US20090179253A1 - Oxide-nitride-oxide stack having multiple oxynitride layers - Google Patents

Oxide-nitride-oxide stack having multiple oxynitride layers Download PDF

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US20090179253A1
US20090179253A1 US11/811,958 US81195807A US2009179253A1 US 20090179253 A1 US20090179253 A1 US 20090179253A1 US 81195807 A US81195807 A US 81195807A US 2009179253 A1 US2009179253 A1 US 2009179253A1
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Prior art keywords
layer
oxynitride
oxide
silicon
oxynitride layer
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US11/811,958
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Sagy Levy
Krishnaswamy Ramkumar
Fredrick Jenne
Sam Geha
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Longitude Flash Memory Solutions Ltd
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Cypress Semiconductor Corp
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Priority to US11/811,958 priority Critical patent/US20090179253A1/en
Application filed by Cypress Semiconductor Corp filed Critical Cypress Semiconductor Corp
Assigned to CYPRESS SEMICONDUCTOR CORPORATION reassignment CYPRESS SEMICONDUCTOR CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GEHA, SAM, JENNE, FREDRICK, LEVY, SAGY, RAMKUMAR, KRISHNASWAMY
Publication of US20090179253A1 publication Critical patent/US20090179253A1/en
Priority to US13/007,533 priority patent/US8643124B2/en
Priority to US13/436,872 priority patent/US9449831B2/en
Priority to US13/917,500 priority patent/US9355849B1/en
Priority to US14/172,775 priority patent/US9349824B2/en
Priority to US15/099,025 priority patent/US10903068B2/en
Priority to US15/189,668 priority patent/US10374067B2/en
Priority to US15/993,224 priority patent/US10896973B2/en
Priority to US15/993,165 priority patent/US10903342B2/en
Assigned to LONGITUDE FLASH MEMORY SOLUTIONS LTD. reassignment LONGITUDE FLASH MEMORY SOLUTIONS LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CYPRESS SEMICONDUCTOR CORPORATION
Assigned to CYPRESS SEMICONDUCTOR CORPORATION, SPANSION LLC reassignment CYPRESS SEMICONDUCTOR CORPORATION RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: MORGAN STANLEY SENIOR FUNDING, INC.
Priority to US16/726,582 priority patent/US11222965B2/en
Priority to US17/157,704 priority patent/US20210249254A1/en
Priority to US17/541,029 priority patent/US11784243B2/en
Priority to US17/945,793 priority patent/US12266521B2/en
Priority to US18/483,250 priority patent/US20240234550A1/en
Abandoned legal-status Critical Current

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    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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    • G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
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Definitions

  • This invention relates to semiconductor processing and, more particularly to an oxide-nitride-oxide stack having an improved oxide-nitride or oxynitride layer and methods of forming the same.
  • Non-volatile semiconductor memories such as a split gate flash memory, typically use a stacked floating gate type field effect transistors, in which electrons are induced into a floating gate of a memory cell to be programmed by biasing a control gate and grounding a body region of a substrate on which the memory cell is formed.
  • An oxide-nitride-oxide (ONO) stack is used as either a charge storing layer, as in silicon-oxide-nitride-oxide-silicon (SONOS) transistor, or as an isolation layer between the floating gate and control gate, as in a split gate flash memory.
  • SONOS silicon-oxide-nitride-oxide-silicon
  • FIG. 1 is a partial cross-sectional view of an intermediate structure for a semiconductor device 100 having a SONOS gate stack or structure 102 including a conventional ONO stack 104 formed over a surface 106 of a silicon substrate 108 according to a conventional method.
  • the device 100 typically further includes one or more diffusion regions 110 , such as source and drain regions, aligned to the gate stack and separated by a channel region 112 .
  • the SONOS structure 102 includes a poly-silicon (poly) gate layer 114 formed upon and in contact with the ONO stack 104 .
  • the poly gate 114 is separated or electrically isolated from the substrate 108 by the ONO stack 104 .
  • the ONO stack 104 generally includes a lower oxide layer 116 , a nitride or oxynitride layer 118 which serves as a charge storing or memory layer for the device 100 , and a top, high-temperature oxide (HTO) layer 120 overlying the nitride or oxynitride layer.
  • HTO high-temperature oxide
  • One problem with conventional SONOS structures 102 and methods of forming the same is the poor data retention of the nitride or oxynitride layer 118 that limits the device 100 lifetime and/or its use in several applications due to leakage current through the layer.
  • the stochiometry of the oxynitride layer 118 is neither uniform nor optimized across the thickness of the layer.
  • the oxynitride layer 118 is conventionally formed or deposited in a single step using a single process gas mixture and fixed or constant processing conditions in an attempt to provide a homogeneous layer having a high nitrogen and high oxygen concentration across the thickness of the relatively thick layer.
  • nitrogen, oxygen and silicon concentrations which can vary throughout the conventional oxynitride layer 118 .
  • the top effect is caused by the order in which process gases are shut off following deposition.
  • the silicon containing process gas such as silane
  • the silicon containing process gas is typically shut off first resulting in a top portion of the oxynitride layer 118 that is high in oxygen and/or nitride and low in silicon.
  • the bottom effect is caused by the order in which process gases are introduced to initiate deposition.
  • the deposition of the oxynitride layer 118 typically follows an annealing step, resulting in a peak or relatively high concentration of ammonia (NH 3 ) at the beginning of the deposition process and producing in a bottom portion of the oxynitride layer that is low in oxygen and silicon and high in nitrogen.
  • the bottom effect is also due to surface nucleation phenomena in which that oxygen and silicon that is available in the initial process gas mixture preferentially reacts with silicon at the surface of the substrate and does not contribute to the formation of the oxynitride layer. Consequently, the charge storage characteristics, and in particular programming and erase speed and data retention of a memory device 100 made with the ONO stack 104 , are adversely effected.
  • the present invention provides a solution to these and other problems, and offers further advantages over conventional ONO stacks or memory layers and methods of forming the same.
  • FIG. 1 (prior art) is a block diagram illustrating a cross-sectional side view of an intermediate structure for a memory device for which a method having an oxide-nitride-oxide (ONO) stack formed according to conventional method;
  • ONO oxide-nitride-oxide
  • FIG. 2 is a block diagram illustrating a cross-sectional side view of a portion of a semiconductor device having an ONO structure including a multi-layer charge storing layer according to an embodiment of the present invention
  • FIG. 3 is flow chart of a method for forming an ONO structure including a multi-layer charge storing layer according to an embodiment of the present invention.
  • FIG. 4 is a graph showing an improvement in data retention for a memory device using a memory layer formed according to the present invention as compared to a memory device using a conventional memory layer.
  • the present invention is directed generally to an oxide-nitride-oxide (ONO) structure including a multi-layer charge storing layer and methods for making the same.
  • ONO structure and method are particularly useful for forming a memory layer in a memory device, such as a silicon-oxide-nitride-oxide-silicon (SONOS) memory transistor.
  • SONOS silicon-oxide-nitride-oxide-silicon
  • the method involves forming a multi-layer charge storing layer including multiple oxynitride layers, such as silicon oxynitride (Si 2 N 2 O) layers, having differing concentrations of Oxygen, Nitrogen and/or Silicon.
  • oxynitride layers are formed at higher temperatures than nitride or oxynitride layers in conventional ONO structures, and each of the layers are formed using differing process gases mixtures and/or at differing flow rates.
  • the oxynitride layers include at least a top oxynitride layer and a bottom oxynitride layer.
  • the stoichiometric compositions of the layers is tailored or selected such that the lower or bottom oxynitride has a high oxygen and silicon content, and the top oxynitride layer has high silicon and a high nitrogen concentration with a low oxygen concentration to produce a silicon-rich nitride or oxynitride.
  • the silicon-rich and oxygen-rich bottom oxynitride layer reduces stored charge loss without compromising device speed or an initial (beginning of life) difference between program and erase voltages.
  • the silicon-rich, oxygen-lean top oxynitride layer increases a difference between programming and erase voltages of memory devices, thereby improving device speed, increasing data retention, and extending the operating life of the device.
  • the ratio of thicknesses between the top oxynitride layer and the bottom oxynitride layer can be selected to facilitate forming of the oxynitride layers over a first oxide layer of an ONO structure following the step of forming the first oxide layer using a steam anneal.
  • FIG. 2 is a block diagram illustrating a cross-sectional side view of a portion of a semiconductor memory device 200 having an ONO structure including a multi-layer charge storing layer according to one embodiment of the present invention.
  • the memory device 200 includes a SONOS gate stack 202 including an ONO structure 204 formed over a surface 206 of silicon layer on a substrate or a silicon substrate 208 .
  • the device 200 further includes one or more diffusion regions 210 , such as source and drain regions, aligned to the gate stack 202 and separated by a channel region 212 .
  • the SONOS structure 202 includes a poly-silicon or poly gate layer 214 formed upon and in contact with the ONO structure 204 and a portion of the silicon layer or substrate 208 .
  • the poly gate 214 is separated or electrically isolated from the substrate 208 by the ONO structure 204 .
  • the ONO structure 204 includes a thin, lower oxide layer or tunneling oxide layer 216 that separates or electrically isolates the gate stack 202 from the channel region 212 , a top or blocking oxide layer 218 , and a multi-layer charge storing layer including multiple nitride containing layers.
  • the multi-layer charge storing layer includes at least two oxynitride layers, including a top oxynitride layer 220 A and a bottom oxynitride layer 220 B.
  • the substrate 208 may include any known silicon-based semiconductor material including silicon, silicon-germanium, silicon-on-insulator, or silicon-on-sapphire substrate.
  • the substrate 208 may include a silicon layer formed on a non-silicon-based semiconductor material, such as gallium-arsenide, germanium, gallium-nitride, or aluminum-phosphide.
  • the substrate 208 is a doped or undoped silicon substrate.
  • the lower oxide layer or tunneling oxide layer 216 of the ONO structure 204 generally includes a relatively thin layer of silicon dioxide (SiO 2 ) of from about 15 angstrom ( ⁇ ) to about 22 ⁇ , and more preferably about 18 ⁇ .
  • the tunneling oxide layer 216 can be formed or deposited by any suitable means including, for example, being thermally grown or deposited using chemical vapor deposition (CVD).
  • the tunnel oxide layer is formed or grown using a steam anneal.
  • the process involves a wet-oxidizing method in which the substrate 208 is placed in a in a deposition or processing chamber, heated to a temperature from about 700° C.
  • exemplary process times are from about 5 to about 20 minutes.
  • the oxidation can be performed at atmospheric or at low pressure.
  • the multi-layer charge storing layer generally includes at least two oxynitride layers having differing compositions of silicon, oxygen and nitrogen, and can have an overall thickness of from about 70 ⁇ to about 150 ⁇ , and more preferably about 100 ⁇ .
  • the oxynitride layers are formed or deposited in a low pressure CVD process using a silicon source, such as silane (SiH 4 ), chlorosilane (SiH 3 Cl), dichlorosilane (SiH 2 Cl 2 ), tetrachlorosilane (SiCl 4 ) or Bis-TertiaryButylAmino Silane (BTBAS), a nitrogen source, such as nitrogen (N 2 ), ammonia (NH 3 ), nitrogen trioxide (NO 3 ) or nitrous oxide (N 2 O), and an oxygen-containing gas, such as oxygen (O 2 ) or N 2 O.
  • a silicon source such as silane (SiH 4 ), chlorosilane (SiH 3 Cl),
  • gases in which hydrogen has been replaced by deuterium can be used, including, for example, the substitution of deuterated-ammonia (ND 3 ) for NH 3 .
  • ND 3 deuterated-ammonia
  • the substitution of deuterium for hydrogen advantageously passivates Si dangling bonds at the silicon-oxide interface, thereby increasing an NBTI (Negative Bias Temperature Instability) lifetime of the devices.
  • NBTI Negative Bias Temperature Instability
  • the lower or bottom oxynitride layer 220 B can be deposited over the tunneling oxide layer 216 by placing the substrate 208 in a deposition chamber and introducing a process gas including N 2 O, NH 3 and DCS, while maintaining the chamber at a pressure of from about 5 millitorr (mT) to about 500 mT, and maintaining the substrate at a temperature of from about 700° C. to about 850° C. and more preferably at least about 780° C., for a period of from about 2.5 minutes to about 20 minutes.
  • mT millitorr
  • the process gas can include a first gas mixture of N 2 O and NH 3 mixed in a ratio of from about 8:1 to about 1:8 and a second gas mixture of DCS and NH 3 mixed in a ratio of from about 1:7 to about 7:1, and can be introduced at a flow rate of from about 5 to about 200 standard cubic centimeters per minute (sccm).
  • sccm standard cubic centimeters per minute
  • the top oxynitride layer 220 A can be deposited over the bottom oxynitride layer 220 B in a CVD process using a process gas including N 2 O, NH 3 and DCS, at a chamber pressure of from about 5 mT to about 500 mT, and at a substrate temperature of from about 700° C. to about 850° C. and more preferably at least about 780° C., for a period of from about 2.5 minutes to about 20 minutes.
  • a process gas including N 2 O, NH 3 and DCS at a chamber pressure of from about 5 mT to about 500 mT
  • a substrate temperature of from about 700° C. to about 850° C. and more preferably at least about 780° C.
  • the process gas can include a first gas mixture of N 2 O and NH 3 mixed in a ratio of from about 8:1 to about 1:8 and a second gas mixture of DCS and NH 3 mixed in a ratio of from about 1:7 to about 7:1, and can be introduced at a flow rate of from about 5 to about 20 sccm. It has been found that an oxynitride layer produced or deposited under these condition yields a silicon-rich, nitrogen-rich, and oxygen-lean top oxynitride layer 220 A, which improves the speed and increases of the initial difference between program and erase voltage without compromising a charge loss rate of memory devices made using an embodiment of the inventive ONO structure 204 , thereby extending the operating life of the device.
  • the top oxynitride layer 220 A is deposited sequentially in the same tool used to form the bottom oxynitride layer 220 B, substantially without breaking vacuum on the deposition chamber. More preferably, the top oxynitride layer 220 A is deposited substantially without altering the temperature to which the substrate 208 was heated during deposition of the bottom oxynitride layer 220 B.
  • the top oxynitride layer 220 A is deposited sequentially and immediately following the deposition of the bottom oxynitride layer 220 B by decreasing the flow rate of the N 2 O/NH 3 gas mixture relative to the DCS/NH 3 gas mixture to provide the desired ratio of the gas mixtures to yield the silicon-rich, nitrogen-rich, and oxygen-lean top oxynitride layer 220 A.
  • another oxide or oxide layer (not shown in these figures) is formed after the formation of the ONO structure 204 in a different area on the substrate or in the device using a steam oxidation.
  • the top oxynitride layer 220 A and top oxide layer 218 of the ONO structure 204 are beneficially steam annealed during the steam oxidation process.
  • steam annealing improves the quality of the top oxide layer 218 reducing the number of traps formed near a top surface of the top oxide layer and near a top surface of the underlying top oxynitride layer 220 A, thereby reducing or substantially eliminating an electric field that could otherwise form across the top oxide layer, which could result in back streaming of charge carriers therethrough and adversely affecting data or charge retention in the charge storing layer.
  • a suitable thickness for the bottom oxynitride layer 220 B has been found to be from about 10 ⁇ to about 80 ⁇ , and a ratio of thicknesses between the bottom layer and the top oxynitride layer has been found to be from about 1:6 to about 6:1, and more preferably at least about 1:4.
  • the top oxide layer 218 of the ONO structure 204 includes a relatively thick layer of SiO 2 of from about 30 ⁇ to about 70 ⁇ , and more preferably about 45 ⁇ .
  • the top oxide layer 218 can be formed or deposited by any suitable means including, for example, being thermally grown or deposited using CVD.
  • the top oxide layer 218 is a high-temperature-oxide (HTO) deposited using CVD process.
  • the deposition process involves exposing the substrate 208 to a silicon source, such as silane, chlorosilane, or dichlorosilane, and an oxygen-containing gas, such as O 2 or N 2 O in a deposition chamber at a pressure of from about 50 mT to about 1000 mT, for a period of from about 10 minutes to about 120 minutes while maintaining the substrate at a temperature of from about 650° C. to about 850° C.
  • a silicon source such as silane, chlorosilane, or dichlorosilane
  • an oxygen-containing gas such as O 2 or N 2 O
  • the top oxide layer 218 is deposited sequentially in the same tool used to form the oxynitride layers 220 A, 220 B. More preferably, the oxynitride layers 220 A, 220 B, and the top oxide layer 218 are formed or deposited in the same tool used to grow the tunneling oxide layer 216 .
  • Suitable tools include, for example, an ONO AVP, commercially available from AVIZA technology of Scotts Valley, Calif.
  • the method begins with forming a first oxide layer, such as a tunneling oxide layer, of the ONO structure over a silicon containing layer on a surface of a substrate (step 300 ).
  • a first oxide layer such as a tunneling oxide layer
  • the first layer of a multi-layer charge storing layer including nitride is formed on a surface of the first oxide layer (step 302 ).
  • this first layer or bottom oxynitride layer can be formed or deposited by a CVD process using a process gas including N 2 O/NH 3 and DCS/NH 3 gas mixtures in ratios and at flow rates tailored to provide a silicon-rich and oxygen-rich oxynitride layer.
  • the second layer of the multi-layer charge storing layer is then formed on a surface of the first layer (step 304 ).
  • the second layer has a stoichiometric composition of oxygen, nitrogen and/or silicon different from that of the first layer.
  • the second or top oxynitride layer can be formed or deposited by a CVD process using a process gas including DCS/NH 3 and N 2 O/NH 3 gas mixtures in ratios and at flow rates tailored to provide a silicon-rich, oxygen-lean top oxynitride layer.
  • a second oxide layer of the ONO structure is formed on a surface of the second layer of the multi-layer charge storing layer (step 306 ).
  • this top or blocking oxide layer can be formed or deposited by any suitable means, but is preferably deposited in a CVD process.
  • the top or second oxide layer is a high temperature oxide deposited in a HTO CVD process.
  • the top or blocking oxide layer can be thermally grown, however it will be appreciated that in this embodiment the oxynitride thickness must be adjusted or increased as some of the top oxynitride will be effectively consumed or oxidized during the process of thermally growing the blocking oxide layer.
  • the method may further include the step of forming or depositing a silicon containing layer on a surface of the second oxide layer to form a SONOS stack or structure (step 308 ).
  • the silicon containing layer can be, for example, a polysilicon layer deposited by a CVD process to form a control gate of a SONOS transistor or device.
  • FIG. 4 illustrates the change in threshold voltage of devices in an electronically erasable programmable read-only memory (EEPROM) during programming (VTP) during erase (VTE) over device life for an EEPROM made using a conventional ONO structure and an ONO structure having a multi-layer oxynitride layer.
  • EEPROM electronically erasable programmable read-only memory
  • VTP programming
  • VTE erase
  • the graph or line 402 illustrates the change over time of a VTP for an EEPROM made using a conventional ONO structure having a single oxynitride layer without refreshing the memory after the initial writing—program or erase. Actual data points on line 402 are shown by unfilled circles, the remainder of the line showing an extrapolation of VTP to a specified end-of-life (EOL) for the EEPROM.
  • Graph or line 404 illustrates the change over time of a VTE for the EEPROM made using a conventional ONO structure. Actual data points on line 404 are shown by filled circles, and the remainder of the line shows an extrapolation of VTE to EOL for the EEPROM.
  • the specified difference between the VTE and VTP for an EEPROM at EOL is at least 0.5 V to be able to identify or sense the difference between the program and erase state.
  • an EEPROM made using a conventional ONO structure has a difference between VTE and VTP of about 0.35V at a specified EOL of 20 years.
  • an EEPROM made using a conventional ONO structure and operated under the conditions described above will fail to meet the specified operating life by at least about 17 years.
  • VTP and VTE over time for an EEPROM made using an ONO structure having a multi-layer oxynitride layer shows a difference between VTE and VTP of at least about 1.96V at the specified EOL.
  • an EEPROM made using an ONO structure according to an embodiment of the present invention will meet and exceed the specified operating life of 20 years.
  • graph or line 406 illustrates the change over time of VTP for an EEPROM using an ONO structure according to an embodiment of the present invention. Actual data points on line 406 are shown by unfilled squares, the remainder of the line showing an extrapolation of VTP to the specified EOL.
  • Graph or line 408 illustrates the change over time of VTE for the EEPROM, and actual data points on line 408 are shown by filled squares, the remainder of the line showing an extrapolation of VTE to EOL.
  • the multi-layer charge storing layer can include any number, n, of oxynitride layers, any or all of which may have differing stoichiometric compositions of oxygen, nitrogen and/or silicon.
  • multi-layer charge storing layers having up to five oxynitride layers each with differing stoichiometric compositions have been produced and tested.
  • utilizing as few layers as possible also results in higher yields as it is simpler to control the stoichiometric composition and dimensions of the fewer layers.
  • the ONO structure and method of the present invention is not so limited, and the ONO structure can be used in or with any semiconductor technology or in any device requiring a charge storing or dielectric layer or stack including, for example, in a split gate flash memory, a TaNOS stack, in a 1T (transistor) SONOS cell, a 2T SONOS cell, a 3T SONOS cell, a localized 2-bit cell, and in a multilevel programming or cell, without departing from the scope of the invention.
  • the advantages of ONO structures and methods of forming the same according to an embodiment of the present invention over previous or conventional approaches include: (i) the ability to enhance data retention in memory devices using the structure by dividing the oxynitride layer into a plurality of films or layers and tailoring the oxygen, nitrogen and silicon profile across each layer; (ii) the ability to enhance speed of a memory device without compromising data retention; (iii) the ability to meet or exceed data retention and speed specifications for memory devices using an ONO structure of an embodiment of the present invention at a temperature of at least about 125° C.; and (iv) provide heavy duty program erase cycles of 100,000 cycles or more.

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Abstract

A semiconductor device including an oxide-nitride-oxide (ONO) structure having a multi-layer charge storing layer and methods of forming the same are provided. Generally, the method involves: (i) forming a first oxide layer of the ONO structure; (ii) forming a multi-layer charge storing layer comprising nitride on a surface of the first oxide layer; and (iii) forming a second oxide layer of the ONO structure on a surface of the multi-layer charge storing layer. Preferably, the charge storing layer comprises at least two silicon oxynitride layers having differing stoichiometric compositions of Oxygen, Nitrogen and/or Silicon. More preferably, the ONO structure is part of a silicon-oxide-nitride-oxide-silicon (SONOS) structure and the semiconductor device is a SONOS memory transistor. Other embodiments are also disclosed.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • The present application claims the benefit of priority under 35 U.S.C. 119(e) to U.S. Provisional Patent Application Ser. No. 60/931,947, entitled Oxide-Nitride-Oxide Stack Having Multiple Oxynitride Layers; which application is hereby incorporated by reference.
    • TECHNICAL FIELD
  • This invention relates to semiconductor processing and, more particularly to an oxide-nitride-oxide stack having an improved oxide-nitride or oxynitride layer and methods of forming the same.
    • BACKGROUND OF THE INVENTION
  • Non-volatile semiconductor memories, such as a split gate flash memory, typically use a stacked floating gate type field effect transistors, in which electrons are induced into a floating gate of a memory cell to be programmed by biasing a control gate and grounding a body region of a substrate on which the memory cell is formed.
  • An oxide-nitride-oxide (ONO) stack is used as either a charge storing layer, as in silicon-oxide-nitride-oxide-silicon (SONOS) transistor, or as an isolation layer between the floating gate and control gate, as in a split gate flash memory.
  • FIG. 1 is a partial cross-sectional view of an intermediate structure for a semiconductor device 100 having a SONOS gate stack or structure 102 including a conventional ONO stack 104 formed over a surface 106 of a silicon substrate 108 according to a conventional method. In addition, the device 100 typically further includes one or more diffusion regions 110, such as source and drain regions, aligned to the gate stack and separated by a channel region 112. Briefly, the SONOS structure 102 includes a poly-silicon (poly) gate layer 114 formed upon and in contact with the ONO stack 104. The poly gate 114 is separated or electrically isolated from the substrate 108 by the ONO stack 104. The ONO stack 104 generally includes a lower oxide layer 116, a nitride or oxynitride layer 118 which serves as a charge storing or memory layer for the device 100, and a top, high-temperature oxide (HTO) layer 120 overlying the nitride or oxynitride layer.
  • One problem with conventional SONOS structures 102 and methods of forming the same is the poor data retention of the nitride or oxynitride layer 118 that limits the device 100 lifetime and/or its use in several applications due to leakage current through the layer.
  • Another problem with conventional SONOS structures 102 and methods of forming the same is the stochiometry of the oxynitride layer 118 is neither uniform nor optimized across the thickness of the layer. In particular, the oxynitride layer 118 is conventionally formed or deposited in a single step using a single process gas mixture and fixed or constant processing conditions in an attempt to provide a homogeneous layer having a high nitrogen and high oxygen concentration across the thickness of the relatively thick layer. However, due to top and bottom effects this results in nitrogen, oxygen and silicon concentrations, which can vary throughout the conventional oxynitride layer 118. The top effect is caused by the order in which process gases are shut off following deposition. In particular, the silicon containing process gas, such as silane, is typically shut off first resulting in a top portion of the oxynitride layer 118 that is high in oxygen and/or nitride and low in silicon. Similarly, the bottom effect is caused by the order in which process gases are introduced to initiate deposition. In particular, the deposition of the oxynitride layer 118 typically follows an annealing step, resulting in a peak or relatively high concentration of ammonia (NH3) at the beginning of the deposition process and producing in a bottom portion of the oxynitride layer that is low in oxygen and silicon and high in nitrogen. The bottom effect is also due to surface nucleation phenomena in which that oxygen and silicon that is available in the initial process gas mixture preferentially reacts with silicon at the surface of the substrate and does not contribute to the formation of the oxynitride layer. Consequently, the charge storage characteristics, and in particular programming and erase speed and data retention of a memory device 100 made with the ONO stack 104, are adversely effected.
  • Accordingly, there is a need for a memory device having an ONO stack with an oxynitride layer as a memory layer that exhibits improved programming and erase speed and data retention. There is a further need for a method or process of forming an ONO stack having an oxynitride layer that exhibits improved oxynitride stochiometry.
  • The present invention provides a solution to these and other problems, and offers further advantages over conventional ONO stacks or memory layers and methods of forming the same.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • These and various other features and advantages of the present invention will be apparent upon reading of the following detailed description in conjunction with the accompanying drawings and the appended claims provided below, where:
  • FIG. 1 (prior art) is a block diagram illustrating a cross-sectional side view of an intermediate structure for a memory device for which a method having an oxide-nitride-oxide (ONO) stack formed according to conventional method;
  • FIG. 2 is a block diagram illustrating a cross-sectional side view of a portion of a semiconductor device having an ONO structure including a multi-layer charge storing layer according to an embodiment of the present invention;
  • FIG. 3 is flow chart of a method for forming an ONO structure including a multi-layer charge storing layer according to an embodiment of the present invention; and
  • FIG. 4 is a graph showing an improvement in data retention for a memory device using a memory layer formed according to the present invention as compared to a memory device using a conventional memory layer.
    •  DETAILED DESCRIPTION
  • The present invention is directed generally to an oxide-nitride-oxide (ONO) structure including a multi-layer charge storing layer and methods for making the same. The ONO structure and method are particularly useful for forming a memory layer in a memory device, such as a silicon-oxide-nitride-oxide-silicon (SONOS) memory transistor.
  • In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be evident, however, to one skilled in the art that the present invention may be practiced without these specific details. In other instances, well-known structures, and techniques are not shown in detail or are shown in block diagram form in order to avoid unnecessarily obscuring an understanding of this description.
  • Reference in the description to “one embodiment” or “an embodiment” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. The appearances of the phrase “in one embodiment” in various places in the specification do not necessarily all refer to the same embodiment. The term “to couple” as used herein may include both to directly connect and to indirectly connect through one or more intervening components.
  • Briefly, the method involves forming a multi-layer charge storing layer including multiple oxynitride layers, such as silicon oxynitride (Si2N2O) layers, having differing concentrations of Oxygen, Nitrogen and/or Silicon. Generally, the oxynitride layers are formed at higher temperatures than nitride or oxynitride layers in conventional ONO structures, and each of the layers are formed using differing process gases mixtures and/or at differing flow rates. Preferably, the oxynitride layers include at least a top oxynitride layer and a bottom oxynitride layer. More preferably, the stoichiometric compositions of the layers is tailored or selected such that the lower or bottom oxynitride has a high oxygen and silicon content, and the top oxynitride layer has high silicon and a high nitrogen concentration with a low oxygen concentration to produce a silicon-rich nitride or oxynitride. The silicon-rich and oxygen-rich bottom oxynitride layer reduces stored charge loss without compromising device speed or an initial (beginning of life) difference between program and erase voltages. The silicon-rich, oxygen-lean top oxynitride layer increases a difference between programming and erase voltages of memory devices, thereby improving device speed, increasing data retention, and extending the operating life of the device.
  • Optionally, the ratio of thicknesses between the top oxynitride layer and the bottom oxynitride layer can be selected to facilitate forming of the oxynitride layers over a first oxide layer of an ONO structure following the step of forming the first oxide layer using a steam anneal.
  • An ONO structure and methods for fabricating the same according to various embodiments of the present invention will now be described in greater detail with reference to FIGS. 2 through 4.
  • FIG. 2 is a block diagram illustrating a cross-sectional side view of a portion of a semiconductor memory device 200 having an ONO structure including a multi-layer charge storing layer according to one embodiment of the present invention. Referring to FIG. 2, the memory device 200 includes a SONOS gate stack 202 including an ONO structure 204 formed over a surface 206 of silicon layer on a substrate or a silicon substrate 208. In addition, the device 200 further includes one or more diffusion regions 210, such as source and drain regions, aligned to the gate stack 202 and separated by a channel region 212. Generally, the SONOS structure 202 includes a poly-silicon or poly gate layer 214 formed upon and in contact with the ONO structure 204 and a portion of the silicon layer or substrate 208. The poly gate 214 is separated or electrically isolated from the substrate 208 by the ONO structure 204. The ONO structure 204 includes a thin, lower oxide layer or tunneling oxide layer 216 that separates or electrically isolates the gate stack 202 from the channel region 212, a top or blocking oxide layer 218, and a multi-layer charge storing layer including multiple nitride containing layers. Preferably, as noted above and as shown in FIG. 2, the multi-layer charge storing layer includes at least two oxynitride layers, including a top oxynitride layer 220A and a bottom oxynitride layer 220B.
  • Generally, the substrate 208 may include any known silicon-based semiconductor material including silicon, silicon-germanium, silicon-on-insulator, or silicon-on-sapphire substrate. Alternatively, the substrate 208 may include a silicon layer formed on a non-silicon-based semiconductor material, such as gallium-arsenide, germanium, gallium-nitride, or aluminum-phosphide. Preferably, the substrate 208 is a doped or undoped silicon substrate.
  • The lower oxide layer or tunneling oxide layer 216 of the ONO structure 204 generally includes a relatively thin layer of silicon dioxide (SiO2) of from about 15 angstrom (Å) to about 22 Å, and more preferably about 18 Å. The tunneling oxide layer 216 can be formed or deposited by any suitable means including, for example, being thermally grown or deposited using chemical vapor deposition (CVD). In a preferred embodiment, the tunnel oxide layer is formed or grown using a steam anneal. Generally, the process involves a wet-oxidizing method in which the substrate 208 is placed in a in a deposition or processing chamber, heated to a temperature from about 700° C. to about 850° C., and exposed to a wet vapor for a predetermined period of time selected based on a desired thickness of the finished tunneling oxide layer 216. Exemplary process times are from about 5 to about 20 minutes. The oxidation can be performed at atmospheric or at low pressure.
  • As noted above, the multi-layer charge storing layer generally includes at least two oxynitride layers having differing compositions of silicon, oxygen and nitrogen, and can have an overall thickness of from about 70 Å to about 150 Å, and more preferably about 100 Å. In a preferred embodiment the oxynitride layers are formed or deposited in a low pressure CVD process using a silicon source, such as silane (SiH4), chlorosilane (SiH3Cl), dichlorosilane (SiH2Cl2), tetrachlorosilane (SiCl4) or Bis-TertiaryButylAmino Silane (BTBAS), a nitrogen source, such as nitrogen (N2), ammonia (NH3), nitrogen trioxide (NO3) or nitrous oxide (N2O), and an oxygen-containing gas, such as oxygen (O2) or N2O. Alternatively, gases in which hydrogen has been replaced by deuterium can be used, including, for example, the substitution of deuterated-ammonia (ND3) for NH3. The substitution of deuterium for hydrogen advantageously passivates Si dangling bonds at the silicon-oxide interface, thereby increasing an NBTI (Negative Bias Temperature Instability) lifetime of the devices.
  • For example, the lower or bottom oxynitride layer 220B can be deposited over the tunneling oxide layer 216 by placing the substrate 208 in a deposition chamber and introducing a process gas including N2O, NH3 and DCS, while maintaining the chamber at a pressure of from about 5 millitorr (mT) to about 500 mT, and maintaining the substrate at a temperature of from about 700° C. to about 850° C. and more preferably at least about 780° C., for a period of from about 2.5 minutes to about 20 minutes. In particular, the process gas can include a first gas mixture of N2O and NH3 mixed in a ratio of from about 8:1 to about 1:8 and a second gas mixture of DCS and NH3 mixed in a ratio of from about 1:7 to about 7:1, and can be introduced at a flow rate of from about 5 to about 200 standard cubic centimeters per minute (sccm). It has been found that an oxynitride layer produced or deposited under these condition yields a silicon-rich, oxygen-rich, bottom oxynitride layer 220B, that decrease the charge loss rate after programming and after erase, which is manifested in a small voltage shift in the retention mode.
  • The top oxynitride layer 220A can be deposited over the bottom oxynitride layer 220B in a CVD process using a process gas including N2O, NH3 and DCS, at a chamber pressure of from about 5 mT to about 500 mT, and at a substrate temperature of from about 700° C. to about 850° C. and more preferably at least about 780° C., for a period of from about 2.5 minutes to about 20 minutes. In particular, the process gas can include a first gas mixture of N2O and NH3 mixed in a ratio of from about 8:1 to about 1:8 and a second gas mixture of DCS and NH3 mixed in a ratio of from about 1:7 to about 7:1, and can be introduced at a flow rate of from about 5 to about 20 sccm. It has been found that an oxynitride layer produced or deposited under these condition yields a silicon-rich, nitrogen-rich, and oxygen-lean top oxynitride layer 220A, which improves the speed and increases of the initial difference between program and erase voltage without compromising a charge loss rate of memory devices made using an embodiment of the inventive ONO structure 204, thereby extending the operating life of the device.
  • Preferably, the top oxynitride layer 220A is deposited sequentially in the same tool used to form the bottom oxynitride layer 220B, substantially without breaking vacuum on the deposition chamber. More preferably, the top oxynitride layer 220A is deposited substantially without altering the temperature to which the substrate 208 was heated during deposition of the bottom oxynitride layer 220B. In one embodiment, the top oxynitride layer 220A is deposited sequentially and immediately following the deposition of the bottom oxynitride layer 220B by decreasing the flow rate of the N2O/NH3 gas mixture relative to the DCS/NH3 gas mixture to provide the desired ratio of the gas mixtures to yield the silicon-rich, nitrogen-rich, and oxygen-lean top oxynitride layer 220A.
  • In certain embodiments, another oxide or oxide layer (not shown in these figures) is formed after the formation of the ONO structure 204 in a different area on the substrate or in the device using a steam oxidation. In this embodiment, the top oxynitride layer 220A and top oxide layer 218 of the ONO structure 204 are beneficially steam annealed during the steam oxidation process. In particular, steam annealing improves the quality of the top oxide layer 218 reducing the number of traps formed near a top surface of the top oxide layer and near a top surface of the underlying top oxynitride layer 220A, thereby reducing or substantially eliminating an electric field that could otherwise form across the top oxide layer, which could result in back streaming of charge carriers therethrough and adversely affecting data or charge retention in the charge storing layer.
  • A suitable thickness for the bottom oxynitride layer 220B has been found to be from about 10 Å to about 80 Å, and a ratio of thicknesses between the bottom layer and the top oxynitride layer has been found to be from about 1:6 to about 6:1, and more preferably at least about 1:4.
  • The top oxide layer 218 of the ONO structure 204 includes a relatively thick layer of SiO2 of from about 30 Å to about 70 Å, and more preferably about 45 Å. The top oxide layer 218 can be formed or deposited by any suitable means including, for example, being thermally grown or deposited using CVD. In a preferred embodiment, the top oxide layer 218 is a high-temperature-oxide (HTO) deposited using CVD process. Generally, the deposition process involves exposing the substrate 208 to a silicon source, such as silane, chlorosilane, or dichlorosilane, and an oxygen-containing gas, such as O2 or N2O in a deposition chamber at a pressure of from about 50 mT to about 1000 mT, for a period of from about 10 minutes to about 120 minutes while maintaining the substrate at a temperature of from about 650° C. to about 850° C.
  • Preferably, the top oxide layer 218 is deposited sequentially in the same tool used to form the oxynitride layers 220A, 220B. More preferably, the oxynitride layers 220A, 220B, and the top oxide layer 218 are formed or deposited in the same tool used to grow the tunneling oxide layer 216. Suitable tools include, for example, an ONO AVP, commercially available from AVIZA technology of Scotts Valley, Calif.
  • A method or forming or fabricating an ONO stack according to one embodiment of the present invention will now be described with reference to the flowchart of FIG. 3.
  • Referring to FIG. 3, the method begins with forming a first oxide layer, such as a tunneling oxide layer, of the ONO structure over a silicon containing layer on a surface of a substrate (step 300). Next, the first layer of a multi-layer charge storing layer including nitride is formed on a surface of the first oxide layer (step 302). As noted above, this first layer or bottom oxynitride layer can be formed or deposited by a CVD process using a process gas including N2O/NH3 and DCS/NH3 gas mixtures in ratios and at flow rates tailored to provide a silicon-rich and oxygen-rich oxynitride layer. The second layer of the multi-layer charge storing layer is then formed on a surface of the first layer (step 304). The second layer has a stoichiometric composition of oxygen, nitrogen and/or silicon different from that of the first layer. In particular, and as noted above, the second or top oxynitride layer can be formed or deposited by a CVD process using a process gas including DCS/NH3 and N2O/NH3 gas mixtures in ratios and at flow rates tailored to provide a silicon-rich, oxygen-lean top oxynitride layer. Finally, a second oxide layer of the ONO structure is formed on a surface of the second layer of the multi-layer charge storing layer (step 306). As noted above, this top or blocking oxide layer can be formed or deposited by any suitable means, but is preferably deposited in a CVD process. In one embodiment the top or second oxide layer is a high temperature oxide deposited in a HTO CVD process. Alternatively, the top or blocking oxide layer can be thermally grown, however it will be appreciated that in this embodiment the oxynitride thickness must be adjusted or increased as some of the top oxynitride will be effectively consumed or oxidized during the process of thermally growing the blocking oxide layer.
  • Optionally, the method may further include the step of forming or depositing a silicon containing layer on a surface of the second oxide layer to form a SONOS stack or structure (step 308). The silicon containing layer can be, for example, a polysilicon layer deposited by a CVD process to form a control gate of a SONOS transistor or device.
  • A comparison of data retention for a memory device using a memory layer formed according to an embodiment of the present invention as compared to a memory device using a conventional memory layer will now be made with reference to FIG. 4. In particular, FIG. 4 illustrates the change in threshold voltage of devices in an electronically erasable programmable read-only memory (EEPROM) during programming (VTP) during erase (VTE) over device life for an EEPROM made using a conventional ONO structure and an ONO structure having a multi-layer oxynitride layer. In gathering data for this figure both devices were pre-cycled for 100K cycles at an ambient temperature of 85° C.
  • Referring to FIG. 4, the graph or line 402 illustrates the change over time of a VTP for an EEPROM made using a conventional ONO structure having a single oxynitride layer without refreshing the memory after the initial writing—program or erase. Actual data points on line 402 are shown by unfilled circles, the remainder of the line showing an extrapolation of VTP to a specified end-of-life (EOL) for the EEPROM. Graph or line 404 illustrates the change over time of a VTE for the EEPROM made using a conventional ONO structure. Actual data points on line 404 are shown by filled circles, and the remainder of the line shows an extrapolation of VTE to EOL for the EEPROM. Generally, the specified difference between the VTE and VTP for an EEPROM at EOL is at least 0.5 V to be able to identify or sense the difference between the program and erase state. As seen from this figure an EEPROM made using a conventional ONO structure has a difference between VTE and VTP of about 0.35V at a specified EOL of 20 years. Thus, an EEPROM made using a conventional ONO structure and operated under the conditions described above will fail to meet the specified operating life by at least about 17 years.
  • In contrast, the change in VTP and VTE over time for an EEPROM made using an ONO structure having a multi-layer oxynitride layer, illustrated by lines 406 and 408 respectively, shows a difference between VTE and VTP of at least about 1.96V at the specified EOL. Thus, an EEPROM made using an ONO structure according to an embodiment of the present invention will meet and exceed the specified operating life of 20 years. In particular, graph or line 406 illustrates the change over time of VTP for an EEPROM using an ONO structure according to an embodiment of the present invention. Actual data points on line 406 are shown by unfilled squares, the remainder of the line showing an extrapolation of VTP to the specified EOL. Graph or line 408 illustrates the change over time of VTE for the EEPROM, and actual data points on line 408 are shown by filled squares, the remainder of the line showing an extrapolation of VTE to EOL.
  • Although shown and described above as having only two oxynitride layer, i.e., a top and a bottom layer, the present invention is not so limited, and the multi-layer charge storing layer can include any number, n, of oxynitride layers, any or all of which may have differing stoichiometric compositions of oxygen, nitrogen and/or silicon. In particular, multi-layer charge storing layers having up to five oxynitride layers each with differing stoichiometric compositions have been produced and tested. However, as will be appreciated by those skilled in the art it is generally desirable to utilize as few layers as possible to accomplish a desired result, reducing the process steps necessary to produce the device, and thereby providing a much simpler and more robust manufacturing process. Moreover, utilizing as few layers as possible also results in higher yields as it is simpler to control the stoichiometric composition and dimensions of the fewer layers.
  • It will further be appreciated that although shown and described as part of a SONOS stack in a SONOS memory device, the ONO structure and method of the present invention is not so limited, and the ONO structure can be used in or with any semiconductor technology or in any device requiring a charge storing or dielectric layer or stack including, for example, in a split gate flash memory, a TaNOS stack, in a 1T (transistor) SONOS cell, a 2T SONOS cell, a 3T SONOS cell, a localized 2-bit cell, and in a multilevel programming or cell, without departing from the scope of the invention.
  • The advantages of ONO structures and methods of forming the same according to an embodiment of the present invention over previous or conventional approaches include: (i) the ability to enhance data retention in memory devices using the structure by dividing the oxynitride layer into a plurality of films or layers and tailoring the oxygen, nitrogen and silicon profile across each layer; (ii) the ability to enhance speed of a memory device without compromising data retention; (iii) the ability to meet or exceed data retention and speed specifications for memory devices using an ONO structure of an embodiment of the present invention at a temperature of at least about 125° C.; and (iv) provide heavy duty program erase cycles of 100,000 cycles or more.
  • The foregoing description of specific embodiments and examples of the invention have been presented for the purpose of illustration and description, and although the invention has been described and illustrated by certain of the preceding examples, it is not to be construed as being limited thereby. They are not intended to be exhaustive or to limit the invention to the precise forms disclosed, and many modifications, improvements and variations within the scope of the invention are possible in light of the above teaching. It is intended that the scope of the invention encompass the generic area as herein disclosed, and by the claims appended hereto and their equivalents. The scope of the present invention is defined by the claims, which includes known equivalents and unforeseeable equivalents at the time of filing of this application.

Claims (20)

1. A method of forming a charge storing layer of a semiconductor device, the method comprising steps of:
depositing on a substrate a silicon-rich nitride; and
oxidizing the silicon-rich nitride to form a silicon-rich, oxygen-rich first oxynitride layer.
2. A method according to claim 1, further comprising the step of forming over a surface of the first oxynitride layer at least one additional layer to form a multi-layer charge storing layer.
3. A method according to claim 2, wherein the step of forming at least a one additional layer comprises the step of forming a second oxynitride layer.
4. A method according to claim 3, wherein the first oxynitride layer and second oxynitride layer have differing stoichiometric compositions of oxygen, nitrogen and/or silicon.
5. A method according to claim 3, wherein the step of forming the second oxynitride layer comprises the step of forming a second oxynitride layer under conditions selected to form a silicon-rich, oxygen-lean oxynitride layer.
6. A method according to claim 5, wherein the first oxynitride layer is formed in a chemical vapor deposition (CVD) process using a process gas comprising a dichlorosilane (SiH2Cl2)/ammonia (NH3) mixture and a nitrous oxide (N2O)/NH3 mixture at a ratio of about 8:1, and wherein the second oxynitride layer is formed in a CVD process using a process gas comprising a N2O/NH3 mixture and a SiH2Cl2/NH3 mixture at a ratio of about 5:1.
7. A method according to claim 6, wherein the steps of forming the first oxynitride layer and the second oxynitride layer are performed sequentially in a single CVD tool by changing the ratio of the N2O/NH3 and SiH2Cl2/NH3 mixtures.
8. A method according to claim 6, wherein at least one of the first oxynitride layer and the second oxynitride layer is formed at temperature of at least about 780° C.
9. A method of forming a semiconductor device including an oxide-nitride-oxide (ONO) structure, the method comprising steps of:
forming a first oxide layer of the ONO structure;
forming a multi-layer charge storing layer comprising nitride on a surface of the first oxide layer; and
forming a second oxide layer of the ONO structure on a surface of the multi-layer charge storing layer.
10. A method according to claim 9, wherein, the multi-layer charge storing layer comprises at least two silicon oxynitride (Si2N2O) layers.
11. A method according to claim 10, wherein the at least two oxynitride layers have differing stoichiometric compositions of oxygen, nitrogen and/or silicon.
12. A method according to claim 11, wherein the at least two oxynitride layers include a top oxynitride layer and a bottom oxynitride layer, and wherein the top oxynitride layer is formed under conditions selected to form a silicon-rich, oxygen-lean oxynitride layer, and the bottom oxynitride layer is formed under conditions selected to form a silicon-rich, oxygen-rich oxynitride layer.
13. A method according to claim 12, wherein the top oxynitride layer is nitrogen-rich oxynitride layer.
14. A method according to claim 12, wherein the step of forming the first oxide layer comprises the step of forming the first oxide layer using a steam anneal, and wherein a ratio of thicknesses between the top oxynitride layer and the bottom oxynitride layer is selected to facilitate forming the multi-layer memory layer following the step of forming the tunnel oxide layer using a steam anneal.
15. A method according to claim 12, wherein the top oxynitride layer is formed using a process gas comprising a dichlorosilane (SiH2Cl2)/ammonia (NH3) mixture and a nitrous oxide (N2O)/NH3 mixture at a ratio of about 5:1, and the bottom oxynitride layer is formed using a process gas comprising a N2O/NH3 mixture and a SiH2Cl2/NH3 mixture at a ratio of about 8:1.
16. A method according to claim 10, wherein the at least two oxynitride layers are formed at temperature of at least about 780° C.
17. A semiconductor device including an oxide-nitride-oxide (ONO) structure comprising a multilayer memory layer between a first oxide layer and a second oxide layer, wherein the multilayer memory layer comprises at least two silicon oxynitride layers.
18. A semiconductor device according to claim 17, wherein the at least two oxynitride layers have differing stoichiometric compositions of oxygen, nitrogen and/or silicon.
19. A semiconductor device according to claim 17, wherein oxygen, nitrogen and silicon profiles across the at least two oxynitride layers are selected to meet a predetermined data retention specification at an operating temperature of at least 125° C.
20. A semiconductor device according to claim 17, wherein the at least two oxynitride layers include a top oxynitride layer and a bottom oxynitride layer, and wherein a ratio of thickness between the top oxynitride layer and the bottom oxynitride layer is from 1 to 5.
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US13/436,872 US9449831B2 (en) 2007-05-25 2012-03-31 Oxide-nitride-oxide stack having multiple oxynitride layers
US13/917,500 US9355849B1 (en) 2007-05-25 2013-06-13 Oxide-nitride-oxide stack having multiple oxynitride layers
US14/172,775 US9349824B2 (en) 2007-05-25 2014-02-04 Oxide-nitride-oxide stack having multiple oxynitride layers
US15/099,025 US10903068B2 (en) 2007-05-25 2016-04-14 Oxide-nitride-oxide stack having multiple oxynitride layers
US15/189,668 US10374067B2 (en) 2007-05-25 2016-06-22 Oxide-nitride-oxide stack having multiple oxynitride layers
US15/993,224 US10896973B2 (en) 2007-05-25 2018-05-30 Oxide-nitride-oxide stack having multiple oxynitride layers
US15/993,165 US10903342B2 (en) 2007-05-25 2018-05-30 Oxide-nitride-oxide stack having multiple oxynitride layers
US16/726,582 US11222965B2 (en) 2007-05-25 2019-12-24 Oxide-nitride-oxide stack having multiple oxynitride layers
US17/157,704 US20210249254A1 (en) 2007-05-25 2021-01-25 Oxide-nitride-oxide stack having multiple oxynitride layers
US17/541,029 US11784243B2 (en) 2007-05-25 2021-12-02 Oxide-nitride-oxide stack having multiple oxynitride layers
US17/945,793 US12266521B2 (en) 2007-05-25 2022-09-15 Oxide-nitride-oxide stack having multiple oxynitride layers
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