JP5030348B2 - 自発光装置 - Google Patents
自発光装置 Download PDFInfo
- Publication number
- JP5030348B2 JP5030348B2 JP2001298724A JP2001298724A JP5030348B2 JP 5030348 B2 JP5030348 B2 JP 5030348B2 JP 2001298724 A JP2001298724 A JP 2001298724A JP 2001298724 A JP2001298724 A JP 2001298724A JP 5030348 B2 JP5030348 B2 JP 5030348B2
- Authority
- JP
- Japan
- Prior art keywords
- tft
- memory
- source
- pixel
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000034 method Methods 0.000 description 84
- 239000010410 layer Substances 0.000 description 83
- 238000010586 diagram Methods 0.000 description 30
- 239000012535 impurity Substances 0.000 description 30
- 239000000463 material Substances 0.000 description 23
- 239000004065 semiconductor Substances 0.000 description 19
- 238000005530 etching Methods 0.000 description 18
- 101150096886 sft-1 gene Proteins 0.000 description 18
- 239000003990 capacitor Substances 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 101710163092 D-lysergyl-peptide-synthetase subunit 1 Proteins 0.000 description 12
- 102100028902 Hermansky-Pudlak syndrome 1 protein Human genes 0.000 description 12
- 101000838926 Homo sapiens Hermansky-Pudlak syndrome 1 protein Proteins 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 9
- 241000287181 Sturnus vulgaris Species 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- 239000000460 chlorine Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 230000001413 cellular effect Effects 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- 238000005499 laser crystallization Methods 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 241001270131 Agaricus moelleri Species 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000005407 aluminoborosilicate glass Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229960000956 coumarin Drugs 0.000 description 1
- 235000001671 coumarin Nutrition 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0857—Static memory circuit, e.g. flip-flop
Landscapes
- Electroluminescent Light Sources (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Control Of El Displays (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001298724A JP5030348B2 (ja) | 2000-10-02 | 2001-09-28 | 自発光装置 |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000302447 | 2000-10-02 | ||
| JP2000302447 | 2000-10-02 | ||
| JP2000-323453 | 2000-10-24 | ||
| JP2000323453 | 2000-10-24 | ||
| JP2000-302447 | 2000-10-24 | ||
| JP2000323453 | 2000-10-24 | ||
| JP2001298724A JP5030348B2 (ja) | 2000-10-02 | 2001-09-28 | 自発光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002202755A JP2002202755A (ja) | 2002-07-19 |
| JP2002202755A5 JP2002202755A5 (enExample) | 2008-10-30 |
| JP5030348B2 true JP5030348B2 (ja) | 2012-09-19 |
Family
ID=27344830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001298724A Expired - Fee Related JP5030348B2 (ja) | 2000-10-02 | 2001-09-28 | 自発光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5030348B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW536689B (en) | 2001-01-18 | 2003-06-11 | Sharp Kk | Display, portable device, and substrate |
| JP3767737B2 (ja) | 2001-10-25 | 2006-04-19 | シャープ株式会社 | 表示素子およびその階調駆動方法 |
| JP3800404B2 (ja) | 2001-12-19 | 2006-07-26 | 株式会社日立製作所 | 画像表示装置 |
| JP2004151155A (ja) * | 2002-10-28 | 2004-05-27 | Toshiba Matsushita Display Technology Co Ltd | 表示装置 |
| CN1331347C (zh) | 2002-07-12 | 2007-08-08 | 东芝松下显示技术有限公司 | 显示装置 |
| JP2004139042A (ja) * | 2002-09-24 | 2004-05-13 | Seiko Epson Corp | 電子回路、電気光学装置、電気光学装置の駆動方法及び電子機器 |
| JP2004139043A (ja) * | 2002-09-24 | 2004-05-13 | Seiko Epson Corp | 電子回路、電気光学装置、電気光学装置の駆動方法及び電子機器 |
| JP5094087B2 (ja) * | 2005-10-21 | 2012-12-12 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US20070090385A1 (en) | 2005-10-21 | 2007-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| EP1806724A3 (en) | 2006-01-07 | 2009-10-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, display device and electronic device |
| JP4994022B2 (ja) * | 2006-01-07 | 2012-08-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP6558420B2 (ja) * | 2017-09-27 | 2019-08-14 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP6669178B2 (ja) * | 2018-01-30 | 2020-03-18 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05289635A (ja) * | 1992-04-14 | 1993-11-05 | Casio Comput Co Ltd | 液晶表示装置 |
| JP3102666B2 (ja) * | 1993-06-28 | 2000-10-23 | シャープ株式会社 | 画像表示装置 |
| JP2903984B2 (ja) * | 1993-12-17 | 1999-06-14 | 株式会社富士通ゼネラル | ディスプレイ装置の駆動方法 |
| JPH08194205A (ja) * | 1995-01-18 | 1996-07-30 | Toshiba Corp | アクティブマトリックス型表示装置 |
| JP4114216B2 (ja) * | 1997-05-29 | 2008-07-09 | カシオ計算機株式会社 | 表示装置及びその駆動方法 |
| JP2001222024A (ja) * | 2000-02-08 | 2001-08-17 | Matsushita Electric Ind Co Ltd | 液晶表示装置とその駆動方法 |
-
2001
- 2001-09-28 JP JP2001298724A patent/JP5030348B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002202755A (ja) | 2002-07-19 |
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