JP4964023B2 - 塗布装置 - Google Patents

塗布装置 Download PDF

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Publication number
JP4964023B2
JP4964023B2 JP2007135779A JP2007135779A JP4964023B2 JP 4964023 B2 JP4964023 B2 JP 4964023B2 JP 2007135779 A JP2007135779 A JP 2007135779A JP 2007135779 A JP2007135779 A JP 2007135779A JP 4964023 B2 JP4964023 B2 JP 4964023B2
Authority
JP
Japan
Prior art keywords
inclined surface
liquid
organic
coating
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007135779A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008289960A (ja
Inventor
秀一 相良
幹雄 増市
幸宏 高村
理史 川越
毅 松家
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2007135779A priority Critical patent/JP4964023B2/ja
Priority to TW096149871A priority patent/TW200911388A/zh
Priority to KR1020080001704A priority patent/KR100908546B1/ko
Priority to CN2008100049296A priority patent/CN101310870B/zh
Publication of JP2008289960A publication Critical patent/JP2008289960A/ja
Application granted granted Critical
Publication of JP4964023B2 publication Critical patent/JP4964023B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12044—OLED

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
JP2007135779A 2007-05-22 2007-05-22 塗布装置 Expired - Fee Related JP4964023B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007135779A JP4964023B2 (ja) 2007-05-22 2007-05-22 塗布装置
TW096149871A TW200911388A (en) 2007-05-22 2007-12-25 Coating device
KR1020080001704A KR100908546B1 (ko) 2007-05-22 2008-01-07 도포 장치
CN2008100049296A CN101310870B (zh) 2007-05-22 2008-01-29 涂敷装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007135779A JP4964023B2 (ja) 2007-05-22 2007-05-22 塗布装置

Publications (2)

Publication Number Publication Date
JP2008289960A JP2008289960A (ja) 2008-12-04
JP4964023B2 true JP4964023B2 (ja) 2012-06-27

Family

ID=40099807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007135779A Expired - Fee Related JP4964023B2 (ja) 2007-05-22 2007-05-22 塗布装置

Country Status (4)

Country Link
JP (1) JP4964023B2 (zh)
KR (1) KR100908546B1 (zh)
CN (1) CN101310870B (zh)
TW (1) TW200911388A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5342282B2 (ja) * 2009-03-17 2013-11-13 大日本スクリーン製造株式会社 塗布装置
JP5267519B2 (ja) * 2009-09-04 2013-08-21 カシオ計算機株式会社 吐出部、塗布装置及び塗布方法
KR101085214B1 (ko) 2011-06-29 2011-11-21 (주)디오 흐름코팅용 코팅액 회수대 및 이를 포함하는 흐름코팅 시스템
KR101597044B1 (ko) * 2013-09-06 2016-02-23 가부시키가이샤 스크린 홀딩스 도포 장치 및 도포 방법
JP6178235B2 (ja) * 2013-12-27 2017-08-09 株式会社Ｓｃｒｅｅｎホールディングス パターン形成方法、パターン印刷方法、パターン形成システムおよびパターン印刷システム
JP6410535B2 (ja) * 2014-09-10 2018-10-24 芝浦メカトロニクス株式会社 液受け装置及び塗布装置
CN104941869B (zh) * 2015-07-03 2018-03-02 深圳市华星光电技术有限公司 涂布装置
CN105082151A (zh) * 2015-08-31 2015-11-25 江苏新光数控技术有限公司 多方向带彩色功能的喷涂工业机器人

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS518069Y2 (zh) * 1971-09-23 1976-03-03
JP2000005666A (ja) 1998-06-24 2000-01-11 Matsushita Electric Works Ltd スプレー塗装装置と塗装方法
JP4256583B2 (ja) * 1999-12-17 2009-04-22 東京エレクトロン株式会社 塗布膜形成装置
JP2002361155A (ja) 2001-06-01 2002-12-17 Tokyo Electron Ltd 塗布処理装置及びその方法
JP3844670B2 (ja) * 2001-09-14 2006-11-15 東京エレクトロン株式会社 塗布膜形成装置
JP4391147B2 (ja) 2003-07-25 2009-12-24 大日本印刷株式会社 液体回収機能付きスピンコーター
JP2005271458A (ja) * 2004-03-25 2005-10-06 Ricoh Co Ltd 液体吐出装置の維持装置及び画像形成装置
KR100625318B1 (ko) * 2004-10-08 2006-09-18 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
JP4573645B2 (ja) * 2004-12-27 2010-11-04 大日本スクリーン製造株式会社 塗布装置
JP2006192862A (ja) * 2005-01-17 2006-07-27 Seiko Epson Corp 液体噴射装置及びそのフラッシング方法

Also Published As

Publication number Publication date
KR100908546B1 (ko) 2009-07-20
CN101310870B (zh) 2012-11-21
KR20080102943A (ko) 2008-11-26
TW200911388A (en) 2009-03-16
CN101310870A (zh) 2008-11-26
JP2008289960A (ja) 2008-12-04
TWI335244B (zh) 2011-01-01

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