JP4976922B2 - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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Publication number
JP4976922B2
JP4976922B2 JP2007141492A JP2007141492A JP4976922B2 JP 4976922 B2 JP4976922 B2 JP 4976922B2 JP 2007141492 A JP2007141492 A JP 2007141492A JP 2007141492 A JP2007141492 A JP 2007141492A JP 4976922 B2 JP4976922 B2 JP 4976922B2
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JP
Japan
Prior art keywords
substrate
support
magnetic body
end surface
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007141492A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008300389A (ja
Inventor
信一郎 水口
肇 石田
政昭 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP2007141492A priority Critical patent/JP4976922B2/ja
Priority to TW97114611A priority patent/TWI414475B/zh
Priority to CN2008101088599A priority patent/CN101315524B/zh
Publication of JP2008300389A publication Critical patent/JP2008300389A/ja
Application granted granted Critical
Publication of JP4976922B2 publication Critical patent/JP4976922B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Manipulator (AREA)
JP2007141492A 2007-05-29 2007-05-29 基板搬送装置 Expired - Fee Related JP4976922B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007141492A JP4976922B2 (ja) 2007-05-29 2007-05-29 基板搬送装置
TW97114611A TWI414475B (zh) 2007-05-29 2008-04-22 Substrate handling device
CN2008101088599A CN101315524B (zh) 2007-05-29 2008-05-29 基板搬运装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007141492A JP4976922B2 (ja) 2007-05-29 2007-05-29 基板搬送装置

Publications (2)

Publication Number Publication Date
JP2008300389A JP2008300389A (ja) 2008-12-11
JP4976922B2 true JP4976922B2 (ja) 2012-07-18

Family

ID=40106567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007141492A Expired - Fee Related JP4976922B2 (ja) 2007-05-29 2007-05-29 基板搬送装置

Country Status (3)

Country Link
JP (1) JP4976922B2 (zh)
CN (1) CN101315524B (zh)
TW (1) TWI414475B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014084228A1 (ja) * 2012-11-30 2014-06-05 株式会社ニコン 吸引装置、搬入方法、搬送システム及び露光装置、並びにデバイス製造方法
CN109078863B (zh) * 2018-07-27 2024-04-16 苏州精濑光电有限公司 一种光学检测设备
CN114615816B (zh) * 2022-04-12 2022-12-23 苏州天准科技股份有限公司 板材曝光设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2818074B2 (ja) * 1992-05-22 1998-10-30 大日本スクリーン製造株式会社 近接露光装置のプリアライメント装置
JPH07147315A (ja) * 1993-11-26 1995-06-06 Nikon Corp 基板搬送装置
JP3414491B2 (ja) * 1994-05-12 2003-06-09 オリンパス光学工業株式会社 基板保持部材及びこれを用いた基板外観検査装置
JP3563851B2 (ja) * 1995-12-05 2004-09-08 大日本スクリーン製造株式会社 基板搬送装置
JP2002313884A (ja) * 2001-04-10 2002-10-25 Jeol Ltd 板状体の位置のアライメント機構
JP4234964B2 (ja) * 2002-09-10 2009-03-04 株式会社オーク製作所 露光装置
JP4664142B2 (ja) * 2005-07-21 2011-04-06 住友重機械工業株式会社 ステージ装置
JP4653588B2 (ja) * 2005-08-12 2011-03-16 株式会社オーク製作所 露光装置および露光方法

Also Published As

Publication number Publication date
CN101315524A (zh) 2008-12-03
CN101315524B (zh) 2012-07-04
TWI414475B (zh) 2013-11-11
JP2008300389A (ja) 2008-12-11
TW200846267A (en) 2008-12-01

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