JP4964023B2 - Coating device - Google Patents

Description

  The present invention relates to a coating apparatus, and more specifically, to a coating apparatus that applies and applies a coating liquid in a liquid column state from a nozzle onto a substrate placed on a stage.

  2. Description of the Related Art Conventionally, there has been developed a coating apparatus that applies a coating liquid onto a substrate like a single stroke while discharging the coating liquid from a nozzle. For example, in an apparatus for manufacturing an organic EL display device, an organic EL material is nozzle-applied in a predetermined pattern shape on the main surface of a substrate such as a glass substrate placed on a stage. In such a coating apparatus, when the coating liquid is applied to the substrate, the coating liquid is applied to the outside of the substrate in order to collect the coating liquid applied to the outside of the substrate or the unnecessary coating liquid when the nozzle moves out of the substrate. A liquid receiving part is provided (see, for example, Patent Document 1).

  As shown in FIG. 13, the coating apparatus includes a stage 101 on which a glass substrate P that receives coating of red, green, and blue organic EL materials is placed. Then, the manufacturing apparatus includes a plurality of (three in the example of FIG. 13) nozzles 102 to 104 that discharge any one of red, green, and blue organic EL materials, and an organic that is discharged outside the substrate P. And a liquid receiving part 105 for collecting the EL material. As the red, green, and blue organic EL materials, for example, organic EL materials having a viscosity that can flow so as to spread in grooves formed in stripes on the substrate P are used. Then, the organic EL material is ejected from the nozzles 102 to 104 into a straight bar shape (hereinafter referred to as a liquid column state) at a predetermined pressure and flow rate, and is applied onto the substrate P. In addition, the liquid receiving part 105 is arrange | positioned by opening the upper surface at the both sides outer side of the board | substrate P (only one is shown in FIG. 13).

  The nozzles 102 to 104 are supported by a holding member (not shown) in a state where they are arranged obliquely with respect to the nozzle reciprocation direction, which will be described later, and the holding member and the stage 101 are supported by each driving mechanism of the coating apparatus. Operate. The drive mechanism moves the nozzles 102 to 104 in a direction crossing the substrate P in a predetermined direction (the direction of the stripe-shaped grooves formed on the substrate P, the direction of the arrow F in the figure; hereinafter referred to as the nozzle reciprocating direction). The supporting member to be supported is reciprocated. At this time, the drive mechanism traverses the substrate P from the upper space of the liquid receiving portion 105 disposed on the one side outer side of the substrate P, and the liquid receiving portion 105 disposed on the other side outer side of the substrate P. The holding member is reciprocated to the upper space. The drive mechanism moves the stage 101 by a predetermined pitch in a predetermined direction (perpendicular to the paper surface) perpendicular to the nozzle reciprocating direction when the holding member is disposed in the upper space of the liquid receiving unit 105. Simultaneously with the operation of the driving mechanism, the organic EL material is ejected from the nozzles 102 to 103 in a liquid column state, so that the red, green, and blue organic EL materials are red, green, and blue for each stripe-shaped groove. A so-called stripe arrangement arranged in order is formed on the substrate P.

  However, when the liquid column state coating liquid is discharged to the liquid receiving portion 105 provided outside the substrate P, there are the following problems. As the distance between the nozzles 102 to 104 and the liquid receiving portion 105 (h1 + h2 shown in FIG. 13) is increased, the coating liquid in the liquid column state is turned into droplets by surface tension. For example, the distance h1 from the tip of the nozzles 102 to 104 to the upper surface of the substrate P can be set to a distance that can guarantee the liquid column state to about 0.25 to 0.50 mm, but the distance h1 + h2 is 20 mm or more. In this case, it is difficult to prevent droplet formation only by adjusting the discharge pressure and flow rate. Further, when the nozzles 102 to 104 move at a high speed in the F direction in the figure, the coating liquid formed into droplets according to the speed is further split into a fine mist. Then, the space behind the nozzles 102 to 104 moving at high speed becomes negative pressure, and the coating liquid in the form of mist rises to the vicinity of the nozzles 102 to 104. As a result, the mist-like coating liquid generated outside the substrate P falls on the substrate P and adheres to the upper surface, which causes a coating failure.

  Further, a method is conceivable in which the coating liquid is applied to a member such as a flat plate in the liquid column state before the liquid column state coating liquid is turned into droplets. However, the coating liquid remains in a state where the coating liquid is accumulated (liquid pool) on the member to which the coating liquid is applied in a liquid column state. If the liquid column state coating liquid continues to be applied to the liquid pool accumulated on the member, a mist-shaped coating liquid is generated near the portion where the liquid column state coating liquid enters the liquid pool. End up.

On the other hand, as shown in FIG. 14, the coating apparatus described in Patent Document 1 is provided with a liquid receiving portion 106 in which a slit S is formed. The slit S is formed on the upper surface of the liquid receiving part 106 in parallel with the nozzle reciprocating direction. Further, the slit S is formed at a position deviating from the stage 101 in the nozzle reciprocating direction and at a position vertically downward from the tip portions of the nozzles 102 to 104. The upper surface of the liquid receiving unit 106 in which the slit S is formed is provided at substantially the same height as the upper surface of the stage 101 (that is, the distance h2 is a small value about the thickness of the substrate P). The liquid column state coating liquid discharged from the nozzle through the opening is collected by the liquid receiving unit 106 to prevent the mist-like coating liquid from leaking out of the liquid receiving unit 106.
JP 2006-181410 A

  However, the coating apparatus generally uses a plurality of nozzles from the standpoint of manufacturing efficiency. Further, as described above, the plurality of nozzles are supported in a state where they are arranged obliquely with respect to the nozzle reciprocation direction, and reciprocate in the nozzle reciprocation direction, so that the coating liquid from all the nozzles passes therethrough. Therefore, it is necessary to make the opening width of the slit S wide. Therefore, in the coating apparatus disclosed in Patent Document 1, it is necessary to form the slit S with a large opening area, and as a result, the mist-like coating liquid from the opening of the slit S is outside the liquid receiving unit 106. It is thought that it leaks out.

  Therefore, an object of the present invention is to provide a coating apparatus in which a coating liquid discharged outside the substrate does not affect the substrate when a liquid column state coating solution is applied to the substrate.

In order to achieve the above object, the present invention has the following features.
1st invention is a coating device which discharges the coating liquid of the liquid column state used as the straight-bar shape to the perpendicular downward direction on a board | substrate, and apply | coats the said coating liquid. The coating apparatus includes a nozzle, a stage, a nozzle moving mechanism, and a liquid receiving unit. The nozzle discharges the coating liquid in a liquid column state from its tip. The stage places the substrate on its upper surface. The nozzle moving mechanism reciprocates the nozzle in a direction crossing the stage surface in the space on the stage. The liquid receiving portion receives the coating liquid discharged from the nozzle to the outside when the nozzle is moved while discharging the coating liquid from the nozzle to a position off the stage along the direction in which the nozzle moving mechanism traverses. . The liquid receiving part includes an inclined surface , suction means, and a partition member . The inclined surface extends in a direction that traverses from the tip of the nozzle disposed at a position off the stage to a position that is vertically downward, and is inclined with respect to a horizontal direction perpendicular to the transverse direction. . The suction means sucks the gas in the space near the position where the coating liquid is applied to the inclined surface. The partition member is fixed to a part of the upper space of the inclined surface in parallel to the inclined surface via a predetermined gap. The liquid receiving part collects the coating liquid discharged from the nozzle disposed at a position off the stage by applying it to the inclined surface in a liquid column state.

In a second aspect based on the first invention, the suction means, the coating solution on the inclined surface has at least one suction port for sucking the gas in the inclined surface headspace below the position where the coating wear.

In a third aspect based on the second invention, intake引口is disposed between the lower end and the partition member of the inclined surface.

In a fourth aspect based on the first invention, the suction means, the coating solution on the inclined surface sucks the gas in the space near the position of the coating wears down along the upper surface of the inclined surface.

In a fifth aspect based on the first aspect, the inclined surface has a position where the coating liquid is applied vertically below the nozzle side from the height at which the coating liquid discharged from the nozzle starts to split from the liquid column state. Arranged at the directional position.

In a sixth aspect based on the fifth aspect, the inclined surface is formed by one plane inclined in one direction with respect to the horizontal direction perpendicular to the transverse direction.

According to a seventh aspect, in the fifth aspect, the inclined surface is a valley shape including two planes that are inclined in both directions with respect to a horizontal direction perpendicular to the transverse direction.

In an eighth aspect based on the fifth aspect, the inclined surface is a mountain shape composed of two planes that are inclined in both directions with respect to a horizontal direction perpendicular to the transverse direction.

According to the first aspect of the present invention, the coating liquid discharged from the nozzle disposed at a position off the stage and in a liquid column state is all formed on the inclined surface of the liquid receiving portion before being formed into droplets by surface tension. Apply. And the coating liquid applied on the inclined surface is collected while flowing down in the inclined direction. Further, by sucking the portion where the coating liquid is applied to the inclined surface, it is possible to reliably prevent the coating liquid discharged to the liquid receiving portion from leaking to the outside. Further, by providing the partition member, the space sucked by the suction means becomes a narrow space sandwiched between the inclined surface and the partition member, and the space sucked by the suction means is further limited, so that the suction efficiency of the suction means is further increased. Can be improved. Therefore, the coating liquid does not remain in a state where the coating liquid is accumulated (liquid pool) on the inclined surface on which the coating liquid is applied in a liquid column state. In other words, the liquid column state coating liquid does not continue to be applied to the liquid pool accumulated on the inclined surface, and the liquid column state coating liquid is allowed to enter the liquid pool. Occurrence can be prevented. Accordingly, it is possible to prevent a coating failure without causing the coating liquid discharged to the outside of the substrate to rise and fall onto the substrate.

According to the second aspect of the invention, since the suction port is provided below the position where the coating liquid is applied to the inclined surface, the coating liquid is sucked along the direction of the coating liquid that is applied to the inclined surface and flows down. can do. Further, when a mist-like coating liquid is generated on the inclined surface, the coating liquid misted downward from the position where the coating liquid is applied can be efficiently sucked. Further, since the space sucked by the suction means is a space limited by the inclined surface, the suction efficiency is improved, and the unnecessary coating liquid can be recovered more efficiently.

According to the fourth aspect of the invention, since the suction is performed downward along the upper surface of the inclined surface, the coating liquid can be sucked along the direction of the coating liquid that is applied to the inclined surface and flows down. In addition, when a mist-like coating liquid is generated on the inclined surface, the coating liquid misted downward along the upper surface can be efficiently sucked. Furthermore, since the space sucked by the suction means is a space limited by the inclined surface, the suction efficiency is improved, and unnecessary coating liquid can be recovered more efficiently.

According to the fifth aspect of the invention, the coating liquid discharged from the nozzle disposed at a position off the stage and in a liquid column state is applied to the inclined surface before the division. Accordingly, it is possible to prevent the coating liquid from becoming a fine mist and falling on the substrate.

According to the sixth aspect, the coating liquid applied on the inclined surface constituted by one plane can be recovered while flowing down in the inclined direction.

According to the seventh aspect of the present invention, the coating solution applied on the inclined surface constituted by the valley shape can be collected while flowing down in the valley bottom direction.

According to the eighth aspect of the invention, the coating liquid applied on the inclined surface constituted by the mountain shape can be collected while flowing down in the mountain skirt direction.

  Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to the drawings. In order to make the description more specific, the following description will be given using an example in which the coating apparatus is applied to a coating apparatus that manufactures an organic EL display device that uses an organic EL material, a hole transport material, or the like as a coating liquid. . The said coating apparatus manufactures an organic EL display apparatus by apply | coating organic EL material, a hole transport material, etc. on the glass substrate mounted on the stage in a predetermined pattern shape. FIG. 1 is a plan view and a front view illustrating a schematic configuration of a main part of the coating apparatus 1. Note that the coating apparatus 1 uses a plurality of coating liquids such as an organic EL material and a hole transport material as described above, and the organic EL material will be described as a coating liquid as a representative thereof.

  In FIG. 1, the coating device 1 generally includes a substrate mounting device 2 and an organic EL coating mechanism 5. The organic EL coating mechanism 5 includes a nozzle moving mechanism 51, a nozzle unit 50, and liquid receivers 53L and 53R. The nozzle moving mechanism 51 has a guide member 511 extending in the X-axis direction in the figure, and moves the nozzle unit 50 in the X-axis direction in the figure along the guide member 511. The nozzle unit 50 holds a plurality of nozzles 52 (three nozzles 52a, 52b, and 52c in FIG. 1) that discharge organic EL materials of any one color of red, green, and blue in parallel. To do. To each of the nozzles 52a to 52c, an organic EL material of any one color of red, green, and blue is supplied from a supply unit (see FIG. 2). Thus, although the organic EL material of the same color is discharged from the plurality of nozzles 52, an example in which the red organic EL material is discharged from the three nozzles 52a to 52c will be used for specific description.

  The substrate mounting apparatus 2 includes a stage 21, a turning unit 22, a parallel movement table 23, a guide receiving unit 24, and a guide member 25. The stage 21 places a substrate P such as a glass substrate to be coated on the upper surface of the stage. The lower part of the stage 21 is supported by the turning unit 22, and the stage 21 is configured to be rotatable in the θ direction shown in the figure by the turning operation of the turning unit 22. In addition, a heating mechanism for preheating the substrate P coated with the organic EL material on the stage surface, a suction mechanism for the substrate P, a delivery pin mechanism, and the like are provided inside the stage 21.

  The guide member 25 extends in the Y-axis direction perpendicular to the X-axis direction and is fixed horizontally so as to pass under the organic EL coating mechanism 5. A guide receiving portion 24 that abuts on the guide member 25 and slides on the guide member 25 is fixed to the lower surface of the translation table 23. In addition, the swivel unit 22 is fixed on the upper surface of the translation table 23. Accordingly, the parallel movement table 23 can be moved in the Y-axis direction along the guide member 25 by receiving a driving force from, for example, a linear motor (not shown), and the stage 21 supported by the turning unit 22 can be moved. Horizontal movement is also possible.

  When the substrate P is placed on the stage 21 via the delivery pin mechanism, the substrate P is sucked and fixed, and the parallel movement table 23 moves to the lower side of the organic EL coating mechanism 5, the substrate P becomes red organic. This is the position where the application of the EL material is received from the nozzles 52a to 52c. Then, the control unit (see FIG. 2) controls the nozzle moving mechanism unit 51 to reciprocate the nozzle unit 50 in the X-axis direction, and moves the stage 21 by a predetermined pitch in the Y-axis direction for each linear movement. The parallel movement table 23 is controlled to discharge the organic EL material at a predetermined flow rate from the nozzles 52a to 52c. Further, at the discharge positions in the X-axis direction of the nozzles 52a to 52c, in both side spaces deviating from the substrate P placed on the stage 21, a liquid receiving portion 53L that receives the organic EL material discharged and discharged from the substrate P, and 53R is respectively fixed. The nozzle moving mechanism 51 is disposed outside the other side of the substrate P from the upper space of the liquid receiving portion 53 (for example, the liquid receiving portion 53L) disposed outside the one side of the substrate P across the substrate P. The nozzle unit 50 is reciprocated to the upper space of the liquid receiver 53 (for example, the liquid receiver 53R) provided. The translation table 23 moves the stage 21 by a predetermined pitch in a predetermined direction (Y-axis direction in the drawing) perpendicular to the nozzle reciprocating direction when the nozzle unit 50 is disposed in the upper space of the liquid receiving portion 53. Let Simultaneously with the operation of the nozzle moving mechanism 51 and the parallel moving table 23, the organic EL material is ejected from the nozzles 52a to 52c in a liquid column state, whereby the red organic EL material is formed in a stripe shape formed on the substrate P. A so-called stripe arrangement arranged for each groove is formed on the substrate P.

  Next, with reference to FIG. 2, the schematic configuration of the control function and the supply unit in the coating apparatus 1 will be described. FIG. 2 is a block diagram illustrating the control function and the supply unit of the coating apparatus 1.

  In FIG. 2, the coating apparatus 1 is provided with the control part 3, the 1st supply part 54a, the 2nd supply part 54b, and the 3rd supply part 54c other than the structure part mentioned above. The first to third supply parts 54a to 54c supply the red organic EL material to the nozzles 52a to 52c, respectively, via pipes.

  The first supply unit 54a includes an organic EL material supply source 541a, a pump 542a for taking out the organic EL material from the supply source 541a, and a flow meter 543a for detecting the flow rate of the organic EL material. The second supply unit 54b includes an organic EL material supply source 541b, a pump 542b for taking out the organic EL material from the supply source 541b, and a flow meter 543b for detecting the flow rate of the organic EL material. The third supply unit 54c includes an organic EL material supply source 541c, a pump 542c for taking out the organic EL material from the supply source 541c, and a flow meter 543c for detecting the flow rate of the organic EL material. And the control part 3 controls each operation | movement of the 1st-3rd supply parts 54a-54c, the turning part 22, the parallel movement table 23, and the nozzle movement mechanism part 51. FIG. Note that pipes made of PE (polyethylene), PP (polypropylene), Teflon (registered trademark), or the like are used for the respective pipes from the supply sources 541a to 541c to the nozzles 52a to 52c.

  The nozzle 52a has a filter part 521a for removing foreign substances in the organic EL material supplied from the first supply part 54a. The nozzle 52b has a filter part 521b for removing foreign substances in the organic EL material supplied from the second supply part 54b. The nozzle 52c has a filter unit 521c for removing foreign substances in the organic EL material supplied from the third supply unit 54c. In addition, since the nozzles 52a to 52c have the same structure, the reference numeral “52” is used for the description in the generic description.

  Here, on the surface of the substrate P to which the red organic EL material is applied, a plurality of stripe-shaped grooves corresponding to a predetermined pattern shape to which the organic EL material is to be applied are formed in parallel. . As the organic EL material, for example, an organic EL material having a viscosity enough to flow in a groove on the substrate P is used, and specifically, a polymer type organic EL material for each color is used. It is done. The nozzle unit 50 is rotatably supported around a predetermined support shaft, and can be adjusted around the support shaft by the control of the control unit 3 to adjust the coating pitch interval.

  Based on the position and direction of the substrate P placed on the stage 21, the control unit 3 adjusts the angle of the swivel unit 22 so that the direction of the groove formed in the substrate P becomes the X-axis direction, and the coating is performed. , That is, a coating start position at which coating is started at one end side of the groove formed in the substrate P is calculated. The application start position is an upper space of one liquid receiving portion 53. Then, the control unit 3 drives the parallel movement table 23 and the nozzle movement mechanism unit 51 as described above.

  At the application start position, the control unit 3 instructs the pumps 542a to 542c to start discharging the organic EL material from the nozzles 52a to 52c. At this time, according to the moving speed of the nozzles 52a to 52c, the control unit 3 makes the coating amount of the organic EL material uniform at each point of the striped groove and discharges the organic EL material in a liquid column state. The application amount is controlled, and flow rate information from the flow meters 543a to 543c is fed back and controlled. Then, the control unit 3 moves the nozzle unit 50 into the guide member 511 so that the organic EL material flows along the groove on the substrate P in order to flow the organic EL material into the groove on the substrate P. It is controlled to move along. By this operation, the red organic EL material discharged from the nozzles 52a to 52c in the liquid column state is poured into the respective grooves at the same time.

  When the control unit 3 is positioned on the other liquid receiving unit 53 fixed on the outside of the other end of the groove across the substrate P, the control unit 3 moves the organic EL material from the nozzles 52a to 52c. While the discharge is continued, the movement of the nozzle unit 50 by the nozzle movement mechanism 51 is stopped. By this one movement, the application of the organic EL material to the grooves for three rows is completed. Specifically, since the organic EL material of the same color is ejected from each of the nozzles 52a to 52c, the organic EL material is applied to a total of three rows of grooves, where one row of grooves is applied every three rows. .

  Next, the control unit 3 pitches the parallel movement table 23 by a predetermined distance (for example, 9 rows of grooves) in the positive direction of the Y axis, and can apply the organic EL material to the grooves to be applied next. Like that. When the control unit 3 moves the nozzle unit 50 from the upper space of the other liquid receiving unit 53 across the substrate P in the opposite direction and is positioned on the one liquid receiving unit 53, the organic material from the nozzles 52a to 52c. While the discharge of the EL material is continued, the movement of the nozzle unit 50 by the nozzle moving mechanism 51 is stopped. By this second movement, the application of the organic EL material to the next three rows of grooves is completed. By repeating such an operation, the red organic EL material is poured into the groove for applying red.

  Next, the liquid receiver 53 will be described with reference to FIGS. FIG. 3 is a perspective view showing the structure of the liquid receiving portion 53. FIG. 4 is a schematic side view of the liquid receiving portion 53 viewed from the direction D of FIG. FIG. 5 is a perspective view showing the positional relationship between the organic EL material discharged from the nozzles 52 a to 52 c and the liquid receiving portion 53. FIG. 6 is a perspective view showing a positional relationship with the liquid receiving portion 53 when the nozzles 52a to 52c move. The liquid receiving portions 53L and 53R (see FIG. 1) on both sides with respect to the stage 21 have the same structure with the stage 21 symmetrical, and FIGS. A liquid receiver 53 is shown.

  In FIG. 3, the liquid receiving portion 53 includes a lower receiving portion 531, an upper box portion 532, an upper plate member 533, an upper support member 534, and an in-box suction portion 536.

  The lower receiving portion 531 is connected to, for example, the nozzle moving mechanism portion 51 and fixed so that the positional relationship with the nozzle moving mechanism portion 51 is always fixed. The lower receiving portion 531 is provided at the lower portion of the upper box portion 532 on the stage 21 side, and when the nozzles 52a to 52c move between the substrate P and the upper box portion 532, the substrate P and the upper box portion 532 are provided. It is positioned to receive the organic EL material leaked from the gap. The organic EL material discharged into the upper box portion 532 flows down into the lower receiving portion 531 via a discharge line 535 (see FIG. 7) provided at the lower portion of the upper box 532. Further, the organic EL material discharged into the lower receiving portion 531 is collected in a drainage tank (not shown) through a flow path (not shown) flowing out from the lowest position. Further, a local exhaust part that sucks gas in the space near the side surface of the stage 21 may be provided inside the lower receiving part 531. Further, an upper support member 534 that supports the upper box portion 532 is fixed to the upper end surface of the lower step receiving portion 531.

  The upper box portion 532 is supported by the upper support member 534 and is fixed to the upper portion of the lower receiving portion 531. The upper box portion 532 has a box shape with an upper surface opened, and an upper plate member 533 is provided and closed so as to cover the upper surface. The upper plate member 533 is formed with a slit opening 533a whose longitudinal opening direction is the X-axis direction shown in the drawing. The upper plate member 533 is attached like a lid of the upper box portion 532 and is detachably fitted from the upper box portion 532. When the upper plate member 533 is attached to the upper box portion 532, the slit opening 533a functions as an opening between the internal space and the external space of the upper box portion 532.

  The upper surface of the upper plate member 533 is fixed so as to have substantially the same height as the upper surface of the stage 21 (see height d in FIG. 4). The side surfaces on the stage 21 side of the upper box portion 532 and the upper plate member 533 are fixedly formed by forming a predetermined gap (see the gap a in FIG. 4) in the vicinity of the stage 21. A substrate P (shown by a broken line in FIG. 3) is placed on the upper surface of the upper plate member 533 so that a part of the upper plate member 533 protrudes from the side surface of the stage 21 in the positive direction of the X-axis (see length b in FIG. 4). A part of which is overlapped (see overlap length c in FIG. 4). The internal structure of the upper box portion 532 will be described later.

  The upper box part 532 is provided with a suction port at the center of the side surface, and the suction part 536 in the box sucks gas or the like inside the upper box part 532 from the suction port. Then, the gas sucked from the inside of the upper box portion 532 (including the mist-like organic EL material generated inside the upper box portion 532) is sucked from the suction port by the suction portion 536 in the box, and the drain tank (FIG. (Not shown).

  In FIG. 4, the side surfaces on the stage 21 side of the upper box portion 532 and the upper plate member 533 are provided such that a gap a is formed with the side surface of the stage 21. The gap a is provided at a distance where the stage 21, the upper box portion 532, and the upper plate member 533 do not interfere with each other by the parallel movement operation of the stage 21 in the Y-axis direction shown in the drawing or the rotation operation of the turning portion 22, for example, 3 mm. It is. Further, the substrate P is placed so as to protrude from the end surface of the stage 21 by a length b on the liquid receiving portion 53 side. Since the length b is set so that the upper surface of the upper plate member 533 and the substrate P overlap each other by the length c, b = a + c, for example, the length b = 5 mm, and the overlap length c = 2 mm. It is. The upper surface of the upper plate member 533 is preferably provided at the same height as the upper surface of the stage 21 in order to prevent downward leakage from the end of the substrate P. However, as described above, the substrate placed on the stage 21 Since P moves in parallel and rotates, it is necessary to prevent interference between the lower surface of the substrate P and the upper surface of the upper plate member 533. For this reason, the upper surface of the upper plate member 533 is provided lower than the upper surface of the stage 21 by a height d, for example, height d = 0.5 to 3.0 mm.

  In addition, in order to prevent interference between the lower surface of the substrate P and the upper surface of the upper plate member 533, an example in which the upper surface of the upper plate member 533 is provided lower than the upper surface of the stage 21 by a height d has been described. When the effect is not expected, the upper surface of the upper plate member 533 may be provided at a height higher than the upper surface of the stage 21. If the upper surface of the upper plate member 533 is provided at least lower than the tip portions of the nozzles 52a to 52c, the liquid receiving portion 53 and the nozzles 52a to 52c can be prevented from interfering with each other.

  Next, the positional relationship between the nozzles 52a to 52c and the liquid receiving portion 53 will be described with reference to FIG. In addition, in FIG. 5, the nozzles 52a-52c, the liquid receiving part 53, and the board | substrate P are mainly shown, and the other site | part is abbreviate | omitted and shown. For the liquid receiving part 53, only the upper box part 532 and the upper plate member 533 are shown. As described above, when the organic EL material is applied to the substrate P, the nozzles 52 a to 52 c are arranged in the upper space of the liquid receiving portion 53 at the start and end of application, or at the time of turning back in the X-axis direction. At this time, the nozzles 52a to 52c discharge the organic EL material in a liquid column state from above the liquid receiving portion 53 toward the slit opening portion 533a.

  When the nozzles 52a to 52c move to the upper space of the liquid receiving portion 53, the liquid is so that the organic EL material discharged from the nozzles 52a to 52c is received inside the upper box portion 532 through the slit opening portion 533a. A receiving portion 53 is provided. That is, when the nozzles 52a to 52c go out of the substrate P in the X-axis direction, the slit openings 533a are formed so as to include all the positions immediately below the respective tip portions (discharge ports) of the nozzles 52a to 52c. Therefore, the moving direction (X-axis direction) of the nozzles 52a to 52c and the longitudinal formation direction (X-axis direction) of the slit opening 533a are parallel to each other, and the Z-axis negative direction (vertical direction) with respect to the tip ends of the nozzles 52a to 52c. ) Is formed with a slit opening 533a. Here, the nozzles 52a to 52c are arranged slightly shifted in the Y-axis direction in the figure in order to simultaneously apply the organic EL material to the three rows of grooves arranged in parallel in the X-axis direction. The slit opening 533a has a width through which all of the organic EL material discharged in a liquid column state from these nozzles 52a to 52c is passed.

  Further, as shown in FIG. 5, when the nozzles 52a to 52c are arranged in the upper space of the liquid receiving portion 53, the nozzles 52a to 52c eventually move at a high speed in the direction C shown in FIG. ). As shown in FIG. 6, when the nozzles 52 a to 52 c move from the upper space of the liquid receiving portion 53 in the direction C as shown, the organic EL material discharged from the nozzles 52 a to 52 c is discharged onto the substrate P. All of them pass through the slit opening 533a in a liquid column state and are collected in the upper box portion 532.

  Next, the internal structure of the upper box portion 532 will be described with reference to FIGS. 7 is a cross-sectional view of the upper box portion 532 when the cross section AA of FIG. 3 is viewed from the B direction. 8 shows a part of the upper box portion 532 and a part of the upper plate member 533 (specifically, a side surface on the Y-axis negative direction side, a side surface on the X-axis positive direction side, and the Y of the upper plate member 533). It is a perspective view of the liquid receiving part 53 which deleted the axial negative direction side member. FIG. 9 is a schematic diagram showing the positional relationship between the nozzles 52a to 52c and the inclined surface 537. As shown in FIG.

  7 and 8, the upper box portion 532 has an inclined surface 537 fixed therein. The inclined surface 537 is provided at a position below the slit opening 533a in the upper box portion 532, and extends in the X-axis direction in which the nozzle unit 50 reciprocates. The inclined surface 537 is inclined downward with respect to the horizontal direction (that is, the Y-axis positive direction or the Y-axis negative direction) perpendicular to the direction in which the nozzle unit 50 reciprocates. The inclined surface 537 is a plate-like member having a smooth surface, and is made of, for example, a stainless plate or a plate material whose surface is covered with a fluororesin. Note that the inclined surface 537 is not limited to a plate-like member, and may be constituted by one side of a solid member or a hollow member.

  Further, the lower end of the inclined surface 537 is joined to the side surface of the upper box portion 532 on the Y axis direction side. 7 and 8, since the inclined surface 537 is inclined toward the Y axis negative direction side, the lower end of the inclined surface 537 is joined to the side surface of the upper box portion 532 on the Y axis negative direction side. Yes. Further, both side portions of the inclined surface 537 are respectively joined to the side surface of the upper box portion 532 on the X axis direction side (see FIG. 8). A discharge line 535 is provided in the vicinity of the upper portion of the joint between the lower end of the inclined surface 537 and the side surface of the upper box portion 532, and the organic EL material that flows down along the inclined surface 537 passes through the discharge line 535 in the lower receiving portion 531. To flow down. The suction port of the in-box suction unit 536 that sucks the gas in the upper space of the inclined surface 537 is connected to the side surface of the upper box portion 532 below the position where the organic EL material is applied to the inclined surface 537. Specifically, the suction port of the suction unit 536 in the box is lower than the position where the organic EL material is applied, is higher than the position where the discharge line 535 is provided, and the upper box unit 532 communicated with the upper space of the inclined surface 537. Provided on the side. Therefore, the in-box suction portion 536 sucks the gas or the like in the upper space of the inclined surface 537 along the inclined surface 537 from the lower end side of the inclined surface 537 inside the upper box portion 532.

  Due to the structure of the upper box portion 532, the organic EL material (indicated by the coating liquids L1 to L3 in FIGS. 7 to 9) discharged from the nozzles 52a to 52c in the upper space of the liquid receiving portion 53 is a slit opening. All are applied to the inclined surface 537 via 533a. Then, as shown in FIG. 8, the organic EL material applied to the inclined surface 537 flows down in the inclined direction along the inclined surface 537 and flows down from the discharge line 535 into the lower stage receiving portion 531. Further, the in-box suction unit 536 generates an air flow that is sucked along the inclined surface 537, and generates a suction air flow in the vicinity of a portion to which the organic EL material discharged from the nozzles 52a to 52c is applied. Therefore, when a mist-like organic EL material is generated on the inclined surface 537, the mist-like organic EL material is sucked from the suction port of the suction part 536 in the box.

  Here, the inclined surface 537 is disposed above the height at which the organic EL material discharged from the nozzles 52a to 52c starts to split from the liquid column state in the upper space of the liquid receiving portion 53. The inclination angle α of the inclined surface 537 with respect to the horizontal direction is preferably as close to the vertical direction as possible in order to allow the coated organic EL material to flow down quickly. However, as shown in FIG. 9, since the nozzles 52 a to 52 c are arranged slightly shifted in the Y-axis direction so as to ensure a coating pitch interval, the distance between the tip of each of the nozzles 52 a to 52 c and the inclined surface 537. Are different. Therefore, the inclined surface 537 is formed of the organic EL material discharged from the nozzles 52a to 52c having the longest distance between the tip portions of the nozzles 52a to 52c and the inclined surface 537 (in the example of FIG. 9, the coating liquid discharged from the nozzle 52a). L1) is arranged to always apply in the liquid column state. Specifically, the inclination is such that the longest distance H1 between the tip of each of the nozzles 52a to 52c and the inclined surface 537 is less than a distance (for example, 20 mm) that can guarantee the liquid column state of the discharged organic EL material. A surface 537 is provided. Further, the nozzles 52a to 52c that are closest to the inclined surface 537 (the nozzle 52c in the example of FIG. 9) need to prevent interference with the inclined surface 537. In other words, the distance H2 between the tip of the nozzles 52a to 52c that is closest to the inclined surface 537 and the inclined surface 537 needs to be secured to some extent. In such a range that satisfies the conditions of the distances H1 and H2, the inclination angle α that is as close as possible to the vertical direction may be set. For example, the inclination angle α is set to 60 °.

  With the above-described configuration, the organic EL material discharged outside the substrate P passes through the slit opening 533a in a liquid column state, is applied to the inclined surface 537, and is collected in the upper box portion 532. Therefore, the organic EL material that has been ejected from the nozzles 52a to 52c and has been in a liquid column state is all applied to the inclined surface 537 before being formed into droplets by surface tension. Further, the organic EL material applied on the inclined surface 537 flows down in the inclined direction and flows down into the lower receiving portion 531. As described above, the organic EL material does not remain in a state where the organic EL material is accumulated (liquid pool) on the inclined surface 537 on which the organic EL material is applied in a liquid column state. That is, the liquid column state organic EL material is not further applied to the liquid pool accumulated on the inclined surface 537, and the liquid column state organic EL material is allowed to enter the liquid pool. Generation of organic EL materials can be prevented. Further, when mist-like organic EL material is generated on the inclined surface 537, the mist-like organic EL material is surely prevented from leaking outside the liquid receiving portion 53 because it is sucked by the in-box suction portion 536. can do.

  As described above, since the upper box portion 532 of the coating apparatus according to the present embodiment has the inclined surface 537 provided therein, the organic EL material discharged into the upper box portion 532 rises again to the outside. There is no. In addition, by sucking the portion where the organic EL material is applied to the inclined surface 537, it is possible to reliably prevent the mist-like organic EL material from leaking to the outside even when the mist-like organic EL material is generated in the upper box portion 532. . Here, since the internal space of the upper box portion 532 sucked by the in-box suction portion 536 is a space limited by the inclined surface 537, the suction efficiency is improved, and the mist-like organic EL material is more efficiently produced. to recover. Therefore, the organic EL material discharged to the outside of the substrate does not drop and adhere to the substrate P, and application failure can be prevented.

  In addition, although the example which uses one inclined surface which inclines below with respect to the horizontal direction perpendicular | vertical to the direction where the nozzle unit 50 reciprocates is used for the inclined surface 537 mentioned above, the inclined surface of another aspect is provided. It doesn't matter. Hereinafter, another example of the inclined surface will be described with reference to FIGS. 10 and 11. FIG. 10 is a cross-sectional view of the upper box portion 532 showing an example of the inclined surface 538 formed in a valley shape. FIG. 11 is a cross-sectional view of the upper box portion 532 showing an example of the inclined surface 539 formed in a mountain shape.

  In FIG. 10, the upper box portion 532 has a valley-shaped inclined surface 538 (one valley-shaped inclined surface is defined as 538a and the other inclined surface is defined as 538b) fixed therein. Like the inclined surface 537, the inclined surface 538 is provided at a position below the slit opening 533a in the upper box portion 532, and extends in the X-axis direction in which the nozzle unit 50 reciprocates. The inclined surface 538a is inclined downward with respect to one horizontal direction (the Y axis positive direction in FIG. 10) perpendicular to the direction in which the nozzle unit 50 reciprocates. In addition, the inclined surface 538b is inclined downward with respect to the other horizontal direction (the Y axis negative direction in FIG. 10) perpendicular to the direction in which the nozzle unit 50 reciprocates. A valley-shaped inclined surface 538 is formed by the pair of inclined surfaces 538a and 538b. The inclined surfaces 538a and 538b are both plate-like members having a smooth surface, and are made of, for example, a stainless plate or a plate material whose surface is coated with a fluororesin. Note that the inclined surfaces 538a and 538b are not limited to plate-like members, and may be configured by two side surfaces formed on a solid member or a hollow member, respectively.

  Further, the upper ends of the inclined surfaces 538a and 538b are respectively joined to the lower surface of the upper plate member 533 or the side surface on the Y-axis direction side of the upper box portion 532. Both side portions of the inclined surfaces 538a and 538b are respectively joined to the side surface of the upper box portion 532 on the X-axis direction side. A slit-shaped gap is formed between the lower ends of the inclined surfaces 538a and 538b (that is, the bottom of the valley), and the connection member is connected from the lower ends of the inclined surfaces 538a and 538b to the gas-liquid separation box 55. By this connection member, the slit-shaped gap formed at the lower ends of the inclined surfaces 538a and 538b and the gas-liquid separation box 55 are communicated. The suction port of the in-box suction part 536 is connected to the upper part of the gas-liquid separation box 55, and the discharge line 535 to the lower stage receiving part 531 is connected to the lower part of the gas-liquid separation box 55. Thus, the slit-like gap formed at the lower ends of the inclined surfaces 538a and 538b and the suction port of the in-box suction portion 536 are communicated with each other via the gas-liquid separation box 55 and the connection member. Therefore, the in-box suction portion 536 sucks the gas or the like in the upper space of the inclined surface 538 along the inclined surface 538 from the bottom side of the inclined surface 538 in the upper box portion 532.

  The organic EL material (coating liquids L1 to L3) discharged from the nozzles 52a to 52c in the upper space of the liquid receiving part 53 is all valleyd through the slit opening 533a by the structure of the upper box part 532 shown in FIG. It is applied to the inclined surface 538 of the mold. Then, as shown in FIG. 10, the organic EL material applied to the inclined surface 538 flows down along the inclined surface 538 toward the bottom of the valley, and the connection member, the gas-liquid separation box 55, and the discharge line 535 are connected to each other. And then flows down to the lower receiving portion 531. Further, the gas present in the space on the valley-shaped inclined surface 538 is sucked from the suction port of the in-box suction portion 536 through the connection member and the gas-liquid separation box 55. That is, the in-box suction section 536 generates an air flow that is sucked along the inclined surface 538, and generates a suction air current in the vicinity of a portion to which the organic EL material discharged from the nozzles 52a to 52c is applied. become.

  Here, the inclined surface 538 is also disposed above the height at which the organic EL material discharged from the nozzles 52a to 52c starts to split from the liquid column state in the upper space of the liquid receiving portion 53. The inclination angle of the inclined surface 538 with respect to the horizontal direction is preferably as close to the vertical direction as possible in order to allow the coated organic EL material to flow down quickly. However, similarly to the inclined surface 537, the inclined surface 538 is discharged from the nozzles 52a to 52c having the longest distance between the tip of each of the nozzles 52a to 52c and the inclined surface 538 while avoiding interference with the nozzles 52a to 52c. It is necessary to arrange so that the organic EL material thus applied is always applied in a liquid column state. Therefore, the inclined surface 538 is also provided at an inclination angle as close to the vertical direction as possible within a range that satisfies such a condition.

  In FIG. 11, the upper box portion 532 has a mountain-shaped inclined surface 539 (one mountain-shaped inclined surface as 539a and the other inclined surface as 539b) fixed therein. Like the inclined surfaces 537 and 538, the inclined surface 539 is provided at a position below the slit opening 533a in the upper box portion 532, and extends in the X-axis direction in which the nozzle unit 50 reciprocates. The inclined surface 539a is inclined downward with respect to one horizontal direction (the Y axis negative direction in FIG. 11) perpendicular to the direction in which the nozzle unit 50 reciprocates. Further, the inclined surface 539b is inclined downward with respect to the other horizontal direction (the Y axis positive direction in FIG. 11) perpendicular to the direction in which the nozzle unit 50 reciprocates. A mountain-shaped inclined surface 539 is formed by the pair of inclined surfaces 539a and 539b. For example, the inclined surfaces 539a and 539b are both configured by two side surfaces formed on a solid member having a smooth surface, and are configured by, for example, a stainless member or a member whose surface is coated with a fluororesin. Note that the inclined surfaces 539a and 539b are not limited to a solid member, and may be configured by two side surfaces formed on a member obtained by combining two plate-like members or a hollow member.

  Further, both side portions of the inclined surface 539 are respectively joined to the side surface of the upper box portion 532 on the X axis direction side. In addition, a gap is formed between the lower ends (that is, the crests) of the inclined surfaces 539a and 539b and the side surface of the upper box portion 532 on the Y axis direction side. Through the gap, in the internal space of the upper box portion 532, the upper space of the inclined surfaces 539a and 539b communicates with the lower space of the upper box portion 532. Then, the suction port of the in-box suction portion 536 is connected to the side surface (the side surface on the Y axis negative direction side in FIG. 11) of the upper box portion 532 positioned below the inclined surfaces 539a and 539b. Further, a discharge line 535 is connected to a side surface of the upper box portion 532 positioned below the inclined surfaces 539a and 539b. Accordingly, the in-box suction portion 536 sucks gas or the like in the lower space with respect to the mountain-shaped inclined surface 539 from the mountain bottom side of the inclined surface 539 inside the upper box portion 532. Further, the organic EL material that has flowed down from the inclined surfaces 539a and 539b to the bottom surface of the upper box portion 532 flows down from the discharge line 535 to the lower receiving portion 531.

  The organic EL material (coating liquids L1 to L3) discharged from the nozzles 52a to 52c in the upper space of the liquid receiving unit 53 is all piled up through the slit opening 533a by the structure of the upper box unit 532 shown in FIG. It is applied to the inclined surface 539 of the mold. Then, as shown in FIG. 11, the organic EL material applied to the inclined surface 539 flows down along the inclined surface 539 in the mountain skirt direction, and flows down from the discharge line 535 to the lower receiving portion 531. Further, when mist-like organic EL material is generated on the inclined surface 539, the mist-like organic EL material is drawn into the lower space of the upper box portion 532 and sucked from the suction port of the in-box suction portion 536.

  Here, the inclined surface 539 is also arranged above the height at which the organic EL material discharged from the nozzles 52a to 52c starts to split from the liquid column state in the upper space of the liquid receiving portion 53. The inclination angle of the inclined surface 539 with respect to the horizontal direction is preferably as close to the vertical direction as possible in order to allow the applied organic EL material to flow down quickly. However, similarly to the inclined surfaces 537 and 538, the inclined surface 539 avoids interference with the nozzles 52a to 52c, and the nozzles 52a to 52c having the longest distances between the tip portions of the nozzles 52a to 52c and the inclined surface 539 are the same. It is necessary to arrange so that the organic EL material discharged from is always applied in a liquid column state. Therefore, the inclined surface 539 is also provided at an inclination angle as close to the vertical direction as possible within a range satisfying such conditions.

  As described above, the inclined surface provided in the upper box portion 532 used in the present invention can be realized by various types of inclined surfaces such as one inclined surface, a valley-shaped inclined surface, and a mountain-shaped inclined surface. is there. Further, the inclined surface used in the present invention is not limited to one plane (inclined surface 537) or a combination of a plurality of planes (inclined surfaces 538 and 539) inclined with respect to the horizontal direction, and is inclined with respect to the horizontal direction. It may be composed of curved surfaces. For example, in an aspect configured by one plane like the inclined surface 537, the one plane may be configured by one convex or concave curved surface to form the inclined surface. Further, in an aspect configured by combining two flat surfaces in a valley shape like the inclined surface 538, the two flat surfaces may be configured by a single concave curved surface to form an inclined surface. Further, in an aspect configured by combining two flat surfaces in a mountain shape like the inclined surface 539, the two flat surfaces may be formed by a single convex curved surface to form an inclined surface.

  In addition, by providing the inclined surface 537 described above inside the upper box portion 532, the in-box suction portion 536 sucks a space limited by the inclined surface 537. Therefore, the upper step without providing the inclined surface 537 is provided. The suction efficiency is improved as compared with the suction of the space inside the box portion 532. However, by providing the partition member 540 inside the upper box portion 532, the suction efficiency of the in-box suction portion 536 can be further improved. Hereinafter, the partition member 540 will be described with reference to FIG. FIG. 12 is a cross-sectional view of the upper box portion 532 showing an example of the partition member 540.

  In FIG. 12, the partition member 540 is fixed inside the upper box portion 532. The partition member 540 further divides the upper space of the inclined surface 537 inside the upper box portion 532 to further reduce the space sucked by the in-box suction portion 536. Specifically, the partition member 540 includes a first partition surface 540 a that is provided on an upper portion of the inclined surface 537 and extends in the X-axis direction in parallel with the inclined surface 537. The lower end of the first partition surface 540a is joined to the side surface on the Y-axis direction side of the upper box portion 532 located above the suction port of the in-box suction portion 536. Also, the upper end of the first partition surface 540a is one end of the slit opening 533a (the end on the Y-axis negative direction side in FIG. 12) so that the first partition surface 540a does not enter the position below the slit opening 533a. Part) in the vertical direction. And the partition member 540 has the 2nd partition surface 540b which joins the upper end of the 1st partition surface 540a, and the said one end part of the slit opening part 533a.

  By providing such a partition member 540 inside the upper box portion 532, the space sucked by the in-box suction portion 536 becomes a narrow space sandwiched between the inclined surface 537 and the partition member 540. Therefore, by providing the partition member 540, the space that the in-box suction portion 536 sucks is further limited, and thus the suction efficiency of the in-box suction portion 536 can be improved. That is, the portion where the organic EL material is applied to the inclined surface 537 can be sucked with a larger suction force, and even when the organic EL material is misted in the upper box portion 532, the misted organic EL material is externally applied. It is possible to more reliably prevent leakage.

  In addition, as described with reference to FIG. 3 and the like, the suction port that the suction unit 536 in the box sucks from the inside of the upper box portion 532 is provided at one place near the center of the side surface of the upper box portion 532. The installation position and number of are not limited to this. For example, the suction port of the in-box suction part 536 is near the upper part of the joint between the lower end of the inclined surface 537 and the side surface of the upper box part 532 and is located below the position where the organic EL material is applied to the inclined surface 537. In addition, a plurality may be installed along the lower end of the inclined surface 537. In this case, the suction port may not be installed at the center of the side surface of the upper box portion 532 as long as the suction airflow can be efficiently generated at the portion where the organic EL material is applied to the inclined surface 537. Absent. The lower end length of the inclined surface 537 is formed near the upper portion of the joint between the lower end of the inclined surface 537 and the side surface of the upper box portion 532 and below the position where the organic EL material is applied to the inclined surface 537. The suction part 536 in the box may suck the inside of the upper box part 532 from a slit-like suction port having a long axis length equivalent to the above.

  In the above-described embodiment, the upper plate member 533 is provided so as to cover the upper surface of the upper box portion 532, but the upper plate member 533 may not be provided. The upper plate member 533 is provided to prevent the mist-like organic EL material from flying up to the outside of the upper box portion 532 when the mist-like organic EL material is generated inside the upper box portion 532. In addition, an effect of improving the suction efficiency of the in-box suction portion 536 can be expected by reducing the area where the upper surface of the upper box portion 532 is opened. However, in the above-described embodiment, the mist-like organic EL material is prevented from being generated by the inclined surfaces 537 to 539 provided in the upper box portion 532, and the mist-like organic EL material is prevented from being generated by the in-box suction portion 536. The organic EL material that has become mist when generated is sucked. Therefore, even when the upper surface of the upper box portion 532 is in an open state, the mist-like organic EL material does not rise outside the upper box portion 532, and the above-described suction efficiency improvement effect by the upper plate member 533 is not expected. The upper plate member 533 may not be provided.

  In the above-described embodiment, each time the nozzle unit 50 linearly moves in the X-axis direction, the stage 21 is moved by a predetermined pitch in the Y-axis direction, so that the nozzle unit 50 and the stage 21 are relative to the Y-axis direction. However, the present invention is not limited to this. For example, each time the nozzle unit 50 linearly moves in the X-axis direction, the nozzle unit 50 is moved by a predetermined pitch in the Y-axis direction (that is, the organic EL coating mechanism 5 moves in the Y-axis direction). The relative positional relationship between the stage 21 and the stage 21 in the Y-axis direction may be changed. In this case, the liquid receiving unit 53 moves together with the organic EL coating mechanism 5 by a predetermined pitch in the Y-axis direction.

  In the above-described embodiment, red, green, and blue red organic EL materials are poured into the groove of the substrate P by a set of three nozzles 52a to 52c. This is an intermediate process for manufacturing an EL display device. The processing procedure when manufacturing an organic EL display device is as follows: hole transport material (PEDOT) coating → drying → red organic EL material coating → drying → green organic EL material coating → drying → blue organic EL material coating → drying It becomes the procedure. In this case, the coating apparatus of the present invention can be used in a step of coating a hole transport material, a red organic EL material, a green organic EL material, and a blue organic EL material, respectively.

  Further, red, green, and blue organic EL materials may be discharged from the nozzles 52a to 52c, respectively. In this case, a so-called stripe arrangement arranged in the order of red, green, and blue is formed in one coating process. In the above-described embodiment, the organic EL material is poured into each groove of the substrate P by one set of three nozzles 52a to 52c, but a plurality of sets of three sets of nozzles 52a to 52c are provided. An organic EL material may be poured into each groove of P. In this case, if the liquid receiving part 53 corresponding to the position where each set of nozzles moves in the X-axis direction is provided, the effect of the present invention can be obtained while reducing the time required for the coating process.

  In the above-described embodiment, the manufacturing apparatus of an organic EL display device using an organic EL material or a hole transport material as a coating liquid has been described as an example. However, the present invention can also be applied to other coating apparatuses. . For example, the present invention can be applied to an apparatus for applying a fluorescent material used to manufacture a resist solution, a SOG (Spin On Glass) solution, or a PDP (plasma display panel). Further, the present invention can also be applied to an apparatus for applying a color material used for manufacturing a color filter configured in a liquid crystal cell in order to perform color display on a liquid crystal color display.

  INDUSTRIAL APPLICABILITY The coating apparatus according to the present invention can reliably recover the coating liquid discharged outside the substrate to be coated, and is useful as an apparatus for applying a liquid column state coating liquid to the substrate. .

The top view and front view which show the principal part schematic structure of the coating device 1 which concerns on one Embodiment of this invention. The block diagram which shows the control function of the coating device 1 of FIG. The perspective view which shows the structure of the liquid receiving part 53 of FIG. Side surface schematic diagram of the liquid receiving part 53 seen from the D direction of FIG. The perspective view which shows the positional relationship of the organic electroluminescent material discharged from the nozzles 52a-52c, and the liquid receiving part 53. FIG. The perspective view which shows the positional relationship with the liquid receiving part 53 when the nozzles 52a-52c move. Sectional drawing of the upper stage box part 532 which looked at the cross section AA of FIG. 3 from the B direction The perspective view of the liquid receiving part 53 which deleted a part of side surface of the upper stage box part 532, and a part of upper board member 533. Schematic diagram showing the positional relationship between the nozzles 52a to 52c and the inclined surface 537 Sectional drawing of the upper stage box part 532 which shows an example of the inclined surface 538 formed in the valley shape Sectional drawing of the upper stage box part 532 which shows an example of the inclined surface 539 formed in the mountain shape Sectional drawing of the upper stage box part 532 which shows an example of the partition member 540 Side surface schematic diagram which shows the positional relationship of the nozzles 102-104 and the liquid receiving part 105 of the conventional coating device. The perspective view which shows the structure of the conventional liquid receiving part 106

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Coating apparatus 2 ... Substrate mounting apparatus 21 ... Stage 22 ... Turning part 23 ... Parallel movement table 24 ... Guide receiving part 25, 511 ... Guide member 3 ... Control part 5 ... Organic EL coating mechanism 50 ... Nozzle unit 51 ... Nozzle Moving mechanism part 52 ... Nozzle 521 ... Filter part 53 ... Liquid receiving part 531 ... Lower receiving part 532 ... Upper box part 533 ... Upper plate member 534 ... Upper support member 535 ... Discharge line 536 ... In-box suction parts 537-539 ... Inclined Surface 540 ... Partition member 54 ... Supply unit 541 ... Supply source 542 ... Pump 543 ... Flow meter 544 ... Filter 55 ... Gas-liquid separation box

Claims (8)

A coating apparatus that applies a coating liquid by discharging a coating liquid in a liquid column state in a vertically downward direction onto a substrate,
A nozzle that discharges the coating liquid from the tip in the liquid column state;
A stage for placing the substrate on its upper surface;
A nozzle moving mechanism for reciprocally moving the nozzle in a direction across the stage surface in the space on the stage;
When the nozzle moving mechanism moves the nozzle while discharging the coating liquid from the nozzle to a position off the stage along the transverse direction, the coating liquid discharged from the nozzle to the outside of the stage A liquid receiving part for receiving,
The liquid receiving portion is extended in the transverse direction from the tip of the nozzle disposed at a position off the stage to a position that is vertically downward, with respect to a horizontal direction perpendicular to the transverse direction. the inclined surface being inclined Te,
A suction means for sucking a gas in a space near a position where the coating liquid is applied to the inclined surface;
A partition member fixed to a part of the upper space of the inclined surface in parallel to the inclined surface through a predetermined gap ,
The liquid receiver is a coating apparatus that collects and collects the coating liquid discharged from the nozzle disposed at a position off the stage in the liquid column state on the inclined surface. 2. The coating apparatus according to claim 1 , wherein the suction unit has at least one suction port that sucks the gas in the upper space of the inclined surface below a position where the coating liquid is applied to the inclined surface. Before Symbol suction port is disposed between the partition member and the lower end of the inclined surface, coating apparatus according to claim 2. The coating apparatus according to claim 1 , wherein the suction unit sucks a gas in a space in the vicinity of a position where the coating liquid is applied to the inclined surface downward along the upper surface of the inclined surface. The inclined surface is disposed at the vertical downward position where the position where the coating liquid is applied is closer to the nozzle than the height at which the coating liquid discharged from the nozzle starts to split from the liquid column state. The coating apparatus according to claim 1 . The coating apparatus according to claim 5 , wherein the inclined surface is formed by one plane inclined in one direction with respect to a horizontal direction perpendicular to the transverse direction. The coating apparatus according to claim 5 , wherein the inclined surface has a valley shape including two flat surfaces that are inclined in both directions with respect to a horizontal direction perpendicular to the transverse direction. The said inclined surface is a coating device of Claim 5 comprised by the two planes respectively inclined in two directions with respect to the horizontal direction perpendicular | vertical to the said crossing direction.

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