JP5022533B2 - 高いｓｐ３含有率をもつ磁気ディスク上に、炭素保護フィルムをスパッタリングする方法 - Google Patents

高いｓｐ３含有率をもつ磁気ディスク上に、炭素保護フィルムをスパッタリングする方法 Download PDF

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Publication number
JP5022533B2
JP5022533B2 JP2000122444A JP2000122444A JP5022533B2 JP 5022533 B2 JP5022533 B2 JP 5022533B2 JP 2000122444 A JP2000122444 A JP 2000122444A JP 2000122444 A JP2000122444 A JP 2000122444A JP 5022533 B2 JP5022533 B2 JP 5022533B2
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Prior art keywords
carbon
voltage
film
negative
sputtering
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Expired - Fee Related
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JP2000122444A
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Japanese (ja)
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JP2000331336A (ja
JP2000331336A5 (enExample
Inventor
ホン リュー ウェン
ペン ガン
ヤマシタ ツトム
チェン ツー
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WD Media LLC
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Komag Inc
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Carbon And Carbon Compounds (AREA)
JP2000122444A 1999-04-22 2000-04-24 高いｓｐ３含有率をもつ磁気ディスク上に、炭素保護フィルムをスパッタリングする方法 Expired - Fee Related JP5022533B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/298,107 US6086730A (en) 1999-04-22 1999-04-22 Method of sputtering a carbon protective film on a magnetic disk with high sp3 content
US09/298107 1999-04-22

Publications (3)

Publication Number Publication Date
JP2000331336A JP2000331336A (ja) 2000-11-30
JP2000331336A5 JP2000331336A5 (enExample) 2007-06-07
JP5022533B2 true JP5022533B2 (ja) 2012-09-12

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JP2000122444A Expired - Fee Related JP5022533B2 (ja) 1999-04-22 2000-04-24 高いｓｐ３含有率をもつ磁気ディスク上に、炭素保護フィルムをスパッタリングする方法

Country Status (7)

Country Link
US (1) US6086730A (enExample)
EP (1) EP1046726B1 (enExample)
JP (1) JP5022533B2 (enExample)
DE (1) DE60042533D1 (enExample)
MY (1) MY124998A (enExample)
SG (1) SG100616A1 (enExample)
TW (1) TW570991B (enExample)

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JP3192109B2 (ja) * 1997-08-07 2001-07-23 株式会社半導体エネルギー研究所 電気用部材
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EP1046726A3 (en) 2003-07-23
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EP1046726B1 (en) 2009-07-15
DE60042533D1 (de) 2009-08-27
US6086730A (en) 2000-07-11
TW570991B (en) 2004-01-11
MY124998A (en) 2006-07-31

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