CN101155442A - 校准微机电话筒 - Google Patents
校准微机电话筒 Download PDFInfo
- Publication number
- CN101155442A CN101155442A CNA2007101612081A CN200710161208A CN101155442A CN 101155442 A CN101155442 A CN 101155442A CN A2007101612081 A CNA2007101612081 A CN A2007101612081A CN 200710161208 A CN200710161208 A CN 200710161208A CN 101155442 A CN101155442 A CN 101155442A
- Authority
- CN
- China
- Prior art keywords
- transducer
- mems
- voltage
- microphone
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000012528 membrane Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 36
- 230000035945 sensitivity Effects 0.000 claims description 25
- 238000000429 assembly Methods 0.000 claims description 12
- 230000000712 assembly Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 9
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 238000009795 derivation Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000004044 response Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 15
- 238000001514 detection method Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000008672 reprogramming Effects 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R29/00—Monitoring arrangements; Testing arrangements
- H04R29/004—Monitoring arrangements; Testing arrangements for microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Micromachines (AREA)
- Circuit For Audible Band Transducer (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US84731906P | 2006-09-26 | 2006-09-26 | |
US60/847,319 | 2006-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101155442A true CN101155442A (zh) | 2008-04-02 |
CN101155442B CN101155442B (zh) | 2013-06-19 |
Family
ID=37564109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101612081A Expired - Fee Related CN101155442B (zh) | 2006-09-26 | 2007-09-25 | 校准微机电话筒 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8036401B2 (zh) |
EP (1) | EP1906704B1 (zh) |
KR (1) | KR101413271B1 (zh) |
CN (1) | CN101155442B (zh) |
AT (1) | ATE550886T1 (zh) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102611980A (zh) * | 2012-01-13 | 2012-07-25 | 瑞声声学科技(深圳)有限公司 | 一种硅麦克风的灵敏度调整系统及调整方法 |
CN103052015A (zh) * | 2012-12-06 | 2013-04-17 | 山东共达电声股份有限公司 | 一种实现传声器灵敏度一致的方法及一种可调增益传声器 |
CN103051990A (zh) * | 2012-12-25 | 2013-04-17 | 苏州恒听电子有限公司 | 自适应送话器 |
CN103209379A (zh) * | 2012-01-16 | 2013-07-17 | 上海耐普微电子有限公司 | 一种单线可编程的mems麦克风及其编程方法和系统 |
CN103373696A (zh) * | 2012-04-23 | 2013-10-30 | 英飞凌科技股份有限公司 | 封装的mems器件和对封装的mems器件进行校准的方法 |
CN104053111A (zh) * | 2013-03-15 | 2014-09-17 | 英飞凌科技股份有限公司 | 用于确定电容式感测设备的灵敏度的装置和方法 |
CN104581605A (zh) * | 2013-10-22 | 2015-04-29 | 英飞凌科技股份有限公司 | 用于换能器的自动校准的系统和方法 |
CN104661155A (zh) * | 2011-11-28 | 2015-05-27 | 英飞凌科技股份有限公司 | 麦克风 |
CN104780489A (zh) * | 2015-03-31 | 2015-07-15 | 歌尔声学股份有限公司 | 用于检测扬声器振动位移的结构和声电互转的双效装置 |
CN105101031A (zh) * | 2015-07-30 | 2015-11-25 | 北京卓锐微技术有限公司 | 麦克风的配置方法 |
CN105532020A (zh) * | 2013-07-03 | 2016-04-27 | 罗伯特·博世有限公司 | 具有内部参数校准的麦克风 |
CN105530570A (zh) * | 2014-10-20 | 2016-04-27 | 现代自动车株式会社 | 麦克风的模拟信号处理电路 |
CN105657631A (zh) * | 2014-12-02 | 2016-06-08 | 英飞凌科技股份有限公司 | 通过电源接口的麦克风配置和校准 |
CN107249165A (zh) * | 2017-06-30 | 2017-10-13 | 歌尔股份有限公司 | 麦克风灵敏度调整系统及方法 |
CN107360528A (zh) * | 2017-06-07 | 2017-11-17 | 歌尔股份有限公司 | 一种基于麦克风阵列的校准方法及装置 |
CN109155890A (zh) * | 2016-04-29 | 2019-01-04 | 应美盛公司 | 微机电系统(mems)麦克风偏置电压 |
CN109842838A (zh) * | 2017-11-29 | 2019-06-04 | Tdk株式会社 | 用于调节麦克风的偏压的电路 |
CN110944269A (zh) * | 2011-08-18 | 2020-03-31 | 美商楼氏电子有限公司 | 用于mems装置的灵敏度调整装置和方法 |
Families Citing this family (64)
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EP1599067B1 (en) * | 2004-05-21 | 2013-05-01 | Epcos Pte Ltd | Detection and control of diaphragm collapse in condenser microphones |
US8542850B2 (en) * | 2007-09-12 | 2013-09-24 | Epcos Pte Ltd | Miniature microphone assembly with hydrophobic surface coating |
DE102007058951B4 (de) * | 2007-12-07 | 2020-03-26 | Snaptrack, Inc. | MEMS Package |
WO2009075280A1 (ja) * | 2007-12-13 | 2009-06-18 | Hitachi Medical Corporation | 超音波診断装置と超音波探触子 |
US8288971B2 (en) * | 2008-01-11 | 2012-10-16 | Broadcom Corporation | Integrated and programmable microphone bias generation |
DE112009001037B8 (de) * | 2008-05-05 | 2014-03-13 | Epcos Pte Ltd | Kondensatormikrophonbaugruppe, dc spannungsversorgung und verfahren zur erzeugung einer dc vorspannung |
GB2459864A (en) | 2008-05-07 | 2009-11-11 | Wolfson Microelectronics Plc | Filtered bias voltage for a MEMS capacitive transducer circuit |
US8326255B2 (en) | 2008-09-24 | 2012-12-04 | Sony Ericsson Mobile Communications Ab | Biasing arrangement, electronic apparatus, biasing method, and computer program |
ATE548725T1 (de) * | 2008-10-31 | 2012-03-15 | Austriamicrosystems Ag | Aktive rauschsteueranordnung, aktiver rauschsteuerungskopfhörer und kalibrierungsverfahren |
US8284958B2 (en) * | 2008-12-22 | 2012-10-09 | Nokia Corporation | Increased dynamic range microphone |
GB2466648B (en) | 2008-12-30 | 2011-09-28 | Wolfson Microelectronics Plc | Apparatus and method for biasing a transducer |
IT1396063B1 (it) * | 2009-03-31 | 2012-11-09 | St Microelectronics Rousset | Circuito di polarizzazione per un trasduttore acustico microelettromeccanico e relativo metodo di polarizzazione |
US8682002B2 (en) * | 2009-07-02 | 2014-03-25 | Conexant Systems, Inc. | Systems and methods for transducer calibration and tuning |
US8831246B2 (en) * | 2009-12-14 | 2014-09-09 | Invensense, Inc. | MEMS microphone with programmable sensitivity |
JP2011130604A (ja) * | 2009-12-18 | 2011-06-30 | Sanyo Electric Co Ltd | 充電回路、増幅回路 |
DE102010006132B4 (de) | 2010-01-29 | 2013-05-08 | Epcos Ag | Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC |
US8233643B1 (en) | 2010-03-23 | 2012-07-31 | Fiberplex Technologies, LLC | System and method for amplifying low level signals provided on electrical supply power |
CN102271300B (zh) * | 2010-06-04 | 2014-01-15 | 北京卓锐微技术有限公司 | 一种集成的麦克风偏置电压控制方法和偏置电压生成电路 |
US9204222B2 (en) * | 2011-02-25 | 2015-12-01 | Nokia Technologies Oy | Transducer apparatus with a tension actuator |
US9232302B2 (en) | 2011-05-31 | 2016-01-05 | Apple Inc. | Microphone assemblies with through-silicon vias |
US9668076B2 (en) * | 2011-06-21 | 2017-05-30 | Apple Inc. | Microphone headset failure detecting and reporting |
US8942389B2 (en) | 2011-08-10 | 2015-01-27 | Robert Bosch Gmbh | Trim method for CMOS-MEMS microphones |
US9236837B2 (en) | 2011-08-25 | 2016-01-12 | Infineon Technologies Ag | System and method for low distortion capacitive signal source amplifier |
KR101241588B1 (ko) * | 2011-11-30 | 2013-03-11 | 이오스 재팬, 인코포레이티드 | 콘덴서 마이크로폰 |
US8630429B2 (en) | 2011-12-16 | 2014-01-14 | Robert Bosch Gmbh | Preventing electrostatic pull-in in capacitive devices |
JP5926440B2 (ja) * | 2012-03-30 | 2016-05-25 | エプコス アクチエンゲゼルシャフトEpcos Ag | 自動バイアス制御を有するマイクロフォン |
US8638249B2 (en) | 2012-04-16 | 2014-01-28 | Infineon Technologies Ag | System and method for high input capacitive signal amplifier |
US9281744B2 (en) | 2012-04-30 | 2016-03-08 | Infineon Technologies Ag | System and method for a programmable voltage source |
JP6130493B2 (ja) * | 2012-05-09 | 2017-05-17 | エプコス アクチエンゲゼルシャフトEpcos Ag | Memsマイクロフォンアセンブリおよびmemsマイクロフォンアセンブリの作動方法 |
DE102012215239B4 (de) * | 2012-08-28 | 2023-12-21 | Robert Bosch Gmbh | Bauteil und Verfahren zum Prüfen eines solchen Bauteils |
US9214911B2 (en) | 2012-08-30 | 2015-12-15 | Infineon Technologies Ag | System and method for adjusting the sensitivity of a capacitive signal source |
US9400262B2 (en) * | 2012-09-14 | 2016-07-26 | Robert Bosch Gmbh | Testing for defective manufacturing of microphones and ultralow pressure sensors |
KR20150094730A (ko) | 2012-12-19 | 2015-08-19 | 노우레스 일렉트로닉스, 엘엘시 | 주파수 부스터를 구비한 디지털 마이크로폰 |
US20140264652A1 (en) * | 2013-03-15 | 2014-09-18 | Invensense, Inc. | Acoustic sensor with integrated programmable electronic interface |
US9306449B2 (en) | 2013-03-15 | 2016-04-05 | Robert Bosch Gmbh | Adjustable biasing circuits for MEMS capacitive microphones |
ITTO20130313A1 (it) * | 2013-04-18 | 2014-10-19 | St Microelectronics Srl | Struttura di rilevamento micromeccanica perfezionata per un trasduttore acustico mems e relativo procedimento di fabbricazione |
GB2513406B (en) | 2013-04-26 | 2016-01-20 | Cirrus Logic Int Semiconductor Ltd | Signal processing for MEMS capacitive transducers |
DE102013108464B4 (de) | 2013-08-06 | 2020-06-25 | Tdk Corporation | Verfahren zur Herstellung eines mikroelektromechanischen Wandlers |
US20150110312A1 (en) * | 2013-10-22 | 2015-04-23 | Starkey Laboratories, Inc. | Input stage headroom expansion for hearing assistance devices |
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US20150256916A1 (en) * | 2014-03-04 | 2015-09-10 | Knowles Electronics, Llc | Programmable Acoustic Device And Method For Programming The Same |
US9414168B2 (en) * | 2014-03-27 | 2016-08-09 | Starkey Laboratories, Inc. | Magnetometer in hearing aid |
DE102014104773B3 (de) * | 2014-04-03 | 2015-06-18 | Epcos Ag | Elektrisches Bauelement, insbesondere Mikrofon mit nachjustierbarer Empfindlichkeit und Verfahren zum Justieren |
CN104717596A (zh) * | 2015-03-23 | 2015-06-17 | 惠州Tcl移动通信有限公司 | 麦克风音频测试系统以及测试方法 |
US10158943B2 (en) * | 2016-02-01 | 2018-12-18 | Knowles Electronics, Llc | Apparatus and method to bias MEMS motors |
DE102016104742A1 (de) | 2016-03-15 | 2017-09-21 | Tdk Corporation | Verfahren zum Kalibrieren eines Mikrofons und Mikrofon |
DE102016105904B4 (de) | 2016-03-31 | 2019-10-10 | Tdk Corporation | MEMS-Mikrofon und Verfahren zur Selbstkalibrierung des MEMS-Mikrofons |
DE102016105923A1 (de) | 2016-03-31 | 2017-10-05 | Tdk Corporation | MEMS-Mikrofon und Verfahren zum Betrieb |
EP3324649A1 (en) * | 2016-11-18 | 2018-05-23 | Sonion Nederland B.V. | A transducer with a high sensitivity |
US20180145643A1 (en) | 2016-11-18 | 2018-05-24 | Sonion Nederland B.V. | Circuit for providing a high and a low impedance and a system comprising the circuit |
EP3324538A1 (en) | 2016-11-18 | 2018-05-23 | Sonion Nederland B.V. | A sensing circuit comprising an amplifying circuit |
US10327072B2 (en) | 2016-11-18 | 2019-06-18 | Sonion Nederland B.V. | Phase correcting system and a phase correctable transducer system |
KR102591814B1 (ko) * | 2016-12-13 | 2023-10-23 | 삼성전자주식회사 | 전자 장치의 음향 신호 처리 방법 및 그 전자 장치 |
EP3379204B1 (en) * | 2017-03-22 | 2021-02-17 | Knowles Electronics, LLC | Arrangement to calibrate a capacitive sensor interface |
GB2561023B (en) * | 2017-03-31 | 2021-08-11 | Cirrus Logic Int Semiconductor Ltd | Transducer apparatus and methods |
KR102087644B1 (ko) * | 2018-12-04 | 2020-04-20 | 지엔에스티 주식회사 | 마이크로폰소자 제조방법 및 이를 이용한 마이크로폰소자의 세팅장치 |
US11637546B2 (en) | 2018-12-14 | 2023-04-25 | Synaptics Incorporated | Pulse density modulation systems and methods |
DE102018132486A1 (de) * | 2018-12-17 | 2020-06-18 | Sennheiser Electronic Gmbh & Co. Kg | Mikrofonkapsel, Mikrofonanordnung mit mehreren Mikrofonkapseln und Verfahren zum Kalibrieren eines Mikrofonarrays |
US12091313B2 (en) | 2019-08-26 | 2024-09-17 | The Research Foundation For The State University Of New York | Electrodynamically levitated actuator |
US11641558B2 (en) * | 2020-08-27 | 2023-05-02 | Cirrus Logic, Inc. | Apparatus and methods for detecting a microphone condition |
US11889252B2 (en) * | 2021-05-11 | 2024-01-30 | Knowles Electronics, Llc | Method and apparatus for balancing detection sensitivity in producing a differential signal |
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CN113905308B (zh) * | 2021-08-05 | 2023-06-06 | 钰太芯微电子科技(上海)有限公司 | 在线修调的mems麦克风及电子设备 |
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EP1599067A2 (en) * | 2004-05-21 | 2005-11-23 | Sonion A/S | Detection and control of diaphragm collapse in condenser microphones |
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-
2007
- 2007-09-05 EP EP07115704A patent/EP1906704B1/en active Active
- 2007-09-05 AT AT07115704T patent/ATE550886T1/de active
- 2007-09-20 KR KR1020070095921A patent/KR101413271B1/ko not_active IP Right Cessation
- 2007-09-25 US US11/903,905 patent/US8036401B2/en active Active
- 2007-09-25 CN CN2007101612081A patent/CN101155442B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2001020948A2 (en) * | 1999-09-13 | 2001-03-22 | Carnegie Mellon University | Mems digital-to-acoustic transducer with error cancellation |
CN1419795A (zh) * | 2000-06-30 | 2003-05-21 | 皇家菲利浦电子有限公司 | 校准麦克风的设备和方法 |
EP1599067A2 (en) * | 2004-05-21 | 2005-11-23 | Sonion A/S | Detection and control of diaphragm collapse in condenser microphones |
Cited By (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110944269A (zh) * | 2011-08-18 | 2020-03-31 | 美商楼氏电子有限公司 | 用于mems装置的灵敏度调整装置和方法 |
CN104661155A (zh) * | 2011-11-28 | 2015-05-27 | 英飞凌科技股份有限公司 | 麦克风 |
CN104661155B (zh) * | 2011-11-28 | 2018-01-26 | 英飞凌科技股份有限公司 | 麦克风 |
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KR101413271B1 (ko) | 2014-06-27 |
EP1906704B1 (en) | 2012-03-21 |
CN101155442B (zh) | 2013-06-19 |
EP1906704A1 (en) | 2008-04-02 |
KR20080028291A (ko) | 2008-03-31 |
US8036401B2 (en) | 2011-10-11 |
ATE550886T1 (de) | 2012-04-15 |
US20080075306A1 (en) | 2008-03-27 |
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