JP4332859B2 - 圧力センサ - Google Patents
圧力センサ Download PDFInfo
- Publication number
- JP4332859B2 JP4332859B2 JP2007119354A JP2007119354A JP4332859B2 JP 4332859 B2 JP4332859 B2 JP 4332859B2 JP 2007119354 A JP2007119354 A JP 2007119354A JP 2007119354 A JP2007119354 A JP 2007119354A JP 4332859 B2 JP4332859 B2 JP 4332859B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive element
- pressure sensor
- diaphragm
- pressure receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
Claims (7)
- 2つの受圧部と、
前記2つの受圧部の周囲に設けた支持枠部と、
当該支持枠部の対向する内側縁部同士を結ぶ方向であって、前記2つの受圧部に挟まれた領域を貫通する方向に前記受圧部の厚みよりも厚い厚肉部を有する撓み抑制部と、
を有するダイヤフラムと、
振動部と該振動部の両端に配置された一対の基部とを有する感圧素子と、
を有し、
前記感圧素子の一対の基部を前記2つの受圧部に夫々設けられた載置部に各々固定すると共に、前記振動部が前記撓み抑制部を跨ぐように感圧素子を配置し、
前記載置部の中央部は、前記受圧部の中央よりも前記撓み抑制部の端部側に寄っている、
ことを特徴とする圧力センサ。 - 前記撓み抑制部は、前記支持枠の対向する内側縁部同士を架け渡してなることを特徴とする請求項1に記載の圧力センサ。
- 前記撓み抑制部が、前記受圧部の厚みと同じ厚みの領域を有していることを特徴とする請求項1に記載の圧力センサ。
- 前記載置部同士が対向する側の前記載置部の縁部と、当該縁部に対向する撓み抑制部の縁辺との間の距離をaとし、
前記縁部と交差する方向の前記載置部の縁部と、当該縁部に対向する前記受圧部の縁辺との間の距離をcとすると、
前記aと前記cとの関係は、
c>a>0
を満たす、
ことを特徴とする請求項1に記載の圧力センサ。 - 前記ダイヤフラムの前記感圧素子を搭載した側の面を覆う蓋部であって、
前記支持枠部と前記蓋部とを固定することによって、前記ダイヤフラムと前記蓋部との間に形成される内部空間を気密封止したことを特徴とする請求項1に記載の圧力センサ。 - 前記載置部は、前記感圧素子を搭載した前記受圧部の表面から突出している、
ことを特徴とする請求項1ないし5のいずれかに記載の圧力センサ。 - 前記感圧素子に発振回路を接続し、前記発振回路に周波数測定演算手段を接続したことを特徴とする請求項1ないし6のいずれかに記載の圧力センサ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007119354A JP4332859B2 (ja) | 2007-04-27 | 2007-04-27 | 圧力センサ |
US12/106,470 US7856886B2 (en) | 2007-04-27 | 2008-04-21 | Pressure sensor having a diaphragm having a pressure-receiving portion receiving a pressure and a thick portion adjacent to the pressure-receiving portion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007119354A JP4332859B2 (ja) | 2007-04-27 | 2007-04-27 | 圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008275445A JP2008275445A (ja) | 2008-11-13 |
JP4332859B2 true JP4332859B2 (ja) | 2009-09-16 |
Family
ID=39885422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007119354A Expired - Fee Related JP4332859B2 (ja) | 2007-04-27 | 2007-04-27 | 圧力センサ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7856886B2 (ja) |
JP (1) | JP4332859B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013250063A (ja) * | 2012-05-30 | 2013-12-12 | Seiko Epson Corp | 圧力センサー素子および電子機器 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5305028B2 (ja) * | 2008-10-16 | 2013-10-02 | セイコーエプソン株式会社 | 圧力センサー |
FR2947096A1 (fr) * | 2009-06-18 | 2010-12-24 | Commissariat Energie Atomique | Procede de realisation d'une membrane plane |
JP2012058024A (ja) * | 2010-09-07 | 2012-03-22 | Seiko Epson Corp | 圧力センサー |
US20120216621A1 (en) * | 2011-02-25 | 2012-08-30 | Seiko Epson Corporation | Physical quantity detector and method of manufacturing the same |
FR3018916B1 (fr) * | 2014-03-19 | 2017-08-25 | Commissariat Energie Atomique | Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique |
FR3037397B1 (fr) * | 2015-06-12 | 2017-06-16 | Sagem Defense Securite | Dispositif de detection de pression a decouplage mecanique |
CN111928980A (zh) * | 2019-05-13 | 2020-11-13 | 西人马联合测控(泉州)科技有限公司 | 压敏元件、压敏元件的制备方法和压力传感器 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2197069B (en) * | 1986-11-03 | 1990-10-24 | Stc Plc | Sensor device |
GB8701556D0 (en) * | 1987-01-24 | 1987-02-25 | Schlumberger Electronics Uk | Sensors |
US4790192A (en) * | 1987-09-24 | 1988-12-13 | Rosemount Inc. | Silicon side by side coplanar pressure sensors |
US5022270A (en) * | 1989-06-15 | 1991-06-11 | Rosemount Inc. | Extended measurement capability transmitter having shared overpressure protection means |
JPH0431728A (ja) | 1990-05-28 | 1992-02-03 | Yokogawa Electric Corp | 半導体圧力計 |
GB9321398D0 (en) | 1993-10-16 | 1993-12-08 | Lucas Ind Plc | Differential pressure transducer |
JP2004132913A (ja) | 2002-10-11 | 2004-04-30 | Toyo Commun Equip Co Ltd | 感圧素子、及びこれを用いた圧力センサ |
JP2005221453A (ja) * | 2004-02-09 | 2005-08-18 | Denso Corp | 圧力センサ |
-
2007
- 2007-04-27 JP JP2007119354A patent/JP4332859B2/ja not_active Expired - Fee Related
-
2008
- 2008-04-21 US US12/106,470 patent/US7856886B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013250063A (ja) * | 2012-05-30 | 2013-12-12 | Seiko Epson Corp | 圧力センサー素子および電子機器 |
Also Published As
Publication number | Publication date |
---|---|
US20080264172A1 (en) | 2008-10-30 |
JP2008275445A (ja) | 2008-11-13 |
US7856886B2 (en) | 2010-12-28 |
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