JP2000331336A5 - - Google Patents

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Publication number
JP2000331336A5
JP2000331336A5 JP2000122444A JP2000122444A JP2000331336A5 JP 2000331336 A5 JP2000331336 A5 JP 2000331336A5 JP 2000122444 A JP2000122444 A JP 2000122444A JP 2000122444 A JP2000122444 A JP 2000122444A JP 2000331336 A5 JP2000331336 A5 JP 2000331336A5
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potential
target
pulse
power supply
value
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JP2000331336A (ja
JP5022533B2 (ja
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Priority claimed from US09/298,107 external-priority patent/US6086730A/en
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Publication of JP5022533B2 publication Critical patent/JP5022533B2/ja
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JP2000122444A 1999-04-22 2000-04-24 高いｓｐ３含有率をもつ磁気ディスク上に、炭素保護フィルムをスパッタリングする方法 Expired - Fee Related JP5022533B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/298,107 US6086730A (en) 1999-04-22 1999-04-22 Method of sputtering a carbon protective film on a magnetic disk with high sp3 content
US09/298107 1999-04-22

Publications (3)

Publication Number Publication Date
JP2000331336A JP2000331336A (ja) 2000-11-30
JP2000331336A5 true JP2000331336A5 (enExample) 2007-06-07
JP5022533B2 JP5022533B2 (ja) 2012-09-12

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JP2000122444A Expired - Fee Related JP5022533B2 (ja) 1999-04-22 2000-04-24 高いｓｐ３含有率をもつ磁気ディスク上に、炭素保護フィルムをスパッタリングする方法

Country Status (7)

Country Link
US (1) US6086730A (enExample)
EP (1) EP1046726B1 (enExample)
JP (1) JP5022533B2 (enExample)
DE (1) DE60042533D1 (enExample)
MY (1) MY124998A (enExample)
SG (1) SG100616A1 (enExample)
TW (1) TW570991B (enExample)

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