cypress Semiconductor Corporation | Memory transistor with multiple charge storing layers and a high work function gate electrode |
US9449831B2 (en) | 2007-05-25 | 2016-09-20 | Cypress Semiconductor Corporation | Oxide-nitride-oxide stack having multiple oxynitride layers |
US7632745B2 (en) * | 2007-06-30 | 2009-12-15 | Intel Corporation | Hybrid high-k gate dielectric film |
JP5349903B2 (ja) * | 2008-02-28 | 2013-11-20 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
US20100102393A1 (en) * | 2008-10-29 | 2010-04-29 | Chartered Semiconductor Manufacturing, Ltd. | Metal gate transistors |
KR101049875B1 (ko) * | 2008-11-18 | 2011-07-19 | 주식회사 동부하이텍 | 반도체 소자 및 그의 제조 방법 |
CN101752237B (zh) | 2008-12-16 | 2012-08-08 | 国际商业机器公司 | 在半导体器件中形成高k栅极叠层的方法 |
KR101589440B1 (ko) | 2009-02-09 | 2016-01-29 | 삼성전자주식회사 | 듀얼 게이트 반도체 장치의 제조 방법 |
US8026539B2 (en) * | 2009-02-18 | 2011-09-27 | Globalfoundries Inc. | Metal oxide semiconductor devices having doped silicon-compromising capping layers and methods for fabricating the same |
US8048791B2 (en) * | 2009-02-23 | 2011-11-01 | Globalfoundries Inc. | Method of forming a semiconductor device |
US20100213555A1 (en) * | 2009-02-23 | 2010-08-26 | Advanced Micro Devices, Inc. | Metal oxide semiconductor devices having capping layers and methods for fabricating the same |
US7943457B2 (en) * | 2009-04-14 | 2011-05-17 | International Business Machines Corporation | Dual metal and dual dielectric integration for metal high-k FETs |
JP5375362B2 (ja) * | 2009-06-24 | 2013-12-25 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法 |
DE102009031155B4 (de) * | 2009-06-30 | 2012-02-23 | GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG | Einstellen einer Schwellwertspannung für komplexe Transistoren durch Diffundieren einer Metallsorte in das Gatedielektrikum vor der Gatestrukturierung |
US20110065287A1 (en) * | 2009-09-11 | 2011-03-17 | Tokyo Electron Limited | Pulsed chemical vapor deposition of metal-silicon-containing films |
KR20120054660A (ko) * | 2009-11-04 | 2012-05-30 | 가부시끼가이샤 도시바 | 불휘발성 반도체 기억 장치 |
US8598027B2 (en) | 2010-01-20 | 2013-12-03 | International Business Machines Corporation | High-K transistors with low threshold voltage |
US8343865B2 (en) * | 2010-01-21 | 2013-01-01 | Renesas Electronics Corporation | Semiconductor device having dual work function metal |
US20120273861A1 (en) * | 2011-04-29 | 2012-11-01 | Shanghan Institute Of Microsystem And Imformation Technology,Chinese Academ | Method of depositing gate dielectric, method of preparing mis capacitor, and mis capacitor |
US8633118B2 (en) * | 2012-02-01 | 2014-01-21 | Tokyo Electron Limited | Method of forming thin metal and semi-metal layers by thermal remote oxygen scavenging |
US8921176B2 (en) * | 2012-06-11 | 2014-12-30 | Freescale Semiconductor, Inc. | Modified high-K gate dielectric stack |
TWI709174B (zh) * | 2012-07-01 | 2020-11-01 | 愛爾蘭商經度閃存解決方案有限公司 | 用於製造非揮發性電荷捕獲記憶體元件之基氧化方法 |
KR101934829B1 (ko) * | 2012-10-23 | 2019-03-18 | 삼성전자 주식회사 | 반도체 장치 및 반도체 장치의 제조 방법 |
KR102392059B1 (ko) | 2013-07-29 | 2022-04-28 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
US9070634B1 (en) * | 2013-12-26 | 2015-06-30 | Macronix International Co., Ltd. | Semiconductor device comprising a surface portion implanted with nitrogen and fluorine |
US9673108B1 (en) | 2015-12-14 | 2017-06-06 | International Business Machines Corporation | Fabrication of higher-K dielectrics |
CN107516631B (zh) * | 2016-06-15 | 2019-11-05 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的形成方法 |
CN107591437B (zh) * | 2016-07-07 | 2020-03-10 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的形成方法 |
CN108630538A (zh) * | 2017-03-17 | 2018-10-09 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法和电子装置 |
US10109639B1 (en) * | 2017-06-09 | 2018-10-23 | International Business Machines Corporation | Lateral non-volatile storage cell |
CN107863349A (zh) * | 2017-10-17 | 2018-03-30 | 安阳师范学院 | 基于HfxSi1‑xO2多元氧化物存储材料的电荷存储器件及其制备方法 |
JP7340538B2 (ja) * | 2018-04-06 | 2023-09-07 | アプライド マテリアルズ インコーポレイテッド | 3次元構造の共形ドーピングのための方法 |
US10629499B2 (en) | 2018-06-13 | 2020-04-21 | International Business Machines Corporation | Method and structure for forming a vertical field-effect transistor using a replacement metal gate process |
JP7189848B2 (ja) * | 2019-08-07 | 2022-12-14 | 株式会社東芝 | 半導体装置およびその製造方法 |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5661165A (en) * | 1979-10-24 | 1981-05-26 | Fujitsu Ltd | Control of threshold voltage of transistor |
DE19622600C2 (de) * | 1996-06-05 | 2001-08-02 | Fraunhofer Ges Forschung | Elektrochrome Einheit |
KR19990014155A (ko) * | 1997-07-24 | 1999-02-25 | 윌리엄 비. 켐플러 | 고 유전율 실리케이트 게이트 유전체 |
US6004850A (en) * | 1998-02-23 | 1999-12-21 | Motorola Inc. | Tantalum oxide anti-reflective coating (ARC) integrated with a metallic transistor gate electrode and method of formation |
US6172407B1 (en) * | 1998-04-16 | 2001-01-09 | Advanced Micro Devices, Inc. | Source/drain and lightly doped drain formation at post interlevel dielectric isolation with high-K gate electrode design |
US6518156B1 (en) * | 1999-03-29 | 2003-02-11 | Hewlett-Packard Company | Configurable nanoscale crossbar electronic circuits made by electrochemical reaction |
US6194748B1 (en) * | 1999-05-03 | 2001-02-27 | Advanced Micro Devices, Inc. | MOSFET with suppressed gate-edge fringing field effect |
US6376349B1 (en) * | 2000-01-19 | 2002-04-23 | Motorola, Inc. | Process for forming a semiconductor device and a conductive structure |
US6184072B1 (en) * | 2000-05-17 | 2001-02-06 | Motorola, Inc. | Process for forming a high-K gate dielectric |
TW531803B (en) * | 2000-08-31 | 2003-05-11 | Agere Syst Guardian Corp | Electronic circuit structure with improved dielectric properties |
US6638876B2 (en) * | 2000-09-19 | 2003-10-28 | Mattson Technology, Inc. | Method of forming dielectric films |
US6562718B1 (en) * | 2000-12-06 | 2003-05-13 | Advanced Micro Devices, Inc. | Process for forming fully silicided gates |
US6342414B1 (en) * | 2000-12-12 | 2002-01-29 | Advanced Micro Devices, Inc. | Damascene NiSi metal gate high-k transistor |
US6475874B2 (en) * | 2000-12-07 | 2002-11-05 | Advanced Micro Devices, Inc. | Damascene NiSi metal gate high-k transistor |
JP2002184973A (ja) * | 2000-12-11 | 2002-06-28 | Hitachi Ltd | 半導体装置及びその製造方法 |
JP3944367B2 (ja) * | 2001-02-06 | 2007-07-11 | 松下電器産業株式会社 | 絶縁膜の形成方法及び半導体装置の製造方法 |
JP4184686B2 (ja) * | 2001-03-28 | 2008-11-19 | 株式会社東芝 | 半導体装置の製造方法 |
US6420279B1 (en) * | 2001-06-28 | 2002-07-16 | Sharp Laboratories Of America, Inc. | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate |
WO2003019643A1 (fr) * | 2001-08-23 | 2003-03-06 | Nec Corporation | Dispositif semi-conducteur comportant un film isolant presentant une permittivite elevee et son procede de production |
JP3688631B2 (ja) * | 2001-11-22 | 2005-08-31 | 株式会社東芝 | 半導体装置の製造方法 |
US6504214B1 (en) * | 2002-01-11 | 2003-01-07 | Advanced Micro Devices, Inc. | MOSFET device having high-K dielectric layer |
US6797525B2 (en) * | 2002-05-22 | 2004-09-28 | Agere Systems Inc. | Fabrication process for a semiconductor device having a metal oxide dielectric material with a high dielectric constant, annealed with a buffered anneal process |
JP4004040B2 (ja) * | 2002-09-05 | 2007-11-07 | 株式会社東芝 | 半導体装置 |
US6624093B1 (en) * | 2002-10-09 | 2003-09-23 | Wisys Technology Foundation | Method of producing high dielectric insulator for integrated circuit |
JP4574951B2 (ja) * | 2003-02-26 | 2010-11-04 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP2005045166A (ja) * | 2003-07-25 | 2005-02-17 | Toshiba Corp | 半導体装置及びその製造方法 |
JP3790242B2 (ja) * | 2003-09-26 | 2006-06-28 | 株式会社東芝 | 半導体装置及びその製造方法 |
US20050224897A1 (en) * | 2004-03-26 | 2005-10-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | High-K gate dielectric stack with buffer layer to improve threshold voltage characteristics |
-
2005
- 2005-04-21 US US10/907,935 patent/US7504700B2/en active Active
-
2006
- 2006-04-07 TW TW095112383A patent/TW200727479A/zh unknown
- 2006-04-19 CN CNB2006800115140A patent/CN100550422C/zh active Active
- 2006-04-19 WO PCT/US2006/014622 patent/WO2006115914A1/en active Application Filing
- 2006-04-19 JP JP2008507818A patent/JP5159609B2/ja not_active Expired - Fee Related
- 2006-04-19 EP EP06750619A patent/EP1872409A4/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1872409A1 (en) | 2008-01-02 |
US7504700B2 (en) | 2009-03-17 |
US20060237803A1 (en) | 2006-10-26 |
CN100550422C (zh) | 2009-10-14 |
JP2008538655A (ja) | 2008-10-30 |
CN101156246A (zh) | 2008-04-02 |
EP1872409A4 (en) | 2009-12-30 |
TW200727479A (en) | 2007-07-16 |
WO2006115914A1 (en) | 2006-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5159609B2 (ja) | 高性能CMOS用途のためのHfドープされた極薄の酸窒化シリコン膜及び製造方法 | |
US7521345B2 (en) | High-temperature stable gate structure with metallic electrode | |
Gusev et al. | Advanced high-κ dielectric stacks with polySi and metal gates: Recent progress and current challenges | |
JP5535706B2 (ja) | 半導体装置の製造方法 | |
US8519466B2 (en) | Tantalum silicon oxynitride high-K dielectrics and metal gates | |
JP5089576B2 (ja) | 自己整合され積極的にスケーリングされたcmosデバイスにおけるゲート電極の金属/金属窒化物二重層のcmos構造体及び半導体構造体 | |
US7115959B2 (en) | Method of forming metal/high-k gate stacks with high mobility | |
US20080105920A1 (en) | Semiconductor devices and fabrication process thereof | |
CN112786438A (zh) | 半导体器件及其栅极结构的形成方法 | |
US7820538B2 (en) | Method of fabricating a MOS device with non-SiO2 gate dielectric | |
JP3646718B2 (ja) | 半導体装置の製造方法 | |
CN110993603A (zh) | 半导体结构及其形成方法 | |
US7018883B2 (en) | Dual work function gate electrodes | |
JP2008072001A (ja) | 半導体装置及びその製造方法 | |
Onishi et al. | Performance of polysilicon gate hfo 2 mosfets on [100] and [111] silicon substrates | |
Matsuki et al. | Area-selective post-deposition annealing process using flash lamp and Si photoenergy absorber for metal/high-k gate metal–insulator–semiconductor field-effect transistors with NiSi source/drain | |
JP2006319091A (ja) | 半導体装置の製造方法 | |
JP2010212376A (ja) | 半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081225 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090123 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120424 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120626 |
|
RD12 | Notification of acceptance of power of sub attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7432 Effective date: 20120626 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20120626 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121120 |
|
RD14 | Notification of resignation of power of sub attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7434 Effective date: 20121120 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121211 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5159609 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151221 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |