CN201937821U - 微电子机械系统传声器 - Google Patents

微电子机械系统传声器 Download PDF

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Publication number
CN201937821U
CN201937821U CN2010206481591U CN201020648159U CN201937821U CN 201937821 U CN201937821 U CN 201937821U CN 2010206481591 U CN2010206481591 U CN 2010206481591U CN 201020648159 U CN201020648159 U CN 201020648159U CN 201937821 U CN201937821 U CN 201937821U
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CN
China
Prior art keywords
film
silicon substrate
supporting bracket
evaporation
microelectromechanical systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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CN2010206481591U
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English (en)
Chinese (zh)
Inventor
金容国
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BSE Co Ltd
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BSE Co Ltd
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Filing date
Publication date
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Publication of CN201937821U publication Critical patent/CN201937821U/zh
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Multimedia (AREA)
  • Micromachines (AREA)
CN2010206481591U 2009-12-29 2010-12-03 微电子机械系统传声器 Expired - Lifetime CN201937821U (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0132682 2009-12-29
KR1020090132682A KR101109095B1 (ko) 2009-12-29 2009-12-29 멤스 마이크로폰 및 그 제조방법

Publications (1)

Publication Number Publication Date
CN201937821U true CN201937821U (zh) 2011-08-17

Family

ID=44175704

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2010206481591U Expired - Lifetime CN201937821U (zh) 2009-12-29 2010-12-03 微电子机械系统传声器
CN201010579578.9A Expired - Fee Related CN102111705B (zh) 2009-12-29 2010-12-03 微电子机械系统传声器及其制造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201010579578.9A Expired - Fee Related CN102111705B (zh) 2009-12-29 2010-12-03 微电子机械系统传声器及其制造方法

Country Status (4)

Country Link
KR (1) KR101109095B1 (ko)
CN (2) CN201937821U (ko)
TW (1) TWI505723B (ko)
WO (1) WO2011081288A2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111263282A (zh) * 2018-11-30 2020-06-09 达菲感测有限公司 电容式传声器及其制作方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101355434B1 (ko) * 2012-06-12 2014-01-28 한국생산기술연구원 미세 홀이 배열된 폴리머 멤브레인을 포함하는 플라스틱 챔버 플레이트의 제작 방법
KR20140040997A (ko) 2012-09-27 2014-04-04 한국전자통신연구원 멤스 마이크로폰 및 그 제조방법
CN106604195A (zh) * 2015-10-14 2017-04-26 天津修瑕科技有限公司 一种基于电子信息系统钥匙的安全方法
CN107465983B (zh) * 2016-06-03 2021-06-04 无锡华润上华科技有限公司 Mems麦克风及其制备方法
CN108609573A (zh) * 2016-12-12 2018-10-02 中芯国际集成电路制造(上海)有限公司 一种mems器件及其制备方法、电子装置
CN111131986A (zh) * 2019-12-31 2020-05-08 歌尔股份有限公司 防尘结构、麦克风封装结构以及电子设备
WO2024034931A1 (ko) * 2022-08-08 2024-02-15 삼성전자주식회사 음향 입력 장치를 포함하는 전자 장치

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US6566251B2 (en) * 2001-03-29 2003-05-20 Georgia Tech Research Corporation Method for selective deposition of materials in micromachined molds
EP1246502A1 (en) * 2001-03-30 2002-10-02 Phone-Or Ltd Microphone
US7045868B2 (en) * 2003-07-31 2006-05-16 Motorola, Inc. Wafer-level sealed microdevice having trench isolation and methods for making the same
JP2006068843A (ja) 2004-08-31 2006-03-16 Sony Corp 微小電気機械素子、光学微小電気機械素子、光変調素子、並びにレーザディスプレイ
KR100685092B1 (ko) * 2005-03-14 2007-02-22 주식회사 케이이씨 Ｍｅｍｓ 공정을 이용한 마이크로폰 및 그 제조 방법
US20060291674A1 (en) * 2005-06-14 2006-12-28 Merry Electronics Co. Ltd. Method of making silicon-based miniaturized microphones
KR100893558B1 (ko) 2005-08-10 2009-04-17 세이코 엡슨 가부시키가이샤 반도체 장치, 반도체 장치의 제조 방법 및 전자 부품
TWI285509B (en) * 2006-02-10 2007-08-11 Univ Nat Chunghsing Sawing-free process for manufacturing wafer of capacitor-type silicon microphone
CN101427593B (zh) * 2006-03-30 2012-09-19 普尔斯门斯公司 单裸片微机电系统声学换能器及制造方法
JP2008092561A (ja) * 2006-09-04 2008-04-17 Yamaha Corp 半導体マイクユニット、その製造方法、及び、半導体マイクユニットの搭載方法
EP1931173B1 (en) * 2006-12-06 2011-07-20 Electronics and Telecommunications Research Institute Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
TWI358235B (en) 2007-12-14 2012-02-11 Ind Tech Res Inst Sensing membrane and micro-electro-mechanical syst
US8258591B2 (en) * 2008-01-16 2012-09-04 Solid State System Co., Ltd. Micro-electro-mechanical systems (MEMS) device
WO2009146494A1 (en) * 2008-06-04 2009-12-10 Cochlear Limited Implantable microphone diaphragm stress decoupling system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111263282A (zh) * 2018-11-30 2020-06-09 达菲感测有限公司 电容式传声器及其制作方法
CN111263282B (zh) * 2018-11-30 2021-11-09 达菲感测有限公司 电容式传声器及其制作方法

Also Published As

Publication number Publication date
CN102111705B (zh) 2015-12-09
CN102111705A (zh) 2011-06-29
WO2011081288A3 (ko) 2011-11-03
TW201127088A (en) 2011-08-01
KR20110076074A (ko) 2011-07-06
TWI505723B (zh) 2015-10-21
WO2011081288A2 (ko) 2011-07-07
KR101109095B1 (ko) 2012-01-31

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20110817

Effective date of abandoning: 20151209

C25 Abandonment of patent right or utility model to avoid double patenting