ATE550886T1 - Kalibriertes mikroelektromechanisches mikrofon - Google Patents

Kalibriertes mikroelektromechanisches mikrofon

Info

Publication number
ATE550886T1
ATE550886T1 AT07115704T AT07115704T ATE550886T1 AT E550886 T1 ATE550886 T1 AT E550886T1 AT 07115704 T AT07115704 T AT 07115704T AT 07115704 T AT07115704 T AT 07115704T AT E550886 T1 ATE550886 T1 AT E550886T1
Authority
AT
Austria
Prior art keywords
bias voltage
calibrated
microphone
microelectromechanical microphone
diaphragm
Prior art date
Application number
AT07115704T
Other languages
English (en)
Inventor
Carsten Fallesen
Jens Kristian Poulsen
Lars Jorn Stenberg
Jozef Johannes Gerardus Bosch
Original Assignee
Epcos Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos Pte Ltd filed Critical Epcos Pte Ltd
Application granted granted Critical
Publication of ATE550886T1 publication Critical patent/ATE550886T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
AT07115704T 2006-09-26 2007-09-05 Kalibriertes mikroelektromechanisches mikrofon ATE550886T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84731906P 2006-09-26 2006-09-26

Publications (1)

Publication Number Publication Date
ATE550886T1 true ATE550886T1 (de) 2012-04-15

Family

ID=37564109

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07115704T ATE550886T1 (de) 2006-09-26 2007-09-05 Kalibriertes mikroelektromechanisches mikrofon

Country Status (5)

Country Link
US (1) US8036401B2 (de)
EP (1) EP1906704B1 (de)
KR (1) KR101413271B1 (de)
CN (1) CN101155442B (de)
AT (1) ATE550886T1 (de)

Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1599067B1 (de) * 2004-05-21 2013-05-01 Epcos Pte Ltd Detektion und Kontrolle des Membrankollaps in einem Kondensatormikrofon
US8542850B2 (en) * 2007-09-12 2013-09-24 Epcos Pte Ltd Miniature microphone assembly with hydrophobic surface coating
DE102007058951B4 (de) * 2007-12-07 2020-03-26 Snaptrack, Inc. MEMS Package
WO2009075280A1 (ja) * 2007-12-13 2009-06-18 Hitachi Medical Corporation 超音波診断装置と超音波探触子
US8288971B2 (en) * 2008-01-11 2012-10-16 Broadcom Corporation Integrated and programmable microphone bias generation
US8666095B2 (en) * 2008-05-05 2014-03-04 Epcos Pte Ltd Fast precision charge pump
GB2459864A (en) * 2008-05-07 2009-11-11 Wolfson Microelectronics Plc Filtered bias voltage for a MEMS capacitive transducer circuit
US20100073079A1 (en) 2008-09-24 2010-03-25 Sony Ericsson Mobile Communications Ab Bias arrangement and apparatus
ATE548725T1 (de) * 2008-10-31 2012-03-15 Austriamicrosystems Ag Aktive rauschsteueranordnung, aktiver rauschsteuerungskopfhörer und kalibrierungsverfahren
US8284958B2 (en) * 2008-12-22 2012-10-09 Nokia Corporation Increased dynamic range microphone
GB2466648B (en) 2008-12-30 2011-09-28 Wolfson Microelectronics Plc Apparatus and method for biasing a transducer
IT1396063B1 (it) * 2009-03-31 2012-11-09 St Microelectronics Rousset Circuito di polarizzazione per un trasduttore acustico microelettromeccanico e relativo metodo di polarizzazione
US8682002B2 (en) * 2009-07-02 2014-03-25 Conexant Systems, Inc. Systems and methods for transducer calibration and tuning
US8831246B2 (en) * 2009-12-14 2014-09-09 Invensense, Inc. MEMS microphone with programmable sensitivity
JP2011130604A (ja) * 2009-12-18 2011-06-30 Sanyo Electric Co Ltd 充電回路、増幅回路
DE102010006132B4 (de) 2010-01-29 2013-05-08 Epcos Ag Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC
US8233643B1 (en) * 2010-03-23 2012-07-31 Fiberplex Technologies, LLC System and method for amplifying low level signals provided on electrical supply power
CN102271300B (zh) * 2010-06-04 2014-01-15 北京卓锐微技术有限公司 一种集成的麦克风偏置电压控制方法和偏置电压生成电路
US9204222B2 (en) * 2011-02-25 2015-12-01 Nokia Technologies Oy Transducer apparatus with a tension actuator
US9232302B2 (en) 2011-05-31 2016-01-05 Apple Inc. Microphone assemblies with through-silicon vias
US9668076B2 (en) * 2011-06-21 2017-05-30 Apple Inc. Microphone headset failure detecting and reporting
US8942389B2 (en) 2011-08-10 2015-01-27 Robert Bosch Gmbh Trim method for CMOS-MEMS microphones
US9635460B2 (en) * 2011-08-18 2017-04-25 Knowles Electronics, Llc Sensitivity adjustment apparatus and method for MEMS devices
US9236837B2 (en) 2011-08-25 2016-01-12 Infineon Technologies Ag System and method for low distortion capacitive signal source amplifier
US8995690B2 (en) 2011-11-28 2015-03-31 Infineon Technologies Ag Microphone and method for calibrating a microphone
KR101241588B1 (ko) * 2011-11-30 2013-03-11 이오스 재팬, 인코포레이티드 콘덴서 마이크로폰
US8630429B2 (en) 2011-12-16 2014-01-14 Robert Bosch Gmbh Preventing electrostatic pull-in in capacitive devices
CN102611980B (zh) * 2012-01-13 2014-11-19 瑞声声学科技(深圳)有限公司 一种硅麦克风的灵敏度调整系统及调整方法
CN103209379B (zh) * 2012-01-16 2015-09-02 上海耐普微电子有限公司 一种单线可编程的mems麦克风及其编程方法和系统
JP5926440B2 (ja) 2012-03-30 2016-05-25 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 自動バイアス制御を有するマイクロフォン
US8638249B2 (en) 2012-04-16 2014-01-28 Infineon Technologies Ag System and method for high input capacitive signal amplifier
US9210516B2 (en) * 2012-04-23 2015-12-08 Infineon Technologies Ag Packaged MEMS device and method of calibrating a packaged MEMS device
US9281744B2 (en) 2012-04-30 2016-03-08 Infineon Technologies Ag System and method for a programmable voltage source
JP6130493B2 (ja) * 2012-05-09 2017-05-17 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Ｍｅｍｓマイクロフォンアセンブリおよびｍｅｍｓマイクロフォンアセンブリの作動方法
DE102012215239B4 (de) * 2012-08-28 2023-12-21 Robert Bosch Gmbh Bauteil und Verfahren zum Prüfen eines solchen Bauteils
US9214911B2 (en) 2012-08-30 2015-12-15 Infineon Technologies Ag System and method for adjusting the sensitivity of a capacitive signal source
WO2014043357A1 (en) * 2012-09-14 2014-03-20 Robert Bosch Gmbh Testing for defective manufacturing of microphones and ultralow pressure sensors
CN103052015A (zh) * 2012-12-06 2013-04-17 山东共达电声股份有限公司 一种实现传声器灵敏度一致的方法及一种可调增益传声器
US9282406B2 (en) 2012-12-19 2016-03-08 Knowles Electronics, Llc Digital microphone with frequency booster
CN103051990B (zh) * 2012-12-25 2016-08-10 苏州恒听电子有限公司 自适应送话器
US9128136B2 (en) 2013-03-15 2015-09-08 Infineon Technologies Ag Apparatus and method for determining the sensitivity of a capacitive sensing device
US20140264652A1 (en) * 2013-03-15 2014-09-18 Invensense, Inc. Acoustic sensor with integrated programmable electronic interface
US9306449B2 (en) 2013-03-15 2016-04-05 Robert Bosch Gmbh Adjustable biasing circuits for MEMS capacitive microphones
ITTO20130313A1 (it) * 2013-04-18 2014-10-19 St Microelectronics Srl Struttura di rilevamento micromeccanica perfezionata per un trasduttore acustico mems e relativo procedimento di fabbricazione
GB2513406B (en) * 2013-04-26 2016-01-20 Cirrus Logic Int Semiconductor Ltd Signal processing for MEMS capacitive transducers
US9414175B2 (en) 2013-07-03 2016-08-09 Robert Bosch Gmbh Microphone test procedure
DE102013108464B4 (de) * 2013-08-06 2020-06-25 Tdk Corporation Verfahren zur Herstellung eines mikroelektromechanischen Wandlers
US9332369B2 (en) 2013-10-22 2016-05-03 Infineon Technologies Ag System and method for automatic calibration of a transducer
US20150110312A1 (en) * 2013-10-22 2015-04-23 Starkey Laboratories, Inc. Input stage headroom expansion for hearing assistance devices
US9729963B2 (en) * 2013-11-07 2017-08-08 Invensense, Inc. Multi-function pins for a programmable acoustic sensor
US9749736B2 (en) 2013-11-07 2017-08-29 Invensense, Inc. Signal processing for an acoustic sensor bi-directional communication channel
US20150256916A1 (en) * 2014-03-04 2015-09-10 Knowles Electronics, Llc Programmable Acoustic Device And Method For Programming The Same
US9414168B2 (en) * 2014-03-27 2016-08-09 Starkey Laboratories, Inc. Magnetometer in hearing aid
DE102014104773B3 (de) * 2014-04-03 2015-06-18 Epcos Ag Elektrisches Bauelement, insbesondere Mikrofon mit nachjustierbarer Empfindlichkeit und Verfahren zum Justieren
KR101601179B1 (ko) * 2014-10-20 2016-03-08 현대자동차 주식회사 마이크로폰의 아날로그 신호 처리 회로
US9420391B2 (en) * 2014-12-02 2016-08-16 Infineon Technologies Ag Microphone configuration and calibration via supply interface
CN104717596A (zh) * 2015-03-23 2015-06-17 惠州Tcl移动通信有限公司 麦克风音频测试系统以及测试方法
CN104780489B (zh) * 2015-03-31 2018-11-30 歌尔股份有限公司 用于检测扬声器振动位移的结构和声电互转的双效装置
CN105101031B (zh) * 2015-07-30 2018-10-12 山东共达电声股份有限公司 麦克风的配置方法
CN108605181A (zh) * 2016-02-01 2018-09-28 美商楼氏电子有限公司 用于偏置mems马达的设备
DE102016104742A1 (de) * 2016-03-15 2017-09-21 Tdk Corporation Verfahren zum Kalibrieren eines Mikrofons und Mikrofon
DE102016105923A1 (de) 2016-03-31 2017-10-05 Tdk Corporation MEMS-Mikrofon und Verfahren zum Betrieb
DE102016105904B4 (de) * 2016-03-31 2019-10-10 Tdk Corporation MEMS-Mikrofon und Verfahren zur Selbstkalibrierung des MEMS-Mikrofons
US10045121B2 (en) * 2016-04-29 2018-08-07 Invensense, Inc. Microelectromechanical systems (MEMS) microphone bias voltage
EP3324649A1 (de) * 2016-11-18 2018-05-23 Sonion Nederland B.V. Wandler mit hoher empfindlichkeit
US20180145643A1 (en) 2016-11-18 2018-05-24 Sonion Nederland B.V. Circuit for providing a high and a low impedance and a system comprising the circuit
EP3324645A1 (de) 2016-11-18 2018-05-23 Sonion Nederland B.V. Phasenkorrigierendes system und phasenkorrigierbares wandlersystem
EP3324538A1 (de) 2016-11-18 2018-05-23 Sonion Nederland B.V. Messschaltung mit einer verstärkerschaltung
KR102591814B1 (ko) * 2016-12-13 2023-10-23 삼성전자주식회사 전자 장치의 음향 신호 처리 방법 및 그 전자 장치
EP3855129B1 (de) * 2017-03-22 2023-10-25 Knowles Electronics, LLC Interface schaltkreis für einen kapazitiven sensor
GB2561023B (en) * 2017-03-31 2021-08-11 Cirrus Logic Int Semiconductor Ltd Transducer apparatus and methods
CN107360528A (zh) * 2017-06-07 2017-11-17 歌尔股份有限公司 一种基于麦克风阵列的校准方法及装置
CN107249165A (zh) * 2017-06-30 2017-10-13 歌尔股份有限公司 麦克风灵敏度调整系统及方法
DE102017128259B4 (de) * 2017-11-29 2019-07-11 Tdk Electronics Ag Elektrische Schaltungsanordnung zum Regeln einer Vorspannung für ein Mikrofon
KR102087644B1 (ko) * 2018-12-04 2020-04-20 지엔에스티 주식회사 마이크로폰소자 제조방법 및 이를 이용한 마이크로폰소자의 세팅장치
US11637546B2 (en) 2018-12-14 2023-04-25 Synaptics Incorporated Pulse density modulation systems and methods
DE102018132486A1 (de) * 2018-12-17 2020-06-18 Sennheiser Electronic Gmbh & Co. Kg Mikrofonkapsel, Mikrofonanordnung mit mehreren Mikrofonkapseln und Verfahren zum Kalibrieren eines Mikrofonarrays
US11641558B2 (en) * 2020-08-27 2023-05-02 Cirrus Logic, Inc. Apparatus and methods for detecting a microphone condition
US11889252B2 (en) * 2021-05-11 2024-01-30 Knowles Electronics, Llc Method and apparatus for balancing detection sensitivity in producing a differential signal
CN113905308B (zh) * 2021-08-05 2023-06-06 钰太芯微电子科技（上海）有限公司 在线修调的mems麦克风及电子设备

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4631749A (en) 1984-06-22 1986-12-23 Heath Company ROM compensated microphone
US5051799A (en) 1989-02-17 1991-09-24 Paul Jon D Digital output transducer
US5029215A (en) 1989-12-29 1991-07-02 At&T Bell Laboratories Automatic calibrating apparatus and method for second-order gradient microphone
US6088463A (en) * 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
US6829131B1 (en) 1999-09-13 2004-12-07 Carnegie Mellon University MEMS digital-to-acoustic transducer with error cancellation
AU2001250970A1 (en) 2000-04-07 2001-10-23 Microtronic Nederland B.V. Microphone with range switching
CN1419795A (zh) * 2000-06-30 2003-05-21 皇家菲利浦电子有限公司 校准麦克风的设备和方法
AU2002237204A1 (en) 2001-03-09 2002-09-24 Techtronic A/S An electret condensor microphone preamplifier that is insensitive to leakage currents at the input
GB2387499B (en) * 2002-04-10 2004-05-26 Motorola Inc Switched-geometry microphone array arrangement and method
US7139400B2 (en) 2002-04-22 2006-11-21 Siemens Vdo Automotive, Inc. Microphone calibration for active noise control system
ATE410820T1 (de) * 2004-01-12 2008-10-15 Sonion As Verstärkerschaltung für kapazitive umformer
US7515721B2 (en) 2004-02-09 2009-04-07 Microsoft Corporation Self-descriptive microphone array
EP1599067B1 (de) * 2004-05-21 2013-05-01 Epcos Pte Ltd Detektion und Kontrolle des Membrankollaps in einem Kondensatormikrofon
JP4579778B2 (ja) * 2004-08-17 2010-11-10 ルネサスエレクトロニクス株式会社 センサ用電源回路およびそれを用いたマイクロホンユニット
US7929716B2 (en) * 2005-01-06 2011-04-19 Renesas Electronics Corporation Voltage supply circuit, power supply circuit, microphone unit using the same, and microphone unit sensitivity adjustment method
KR20080063267A (ko) 2005-07-19 2008-07-03 아우디오아시스 에이/에스 프로그래밍 가능 마이크로폰
US20070237345A1 (en) * 2006-04-06 2007-10-11 Fortemedia, Inc. Method for reducing phase variation of signals generated by electret condenser microphones

Also Published As

Publication number Publication date
CN101155442A (zh) 2008-04-02
CN101155442B (zh) 2013-06-19
EP1906704B1 (de) 2012-03-21
US8036401B2 (en) 2011-10-11
EP1906704A1 (de) 2008-04-02
KR20080028291A (ko) 2008-03-31
US20080075306A1 (en) 2008-03-27
KR101413271B1 (ko) 2014-06-27

Similar Documents

Publication Publication Date Title
ATE550886T1 (de) Kalibriertes mikroelektromechanisches mikrofon
ATE483329T1 (de) Akustisches sensorelement
CR11512A (es) Compuestos insecticidas
BRPI0811701A2 (pt) Sonora auto-ajustável"
DE602006021150D1 (de) Monolithisch integrierte leistungsverstärkereinrichtung
EP2150075A3 (de) Elektronische Vorrichtung und elektroakustischer Wandler
DK2124480T3 (da) Højtalerindretning
DE602006017222D1 (de) Naphtalin-amidin-imide
DE602005023864D1 (de) Strommodus-instrumentationsverstärker
WO2014143723A3 (en) Acoustic transducers
ATE410767T1 (de) Messbox für eine hörvorrichtung und entsprechendes messverfahren
ATE510416T1 (de) Mems-mikrofon
DE602006010503D1 (de) Optischer Verstärker
ATE410041T1 (de) Cic-hörgerät
TW200608172A (en) Techniques to adjust vertical offset
DE602005006720D1 (de) Audioverstärker mit Rückkopplungsunterdrückung
DE502005004020D1 (de) Membranspannfutter
DK1730993T3 (da) Høreanordning med to eller flere mikrofoner
WO2011064410A3 (en) Implantable microphone
DE602006003357D1 (de) Elektro-akustischer Wandler mit Halterung
WO2009013869A1 (ja) バイオセンサ
EP2575376A3 (de) Kopfgarnitur und Kopfhörer
FI20065852A (fi) Laajakaistavahvistimen vahvistuksen säätö
DE602007001054D1 (de) Frequenzkompensation eines Verstärkers mit wenigstens zwei Verstärkungsstufen
WO2008157317A3 (en) Piano microphone apparatus