ATE483329T1 - Akustisches sensorelement - Google Patents
Akustisches sensorelementInfo
- Publication number
- ATE483329T1 ATE483329T1 AT08760771T AT08760771T ATE483329T1 AT E483329 T1 ATE483329 T1 AT E483329T1 AT 08760771 T AT08760771 T AT 08760771T AT 08760771 T AT08760771 T AT 08760771T AT E483329 T1 ATE483329 T1 AT E483329T1
- Authority
- AT
- Austria
- Prior art keywords
- diaphragm
- acoustic sensor
- counter
- sensor element
- substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
- Electrophonic Musical Instruments (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007029911A DE102007029911A1 (de) | 2007-06-28 | 2007-06-28 | Akustisches Sensorelement |
PCT/EP2008/057211 WO2009000641A1 (de) | 2007-06-28 | 2008-06-10 | Akustisches sensorelement |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE483329T1 true ATE483329T1 (de) | 2010-10-15 |
Family
ID=39684411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08760771T ATE483329T1 (de) | 2007-06-28 | 2008-06-10 | Akustisches sensorelement |
Country Status (6)
Country | Link |
---|---|
US (1) | US8089828B2 (de) |
EP (1) | EP2163121B1 (de) |
JP (1) | JP2010531592A (de) |
AT (1) | ATE483329T1 (de) |
DE (2) | DE102007029911A1 (de) |
WO (1) | WO2009000641A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007029911A1 (de) * | 2007-06-28 | 2009-01-02 | Robert Bosch Gmbh | Akustisches Sensorelement |
DE102009026682A1 (de) * | 2009-06-03 | 2010-12-09 | Robert Bosch Gmbh | Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zu dessen Herstellung |
JP4947220B2 (ja) * | 2010-05-13 | 2012-06-06 | オムロン株式会社 | 音響センサ及びマイクロフォン |
KR20130039504A (ko) | 2011-10-12 | 2013-04-22 | 한국전자통신연구원 | 멤스 마이크로폰 및 그 제조 방법 |
ITTO20130225A1 (it) | 2013-03-21 | 2014-09-22 | St Microelectronics Srl | Struttura sensibile microelettromeccanica per un trasduttore acustico capacitivo includente un elemento di limitazione delle oscillazioni di una membrana, e relativo processo di fabbricazione |
ITTO20130441A1 (it) * | 2013-05-30 | 2014-12-01 | St Microelectronics Srl | Struttura di rilevamento per un trasduttore acustico mems con migliorata resistenza alle deformazioni |
ITTO20130540A1 (it) | 2013-06-28 | 2014-12-29 | St Microelectronics Srl | Dispositivo mems dotato di membrana sospesa e relativo procedimento di fabbricazione |
JP6149628B2 (ja) * | 2013-09-13 | 2017-06-21 | オムロン株式会社 | 音響トランスデューサ及びマイクロフォン |
DE102014214525B4 (de) * | 2014-07-24 | 2019-11-14 | Robert Bosch Gmbh | Mikro-elektromechanisches Bauteil und Herstellungsverfahren für mikro-elektromechanische Bauteile |
DE102014221037A1 (de) * | 2014-10-16 | 2016-04-21 | Robert Bosch Gmbh | MEMS-Mikrofonbauelement |
US9534492B2 (en) * | 2014-11-11 | 2017-01-03 | Baker Hughes Incorporated | Pressure compensated capacitive micromachined ultrasound transducer for downhole applications |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0619271Y2 (ja) * | 1984-07-30 | 1994-05-18 | 株式会社オ−デイオテクニカ | コンデンサマイクロホンユニツト |
JP3293729B2 (ja) * | 1995-10-11 | 2002-06-17 | ホシデン株式会社 | 振動ピックアップ装置およびその製造方法 |
JP3462645B2 (ja) * | 1995-10-27 | 2003-11-05 | 株式会社オーディオテクニカ | コンデンサマイクロホンの成極電源回路 |
US6535460B2 (en) | 2000-08-11 | 2003-03-18 | Knowles Electronics, Llc | Miniature broadband acoustic transducer |
DE102004010295A1 (de) * | 2004-03-03 | 2005-09-22 | Robert Bosch Gmbh | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
JP4036866B2 (ja) * | 2004-07-30 | 2008-01-23 | 三洋電機株式会社 | 音響センサ |
US7346178B2 (en) | 2004-10-29 | 2008-03-18 | Silicon Matrix Pte. Ltd. | Backplateless silicon microphone |
WO2007024909A1 (en) | 2005-08-23 | 2007-03-01 | Analog Devices, Inc. | Multi-microphone system |
US8059842B2 (en) * | 2005-09-09 | 2011-11-15 | Yamaha Corporation | Capacitor microphone |
DE102007029911A1 (de) * | 2007-06-28 | 2009-01-02 | Robert Bosch Gmbh | Akustisches Sensorelement |
-
2007
- 2007-06-28 DE DE102007029911A patent/DE102007029911A1/de not_active Withdrawn
-
2008
- 2008-06-10 EP EP08760771A patent/EP2163121B1/de not_active Not-in-force
- 2008-06-10 US US12/598,994 patent/US8089828B2/en not_active Expired - Fee Related
- 2008-06-10 DE DE502008001455T patent/DE502008001455D1/de active Active
- 2008-06-10 JP JP2010513833A patent/JP2010531592A/ja active Pending
- 2008-06-10 AT AT08760771T patent/ATE483329T1/de active
- 2008-06-10 WO PCT/EP2008/057211 patent/WO2009000641A1/de active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE502008001455D1 (de) | 2010-11-11 |
US20100135123A1 (en) | 2010-06-03 |
EP2163121A1 (de) | 2010-03-17 |
WO2009000641A1 (de) | 2008-12-31 |
EP2163121B1 (de) | 2010-09-29 |
DE102007029911A1 (de) | 2009-01-02 |
JP2010531592A (ja) | 2010-09-24 |
US8089828B2 (en) | 2012-01-03 |
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