JP5053336B2 - 集積化された光学的ヘッド装置および関連する方法 - Google Patents
集積化された光学的ヘッド装置および関連する方法 Download PDFInfo
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- JP5053336B2 JP5053336B2 JP2009164638A JP2009164638A JP5053336B2 JP 5053336 B2 JP5053336 B2 JP 5053336B2 JP 2009164638 A JP2009164638 A JP 2009164638A JP 2009164638 A JP2009164638 A JP 2009164638A JP 5053336 B2 JP5053336 B2 JP 5053336B2
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
- G02B6/4231—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment with intermediate elements, e.g. rods and balls, between the elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/4232—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using the surface tension of fluid solder to align the elements, e.g. solder bump techniques
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/123—Integrated head arrangements, e.g. with source and detectors mounted on the same substrate
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1353—Diffractive elements, e.g. holograms or gratings
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/22—Apparatus or processes for the manufacture of optical heads, e.g. assembly
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12102—Lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
- G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4238—Soldering
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4239—Adhesive bonding; Encapsulation with polymer material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Optical Head (AREA)
- Semiconductor Lasers (AREA)
- Light Receiving Elements (AREA)
- Led Device Packages (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Description
Claims (8)
- 記録媒体上の光学的トラックを検出する複数の集積化された光学装置を製造する方法であって
第1および第2の表面を含む第1の透明ウェーハを提供するステップと、
光源および複数の光検出器を第1の透明ウェーハの第1の表面上に配置するステップと、
光源から第1の基板を介して伝播した光より複数の光束を形成する回折光学部品を、第1の透明ウェーハ上の第2の表面上に形成するステップと、
複数のマイクロレンズを有する第2のウェーハを提供するステップと、
複数の光束のそれぞれが対象物上の複数の隣接するスポット上に集光し反射した後、対応するマイクロレンズを通って対応する各光検出部品で検出されるように、第2のウェーハを第1のウェーハに位置合わせするステップと、
位置合わせされた第1および第2のウェーハを一体に接着するステップと、
各光学装置が少なくとも2つのマイクロレンズを有するように、第1および第2のウェーハをダイ切断して、複数の集積化された光学装置を形成するステップとを有することを特徴とする方法。 - 請求項1に記載の方法であって、
第2のウェーハを第1のウェーハに位置合わせする前記ステップは、
第1のウェーハ表面とこれに対向する第2のウェーハ表面との間に、機械的整合部材を形成するサブステップと、
機械的整合部材が互いに係合するように、第1および第2のウェーハを相対的に配置するサブステップとを有することを特徴とする方法。 - 請求項1に記載の方法であって、
第2のウェーハを第1のウェーハに位置合わせする前記ステップは、第1および第2のウェーハ上に位置合わせ用印を形成するサブステップを有することを特徴とする方法。 - 請求項1に記載の方法であって、
光検出器を第1のウェーハに位置合わせするステップをさらに有し、このステップは、
第1のウェーハ表面上に複数の第1のコンタクトパッドを形成するサブステップと、
光検出器上に複数の第2のコンタクトパッドを形成するサブステップと、
光検出器を第1のウェーハに位置合わせするために、複数の第1および第2のコンタクトパッドの間に半田を形成するサブステップとを有することを特徴とする方法。 - 請求項4に記載の方法であって、
複数の第1および第2のコンタクトパッドを形成するステップは、フォトリソグラフィ技術を用いることを特徴とする方法。 - 請求項1に記載の方法であって、
光源を第1のウェーハに位置合わせするステップをさらに有し、このステップは、
第1のウェーハ表面と光検出器との間に、機械的整合部材を形成するサブステップと、
機械的整合部材が互いに係合するように、第1のウェーハと光検出器とを相対的に配置するサブステップとを有することを特徴とする方法。 - 請求項1に記載の方法であって、
複数の光学部品を第1のウェーハ上に形成するステップをさらに有し、
各光学部品は、第1のウェーハ上においてそれぞれの光検出器の光路上に位置合わせされることを特徴とする方法。 - 記録媒体上の光学的トラックを検出する光学装置であって、
第1および第2の表面を有する第1の基板と、
第1の基板の第1の表面上に配置された光源と、
第1の基板の第2の表面上に配置され、光源から第1の基板を介して伝播した光より複数の光束を形成する回折光学部品と、
互いに隣接する複数のマイクロレンズを有する第2の基板と、
第1の基板の第1の表面上に配置された複数の光検出器とを備え、
複数の光束のそれぞれが対象物上の複数の隣接するスポット上に集光し反射した後、対応するマイクロレンズを通って対応する各光検出部品で検出されることを特徴とする光学装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/727,837 | 1996-09-27 | ||
US08/727,837 US5771218A (en) | 1996-09-27 | 1996-09-27 | Passively aligned integrated optical head including light source, detector, and optical element and methods of forming same |
Related Parent Applications (1)
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JP10515930A Division JP2001501351A (ja) | 1996-09-27 | 1997-09-26 | 集積化された光学的ヘッド装置および関連する方法 |
Publications (2)
Publication Number | Publication Date |
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JP2009238365A JP2009238365A (ja) | 2009-10-15 |
JP5053336B2 true JP5053336B2 (ja) | 2012-10-17 |
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Application Number | Title | Priority Date | Filing Date |
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JP10515930A Ceased JP2001501351A (ja) | 1996-09-27 | 1997-09-26 | 集積化された光学的ヘッド装置および関連する方法 |
JP2009164638A Expired - Fee Related JP5053336B2 (ja) | 1996-09-27 | 2009-07-13 | 集積化された光学的ヘッド装置および関連する方法 |
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JP10515930A Ceased JP2001501351A (ja) | 1996-09-27 | 1997-09-26 | 集積化された光学的ヘッド装置および関連する方法 |
Country Status (7)
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US (2) | US5771218A (ja) |
EP (1) | EP0928481B1 (ja) |
JP (2) | JP2001501351A (ja) |
AT (1) | ATE203620T1 (ja) |
AU (1) | AU4738497A (ja) |
DE (1) | DE69705848T2 (ja) |
WO (1) | WO1998013825A2 (ja) |
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-
1996
- 1996-09-27 US US08/727,837 patent/US5771218A/en not_active Expired - Lifetime
-
1997
- 1997-09-26 EP EP97909876A patent/EP0928481B1/en not_active Expired - Lifetime
- 1997-09-26 JP JP10515930A patent/JP2001501351A/ja not_active Ceased
- 1997-09-26 AT AT97909876T patent/ATE203620T1/de not_active IP Right Cessation
- 1997-09-26 WO PCT/US1997/017279 patent/WO1998013825A2/en active IP Right Grant
- 1997-09-26 AU AU47384/97A patent/AU4738497A/en not_active Abandoned
- 1997-09-26 DE DE69705848T patent/DE69705848T2/de not_active Expired - Fee Related
- 1997-12-19 US US08/994,205 patent/US5872762A/en not_active Expired - Lifetime
-
2009
- 2009-07-13 JP JP2009164638A patent/JP5053336B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO1998013825A3 (en) | 1998-08-06 |
US5771218A (en) | 1998-06-23 |
DE69705848T2 (de) | 2002-04-04 |
US5872762A (en) | 1999-02-16 |
WO1998013825A2 (en) | 1998-04-02 |
EP0928481A2 (en) | 1999-07-14 |
ATE203620T1 (de) | 2001-08-15 |
JP2001501351A (ja) | 2001-01-30 |
JP2009238365A (ja) | 2009-10-15 |
AU4738497A (en) | 1998-04-17 |
DE69705848D1 (de) | 2001-08-30 |
EP0928481B1 (en) | 2001-07-25 |
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