WO2011081288A3 - 멤스 마이크로폰 및 그 제조방법 - Google Patents

멤스 마이크로폰 및 그 제조방법 Download PDF

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Publication number
WO2011081288A3
WO2011081288A3 PCT/KR2010/007535 KR2010007535W WO2011081288A3 WO 2011081288 A3 WO2011081288 A3 WO 2011081288A3 KR 2010007535 W KR2010007535 W KR 2010007535W WO 2011081288 A3 WO2011081288 A3 WO 2011081288A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems microphone
silicon substrate
membrane
deposited
manufacturing same
Prior art date
Application number
PCT/KR2010/007535
Other languages
English (en)
French (fr)
Other versions
WO2011081288A2 (ko
Inventor
김용국
Original Assignee
주식회사 비에스이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 비에스이 filed Critical 주식회사 비에스이
Publication of WO2011081288A2 publication Critical patent/WO2011081288A2/ko
Publication of WO2011081288A3 publication Critical patent/WO2011081288A3/ko

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Multimedia (AREA)
  • Micromachines (AREA)

Abstract

본 발명은 실리콘 기판과 멤브레인의 접촉 부위에서 잔류 응력를 감소시킬 수 있는 멤스(MEMS) 마이크로폰 및 그 제조방법에 관한 것이다. 본 발명에 의하면, 백 챔버가 형성되는 실리콘 기판; 상기 실리콘 기판에 증착되고, 다수의 음공이 형성된 백 플레이트; 상기 백 플레이트와 이격되어 에어갭이 형성되도록 상기 실리콘 기판에 증착되는 멤브레인; 및 상기 멤브레인과 실리콘 기판의 접촉 부위에 증착되는 응력 완충부;를 포함하는 멤스 마이크로폰 및 그 제조방법을 제공한다.
PCT/KR2010/007535 2009-12-29 2010-10-29 멤스 마이크로폰 및 그 제조방법 WO2011081288A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0132682 2009-12-29
KR1020090132682A KR101109095B1 (ko) 2009-12-29 2009-12-29 멤스 마이크로폰 및 그 제조방법

Publications (2)

Publication Number Publication Date
WO2011081288A2 WO2011081288A2 (ko) 2011-07-07
WO2011081288A3 true WO2011081288A3 (ko) 2011-11-03

Family

ID=44175704

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/007535 WO2011081288A2 (ko) 2009-12-29 2010-10-29 멤스 마이크로폰 및 그 제조방법

Country Status (4)

Country Link
KR (1) KR101109095B1 (ko)
CN (2) CN201937821U (ko)
TW (1) TWI505723B (ko)
WO (1) WO2011081288A2 (ko)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101355434B1 (ko) * 2012-06-12 2014-01-28 한국생산기술연구원 미세 홀이 배열된 폴리머 멤브레인을 포함하는 플라스틱 챔버 플레이트의 제작 방법
KR20140040997A (ko) 2012-09-27 2014-04-04 한국전자통신연구원 멤스 마이크로폰 및 그 제조방법
CN106604195A (zh) * 2015-10-14 2017-04-26 天津修瑕科技有限公司 一种基于电子信息系统钥匙的安全方法
CN107465983B (zh) * 2016-06-03 2021-06-04 无锡华润上华科技有限公司 Mems麦克风及其制备方法
CN108609573A (zh) * 2016-12-12 2018-10-02 中芯国际集成电路制造(上海)有限公司 一种mems器件及其制备方法、电子装置
KR102091849B1 (ko) * 2018-11-30 2020-03-20 (주)다빛센스 콘덴서 마이크로폰 및 그 제조방법
CN111131986A (zh) * 2019-12-31 2020-05-08 歌尔股份有限公司 防尘结构、麦克风封装结构以及电子设备
WO2024034931A1 (ko) * 2022-08-08 2024-02-15 삼성전자주식회사 음향 입력 장치를 포함하는 전자 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068843A (ja) * 2004-08-31 2006-03-16 Sony Corp 微小電気機械素子、光学微小電気機械素子、光変調素子、並びにレーザディスプレイ
KR20060099627A (ko) * 2005-03-14 2006-09-20 주식회사 케이이씨 Ｍｅｍｓ 공정을 이용한 마이크로폰 및 그 제조 방법
KR100893558B1 (ko) * 2005-08-10 2009-04-17 세이코 엡슨 가부시키가이샤 반도체 장치, 반도체 장치의 제조 방법 및 전자 부품
JP2009148880A (ja) * 2007-12-14 2009-07-09 Ind Technol Res Inst センシング膜及びそれを用いるマイクロエレクトロメカニカルシステムデバイス

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6566251B2 (en) * 2001-03-29 2003-05-20 Georgia Tech Research Corporation Method for selective deposition of materials in micromachined molds
EP1246502A1 (en) * 2001-03-30 2002-10-02 Phone-Or Ltd Microphone
US7045868B2 (en) * 2003-07-31 2006-05-16 Motorola, Inc. Wafer-level sealed microdevice having trench isolation and methods for making the same
US20060291674A1 (en) * 2005-06-14 2006-12-28 Merry Electronics Co. Ltd. Method of making silicon-based miniaturized microphones
TWI285509B (en) * 2006-02-10 2007-08-11 Univ Nat Chunghsing Sawing-free process for manufacturing wafer of capacitor-type silicon microphone
WO2007112743A1 (en) * 2006-03-30 2007-10-11 Sonion Mems A/S Single die mems acoustic transducer and manufacturing method
JP2008092561A (ja) * 2006-09-04 2008-04-17 Yamaha Corp 半導体マイクユニット、その製造方法、及び、半導体マイクユニットの搭載方法
EP1931173B1 (en) * 2006-12-06 2011-07-20 Electronics and Telecommunications Research Institute Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
US8258591B2 (en) * 2008-01-16 2012-09-04 Solid State System Co., Ltd. Micro-electro-mechanical systems (MEMS) device
WO2009146494A1 (en) * 2008-06-04 2009-12-10 Cochlear Limited Implantable microphone diaphragm stress decoupling system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068843A (ja) * 2004-08-31 2006-03-16 Sony Corp 微小電気機械素子、光学微小電気機械素子、光変調素子、並びにレーザディスプレイ
KR20060099627A (ko) * 2005-03-14 2006-09-20 주식회사 케이이씨 Ｍｅｍｓ 공정을 이용한 마이크로폰 및 그 제조 방법
KR100893558B1 (ko) * 2005-08-10 2009-04-17 세이코 엡슨 가부시키가이샤 반도체 장치, 반도체 장치의 제조 방법 및 전자 부품
JP2009148880A (ja) * 2007-12-14 2009-07-09 Ind Technol Res Inst センシング膜及びそれを用いるマイクロエレクトロメカニカルシステムデバイス

Also Published As

Publication number Publication date
CN102111705B (zh) 2015-12-09
KR101109095B1 (ko) 2012-01-31
CN201937821U (zh) 2011-08-17
KR20110076074A (ko) 2011-07-06
WO2011081288A2 (ko) 2011-07-07
TW201127088A (en) 2011-08-01
CN102111705A (zh) 2011-06-29
TWI505723B (zh) 2015-10-21

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