JP5104867B2 - 圧電振動子 - Google Patents

圧電振動子 Download PDF

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Publication number
JP5104867B2
JP5104867B2 JP2009526404A JP2009526404A JP5104867B2 JP 5104867 B2 JP5104867 B2 JP 5104867B2 JP 2009526404 A JP2009526404 A JP 2009526404A JP 2009526404 A JP2009526404 A JP 2009526404A JP 5104867 B2 JP5104867 B2 JP 5104867B2
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JP
Japan
Prior art keywords
excitation electrode
excitation
piezoelectric
axis direction
electrodes
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JP2009526404A
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English (en)
Japanese (ja)
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JPWO2009020022A1 (ja
Inventor
伸一 小山
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Daishinku Corp
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Daishinku Corp
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Priority to JP2009526404A priority Critical patent/JP5104867B2/ja
Publication of JPWO2009020022A1 publication Critical patent/JPWO2009020022A1/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/0211—Means for compensation or elimination of undesirable effects of reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009526404A 2007-08-03 2008-07-30 圧電振動子 Active JP5104867B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009526404A JP5104867B2 (ja) 2007-08-03 2008-07-30 圧電振動子

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2007203010 2007-08-03
JP2007203010 2007-08-03
JP2007246279 2007-09-21
JP2007246279 2007-09-21
JP2007254046 2007-09-28
JP2007254046 2007-09-28
PCT/JP2008/063652 WO2009020022A1 (ja) 2007-08-03 2008-07-30 圧電振動子
JP2009526404A JP5104867B2 (ja) 2007-08-03 2008-07-30 圧電振動子

Publications (2)

Publication Number Publication Date
JPWO2009020022A1 JPWO2009020022A1 (ja) 2010-11-04
JP5104867B2 true JP5104867B2 (ja) 2012-12-19

Family

ID=40341256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009526404A Active JP5104867B2 (ja) 2007-08-03 2008-07-30 圧電振動子

Country Status (4)

Country Link
US (1) US8164235B2 (zh)
JP (1) JP5104867B2 (zh)
CN (1) CN101772889B (zh)
WO (1) WO2009020022A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020241790A1 (zh) * 2019-05-31 2020-12-03

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446941B2 (ja) * 2010-01-29 2014-03-19 株式会社大真空 圧電振動片
US8692632B2 (en) * 2010-03-17 2014-04-08 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5477478B2 (ja) * 2010-12-01 2014-04-23 株式会社村田製作所 圧電素子の製造方法及び電極付きマザー圧電基板
JP5699809B2 (ja) * 2011-05-27 2015-04-15 株式会社大真空 圧電振動片
JP2013062578A (ja) * 2011-09-12 2013-04-04 Nippon Dempa Kogyo Co Ltd 水晶振動片及び水晶デバイス
US9013242B2 (en) 2012-03-27 2015-04-21 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and mobile object
TWI578585B (zh) * 2012-03-27 2017-04-11 精工愛普生股份有限公司 振動元件、振動器、電子裝置、電子機器及移動體
JP2013255051A (ja) 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器及び振動素子の製造方法
JP5936950B2 (ja) * 2012-08-21 2016-06-22 京セラクリスタルデバイス株式会社 水晶素子及び水晶デバイス
JP5617983B2 (ja) * 2013-09-26 2014-11-05 株式会社大真空 音叉型圧電振動片、および音叉型圧電振動デバイス
JP6303372B2 (ja) 2013-10-01 2018-04-04 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、及び移動体
WO2015084699A1 (en) 2013-12-02 2015-06-11 Gyrus Acmi, Inc. (D.B.A. Olympus Surgical Technologies America) Electronic endoscope cleaner sheath
JP2016025408A (ja) 2014-07-17 2016-02-08 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器、および移動体
US9571063B2 (en) 2014-10-28 2017-02-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator device with structures having different apodized shapes
JP6500915B2 (ja) * 2015-01-29 2019-04-17 株式会社大真空 水晶振動板、及び水晶振動デバイス
JP2017158146A (ja) * 2016-03-04 2017-09-07 日本電波工業株式会社 水晶振動子
JP6755108B2 (ja) * 2016-03-23 2020-09-16 日本電波工業株式会社 水晶振動子
JP2017192032A (ja) * 2016-04-13 2017-10-19 日本電波工業株式会社 水晶振動子
JP6855227B2 (ja) * 2016-12-12 2021-04-07 日本電波工業株式会社 圧電振動片及び圧電デバイス
CN108649920B (zh) * 2017-12-29 2021-12-03 苏州汉天下电子有限公司 压电声波谐振器、压电声波滤波器、双工器及射频通信模块
JP6562101B2 (ja) * 2018-03-02 2019-08-21 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、及び移動体
WO2023112962A1 (ja) * 2021-12-15 2023-06-22 京セラ株式会社 水晶振動素子及び水晶デバイス

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4853691A (zh) * 1971-11-06 1973-07-27
JPS5668328U (zh) * 1979-10-30 1981-06-06
JPH03172011A (ja) * 1989-11-30 1991-07-25 Seikosha Co Ltd ３次オーバトーン圧電振動子
JPH04196910A (ja) * 1990-11-28 1992-07-16 Seiko Epson Corp 厚み辷り圧電振動子の周波数調整方法
JP2002111435A (ja) * 2000-09-29 2002-04-12 Kyocera Corp 圧電振動子及びそれを搭載した圧電デバイス
JP2002246874A (ja) * 2001-02-13 2002-08-30 Seiko Epson Corp 高周波振動子及びその製造方法
JP2002374146A (ja) * 2001-06-13 2002-12-26 Seiko Epson Corp 圧電振動片及び圧電デバイス
JP2003309446A (ja) * 2002-04-15 2003-10-31 Toyo Commun Equip Co Ltd 圧電振動子
JP2006013647A (ja) * 2004-06-23 2006-01-12 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶振動子

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5074879A (zh) 1973-11-08 1975-06-19
JPS5335423Y2 (zh) * 1973-11-12 1978-08-30
JP3287383B2 (ja) 1995-09-28 2002-06-04 株式会社大真空 モノリシック水晶フィルタ
US5920146A (en) 1997-06-05 1999-07-06 Motorola Inc. Electrode edge wave patterns for piezoelectric resonator
JP4513150B2 (ja) 2000-01-07 2010-07-28 エプソントヨコム株式会社 高周波圧電振動子
JP2001223556A (ja) 2000-02-14 2001-08-17 Ueda Japan Radio Co Ltd 圧電振動子及びアレイ型圧電振動子
JP4325178B2 (ja) 2002-11-26 2009-09-02 エプソントヨコム株式会社 圧電振動素子、圧電振動子及び圧電発振器
US7466213B2 (en) * 2003-10-06 2008-12-16 Nxp B.V. Resonator structure and method of producing it
US7126255B2 (en) * 2004-04-05 2006-10-24 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film-type device
JP4567742B2 (ja) * 2005-08-30 2010-10-20 京セラ株式会社 圧電共振素子及びそれを用いた圧電共振装置
JP4412506B2 (ja) * 2007-09-07 2010-02-10 エプソントヨコム株式会社 圧電デバイスおよびその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4853691A (zh) * 1971-11-06 1973-07-27
JPS5668328U (zh) * 1979-10-30 1981-06-06
JPH03172011A (ja) * 1989-11-30 1991-07-25 Seikosha Co Ltd ３次オーバトーン圧電振動子
JPH04196910A (ja) * 1990-11-28 1992-07-16 Seiko Epson Corp 厚み辷り圧電振動子の周波数調整方法
JP2002111435A (ja) * 2000-09-29 2002-04-12 Kyocera Corp 圧電振動子及びそれを搭載した圧電デバイス
JP2002246874A (ja) * 2001-02-13 2002-08-30 Seiko Epson Corp 高周波振動子及びその製造方法
JP2002374146A (ja) * 2001-06-13 2002-12-26 Seiko Epson Corp 圧電振動片及び圧電デバイス
JP2003309446A (ja) * 2002-04-15 2003-10-31 Toyo Commun Equip Co Ltd 圧電振動子
JP2006013647A (ja) * 2004-06-23 2006-01-12 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶振動子

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020241790A1 (zh) * 2019-05-31 2020-12-03
CN113812088A (zh) * 2019-05-31 2021-12-17 株式会社大真空 压电振动板及压电振动器件
JP7283538B2 (ja) 2019-05-31 2023-05-30 株式会社大真空 圧電振動板および圧電振動デバイス

Also Published As

Publication number Publication date
US20100327705A1 (en) 2010-12-30
WO2009020022A1 (ja) 2009-02-12
CN101772889A (zh) 2010-07-07
JPWO2009020022A1 (ja) 2010-11-04
CN101772889B (zh) 2013-01-09
US8164235B2 (en) 2012-04-24

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