ATE471635T1 - Akustischer einchip-mems-wandler und herstellungsverfahren - Google Patents

Akustischer einchip-mems-wandler und herstellungsverfahren

Info

Publication number
ATE471635T1
ATE471635T1 AT07711298T AT07711298T ATE471635T1 AT E471635 T1 ATE471635 T1 AT E471635T1 AT 07711298 T AT07711298 T AT 07711298T AT 07711298 T AT07711298 T AT 07711298T AT E471635 T1 ATE471635 T1 AT E471635T1
Authority
AT
Austria
Prior art keywords
cavity
die
back plate
diaphragm
mems transducer
Prior art date
Application number
AT07711298T
Other languages
English (en)
Inventor
Pirmin Rombach
Morten Berg Arnoldus
Morten Ginnerup
Original Assignee
Sonion Mems As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sonion Mems As filed Critical Sonion Mems As
Application granted granted Critical
Publication of ATE471635T1 publication Critical patent/ATE471635T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
AT07711298T 2006-03-30 2007-03-29 Akustischer einchip-mems-wandler und herstellungsverfahren ATE471635T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US78755906P 2006-03-30 2006-03-30
PCT/DK2007/000157 WO2007112743A1 (en) 2006-03-30 2007-03-29 Single die mems acoustic transducer and manufacturing method

Publications (1)

Publication Number Publication Date
ATE471635T1 true ATE471635T1 (de) 2010-07-15

Family

ID=37432486

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07711298T ATE471635T1 (de) 2006-03-30 2007-03-29 Akustischer einchip-mems-wandler und herstellungsverfahren

Country Status (8)

Country Link
US (1) US8188557B2 (de)
EP (1) EP2005789B1 (de)
JP (1) JP4966370B2 (de)
KR (1) KR101398667B1 (de)
CN (1) CN101427593B (de)
AT (1) ATE471635T1 (de)
DE (1) DE602007007198D1 (de)
WO (1) WO2007112743A1 (de)

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Also Published As

Publication number Publication date
WO2007112743A1 (en) 2007-10-11
KR101398667B1 (ko) 2014-05-27
DE602007007198D1 (de) 2010-07-29
KR20080109001A (ko) 2008-12-16
EP2005789A1 (de) 2008-12-24
CN101427593B (zh) 2012-09-19
EP2005789B1 (de) 2010-06-16
US8188557B2 (en) 2012-05-29
JP2009531884A (ja) 2009-09-03
CN101427593A (zh) 2009-05-06
US20090169035A1 (en) 2009-07-02
JP4966370B2 (ja) 2012-07-04

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