JP2008267896A5 - - Google Patents

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Publication number
JP2008267896A5
JP2008267896A5 JP2007109175A JP2007109175A JP2008267896A5 JP 2008267896 A5 JP2008267896 A5 JP 2008267896A5 JP 2007109175 A JP2007109175 A JP 2007109175A JP 2007109175 A JP2007109175 A JP 2007109175A JP 2008267896 A5 JP2008267896 A5 JP 2008267896A5
Authority
JP
Japan
Prior art keywords
pressure
main surface
pressure sensor
groove
sensor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007109175A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008267896A (ja
JP5088672B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007109175A priority Critical patent/JP5088672B2/ja
Priority claimed from JP2007109175A external-priority patent/JP5088672B2/ja
Publication of JP2008267896A publication Critical patent/JP2008267896A/ja
Publication of JP2008267896A5 publication Critical patent/JP2008267896A5/ja
Application granted granted Critical
Publication of JP5088672B2 publication Critical patent/JP5088672B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007109175A 2007-04-18 2007-04-18 圧力センサおよびその製造方法 Expired - Fee Related JP5088672B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007109175A JP5088672B2 (ja) 2007-04-18 2007-04-18 圧力センサおよびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007109175A JP5088672B2 (ja) 2007-04-18 2007-04-18 圧力センサおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2008267896A JP2008267896A (ja) 2008-11-06
JP2008267896A5 true JP2008267896A5 (https=) 2010-05-20
JP5088672B2 JP5088672B2 (ja) 2012-12-05

Family

ID=40047608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007109175A Expired - Fee Related JP5088672B2 (ja) 2007-04-18 2007-04-18 圧力センサおよびその製造方法

Country Status (1)

Country Link
JP (1) JP5088672B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4973718B2 (ja) * 2009-01-27 2012-07-11 セイコーエプソン株式会社 圧力検出ユニット、及び圧力センサー
JP4998860B2 (ja) 2009-02-26 2012-08-15 セイコーエプソン株式会社 圧力センサー素子、圧力センサー

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63281033A (ja) * 1987-05-13 1988-11-17 Daiwa Shinku Kogyosho:Kk 圧力検出装置
JPH0972804A (ja) * 1995-09-04 1997-03-18 Mitsubishi Electric Corp 半導体圧力センサ
JPH1137859A (ja) * 1997-07-17 1999-02-12 Toyo Commun Equip Co Ltd 圧力センサ用圧電振動子
JP2000329787A (ja) * 1999-05-20 2000-11-30 Japan Aviation Electronics Industry Ltd 力学量センサおよびウェハ組み立て体
JP2004132913A (ja) * 2002-10-11 2004-04-30 Toyo Commun Equip Co Ltd 感圧素子、及びこれを用いた圧力センサ
JP2005326290A (ja) * 2004-05-14 2005-11-24 Toyo Commun Equip Co Ltd タッチモード容量型圧力センサの構造
JP3969442B2 (ja) * 2005-09-26 2007-09-05 エプソントヨコム株式会社 圧力センサ

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