SG158758A1 - Extended sensor back volume - Google Patents

Extended sensor back volume

Info

Publication number
SG158758A1
SG158758A1 SG200805261-5A SG2008052615A SG158758A1 SG 158758 A1 SG158758 A1 SG 158758A1 SG 2008052615 A SG2008052615 A SG 2008052615A SG 158758 A1 SG158758 A1 SG 158758A1
Authority
SG
Singapore
Prior art keywords
transducer
back volume
pedestal
sensor back
back plate
Prior art date
Application number
SG200805261-5A
Inventor
Kok Kitt-Wai
Srini Gengusamy Naidu
Bryan Keith Patmon
Kathirgamasundaram Sooriakumar
Karthikeyan Kumaraswamy
Original Assignee
Sensfab Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensfab Pte Ltd filed Critical Sensfab Pte Ltd
Priority to SG200805261-5A priority Critical patent/SG158758A1/en
Priority to PCT/SG2009/000243 priority patent/WO2010008344A2/en
Publication of SG158758A1 publication Critical patent/SG158758A1/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Abstract

A microelectromechanical system (MEMS) transducer comprises a diaphragm and a back plate. The diaphragm and back plate are spaced apart and are made of semiconductor material using microelectronic fabrication techniques. The transducer also includes a pedestal comprising a cavity. The pedestal has a first end and a second end, and the back plate of the transducer is affixed to the first end, substantially covering the cavity. An extension member is affixed to the second end of the pedestal, enlarging the back volume of the transducer.
SG200805261-5A 2008-07-14 2008-07-14 Extended sensor back volume SG158758A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG200805261-5A SG158758A1 (en) 2008-07-14 2008-07-14 Extended sensor back volume
PCT/SG2009/000243 WO2010008344A2 (en) 2008-07-14 2009-07-08 Extended sensor back volume

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200805261-5A SG158758A1 (en) 2008-07-14 2008-07-14 Extended sensor back volume

Publications (1)

Publication Number Publication Date
SG158758A1 true SG158758A1 (en) 2010-02-26

Family

ID=41550893

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200805261-5A SG158758A1 (en) 2008-07-14 2008-07-14 Extended sensor back volume

Country Status (2)

Country Link
SG (1) SG158758A1 (en)
WO (1) WO2010008344A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102264020B (en) * 2010-05-26 2013-12-25 国立清华大学 Micro-Electro-Mechanical condenser microphone
JP4893860B1 (en) * 2011-02-21 2012-03-07 オムロン株式会社 microphone
DE102013213891A1 (en) 2013-05-21 2014-11-27 Siemens Medical Instruments Pte. Ltd. microphone array

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
KR101398667B1 (en) * 2006-03-30 2014-05-27 에프코스 피티이 엘티디 Single die MEMS acoustic transducer and manufacturing method

Also Published As

Publication number Publication date
WO2010008344A3 (en) 2010-09-10
WO2010008344A2 (en) 2010-01-21

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