JP4970971B2 - 締結具の製造方法 - Google Patents

締結具の製造方法 Download PDF

Info

Publication number
JP4970971B2
JP4970971B2 JP2007024661A JP2007024661A JP4970971B2 JP 4970971 B2 JP4970971 B2 JP 4970971B2 JP 2007024661 A JP2007024661 A JP 2007024661A JP 2007024661 A JP2007024661 A JP 2007024661A JP 4970971 B2 JP4970971 B2 JP 4970971B2
Authority
JP
Japan
Prior art keywords
bolt
vacuum
polyimide
heating
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007024661A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008190600A (ja
JP2008190600A5 (https=
Inventor
文昭 石榑
さかえ 角谷
三沢　　俊司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2007024661A priority Critical patent/JP4970971B2/ja
Publication of JP2008190600A publication Critical patent/JP2008190600A/ja
Publication of JP2008190600A5 publication Critical patent/JP2008190600A5/ja
Application granted granted Critical
Publication of JP4970971B2 publication Critical patent/JP4970971B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Physical Vapour Deposition (AREA)
JP2007024661A 2007-02-02 2007-02-02 締結具の製造方法 Active JP4970971B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007024661A JP4970971B2 (ja) 2007-02-02 2007-02-02 締結具の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007024661A JP4970971B2 (ja) 2007-02-02 2007-02-02 締結具の製造方法

Publications (3)

Publication Number Publication Date
JP2008190600A JP2008190600A (ja) 2008-08-21
JP2008190600A5 JP2008190600A5 (https=) 2009-09-10
JP4970971B2 true JP4970971B2 (ja) 2012-07-11

Family

ID=39750886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007024661A Active JP4970971B2 (ja) 2007-02-02 2007-02-02 締結具の製造方法

Country Status (1)

Country Link
JP (1) JP4970971B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5223692B2 (ja) * 2009-01-22 2013-06-26 株式会社リコー 光走査装置及び画像形成装置
JP5541619B2 (ja) * 2009-09-30 2014-07-09 株式会社アルバック かじり試験装置及びかじり試験方法
JP6533042B2 (ja) * 2014-08-11 2019-06-19 株式会社梅田製作所 雄ネジ部材、雌ネジ部材、締結部材
CN104451584B (zh) * 2014-12-08 2017-02-22 西安赛福斯材料防护有限责任公司 一种pvd制备螺纹防锁死涂层的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178463A (ja) * 1984-09-25 1986-04-22 Ulvac Corp 合成樹脂被膜の形成方法
JP2517969B2 (ja) * 1987-06-12 1996-07-24 東亞合成株式会社 ゆるみ止めねじ
JP3330045B2 (ja) * 1996-03-01 2002-09-30 日産自動車株式会社 ネジ部品の表面処理方法
JP3585633B2 (ja) * 1996-03-19 2004-11-04 株式会社アルバック 蒸着重合装置
JP3567613B2 (ja) * 1996-05-28 2004-09-22 松下電工株式会社 蒸着重合装置
JP3609912B2 (ja) * 1997-01-24 2005-01-12 日産自動車株式会社 ボルトの被膜形成方法
JPH10340823A (ja) * 1997-06-05 1998-12-22 Sumitomo Special Metals Co Ltd 耐塩水性にすぐれたＲ−Ｆｅ−Ｂ系永久磁石の製造方法
JPH117213A (ja) * 1997-06-17 1999-01-12 Ricoh Co Ltd 定着ローラ及びその製造方法
JPH11141525A (ja) * 1997-11-12 1999-05-25 Topura Co Ltd ネジ部品の表面処理方法
JP3085529B2 (ja) * 1998-05-19 2000-09-11 宇部興産株式会社 ポリイミドフィルムに金属薄膜を形成する方法
JP2002331201A (ja) * 2001-05-10 2002-11-19 Tokyo Rika Kikai Kk 遠心エバポレータ
JP2005195094A (ja) * 2004-01-07 2005-07-21 Nsk Ltd 組立部品
JP2005305442A (ja) * 2005-07-21 2005-11-04 Nitto Denko Corp 脱気装置及び脱気方法

Also Published As

Publication number Publication date
JP2008190600A (ja) 2008-08-21

Similar Documents

Publication Publication Date Title
CN102905814B (zh) 用于垫圈生产的方法和设备以及垫圈
JP4970971B2 (ja) 締結具の製造方法
KR101680864B1 (ko) 내식성 금속 산화물층이 도입된 철계 기재의 세라믹 코팅방법
JP2018529016A (ja) ガスタービンのコンプレッサー構成部品用の輪郭追従保護層
CN106463360A (zh) 用于薄膜沉积设备的内部材料及其制造方法
EP4039845B1 (en) Corrosion-resistant member
TWI681867B (zh) 抗蝕性之金屬與Ｍｏ或Ｍｏ合金經擴散接合之背板、以及具備該背板之濺鍍靶-背板組件
JP5001672B2 (ja) 締結具とその製造方法
JP5072095B2 (ja) 締結具及びその製造方法
JP4216497B2 (ja) チタン合金ねじ部品の製造方法とそれを用いたチタン合金ねじ部品
JP5865483B2 (ja) 締結部材および真空装置
US3071491A (en) Titanium coating process
JP5752640B2 (ja) 成膜方法
CN102345100B (zh) 铝铈金属靶材及利用该铝铈金属靶材制作铝铈膜的方法
CN108315690A (zh) 一种超薄金属产品喷砂表面耐手汗腐蚀处理工艺
JP3823197B2 (ja) 摺動部品およびその製造方法
CN105420466A (zh) 一种在热处理中保护螺孔的方法
JP2013142461A (ja) 耐食性ねじ及びその製造方法
JP4189413B2 (ja) チタン合金ねじ部品の製造方法を用いたチタン合金ねじ部品
JP2005314732A (ja) 防着治具の製造方法
CN116065118B (zh) 一种钛合金离子渗氧的方法
JPH08260127A (ja) ねじ部品
JP7066868B2 (ja) 反応室コンポーネント、作製方法、及び反応室
CN110246738A (zh) 反应腔室部件结构及其制备方法、反应腔室
JP2001181819A (ja) ネジ締結部材の表面処理方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090729

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090729

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101104

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110510

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111220

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120403

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120405

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150413

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4970971

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250