JP5088672B2 - 圧力センサおよびその製造方法 - Google Patents
圧力センサおよびその製造方法 Download PDFInfo
- Publication number
- JP5088672B2 JP5088672B2 JP2007109175A JP2007109175A JP5088672B2 JP 5088672 B2 JP5088672 B2 JP 5088672B2 JP 2007109175 A JP2007109175 A JP 2007109175A JP 2007109175 A JP2007109175 A JP 2007109175A JP 5088672 B2 JP5088672 B2 JP 5088672B2
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- pressure receiving
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007109175A JP5088672B2 (ja) | 2007-04-18 | 2007-04-18 | 圧力センサおよびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007109175A JP5088672B2 (ja) | 2007-04-18 | 2007-04-18 | 圧力センサおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008267896A JP2008267896A (ja) | 2008-11-06 |
| JP2008267896A5 JP2008267896A5 (https=) | 2010-05-20 |
| JP5088672B2 true JP5088672B2 (ja) | 2012-12-05 |
Family
ID=40047608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007109175A Expired - Fee Related JP5088672B2 (ja) | 2007-04-18 | 2007-04-18 | 圧力センサおよびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5088672B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4973718B2 (ja) * | 2009-01-27 | 2012-07-11 | セイコーエプソン株式会社 | 圧力検出ユニット、及び圧力センサー |
| JP4998860B2 (ja) | 2009-02-26 | 2012-08-15 | セイコーエプソン株式会社 | 圧力センサー素子、圧力センサー |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63281033A (ja) * | 1987-05-13 | 1988-11-17 | Daiwa Shinku Kogyosho:Kk | 圧力検出装置 |
| JPH0972804A (ja) * | 1995-09-04 | 1997-03-18 | Mitsubishi Electric Corp | 半導体圧力センサ |
| JPH1137859A (ja) * | 1997-07-17 | 1999-02-12 | Toyo Commun Equip Co Ltd | 圧力センサ用圧電振動子 |
| JP2000329787A (ja) * | 1999-05-20 | 2000-11-30 | Japan Aviation Electronics Industry Ltd | 力学量センサおよびウェハ組み立て体 |
| JP2004132913A (ja) * | 2002-10-11 | 2004-04-30 | Toyo Commun Equip Co Ltd | 感圧素子、及びこれを用いた圧力センサ |
| JP2005326290A (ja) * | 2004-05-14 | 2005-11-24 | Toyo Commun Equip Co Ltd | タッチモード容量型圧力センサの構造 |
| JP3969442B2 (ja) * | 2005-09-26 | 2007-09-05 | エプソントヨコム株式会社 | 圧力センサ |
-
2007
- 2007-04-18 JP JP2007109175A patent/JP5088672B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008267896A (ja) | 2008-11-06 |
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