JP5071058B2 - 圧電振動片 - Google Patents

圧電振動片 Download PDF

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Publication number
JP5071058B2
JP5071058B2 JP2007289313A JP2007289313A JP5071058B2 JP 5071058 B2 JP5071058 B2 JP 5071058B2 JP 2007289313 A JP2007289313 A JP 2007289313A JP 2007289313 A JP2007289313 A JP 2007289313A JP 5071058 B2 JP5071058 B2 JP 5071058B2
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Japan
Prior art keywords
vibrating
vibrating arm
arm
piezoelectric
thin film
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JP2007289313A
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English (en)
Japanese (ja)
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JP2009118217A (ja
JP2009118217A5 (enExample
Inventor
誠 古畑
司 舩坂
隆 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007289313A priority Critical patent/JP5071058B2/ja
Publication of JP2009118217A publication Critical patent/JP2009118217A/ja
Publication of JP2009118217A5 publication Critical patent/JP2009118217A5/ja
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007289313A 2007-11-07 2007-11-07 圧電振動片 Active JP5071058B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007289313A JP5071058B2 (ja) 2007-11-07 2007-11-07 圧電振動片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007289313A JP5071058B2 (ja) 2007-11-07 2007-11-07 圧電振動片

Publications (3)

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JP2009118217A JP2009118217A (ja) 2009-05-28
JP2009118217A5 JP2009118217A5 (enExample) 2010-11-18
JP5071058B2 true JP5071058B2 (ja) 2012-11-14

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JP2007289313A Active JP5071058B2 (ja) 2007-11-07 2007-11-07 圧電振動片

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JP (1) JP5071058B2 (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108141196A (zh) * 2015-11-24 2018-06-08 株式会社村田制作所 谐振装置及其制造方法
US10659004B2 (en) 2015-04-27 2020-05-19 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10673403B2 (en) 2015-04-28 2020-06-02 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10715103B2 (en) 2015-12-21 2020-07-14 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10790800B2 (en) 2015-04-27 2020-09-29 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10812046B2 (en) 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size
US10879448B2 (en) 2015-10-13 2020-12-29 Murata Manufacturing Co., Ltd. Resonator and resonator device
US11296675B2 (en) 2016-05-10 2022-04-05 Murata Manufacturing Co., Ltd. Resonator and resonance device

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
JP5482250B2 (ja) * 2010-02-02 2014-05-07 セイコーエプソン株式会社 振動体および振動デバイス
JP2011199453A (ja) * 2010-03-18 2011-10-06 Seiko Epson Corp 振動体および振動デバイス
JP5622173B2 (ja) * 2010-07-29 2014-11-12 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
CN102629861A (zh) 2011-02-02 2012-08-08 精工爱普生株式会社 振动片、振子、振荡器以及电子设备
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
JP6886646B2 (ja) * 2017-05-25 2021-06-16 株式会社村田製作所 共振子及び共振装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838015A (ja) * 1981-08-28 1983-03-05 Citizen Watch Co Ltd 圧電振動子
JPS58150317A (ja) * 1982-03-02 1983-09-07 Citizen Watch Co Ltd 長さたて振動子
JPH085382A (ja) * 1994-06-23 1996-01-12 Nippondenso Co Ltd 角速度センサ
JP3553418B2 (ja) * 1999-05-25 2004-08-11 シャープ株式会社 振動型ジャイロスコープ、振動型ジャイロスコープの形成方法および調整方法
JP2001196891A (ja) * 2000-01-07 2001-07-19 Citizen Watch Co Ltd 振動子
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP3975927B2 (ja) * 2003-01-30 2007-09-12 セイコーエプソン株式会社 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4440682B2 (ja) * 2004-03-25 2010-03-24 シチズンホールディングス株式会社 振動ジャイロ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10659004B2 (en) 2015-04-27 2020-05-19 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10790800B2 (en) 2015-04-27 2020-09-29 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10673403B2 (en) 2015-04-28 2020-06-02 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10879448B2 (en) 2015-10-13 2020-12-29 Murata Manufacturing Co., Ltd. Resonator and resonator device
CN108141196A (zh) * 2015-11-24 2018-06-08 株式会社村田制作所 谐振装置及其制造方法
US10374569B2 (en) 2015-11-24 2019-08-06 Murata Manufacturing Co., Ltd. Resonance device and manufacturing method therefor
US10715103B2 (en) 2015-12-21 2020-07-14 Murata Manufacturing Co., Ltd. Resonator and resonance device
US11296675B2 (en) 2016-05-10 2022-04-05 Murata Manufacturing Co., Ltd. Resonator and resonance device
US10812046B2 (en) 2018-02-07 2020-10-20 Murata Manufacturing Co., Ltd. Micromechanical resonator having reduced size

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JP2009118217A (ja) 2009-05-28

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