JP4974384B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP4974384B2 JP4974384B2 JP2008228822A JP2008228822A JP4974384B2 JP 4974384 B2 JP4974384 B2 JP 4974384B2 JP 2008228822 A JP2008228822 A JP 2008228822A JP 2008228822 A JP2008228822 A JP 2008228822A JP 4974384 B2 JP4974384 B2 JP 4974384B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric constant
- groove
- low dielectric
- film
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims description 115
- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 238000007789 sealing Methods 0.000 claims description 35
- 230000001681 protective effect Effects 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 24
- 229910000679 solder Inorganic materials 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 17
- 230000001070 adhesive effect Effects 0.000 claims description 17
- 239000011347 resin Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 238000000227 grinding Methods 0.000 claims description 8
- 230000009477 glass transition Effects 0.000 claims description 5
- 239000003566 sealing material Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 182
- 238000002161 passivation Methods 0.000 description 31
- 239000000758 substrate Substances 0.000 description 30
- 229910052751 metal Inorganic materials 0.000 description 21
- 239000002184 metal Substances 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 238000007747 plating Methods 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 239000010953 base metal Substances 0.000 description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 239000010949 copper Substances 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910018557 Si O Inorganic materials 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920003209 poly(hydridosilsesquioxane) Polymers 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- -1 polysiloxane Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008228822A JP4974384B2 (ja) | 2008-09-05 | 2008-09-05 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008228822A JP4974384B2 (ja) | 2008-09-05 | 2008-09-05 | 半導体装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010062465A JP2010062465A (ja) | 2010-03-18 |
JP2010062465A5 JP2010062465A5 (hu) | 2011-05-19 |
JP4974384B2 true JP4974384B2 (ja) | 2012-07-11 |
Family
ID=42188920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008228822A Active JP4974384B2 (ja) | 2008-09-05 | 2008-09-05 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4974384B2 (hu) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012009816A (ja) * | 2010-05-28 | 2012-01-12 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
JP2012023259A (ja) * | 2010-07-16 | 2012-02-02 | Casio Comput Co Ltd | 半導体装置及びその製造方法 |
JP6062254B2 (ja) * | 2013-01-15 | 2017-01-18 | 株式会社ディスコ | ウエーハの加工方法 |
JP6491055B2 (ja) * | 2015-06-30 | 2019-03-27 | 株式会社ディスコ | ウエーハの加工方法 |
JP2017092125A (ja) * | 2015-11-05 | 2017-05-25 | 株式会社ディスコ | ウエーハの加工方法 |
US11699663B2 (en) | 2020-04-27 | 2023-07-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Passivation scheme design for wafer singulation |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3784776B2 (ja) * | 2003-03-10 | 2006-06-14 | 沖電気工業株式会社 | 半導体装置の製造方法 |
JP2005044901A (ja) * | 2003-07-24 | 2005-02-17 | Fuji Electric Holdings Co Ltd | 半導体ウェハ分割方法 |
JP2006156863A (ja) * | 2004-12-01 | 2006-06-15 | Hitachi Ltd | 半導体装置及びその製造方法 |
JP2007161784A (ja) * | 2005-12-09 | 2007-06-28 | Fujifilm Corp | 絶縁膜、化合物、膜形成用組成物及び電子デバイス |
JP4193897B2 (ja) * | 2006-05-19 | 2008-12-10 | カシオ計算機株式会社 | 半導体装置およびその製造方法 |
JP4913563B2 (ja) * | 2006-11-22 | 2012-04-11 | 株式会社テラミクロス | 半導体装置の製造方法 |
-
2008
- 2008-09-05 JP JP2008228822A patent/JP4974384B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010062465A (ja) | 2010-03-18 |
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