JP4978220B2 - 圧電振動子及びその製造方法 - Google Patents
圧電振動子及びその製造方法 Download PDFInfo
- Publication number
- JP4978220B2 JP4978220B2 JP2007025629A JP2007025629A JP4978220B2 JP 4978220 B2 JP4978220 B2 JP 4978220B2 JP 2007025629 A JP2007025629 A JP 2007025629A JP 2007025629 A JP2007025629 A JP 2007025629A JP 4978220 B2 JP4978220 B2 JP 4978220B2
- Authority
- JP
- Japan
- Prior art keywords
- frame
- piezoelectric vibrator
- lid
- transparent material
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000012780 transparent material Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 238000005304 joining Methods 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 230000005284 excitation Effects 0.000 description 25
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 10
- 238000003466 welding Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000000605 extraction Methods 0.000 description 6
- 235000014676 Phragmites communis Nutrition 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007025629A JP4978220B2 (ja) | 2007-02-05 | 2007-02-05 | 圧電振動子及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007025629A JP4978220B2 (ja) | 2007-02-05 | 2007-02-05 | 圧電振動子及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008193401A JP2008193401A (ja) | 2008-08-21 |
| JP2008193401A5 JP2008193401A5 (cg-RX-API-DMAC10.html) | 2010-03-11 |
| JP4978220B2 true JP4978220B2 (ja) | 2012-07-18 |
Family
ID=39753059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007025629A Expired - Fee Related JP4978220B2 (ja) | 2007-02-05 | 2007-02-05 | 圧電振動子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4978220B2 (cg-RX-API-DMAC10.html) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5743628U (cg-RX-API-DMAC10.html) * | 1980-08-26 | 1982-03-10 | ||
| JPS57106184A (en) * | 1980-12-24 | 1982-07-01 | Nec Home Electronics Ltd | Manufacture of airtight window |
| JPS6310546A (ja) * | 1986-07-01 | 1988-01-18 | Nec Corp | 半導体装置 |
| JPH0362951A (ja) * | 1989-07-31 | 1991-03-19 | Nippon Dempa Kogyo Co Ltd | 電子部品の表面実装型容器 |
| JPH03220752A (ja) * | 1990-01-26 | 1991-09-27 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
| JP4114149B2 (ja) * | 2003-10-22 | 2008-07-09 | セイコーエプソン株式会社 | 圧電デバイスとその製造方法ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP4292575B2 (ja) * | 2003-11-18 | 2009-07-08 | セイコーエプソン株式会社 | 圧電デバイスおよび蓋体の製造方法 |
| JP4714485B2 (ja) * | 2005-03-03 | 2011-06-29 | パナソニック株式会社 | 窓ガラス付き蓋体の製造方法 |
-
2007
- 2007-02-05 JP JP2007025629A patent/JP4978220B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008193401A (ja) | 2008-08-21 |
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