TW200911388A - Coating device - Google Patents

Coating device Download PDF

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Publication number
TW200911388A
TW200911388A TW096149871A TW96149871A TW200911388A TW 200911388 A TW200911388 A TW 200911388A TW 096149871 A TW096149871 A TW 096149871A TW 96149871 A TW96149871 A TW 96149871A TW 200911388 A TW200911388 A TW 200911388A
Authority
TW
Taiwan
Prior art keywords
liquid
inclined surface
nozzle
coating
organic
Prior art date
Application number
TW096149871A
Other languages
Chinese (zh)
Other versions
TWI335244B (en
Inventor
Shuichi Sagara
Mikio Masuichi
Yukihiro Takamura
Masafumi Kawagoe
Tsuyoshi Matsuka
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200911388A publication Critical patent/TW200911388A/en
Application granted granted Critical
Publication of TWI335244B publication Critical patent/TWI335244B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12044—OLED

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to a coating device, wherein a nozzle ejects coating liquid in a liquid column state from a front end; an objective table loads a substrate on the upper surface; a nozzle travel mechanism causes the nozzle to reciprocate on the direction traversing the surface of the objective table in the space thereof; a liquid accepting part including an inclined surface, receives the coating liquid ejected from the nozzle to the outside of the objective table when the nozzle travel mechanism causes the nozzle to move along the traversing direction and ejects the coating liquid by the nozzle to the deflected position on the objective table.; The inclined surface is arranged at the vertical lower of the front end of the nozzle from the deflected position on the objective table, and is extended toward the traversing direction, and is inclined relative to the horizontal plane vertical to the traversing direction. The liquid accepting part reclaims the coating liquid coated on the inclined surface in the liquid column state ejected from the nozzle on the deflected position on the objective table.

Description

200911388 九、發明說明： 【發明所屬之技術領域】 +本發明係關於塗佈裝置，更特定地說，本發明係關於從 喷嘴對台座上所載置之基板吐出液柱狀態之塗佈液並進 行塗佈之塗佈裝置。 【先前技術】 習知技術中，已開發出從喷嘴吐出塗佈液，並且連續以 一筆晝之方式對基板將塗佈液予以塗佈之塗佈裝置。例 如，在製造有機EL顯示裝置之裝置中，係對台座上所載 置之玻璃基板等基板主面，以既定之圖案形狀，將有機 EL材料進行喷嘴塗佈。例如曰本專利特開2〇〇6_丨8141〇 號公報（對應台灣申請案：TW94135m ;以下稱為專利文 獻υ所揭示，此種塗佈裝置中，在將塗佈液塗佈於基板 時，為了回收喷嘴移動至基板外時對基板外所塗佈之塗佈 液^、不兩要的塗佈液，係於基板外配設有接受塗佈液之液 體接受部。 如圖13所示’塗佈裝置係具備有載置接受紅、綠及藍 色有機EL材料之塗佈的玻璃基板ρ之台座⑻。另外， 該製造裝置係具備：吐出紅色、綠色及藍色有機EL材料 之任一者的複數根（圖13之例為3根）噴嘴勝1〇4; i nf ^收吐出於基板P之外的有機EL材料之液體接受部 1〇5。作為紅、綠及藍色之有機EL材料，例如係使用具有 可在基板P上形成為條狀之溝内進行擴散的流動程度之 黏性的有機性之EL材料。另外，以既定之壓力及流量， 96149871 200911388 由喷嘴102〜104將有機EL材料以直線棒狀（以下記载為 液柱狀態）吐出，塗佈於基板p上。另外，液體接受部 10 5係在基板p之兩邊外侧（圖13中僅顯示一邊）對頂 面進行開口而配設。200911388 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a coating apparatus, and more particularly to a coating liquid for discharging a liquid column state from a nozzle to a substrate placed on a pedestal A coating device for coating is performed. [Prior Art] In the prior art, a coating apparatus that ejects a coating liquid from a nozzle and continuously applies a coating liquid to the substrate in a single twist has been developed. For example, in an apparatus for manufacturing an organic EL display device, an organic EL material is nozzle-coated in a predetermined pattern shape on a main surface of a substrate such as a glass substrate placed on a pedestal. For example, in Japanese Patent Application Laid-Open No. Hei. No. Hei. No. Hei. No. Hei. In order to collect the coating liquid applied to the outside of the substrate when the nozzle is moved outside the substrate, the coating liquid that is applied to the outside of the substrate is disposed outside the substrate with a liquid receiving portion that receives the coating liquid. The coating apparatus is provided with a pedestal (8) on which a glass substrate ρ that receives application of red, green, and blue organic EL materials is placed. The manufacturing apparatus includes a red, green, and blue organic EL material. The plurality of roots (three in the case of FIG. 13) have a nozzle of 1〇4; i nf ^ is discharged from the liquid receiving portion 1〇5 of the organic EL material other than the substrate P. As red, green, and blue The organic EL material is, for example, an organic EL material having a viscosity which is diffusible in a groove formed in a strip shape on the substrate P. Further, with a predetermined pressure and flow rate, 96149871 200911388 is used by the nozzle 102~ 104. The organic EL material is in the form of a straight rod (described below) Column state) discharged, p applied onto a substrate. Further, the liquid receiving portion 105 lines showed only one side) of the top surface for opening disposed outside of both sides of the substrate p (FIG. 13.

喷嘴102~104係以相對於後述之喷嘴往返移動方向斜 向地並列設置之狀態，由保持構件（未圖示）所支持，該 保持構件及台座1〇1係利用塗佈裝置之各驅動機構而動 作。驅動機構係使將喷嘴1〇2〜104支持於在既定方向橫斷 基板P之方向（係形成於基板p之條狀的溝方向，為圖示 箭頭F之方向；以下記載為喷嘴往返移動方向）上的保持 構件，進行往返移動。此時，驅動機構係使上述保持構件 往返移動，移動範圍係從配設於基板p之一邊外側的液體 接受部105之上部空間，至橫斷基板p而配設於基板？之 =一邊外側之液體接受部105之上部空間為止。又，驅動 棧構在上述保持構件係配置於液體接受部1 之上部空 ，時，係使台座101在與上述噴嘴往返移動方向垂直之二 定方向（紙面垂直方向）上’僅移動既定的間距。在此種 機構動作之同時，使有機EL材料從喷嘴1〇2〜1〇3以 之，態吐出’藉此’在基板p上可形成紅、綠及藍色之 :幾乩材料分別以條狀之溝以紅、綠、藍 亦即所謂條狀排列。 e p J 受柱狀態之塗佈液對基板p外所設置之液體接 盘液轉技/之清況’有以下之問題。由於喷嘴102〜104 體接” 105之距離（们3所示之hl+h2)變長， 96149871 200911388 液柱狀態之塗佈液會因表面張力而液滴化。例如，雖可將 喷嘴102〜104前端部至基板p頂面之距離M設定為 0.25〜0.5〇mm左右之可保證為液柱狀態之距離，^距離 ' hl+h2在20mm以上之情況，僅調整吐出壓力或流量，仍 •難以防止液滴化。又，喷嘴102〜104往圖示F方向高速移 動之情況，隨著其速度而液滴化之塗佈液會進一步分裂為 細微的靄（mist)狀。另外，高速移動之喷嘴1〇2〜1〇4的 者後之空間成為負壓，成為靄狀之塗佈液會飛濺至喷嘴 102^104之附近。其結果，基板p外所產生之靄狀的塗佈 液落下至基板P上，並附著於頂面，因而成為塗佈不良的 原因。 又，可考慮在液柱狀態之塗佈液液滴化之前，將塗佈液 直接以液柱狀態塗附於平板等之構件的方式。然而，將塗 佈液以液柱狀態塗附之構件上，該塗佈液係以積存之狀態 (積液）殘存。另外，若進一步對於構件上所積存之積液 繼續塗附液柱狀態之塗佈液，則在液柱狀態之塗佈液進入 該積液之部位附近’會發生靄狀之塗佈液。 另一方面，如圖14所示，上述專利文獻i所記載之塗 佈裝置上，設置有形成狹縫s之液體接受部i〇6。狹縫s 係與上述喷嘴往返移動方向平行地形成於液體接受部1Μ •之頂面。又，狹縫S係形成於從台座101上離開上述喷嘴 '往返移動方向之位置、以及由噴嘴102〜104之前端部開始 之垂直下方向之位置。另外，形成狹縫s之液體接受部 1〇6的頂面係設置於與台座1〇1之頂面大致相同之高度 96149871 7 200911388 (亦即，距離h2為基板p厚度左右之偏小值），因此，通 過狹縫S之開口而從喷嘴吐出之液柱狀態的塗佈液係以 液體接受部106回收，可防止靄狀之塗佈液漏出至液體接 * 受部10 6之外部。 …而，塗佈襞置由其製造效率等方面而言，一般係使用 複數喷嘴。又，上述之複數喷嘴係以相對於喷嘴往返移動 方向斜向地並列設置之狀態而被支持，並往該喷嘴往返移 〇動方向而往返移動，因此，為了使來自所有喷嘴之塗佈液 通過，必須將狹縫S之開口寬度形成為較寬廣。因此，在 上述專利文獻1所揭示之塗佈裝置中，必須將狹縫s之開 口面積形成為較大，結果使來自狹縫s之開口部的靄狀塗 佈液漏出至液體接受部1 〇6之外部。 【發明内容】 因此，本發明之目的在於提供一種塗佈裝置，其係於將 液柱狀態之塗佈液塗佈於基板時，吐出於基板外之塗佈液 I 不會對該基板造成影響。 為了達成上述目的，本發明具有下述特徵。 本發明之第1態樣係將朝垂直下方向之直線棒狀液柱 狀態的塗佈液吐出於基板上，並塗佈該塗佈液之塗佈裝 置。塗佈裝置係具備喷嘴、台座、喷嘴移動機構以及液體 .接受部。喷嘴係將塗佈液以液柱狀態從其前端部吐出。台 •座係將基板載置於其頂面。喷嘴移動機構係於台座上之空 間中，使喷嘴在橫斷該台座面之方向上往返移動。液體接 受部係在液體移動機構沿著橫斷方向而於離開台座上之 96149871 8 200911388 位置’由喷嘴吐出塗佈液並且移動該噴嘴時，接受由該喷 嘴吐出於台座外之塗佈液。液體接受部係包含傾斜面。傾 斜面係由離開台座上之位置所配置之喷嘴的前端部，於垂 直下方向之位置向橫斷方向延伸設置，相對於垂直於該橫 斷方向的水平方向傾斜。液體接受部係將從㈣台座上之 位置所配置之噴嘴吐出之塗佈液，以液柱狀態塗附於傾斜 面並回收 第2態樣係於上述第1態樣中，液體接受部進-步包含 吸引手段。吸引手段係吸引傾斜面上塗附塗佈液之位置附 近的空間之氣體。 第3態樣係於上述第2態樣中，吸引手段具有至少w 吸引口，其係於傾斜面上塗附塗佈液之位置的下方，吸引 該傾斜面上部空間之氣體。 第4態樣係於上述第3態樣中，液體接受部進—步包含 區隔構件。區隔構件係相對於傾斜面，介隔著既定的間 隙’平行地固定設置於傾斜面之上部空間的—部份。 口係配設於傾斜面之下端與區隔構件之間。 第5態樣係於上述第2態樣中，吸引手段將傾斜面上塗 附塗佈液之位置附近的空間之氣體，朝沿著該傾斜 面的下方吸引。 第6態樣係於上述第1或第2態樣中，傾斜面係配設於 下述位置：塗佈液塗附之位置較喷嘴吐出之塗佈液從液检 狀態開始分裂之高度更靠該噴嘴側之垂直下方向位置。 第7態樣係於上述第6態樣中’傾斜面係由}個平面所 96149871 9 200911388 形成’該平面係相對於垂直於橫斷方向 個方向傾斜。 +方向，往一 第8心樣係於上述第6態樣中，傾斜面 構成之谷型，嗲犛承；扃+灿‘ 由2個平面所 I該4千面係相對於垂直於橫斷 向，分別往雙方向傾斜。 π之水千方 構係於上述第6態樣中，傾斜面係由2個平面所 i，該等平面係相對於垂直於橫斷方 向，分別往雙方向傾斜。 &amp;十方 二Γ上述第1態樣，從配置於離開台座上之位置的噴嘴 /之液柱狀態的塗佈液，係在因表面張力而液滴化之 :广:塗附於液體接受部之傾斜面。另外，塗附於傾斜 面上之塗佈液係於其傾斜方向上一邊流下一邊被回收。因 此，使塗佈液以液柱狀態塗附之傾斜面上，不會有該塗佈 液以積存之狀態（積液）而殘存之狀況。亦即，不會對於 積存在傾斜面上之積液進—步繼續塗附液柱狀態之塗佈 液，可防止液柱狀態之塗佈液進入該積液所造 擔的發生。因此，不會發生吐出至基板外之塗佈液飛 濺而洛下至基板上並附著之狀況，可防止塗佈不良。 根據上述第2態樣，藉由吸引傾斜面上塗附塗佈液之部 位，可進一步確實地防止吐出至液體接受部之塗佈液向外 部漏出。 根據上述第3態樣，由於吸引口係設置於傾斜面上塗佈 液塗附之位置的下方，因此可沿著塗附於傾斜面並流下之 塗佈液的方向，吸引塗佈液。又，在傾斜面上產生靄狀之 96149871 200911388 塗佈液的情況’可從塗附塗佈液之位置向下方有效率地吸 引霜化之塗佈液。又’吸引手段所吸引之空間係被傾斜面 限定之空間’因此可提升其吸引效率，可進一步有效率地 回收不需要的塗佈液。 ' 根據上述第4態樣’吸引手段所吸引之空間係被包夾於 傾斜面與區隔構件之狹窄空間。因此，藉由設置區隔構 件’吸引手段所吸引之空間被進一步限定，故可進一步提 , 升吸引手段之吸引效率。 C、 根據上述第5態樣’由於係朝沿著傾斜面頂面之下方進 行吸引’故可沿著塗附於傾斜面並流下之塗佈液的方向， 吸引塗佈液。又，當在傾斜面上產生靄狀之塗佈液的情 況，可有效率地朝沿著該頂面之下方，吸引靄化之塗佈 液。此外，吸引手段所吸引之空間係被傾斜面所限定之空 間，故可提升其吸引效率，並進一步有效率地回收不需要 的塗佈液。 L 根據上述第6態樣，從配置於離開台座上之位置的喷嘴 吐出之液柱狀態塗佈液係於分裂前塗附於傾斜面。因此， 可防止塗佈液成為細微的靄狀並落下至基板上。 根據上述第7態樣，可使塗附於由1個平面所構成之傾 斜面上的塗佈液，一邊在該傾斜方向上流下一邊進行回 * 收。 • 根據上述第8態樣，可使塗附於以谷型構成之傾斜面上 的塗佈液，一邊在該谷底方向上流下一邊進行回收。 根據上述第9態樣，可使塗附於以山型構成之傾斜面上 96149871 11 200911388 的塗佈液，一邊在該山裙方向上流下一邊進行回收。 本發明之上述及其他目的、特徵、態樣、效果，係可對 照後附圖式，由下述之詳細說明更為明確。 • 【實施方式】 ’以下參照圖式’針對本發明之-實施形態的塗佈裝置進 行說明。為了使說明較為具體，係使用該塗佈裝置係使用 有機EL材料或電洞輪送材料等作為塗佈液之應用於製造 『有機EL顯示裝置的塗佈裝置之例，進行以下說明。該塗 佈裝置係將有機EL材料或電洞輸送材料等以既定之圖案 形狀塗佈於台座上所载置之玻璃基板上，以製造有機el 顯:裝置者。圖1係顯示塗佈裝置i之重要部位概略構成 之平面圖及正面圖。另外，塗佈裝置1係如上所述般使用 有機EL材料或電洞輸送材料等之複數塗佈液，以有機乩 材料作為塗佈液之情況作為代表，進行說明。 圖1中，塗佈襞置1大致而言係具備基板載置裝置2及 (:有機EL塗佈機構5。有機EL塗佈機構5係具有喷嘴移動 機構部51、喷嘴單元50、液體接受部53L以及53R。喷 嘴移動機構部51 +，導引構件511係延伸設置於圖示χ 轴方向’使喷嘴單元5〇沿著導引構件5η而在圖示乂軸 方向移動。喷嘴單元50係以並列設置有吐出紅、綠及藍 *色中任1色之有機乩材料的複數喷嘴52(圖1中係3根 .之噴嘴52a、52b及52c)之狀態保持著。分別由供給部 (參照圖2)對各噴嘴52a~52c供給紅、綠及藍色中任i 色之有機EL材料。如此，係由複數之喷嘴52吐出同樣顏 96149871 12 200911388 色之有機EL材料’但為了使說明較為具體，係使用由^ 根之喷嘴52a〜52c吐出紅色的有機EL材料之例。 基板載置裝置2係具有台座2卜旋轉部22、平行移動 ^3、導引接受部24以及導引構件25。台座21係於= 。座頂面上載置作為被塗佈體之玻璃基板等之基板p。△ :2;之：部係藉由旋轉部22而支持，係構成為利用旋； A之％轉動作，可於圖示Θ方向上使台座21旋轉。又， :座21之内部中係設有用以使塗佈有機此材料之基 =座面上進行預備加熱處理之加熱機構或基板P之吸 附機構或授受銷機構等。The nozzles 102 to 104 are supported by a holding member (not shown) in a state in which they are arranged side by side in a diagonally moving direction with respect to a nozzle reciprocating movement to be described later. The holding member and the pedestal 1 〇 1 are driven by respective driving mechanisms of the coating device. And the action. The drive mechanism supports the nozzles 1〇2 to 104 in the direction in which the substrate P is traversed in a predetermined direction (the groove direction formed in the strip shape of the substrate p, which is the direction of the arrow F in the figure); The holding member on the side moves back and forth. At this time, the drive mechanism reciprocates the holding member, and the movement range is disposed from the upper space of the liquid receiving portion 105 disposed on the outer side of one of the substrates p to the substrate p to the substrate p. = the upper space of the liquid receiving portion 105 on the outer side. Further, when the holding member is disposed in the upper portion of the liquid receiving portion 1, the driving base is configured to move only a predetermined pitch in the two directions (the vertical direction of the paper surface) perpendicular to the reciprocating direction of the nozzle. . At the same time as the operation of such a mechanism, the organic EL material is ejected from the nozzles 1〇2 to 1〇3, and the red, green, and blue colors are formed on the substrate p by the state of the nozzles: The grooves are arranged in red, green and blue, so-called strips. e p J The following problems occur with the coating liquid in the column state and the liquid transfer liquid set to the outside of the substrate p. Since the distance between the nozzles 102 to 104 and the body of the "105" (the hl + h2 shown in Fig. 3) becomes long, the coating liquid in the liquid column state of 96149871 200911388 is dropletized by the surface tension. For example, the nozzle 102 can be used. The distance M from the front end portion to the top surface of the substrate p is set to be about 0.25 to 0.5 〇mm to ensure the distance of the liquid column state. ^ When the distance hl+h2 is 20 mm or more, only the discharge pressure or flow rate is adjusted, and still Further, when the nozzles 102 to 104 are moved at a high speed in the F direction, the coating liquid dropletized by the speed is further split into a fine mist shape. The space behind the nozzles 1〇2 to 1〇4 becomes a negative pressure, and the coating liquid which is in the form of a flaw splashes to the vicinity of the nozzle 102^104. As a result, the coating liquid generated outside the substrate p is formed. Dropping onto the substrate P and adhering to the top surface causes a coating failure. Further, it is conceivable to apply the coating liquid directly to the flat plate in a liquid column state before the liquid coating of the liquid column state is dropletized. The method of the component, however, the coating liquid is applied in a liquid column state. In the above, the coating liquid remains in the state of being accumulated (liquid accumulation). Further, when the coating liquid in the liquid column state is further applied to the accumulated liquid accumulated on the member, the coating liquid in the liquid column state enters. In the vicinity of the portion of the effusion, a coating liquid is formed in a meandering state. On the other hand, as shown in Fig. 14, the coating device described in the above Patent Document i is provided with a liquid receiving portion that forms the slit s. 6. The slit s is formed on the top surface of the liquid receiving portion 1 in parallel with the reciprocating direction of the nozzle. Further, the slit S is formed at a position away from the pedestal 101 in the reciprocating direction of the nozzle, and by the nozzle The position of the liquid receiving portion 1〇6 forming the slit s is set at a height substantially the same as the top surface of the pedestal 〇1, and the height of the top surface of the pedestal 〇1 is 96194871 7 200911388 (also In other words, since the distance h2 is a small value of the thickness of the substrate p), the coating liquid in the liquid column state discharged from the nozzle through the opening of the slit S is recovered by the liquid receiving portion 106, thereby preventing the coating of the coating. The liquid leaks out to the liquid to receive the receiving part 10 6 Externally, the coating device generally uses a plurality of nozzles in terms of its manufacturing efficiency, etc. Further, the above-described plurality of nozzles are supported in a state of being arranged side by side obliquely with respect to the reciprocating direction of the nozzle, and Since the nozzle is moved back and forth in the direction of the reciprocating motion, the opening width of the slit S must be formed to be wide in order to allow the coating liquid from all the nozzles to pass. Therefore, the coating disclosed in the above Patent Document 1 is applied. In the apparatus, it is necessary to form the opening area of the slit s to be large, and as a result, the coating liquid from the opening of the slit s is leaked to the outside of the liquid receiving portion 1 to 6. The present invention is therefore made. It is an object of the invention to provide a coating apparatus for applying a coating liquid in a liquid column state to a substrate, and the coating liquid I discharged from the substrate does not affect the substrate. In order to achieve the above object, the present invention has the following features. According to a first aspect of the present invention, a coating liquid in a state of a linear rod-shaped liquid column in a vertically downward direction is discharged from a substrate, and a coating device for applying the coating liquid is applied. The coating device includes a nozzle, a pedestal, a nozzle moving mechanism, and a liquid receiving portion. The nozzle discharges the coating liquid from the front end portion thereof in a liquid column state. The platform • mounts the substrate on its top surface. The nozzle moving mechanism is placed in the space on the pedestal to reciprocate the nozzle in a direction transverse to the seating surface. The liquid receiving portion receives the coating liquid discharged from the nozzle by the nozzle when the liquid moving mechanism discharges the coating liquid from the nozzle at the position of the 96149871 8 200911388 position on the pedestal in the transverse direction. The liquid receiving portion includes an inclined surface. The inclined slope is extended from the front end portion of the nozzle disposed at a position away from the pedestal in the direction of the vertical direction, and is inclined with respect to the horizontal direction perpendicular to the transverse direction. In the liquid receiving portion, the coating liquid discharged from the nozzle disposed at the position on the (four) pedestal is applied to the inclined surface in a liquid column state, and the second state is collected in the first aspect, and the liquid receiving portion enters - Steps include the means of attraction. The attraction means is a gas which attracts a space in the vicinity of the position where the coating liquid is applied on the inclined surface. In the third aspect, the suction means has at least a suction port which is located below the position where the coating liquid is applied to the inclined surface, and attracts the gas in the inclined upper surface space. The fourth aspect is in the third aspect described above, and the liquid receiving portion further includes the partition member. The partition member is fixed to the inclined surface in a space in which the predetermined gap is fixed in parallel with the space above the inclined surface. The mouth is disposed between the lower end of the inclined surface and the partition member. In the fifth aspect, in the second aspect, the suction means suctions the gas in the space near the position where the coating liquid is applied on the inclined surface toward the lower side along the inclined surface. The sixth aspect is in the first or second aspect, and the inclined surface is disposed at a position at which the coating liquid is applied at a position higher than a height at which the coating liquid discharged from the nozzle is split from the liquid inspection state. The vertical side position of the nozzle side. The seventh aspect is in the sixth aspect described above. The 'inclined surface system is formed by} planes 96149871 9 200911388' which is inclined with respect to the direction perpendicular to the transverse direction. + direction, to the eighth heart sample in the above sixth aspect, the inclined surface constitutes the valley type, 嗲牦承; 扃+灿' from two planes I, the four thousand planes are perpendicular to the transverse Tilt to both directions. The water structure of π is in the sixth aspect described above, and the inclined plane is composed of two planes i, and the planes are inclined in two directions with respect to the direction perpendicular to the transverse direction. In the first aspect, the coating liquid in the state of the nozzle/the liquid column disposed at the position away from the pedestal is dropletized by the surface tension: wide: applied to the liquid to receive The slope of the section. Further, the coating liquid applied to the inclined surface is recovered while flowing down in the oblique direction. Therefore, the inclined surface on which the coating liquid is applied in a liquid column state does not remain in a state in which the coating liquid is accumulated (liquid accumulation). In other words, the coating liquid which is continuously applied to the liquid column state without accumulating the accumulated liquid on the inclined surface can prevent the occurrence of the liquid in the liquid column state from entering the liquid. Therefore, the coating liquid discharged to the outside of the substrate does not splash and adheres to the substrate, and the coating failure can be prevented. According to the second aspect described above, by applying the portion to which the coating liquid is applied on the inclined surface, it is possible to more reliably prevent the coating liquid discharged to the liquid receiving portion from leaking to the outside. According to the third aspect described above, since the suction port is provided below the position on which the coating liquid is applied on the inclined surface, the coating liquid can be sucked in the direction of the coating liquid applied to the inclined surface and flowing down. Further, in the case where a coating liquid of 96149871 200911388 is produced on the inclined surface, the frosting coating liquid can be efficiently sucked downward from the position where the coating liquid is applied. Further, the space to be attracted by the attraction means is a space defined by the inclined surface. Therefore, the suction efficiency can be improved, and the unnecessary coating liquid can be further efficiently recovered. The space attracted by the suction means according to the fourth aspect described above is sandwiched between the inclined surface and the narrow space of the partition member. Therefore, since the space to which the attraction means is provided by the attraction means is further limited, the attraction efficiency of the suction means can be further improved. C. According to the fifth aspect described above, "the suction is performed along the lower surface of the inclined surface", so that the coating liquid can be sucked in the direction of the coating liquid applied to the inclined surface and flowing down. Further, when a coating liquid having a meandering shape is formed on the inclined surface, the coating liquid which is deuterated can be efficiently sucked toward the lower side of the top surface. Further, since the space attracted by the attraction means is the space defined by the inclined surface, the suction efficiency can be improved, and the unnecessary coating liquid can be further efficiently recovered. L According to the sixth aspect described above, the liquid column state coating liquid discharged from the nozzle disposed at a position away from the pedestal is applied to the inclined surface before being split. Therefore, the coating liquid can be prevented from becoming a fine ridge and dropped onto the substrate. According to the seventh aspect described above, the coating liquid applied to the inclined surface formed of one flat surface can be returned while flowing in the oblique direction. • According to the eighth aspect described above, the coating liquid applied to the inclined surface formed of the valley shape can be recovered while flowing down in the valley direction. According to the ninth aspect, the coating liquid applied to the inclined surface of the mountain type 96149871 11 200911388 can be recovered while flowing down in the direction of the mountain skirt. The above and other objects, features, aspects and advantages of the present invention will become <RTIgt; [Embodiment] The coating apparatus according to the embodiment of the present invention will be described below with reference to the drawings. In order to make the coating apparatus more specifically, an organic EL material, a hole-wheeling material, or the like is used as a coating liquid, and an example of a coating apparatus for an organic EL display device is used. In the coating apparatus, an organic EL material or a hole transporting material or the like is applied to a glass substrate placed on a pedestal in a predetermined pattern shape to produce an organic EL display device. Fig. 1 is a plan view and a front view showing a schematic configuration of important parts of a coating device i. In addition, the coating apparatus 1 is described as a case where a plurality of coating liquids such as an organic EL material or a hole transporting material are used as described above, and an organic cerium material is used as a coating liquid. In the first embodiment, the coating device 1 includes a substrate mounting device 2 and an organic EL coating mechanism 5. The organic EL coating mechanism 5 includes a nozzle moving mechanism portion 51, a nozzle unit 50, and a liquid receiving portion. 53L and 53R. The nozzle moving mechanism portion 51 +, the guiding member 511 is extended in the drawing axis direction ' to move the nozzle unit 5 〇 along the guiding member 5n in the direction of the drawing axis. The nozzle unit 50 is The plurality of nozzles 52 (three nozzles 52a, 52b, and 52c in Fig. 1) in which the organic bismuth material of any one of red, green, and blue* colors is discharged are provided in a state of being held by the supply unit. 2) The organic EL material of any of red, green, and blue colors is supplied to each of the nozzles 52a to 52c. Thus, the organic EL material of the same color 96149871 12 200911388 is discharged from the plurality of nozzles 52, but for the sake of explanation Specifically, an example in which a red organic EL material is ejected from nozzles 52a to 52c is used. The substrate mounting device 2 has a pedestal 2, a rotating portion 22, a parallel movement, a guide receiving portion 24, and a guiding member 25. The pedestal 21 is attached to the glass on the top surface of the coated object. The substrate p of the substrate or the like is Δ: 2; the portion is supported by the rotating portion 22, and is configured to rotate the pedestal 21 in the Θ direction shown by the rotation of A; In the interior of the 21, an adsorption mechanism or a pin-receiving mechanism for applying a heating mechanism or a substrate P to which a base of the organic material is applied is prepared.

導引構件25係以通過有機EL塗佈機構5之下方的方 式’延伸設置於與上述X ^ ^ ^, 軸方向垂直之圖示Y軸方向上， 接受ί 24水平打移動台23之底面係固定設置有導引 二 八係與導引構件25抵接並在導引構件25上 ;;動：，，於平行移動台23之頂面係固定設置有旋轉部 22。糟此，平行移動a μ ^ ^ w σ| m _ s 口 可接焚來自例如線性馬達（未 圖不）之驅動力，在沿著邋、禾 移動，亦τ你士# 者導弓1構件25之圖示Y軸方向上 α/ρΠ 旋轉部22以座21進行水平移動。 固定該基板Ρ，當平… 5之下方時，誃D 23移動至有機EL塗佈機構 a FT 以土 係位於從喷嘴52a〜52c接受红色有 栈虹材料之塗佈的位 牧又二邑有 控制噴嘴移動機構部51，//’控制部（參照圖2)係 返移動，並㈣平行移一 2噴嘴2 5G在X軸方向上往 &gt;23 ’使台座21往γ軸方向每 96149871 200911388 次進行該直線移動時僅移動既定間距，使既定流量之有機 EL材料從喷嘴52a~52c吐出。又，於噴嘴仏〜52c之X 2方向吐出位置，從載置於台座21之基板p鬆脫之兩側 空間’係分別固定設置有液體接受部饥及·，以接受 從基板P遠離並吐出之有機EL材料。喷嘴移動機構部^ 中，喷嘴早το 50進行往返移動，移動範圍係從配設於基 板P之侧外侧的液體接受部53 (例如液體接受部53L ) 之上部空間，至橫斷基板p並配設於基板p之另一側外側 之液體接受部53 (例如液體接受部53R)之上部空間為 止。又’當喷嘴單元50係、配置於液體接受部53之上部空 間時平行移動台23係使台座21在與喷嘴往返移動方向 垂直之既疋方向（圖不γ軸方向）上僅移動既定間距。在 此種喷嘴移動機構部51以及平行移動台23之動作的同 時，從喷嘴52a〜52c以液柱狀態吐出有機乩材料，藉此， 於基板P上形成紅色有機此材料形成於基板卩上並排列 於條狀的溝之所謂條狀排列。 其次，參照圖2,針對塗佈裝置！之控制機能以及供給 部之概略構成進行說明。另外，圖2係顯示塗佈裝置ι之 控制機能以及供給部之方塊圖。 圖2中’塗佈裝置i係除了上述之構成部以外，具備控 制部3、f 1供給部54a、第2供給部54b以及第3供給 部54c。第卜第3供給部54a〜54c均係介隔配管，將紅^ 有機EL材料分別供給至嘴嘴52a〜52c。 第1供給部54a係具備有機EL材料之供給源541&amp;、用 96149871 14 200911388 以從供給源541a將有機此材 測有機乩材料之流量的流量：出=542a、以及檢 係具備有機EL材料之^ °又’第2供給部54b 將有播ϊΛ 源541b、用以從供給源54ib 产量的、“ +料取出之泵⑽、以及檢測有機EL材料之 二。第3供給部54。係具備有機EL材料The guiding member 25 is extended in the Y-axis direction perpendicular to the X-^, axis direction in the manner of passing under the organic EL coating mechanism 5, and accepts the bottom surface of the horizontal moving table 23 The guiding member 28 is fixedly disposed to abut against the guiding member 25 and on the guiding member 25; and the rotating portion 22 is fixedly disposed on the top surface of the parallel moving table 23. Worse, parallel movement a μ ^ ^ w σ| m _ s mouth can be burned from the driving force from, for example, a linear motor (not shown), moving along the 邋, Wo, also τ你士# 25 is shown in the Y-axis direction α/ρΠ The rotating portion 22 is horizontally moved by the seat 21. The substrate 固定 is fixed, and when it is below the level 5, the 誃D 23 is moved to the organic EL coating mechanism a FT, and the soil is located at the nozzles 52a to 52c to receive the red coating material. The nozzle movement mechanism unit 51 is controlled, and the control unit (see FIG. 2) is moved back, and (4) is moved in parallel by one nozzle 2 5G in the X-axis direction to the direction 23' to make the pedestal 21 to the γ-axis direction every 96149871 200911388 When this linear movement is performed, only a predetermined pitch is moved, and the organic EL material of a predetermined flow rate is discharged from the nozzles 52a to 52c. Further, in the X 2 direction discharge position of the nozzles 52 to 52c, the liquid receiving portion is fixedly provided from the space on both sides where the substrate p placed on the pedestal 21 is loosened, and is received from the substrate P to be discharged. Organic EL material. In the nozzle moving mechanism unit, the nozzle moves back and forth το 50, and the movement range is from the upper space of the liquid receiving portion 53 (for example, the liquid receiving portion 53L) disposed on the outer side of the substrate P to the transverse substrate p. The liquid receiving portion 53 (for example, the liquid receiving portion 53R) on the outer side of the other side of the substrate p is provided in the upper space. Further, when the nozzle unit 50 is disposed in the upper space of the liquid receiving portion 53, the parallel moving table 23 moves the pedestal 21 only in a predetermined direction (not in the γ-axis direction) perpendicular to the direction in which the nozzle reciprocates. At the same time as the operation of the nozzle moving mechanism portion 51 and the parallel moving table 23, the organic ruthenium material is discharged from the nozzles 52a to 52c in a liquid column state, whereby a red organic material is formed on the substrate P and formed on the substrate 并. A so-called strip arrangement arranged in a strip-shaped groove. Next, referring to Figure 2, for the coating device! The schematic configuration of the control function and the supply unit will be described. In addition, Fig. 2 is a block diagram showing the control function of the coating device ι and the supply unit. In Fig. 2, the coating device i includes a control unit 3, an f1 supply unit 54a, a second supply unit 54b, and a third supply unit 54c in addition to the above-described components. Each of the third supply portions 54a to 54c is provided with a partition pipe, and the red organic EL material is supplied to the nozzles 52a to 52c, respectively. The first supply unit 54a includes a supply source 541 of the organic EL material, and a flow rate of the flow rate of the organic material from the supply source 541a by using 96149871 14 200911388: output = 542a, and the inspection system is provided with an organic EL material. Further, the second supply unit 54b has a seed source 541b, a pump (10) for taking out the "product" from the supply source 54ib, and a second organic detecting material. The third supply unit 54 is organic. EL material

用以從供給源5仙將有機 J 以及檢測有機EL材料之流量的流量計543。。 二控：部3係分別控制第i〜第3供給部_^ I。:： 台23以及喷嘴移動機構部51之動作。 使用以PE (聚乙埽)、pp (二52 ; C之各配管，係 等作為材料之管構件。以席）、™⑽（註冊商標） 喷嘴52a係具有過減邱7. 认部54a所徂〜^ 錢用以除去從第1供 广，所供給之有機EL材料中的異物 有過濾部521b，其係用以除去 ％扑係- 之;第供給部54b所供給 材料中的異物。噴嘴52c係具有過滤部仙， ^ ^以除去從第3供給部54c所供給之 的異物。另外，由於噴嘴52a〜52c係 = 明時’係賦予元件符號「52」而進=明口 接又紅色有機乩材料之塗佈的基板p之表 係以並列設置多條$ 士斗、 # i ^ 材料之既定狀:塗佈有機el 7惊狀的溝。作為有機EL·材料，例 如可使用具有可在基板p上 度的黏性之有機性EL材料，4 方式流動之程 何料具體而吕可使用各色之高分 96149871 15 200911388 子型有機el材料。哈禮· g γ 支持為可自由轉動藉50係於既定之支持轴周圍被 圍轉動，制部3之控制而於該支持轴周 圍轉動，可藉以調整塗佈間距間隔。 控係根據载置於台座21之基板ρ的位置或方 °調整旋轉部22之角产，伟带 成為上if 成於基板Ρ之溝的方向 其：Λ、盖 算出塗佈之開始點（亦即在形成於 : 端部側開始塗佈之塗佈開始位置）。另 卜’上述塗佈開始位置传一 係為一液體接受部53之上部空 9 ，㈣部3係如上所述，驅動平行移動a 及噴嘴移動機構部51。 卞仃移勤口 23以 亡述塗佈開始位置中，控制部3係對各 不由各喷嘴52a〜52c開始右拋PT枓把 化扣 封 σ有機EL材料之吐出。此時，控 =3係以使條狀溝之各點的有機EL材料 並以液柱狀態吐出有機π上 种I岣9 152c之移動速度而之广:，對應於喷嘴 543a〜543c之流量資訊其塗佈里’並將來自流量計 係為·Γ #右播PT U 5 °貝而進灯控制。另外，控制部3 :為了使有機EL材料流入基板p上之溝内，將噴嘴單元 :控制為沿著導引構件511而移動，俾使有機肛材:： !基板p上之溝並且流入該溝内。藉由此動作，以液柱狀 恶從各噴嘴52a〜52c吐出之女输ϋΤι 往狀 各自的溝中。 &amp;之、，工色有機EL材料係同時流入 若控制部3位於噴嘴單元50橫斷基板ρ上並固定 =之另-端部外侧之另_液體接受部53上，則在=自 、b52a~52c之有機EL材料之吐出繼續之情況下，停止 96149871 200911388 喷嘴移動機構部51所進行之喷嘴單元 1次的移動’有機EL材料對3 J多動错由該 具體而吕’由於從各脅嘴5&amp;52c吐出同色的f 科，因此有機EL材料被塗佈於每3行中以 佈對象之總計3行份量的溝中。 冓作為塗 其次，控制部3係將平行移動台23於&quot; 移送岐距離（例如9行溝之份量）的間距 ^ 作為塗佈對象之溝的有機EL材料的塗佈。另外 &quot;、若使喷嘴單元5。從另一液體接受部53之上卜f : 斷基板P上並位於一液體接受部53上，則在。= 伽册之有機EL材料之σ土出繼續之情況下，停止喷 移動機構部51所進行之喷嘴單元50之移動。藉由琴第2 奴移動，結束有機EL材料對下3行份量之溝的塗佈弟。2 猎由重複此種動作’紅色有機EL材料流入以紅色為塗佈 對量之溝中。 接著，參照圖3〜圖6，針對液體接受部53進行說明， 另2，圖3係顯示液體接受部53之構造的立體圖。圖4 係從圖3之D方向所見之液體接受部53的側面概要圖。 圖5係顯示由噴嘴52a〜52c吐出之有機乩材料與液體接 义。P 53之位置關係的立體圖。圖6係顯示與嘴嘴52a〜52c 移動時之液體接受部53之位置關係的立體圖。另外，相 對於台座21位於兩側之液體接受部53L及53R(參照圖〇 係均具有對稱於台座21之相同構造，圖3〜圖6係顯示其 一者，作為液體接受部53。 ' 96149871 200911388 j 3中液體接受部53係具備下段接受部531、上段 瓜。卩532上板構件533、上段支持構件534以及盒内吸 引部536。 接又。卩531係例如連結於喷嘴移動機構部51，固 • f設置：使其與喷嘴移動機構部51的位置關係恆常固 疋。下段接受部531係被安裝於上段盒部532之台座21 ^的下σ卩其位置係當噴嘴52&amp;〜在基板p上與上段盒 (。卩532上之間移動時，可接受從基板P與上段盒部532之 縫隙漏出之有機EL材料等。吐出於上段盒部532之内部 ，有機EL材料’係經由設於上段盒部532之下部的排出 管線535 (參照圖7) ’流下到下部接受部531内。又，吐 出於下#又接叉部531内部之有機EL材料係透過從其最下 位置流出的流動路徑（未圖示），以排液槽（未圖示）回收。 又，下段接受部531内部中，亦可設置吸引台座21侧面 附近空間之氣體的局部排氣部。此外，於下段接受部5 31 (之上端面，係固定設置有用以支持上段盒部532之上段支 持構件534。 上段盒部532係利用上段支持構件534而支持，並固定 設置於下段接受部531之上部。上段盒部532係具有頂面 為開放的盒子形狀，上板構件533係以覆蓋該頂面之方式 .設置，並被關閉。上板構件533係形成有以圖示χ軸方向 -作為長度開口方向之狹縫開口部533a。上板構件533係 以成為上段盒部532之蓋的方式而被安裝，被嵌入為可從 上段盒部532取下。另外，若上板構件533被安裝於上段 96149871 18 200911388 现P 532 ’則狹缝開口部533a係作用為上段盒部之 内部空間與外部空間的開孔。 上板構件533之頂面係被固定設置為與台座21之頂面 ，致相同向度（參照圖4之高度d)。上段盒部532及上 構件533之台座21側的側面，係在該台座21附近形成 既定的間隙（參照圖4之間隙a)並固定設置。另外，上 板構件533之頂面係相對於載置為從台座21之側面往圖 ^軸正方向超出-部份（參照圖4之長度b)的基板p ，3中係以虛線表示）’配置為其一部份為重疊（參照 :之重叠長度c)。另外，上段盒部532之内 如後述。 又，上段盒部532係於其側面中央位置設置吸引口，盒 ^口及引部536係從該吸引σ吸引上段盒部娜内部之氣^ 丄。另外，從上段盒部532内部被吸引之氣體（包含上段 j 532内部所產生之靄狀有機此材料）係藉由盒内吸 ^ 536而從上述吸引口被吸引，以排液槽（未圖示）回 &quot;圖4中’上段盒部532及上板構件533之台座21側之 :面係設置為與台座21側面形成間隙&amp;。此間隙&amp;係藉 2 21 Ϊ圖示Y軸方向之平行移動動作或旋轉部22之 、作，没置為台座21與上段盒部532及上板構件5犯 不t涉之㈣’例如為3_。又’基板ρ係相對於台座21 ^面僅於液體接受部53側超出長度b而載置。長度b 係设定為上板構件533之頂面與基板p僅重#長度^因 96149871 19 200911388 此b = a+c，例如長度b=5腿，^疊長度c=2随。上板構件 533之頂面係為了防止從基板p之端部往下方向之漏 較佳係以與台座21之頂面相同的高度而設置，但由於如 上所述，載置於台座21之基板p會平行移動或轉動，因 使必須防止基板P之底面與上板構件533之頂面的干涉。 因此丄上板構件533之頂面係以設置為較台座21之頂^面 僅低高度d ’例如高度d=0. 5〜3. Omm。 另外，為了防止基板P之底面與上板構件533之頂面的 干涉，，以上板構件533之頂面設置為僅較台座2丨之頂 面低了高度d之例進行說明，但在不期待此種效果之情 況’ f可將上板構件533之頂面設置為台座21之頂面以 上的咼度。若上板構件533之頂面係設置為至少較喷嘴 52a〜52c之前端部更低，則可防止液體接受部53與噴 52a〜52c之干涉。 ' ' 其次’參照圖5 ’針對噴嘴52a〜52c與液體接受部53 之位置關係進行說明。另外，圖5中主要顯示噴嘴 52a〜52c、液體接受部53以及基板p ,其他部位係省略表 不。又’液體接受部53僅圖示上段盒部532及上板構件 3如上所述^對於基板P塗佈有機el材料時，在塗 佈開始及結束之時間點、或者X軸方向折返之時間點等， 喷嘴52a〜52c係配置於液體接受部53之上部空間。此時， 喷嘴52a~52c係從液體接受部53之上方，朝狹縫開口部 533a而吐出液柱狀態之有機EL材料。 設置液體接受部53，俾當噴嘴52a〜52c移動至液體接 96149871 20 200911388 受部53之上部空間時， 材料會通過狭縫開σ^31 ^ 為. 邻533a並以上段盒部532之内部接 又=P ’狹缝開口部5咖係形成為當喷嘴^ X軸方向移出基板P外時， ^ 部（吐出口）之正下1 喷嘴52邊之各前端A flow meter 543 for taking the organic J from the supply source and detecting the flow rate of the organic EL material. . The second control unit 3 controls the i-th to third supply units _^. :: The operation of the stage 23 and the nozzle moving mechanism unit 51. The use of PE (polyethylene), pp (two 52; C, each pipe, etc. as a material of the pipe member.), TM (10) (registered trademark) nozzle 52a has a reduction of Qiu 7. Recognized by 54a徂~^ The money is used to remove the foreign matter from the first supply, and the foreign matter in the organic EL material supplied has a filter portion 521b for removing the foreign matter in the material supplied from the supply portion 54b. The nozzle 52c has a filter unit for removing foreign matter supplied from the third supply unit 54c. In addition, since the nozzles 52a to 52c are hereinafter, the symbol "52" is given, and the surface of the substrate p which is coated with the red organic bismuth material is placed in parallel, and a plurality of $ 士斗, # i are arranged side by side. ^ The shape of the material: coated organic el 7 shocked groove. As the organic EL material, for example, an organic EL material having a viscosity which is viscous on the substrate p can be used, and the flow of the four-way method can be used in a specific manner, and the high-concentration of each color can be used. 96149871 15 200911388 Sub-type organic EL material. The Harriet g γ supports a freely rotatable 50-axis rotation around a given support shaft, and the control of the manufacturing portion 3 rotates around the support shaft to adjust the coating pitch interval. The control system adjusts the angle of the rotating portion 22 according to the position or the square of the substrate ρ placed on the pedestal 21. The wei belt is in the direction of the groove of the substrate 其: Λ, the cover calculates the starting point of the coating (also That is, it is formed on the coating start position at which the coating is started on the end side. Further, the coating start position is transmitted as a liquid upper portion 9 of the liquid receiving portion 53, and the (four) portion 3 drives the parallel movement a and the nozzle moving mechanism portion 51 as described above. In the 卞仃 卞仃 口 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 At this time, the control = 3 is a wide range of the organic EL material at each point of the strip-shaped groove and the liquid pilling state of the organic π upper species I 岣 9 152c: corresponding to the flow information of the nozzles 543a to 543c It is coated in the 'and will be from the flowmeter system · Γ # right broadcast PT U 5 ° shell and enter the light control. Moreover, the control unit 3 controls the nozzle unit to move along the guide member 511 in order to cause the organic EL material to flow into the groove on the substrate p, and to cause the organic anion material to: Inside the ditch. By this operation, the liquid columnar smear is discharged from the respective nozzles 52a to 52c into the respective grooves. And the work color organic EL material is simultaneously flown into the other liquid receiving portion 53 if the control unit 3 is located on the substrate ρ across the substrate ρ and fixed to the other end portion, then at =, b52a When the discharge of the organic EL material of the ~52c is continued, the movement of the nozzle unit by the nozzle moving mechanism unit 51 is stopped once. 'The organic EL material is more than 3 J. The error is caused by the specific The mouth 5 &amp; 52c spits out the f-class of the same color, and therefore the organic EL material is applied to the groove of the total of three lines of the cloth object in every three rows. Next, the control unit 3 applies the distance of the parallel moving stage 23 to the organic EL material of the groove to be coated. In addition, &quot;, if the nozzle unit 5 is made. From the other liquid receiving portion 53 on the substrate P and on the liquid receiving portion 53, it is. When the σ soil of the organic EL material is continued, the movement of the nozzle unit 50 by the ejection mechanism unit 51 is stopped. By the movement of the second slave, the organic EL material ends the coating of the next three lines of the ditch. 2 Hunting is repeated by this action. The red organic EL material flows into the groove of the coating amount in red. Next, the liquid receiving portion 53 will be described with reference to Figs. 3 to 6, and Fig. 3 is a perspective view showing the structure of the liquid receiving portion 53. Fig. 4 is a schematic side view showing the liquid receiving portion 53 as seen from the direction D of Fig. 3. Fig. 5 shows that the organic tantalum material discharged from the nozzles 52a to 52c is fluid-consistent. A perspective view of the positional relationship of P 53. Fig. 6 is a perspective view showing the positional relationship of the liquid receiving portion 53 when the nozzles 52a to 52c are moved. Further, the liquid receiving portions 53L and 53R which are located on both sides with respect to the pedestal 21 (see FIGS. 3 to 6 have the same structure which is symmetrical to the pedestal 21, and FIG. 3 to FIG. 6 show one of them as the liquid receiving portion 53. ' 96149871 In the liquid receiving portion 53 of the present invention, the liquid receiving portion 53 includes a lower receiving portion 531, an upper portion, a lower plate member 533, an upper support member 534, and an in-box suction portion 536. The 531 is connected to the nozzle moving mechanism portion 51, for example. The setting of the solid f is such that the positional relationship with the nozzle moving mechanism portion 51 is constant. The lower receiving portion 531 is attached to the lower σ of the pedestal 21 of the upper casing portion 532, and its position is the nozzle 52&amp; When moving between the substrate p and the upper casing (the 卩532), an organic EL material or the like which leaks from the gap between the substrate P and the upper casing portion 532 can be received. The inside of the upper casing portion 532 is spit out, and the organic EL material is The discharge line 535 (refer to FIG. 7) provided in the lower portion of the upper casing portion 532 flows down into the lower receiving portion 531. Further, the organic EL material which is discharged from the lower portion 531 is transmitted from the lowermost position thereof. Outflow path (not In addition, the inside of the lower receiving portion 531 may be provided with a partial exhausting portion for attracting a gas in a space in the vicinity of the side surface of the pedestal 21. Further, the lower receiving portion 5 31 The upper end surface is fixedly disposed to support the upper support portion 534 of the upper casing portion 532. The upper casing portion 532 is supported by the upper support member 534 and fixedly disposed above the lower receiving portion 531. The upper casing portion 532 has a top portion. The upper plate member 533 is provided in such a manner as to cover the top surface, and is closed. The upper plate member 533 is formed with a slit opening portion 533a in the direction of the x-axis as the length opening direction. The upper plate member 533 is attached so as to be the cover of the upper casing portion 532, and is fitted to be detachable from the upper casing portion 532. Further, if the upper plate member 533 is attached to the upper portion 96149871 18 200911388 now P 532 ' The slit opening portion 533a functions as an opening of the inner space of the upper box portion and the outer space. The top surface of the upper plate member 533 is fixedly disposed to be the same as the top surface of the pedestal 21 (refer to FIG. 4 The height d) is a side surface of the upper casing portion 532 and the upper member 533 on the pedestal 21 side, and a predetermined gap (refer to the gap a in Fig. 4) is formed in the vicinity of the pedestal 21, and is fixedly disposed. Further, the top surface of the upper plate member 533 With respect to the substrate p, 3 which is placed beyond the side of the pedestal 21 from the side of the pedestal 21 in the positive direction of the drawing (refer to the length b of FIG. 4), it is arranged as a part of the overlap ( Reference: the overlap length c). The upper box portion 532 is as described later. Further, the upper box portion 532 is provided with a suction port at the center of the side surface thereof, and the box mouth portion and the lead portion 536 attract the upper box from the suction σ. The internal gas of the Ministry of Health ^ 丄. Further, the gas sucked from the inside of the upper casing portion 532 (including the organic material generated inside the upper j 532) is sucked from the suction port by the suction inside the casing 536 to discharge the liquid tank (not shown). In the middle of the pedestal 21 side of the upper box portion 532 and the upper plate member 533 in Fig. 4, the surface is disposed to form a gap &amp; with the side surface of the pedestal 21. This gap &amp; is caused by the parallel movement of the Y-axis direction or the rotation of the rotating portion 22, and is not placed in the pedestal 21 and the upper box portion 532 and the upper plate member 5 (4), for example 3_. Further, the substrate ρ is placed on the liquid receiving portion 53 side beyond the length b with respect to the pedestal 21 surface. The length b is set such that the top surface of the upper plate member 533 and the substrate p are only heavy #length^9616871 19 200911388 This b = a+c, for example, the length b = 5 legs, the length of the stack c = 2. The top surface of the upper plate member 533 is preferably provided to prevent the leakage from the end portion of the substrate p in the downward direction to be the same height as the top surface of the pedestal 21, but as described above, the substrate placed on the pedestal 21 The p moves or rotates in parallel because it is necessary to prevent interference between the bottom surface of the substrate P and the top surface of the upper plate member 533. Omm。 The top surface of the upper plate member 533 is set to be a lower surface height than the pedestal of the pedestal 21, such as a height d = 0.5 to 3. Omm. Further, in order to prevent interference between the bottom surface of the substrate P and the top surface of the upper plate member 533, the top surface of the upper plate member 533 is set to be lower than the top surface of the pedestal 2 高度 by a height d, but it is not expected In the case of such an effect, the top surface of the upper plate member 533 can be set to a degree above the top surface of the pedestal 21. If the top surface of the upper plate member 533 is disposed at least lower than the front end portions of the nozzles 52a to 52c, the interference of the liquid receiving portion 53 with the sprays 52a to 52c can be prevented. The positional relationship between the nozzles 52a to 52c and the liquid receiving portion 53 will be described with reference to Fig. 5'. Further, in Fig. 5, the nozzles 52a to 52c, the liquid receiving portion 53, and the substrate p are mainly shown, and other portions are omitted. Further, the liquid receiving portion 53 is only shown when the upper portion of the box portion 532 and the upper plate member 3 are coated with the organic EL material on the substrate P as described above, at the time when the coating starts and ends, or when the X-axis direction is folded back. The nozzles 52a to 52c are disposed in the upper space of the liquid receiving portion 53. At this time, the nozzles 52a to 52c discharge the organic EL material in the liquid column state from above the liquid receiving portion 53 toward the slit opening portion 533a. The liquid receiving portion 53 is provided, and when the nozzles 52a to 52c are moved to the upper space of the receiving portion 53 of the liquid connection 96149871 20 200911388, the material is opened by the slit σ^31 ^. The adjacent 533a and the inner portion of the upper box portion 532 Further, the 'P slit opening portion 5 is formed so that when the nozzle X axis direction moves out of the substrate P, the front end of the ^ portion (discharge port) and the front end of the nozzle 52 are formed.

之務二 位置之全部。因此，喷嘴52㈣C =方向U轴方向）與狹縫開口部533a之長 、1⑨5 2 a 5 2 c之別端jijj沾固—7 i» a 上形成。在此，為了對；軸方二、㈣方向（垂直方向） 軸方向所亚列設置之3行份量的 ^5,日1佈有機EL材料，噴嘴52a〜…係往圖示 向稍微偏移而配置。狹縫開口部5咖係具有由該等 =〜52c以液柱狀態吐出之有機EL材料可全部通過的寬 又’若如圖5所示般將喷嘴52a〜故配置於液體接受部 之上口|3空間，則喷嘴52a〜52c會往屬於X轴負方向 圖示c方向高速移動（圖6)。如圖6所示，當嘴嘴5 從液體接受部53之上部空間往圖示C方向移動時，從該 贺嘴52a〜52c吐出之有機EL材料至吐出於基板p上為 止，亦全部以液柱狀態通過狹縫開口部533a而回 ： 段盒部532中。 上 其次，參照圖7〜圖9，針對上段盒部532之内部構告 行說明。另外，® 7係對圖3之剖面A_A由β方向看= 上段盒部532之剖面圖。圖8係削除上段盒部5犯之一立 刀的側面及上板構件5 3 3之一部分（具體而言為γ軸負方 96149871 21 200911388 向側之側面、X軸正方向侧之侧面、以及上板構件5犯之 Y軸負方向側構件）的液體接受部53之立體圖。圖9係 •顯示喷嘴52a〜52c與傾斜面537之位置關係的概要圖。’、 S 7及圖8中，上段盒部5 3 2係於其内部固定設置有傾 .斜面537。傾斜面537係設置於上段盒部532中狹縫開口 部533a之下方位置，在喷嘴單元5〇往返移動之χ軸方向 上延伸設置。另外，傾斜面537係相對於噴嘴單元往 (返移動之方向的垂直水平方向（亦即γ軸正方向或Υ軸負 方向往下方傾斜。傾斜面537係表面為平滑的板狀構 件，係由例如不銹鋼板或表面被氟樹脂被覆之板材所構 成。另外，傾斜面537並不限定於板狀構件， 構件或中空構件之一侧面構成。 ^ 又，傾斜面537之下端係接合於上段盒部532 iY軸方 向侧之側面。另外，圖7及圖8之―例中，由於傾斜面 537係往Υ軸負方向侧傾斜，故該傾斜面537之下端係接 I &amp;於上#又益部532之Υ軸負方向側之侧面。又，傾斜面 537之兩側部係分別接合於上段盒部5犯之χ軸方向侧的 侧面（參照圖8)。另外，傾斜面537之下端與上段盒部 5+32之侧面的接合部上側附近，係設有排出管線535，沿 著傾斜面537而流下之有機EL材料係通過排出管線535， •流下至下段接受部531内。又’在有機EL材料塗覆於傾 _斜面537之位置的下方之上段盒部532之側面，係連接著 吸引傾斜面537之上部空間的氣體之盒内吸引部536之吸 引口。具體而言’盒内吸引部536之吸引口係較有機乩 96149871 22 200911388 ^料塗覆之位置更低，較排出管線挪所設置之位置更 间°又置於與傾斜面537之上部空間連通的上段盒部532 之側面。因此，盒内吸引部536係於上段盒部532内部， 由°亥傾斜面537之下端侧，沿著該傾斜面537吸引傾斜面 ' 537之上部空間的氣體等。 藉由此種上段盒部532之構造，在液體接受部53之上 邛，間中彳丈噴嘴52a〜52c吐出之有機El材料（圖7~圖9 『中係以塗佈液L1〜L3表示）係透過狹縫開口部533a，全 指覆於傾斜面537。另外，如圖8所示，塗覆於傾斜面 537之有機EL材料係沿著傾斜面537朝其傾斜方向流下， 由排出管線535流下至下段接受部531内。又，盒内吸引 部536係產生沿著傾斜面537而吸引之氣流，並在從喷嘴 吐出之有機EL材料所塗覆之部位附近，發生吸 引氣抓因此，當在傾斜面537上產生靄狀之有機EL材 料的情況，被靄化之有機EL材料係由盒内吸引部咖之 (:吸引口被吸引。 在此，傾斜面537係配置於較液體接受部53之上部空 間中由，嘴52a〜52c吐出之有機虹材料從液柱狀態開始 分裂之两度更為上方。另外，傾斜面537相對於水平方向 之傾斜角度α，為了使塗覆之有機EL材料迅速地流下， .較佳係儘量接近垂直方向。然而，如圖9所示，由於為了 -確保塗佈間距間隔，使喷嘴52a〜52c朝γ軸方向若干偏移 而配置，故喷嘴52a〜52c各自的前端部與傾斜面537之距 離係分別不同。因此，傾斜面537之配置方式為，從喷嘴 96149871 23 200911388 52a〜52c :自的前端部與傾斜面537之距離 52a〜52c所吐出之古4叙PT u ^ 97 ^ ^ 吐出之塗佈液丨1 之财係從噴嘴52a L1)係以液柱狀態恆常塗覆。且 傾斜面537之今罟士 &amp; &amp; ，、體而§ ’ 面印之最長距嘴心敗各前端部與傾斜 H1係未滿可保證所吐出之有 的液柱狀態之距離（例如2_)。又有材科 必项防止^(圖9之例中為噴嘴_， 之二面537之干涉°亦即’最接近傾斜面挪 、 a 2c之别端部與傾斜面537之距離H2，苹 程度上必須確伴。以、岔^ 茶種 置k罝接近垂直方向的傾斜角度α即可，例 疋為傾斜角度α =60。。 “ 〇又 =^述構成，吐出於基板？外的有機此材料，係以 二2533a’塗覆於傾斜面53?並回 柱狀if跳内。因此，從噴嘴如~52。所吐出之液 材料係在因表面張力而液滴化之前，ί °塗覆傾斜面537。又，塗覆於傾斜© 537上之有機ΡϊThe second part of the business. Therefore, the nozzle 52 (four) C = direction U-axis direction) is formed on the length of the slit opening portion 533a and the other end of the 195 2 a 5 2 c. Here, in order to correct the axial direction of the axial direction in the direction of the axial direction (the vertical direction) (the direction of the vertical direction), the organic EL material is applied, and the nozzles 52a to ... are slightly shifted toward the drawing. Configuration. The slit opening portion 5 has a width in which all of the organic EL materials discharged by the liquid column state can be passed through, and the nozzle 52a is disposed above the liquid receiving portion as shown in FIG. In the case of the 3 space, the nozzles 52a to 52c move at a high speed in the direction of the c-axis in the negative direction of the X-axis (Fig. 6). As shown in Fig. 6, when the mouthpiece 5 is moved from the upper space of the liquid receiving portion 53 to the direction of the drawing C, the organic EL material discharged from the heels 52a to 52c is discharged to the substrate p, and all of the liquid is also liquid. The column state is returned to the segment case portion 532 through the slit opening portion 533a. Next, the internal structure of the upper box portion 532 will be described with reference to Figs. 7 to 9 . In addition, the section 7 of the Fig. 3 is viewed from the β direction = the upper section of the box portion 532. Fig. 8 is a view showing a side surface of one of the vertical blades and a part of the upper plate member 533 formed by the upper box portion 5 (specifically, the side of the γ-axis negative side 96149871 21 200911388 side, the side of the positive side of the X-axis, and A perspective view of the liquid receiving portion 53 of the Y-axis negative direction side member which the upper plate member 5 makes. Fig. 9 is a schematic view showing the positional relationship between the nozzles 52a to 52c and the inclined surface 537. In the case of ', S7 and Fig. 8, the upper box portion 523 is fixedly provided with a tilting 537 inside. The inclined surface 537 is provided below the slit opening portion 533a of the upper casing portion 532, and extends in the direction of the x-axis of the reciprocating movement of the nozzle unit 5. Further, the inclined surface 537 is inclined with respect to the nozzle unit in the vertical horizontal direction of the returning direction (that is, the positive direction of the γ-axis or the negative direction of the y-axis. The surface of the inclined surface 537 is a smooth plate-shaped member. For example, the stainless steel plate or the plate whose surface is covered with the fluororesin is not limited to the plate member, and the member or one side of the hollow member is formed. ^ Further, the lower end of the inclined surface 537 is joined to the upper box portion. 532. The side of the iY axis direction side. In addition, in the example of FIGS. 7 and 8, since the inclined surface 537 is inclined toward the negative side of the yaw axis, the lower end of the inclined surface 537 is coupled to the I &amp; The side surface of the 532 is the side surface on the negative side of the yoke axis. Further, the both side portions of the slanted surface 537 are joined to the side surface on the side of the yaw axis direction of the upper box portion 5 (see Fig. 8). A discharge line 535 is provided in the vicinity of the upper side of the joint portion on the side surface of the upper box portion 5+32, and the organic EL material flowing down along the inclined surface 537 passes through the discharge line 535 and flows down to the lower receiving portion 531. Organic EL material coated on tilting The side of the upper box portion 532 below the position of the 537 is connected to the suction port of the in-casing suction portion 536 of the gas that attracts the upper space of the inclined surface 537. Specifically, the suction port of the in-box suction portion 536 is more organic.乩96149871 22 200911388 The material coating position is lower, and is placed on the side of the upper box portion 532 which communicates with the upper space of the inclined surface 537 more than the position where the discharge line is disposed. Therefore, the in-box suction portion 536 It is attached to the inside of the upper box portion 532, and is attracted to the upper surface of the inclined surface '537 along the inclined surface 537 by the lower end side of the inclined surface 537. By the structure of the upper box portion 532, the liquid is received. Above the portion 53, the organic EL material (shown in the middle of the coating liquids L1 to L3 in the middle of the nozzles 52a to 52c) is passed through the slit opening portion 533a, and the entire finger is inclined. In addition, as shown in Fig. 8, the organic EL material applied to the inclined surface 537 flows down in the oblique direction along the inclined surface 537, and flows down from the discharge line 535 to the lower receiving portion 531. The portion 536 is attracted along the inclined surface 537 The airflow is generated in the vicinity of the portion where the organic EL material is ejected from the nozzle, so that the organic EL material is formed on the inclined surface 537, and the organic EL material is degraded by the box. The inner suction portion is (the suction port is attracted. Here, the inclined surface 537 is disposed in the upper space of the liquid receiving portion 53, and the organic rainbow material discharged from the nozzles 52a to 52c is split twice from the liquid column state. Further, the inclination angle α of the inclined surface 537 with respect to the horizontal direction is preferably as close as possible to the vertical direction in order to allow the coated organic EL material to rapidly flow down. However, as shown in Fig. 9, since the nozzles 52a to 52c are arranged to be slightly offset in the γ-axis direction in order to ensure the coating pitch interval, the distance between the tip end portion of each of the nozzles 52a to 52c and the inclined surface 537 is different. . Therefore, the arrangement of the inclined surface 537 is from the nozzle 96149871 23 200911388 52a to 52c: the coating liquid discharged from the front end portion and the inclined surface 537 by the distances 52a to 52c. The 1st money is constantly applied from the nozzle 52a L1) in a liquid column state. And the sloping surface 537 of the current gentleman &amp;&amp; & § ' face of the longest distance between the front end and the tilt H1 system is not full to ensure the distance of the liquid column state (such as 2_ ). There is also a material to prevent ^ (in the example of Fig. 9 is the nozzle _, the interference of the two sides 537, that is, the closest to the inclined surface, the distance between the end of the a 2c and the inclined surface 537, H2 It must be accompanied by. The 茶^ tea type can set the inclination angle α of k罝 close to the vertical direction, for example, the inclination angle α = 60. “ “ === 述 述, spit out of the substrate? The material is applied to the inclined surface 53 with two 2533a' and back into the column if jump. Therefore, from the nozzle such as ~52. The liquid material discharged is before the dropletization due to surface tension, ί ° coating Inclined surface 537. Also, organic enamel applied to the tilt © 537

材料係於:a：傾斜方Α冷丁 、 有機EL J斜方向流下，亚流下至下段接受部53i内。 該有機t以液柱狀態塗覆有機此材料之傾斜面537上， ^^ 不會以積存之狀'態（積液）殘存。亦即， 子於積存於傾斜面537上之積液， 柱狀態之有機Ρϊ妯祖，·^ &amp; L /繼續塗覆液 入該積液Γ 柱狀態之有機el材料進 k成靄狀之有機EL材料的產生。又，於傾 上產生靄狀之有機EL材料的情況，亦被吸引至盒 96149871 24 200911388 =二536，故可確實防止靄狀之有機ε“ 液體接受部53外部。 如此，本實施形態之塗佈裝置的上段各 部設有傾斜面537，故吐出至上段盒部=5 =於其内 材料不會再度往外部飛难。又，藉由對傾斜面537^= 機EL材科之部位進行吸引，當上段盒部532 f 之情況，亦可確實防止往外= 此’盒内吸引部536所吸引之上段盒部嫩之内部 ^間係被傾斜面537所限定之空間，因此其 ==有效率地回收霸狀之有機EL材料。因： 附著二4 板外之有機el材料落下至基板p上並 附者之炀況，可防止塗佈不良。 二:===對”嘴… 面，向㈣方傾斜之1個傾斜 n &amp;置其他態樣之傾斜面。以下參照® 10及圖 ’對傾斜面之其他態樣例進行說明 盒部心傾斜面539的一例之上段 傾其内部固定設置有谷型的 538b) _ 的一傾斜面為538a’另一傾斜面為 ^犯之狹縫開口部5恤的下方位置， = 返移動之x軸方向上延伸設置。另外，傾斜面:二： 96149871 25 200911388 對於垂直於噴嘴單元50往返移動之方 (圖10中為Y軸正方向），於下方傾 的一水平方向 係相對於垂直於喷嘴單元5〇往 ^傾斜面5咖 .方向⑷。…軸負方向)，於移下:::向 • 斜面5咖及538b，形成谷型之傾斜面⑽。傾 2 及均為表面平滑的板狀構件，例如係由不 銹鋼板或表面被氟樹脂被覆之板材所構成。另外，傾 :二此並不限於板狀構件，亦可由分別形成為實心 構件或中空構件之2個側面所構成。 又斜面5撕及5篇之上端係分別接合於上板構件 533之底面或上段盒部532之¥軸方向側的側面。傾斜面 538a及538b之各兩侧部係分別接合於上段盒部532之X 軸方向側的侧面。另外，於傾斜面538&amp;及53此之下端之 間（亦即谷底部）係形成狹縫狀的間隙，從傾斜面53仏 及538b之下端開始至氣液分離盒55為止，係由連接構件 所連接。藉由該連接構件，形成於傾斜面538a及53扑之 下端的狹縫狀間隙與氣液分離盒55被連通。另外，氣液 分離盒55之上部係連接著盒内吸引部536之吸引口，氣 液分離盒55之下部係連接著朝下段接受部531之排出管 線535。藉此，介隔著氣液分離盒55及上述連接構件， 形成於傾斜面538a及538b之下端的狹縫狀的間隙與盒内 吸引部536之吸引口被連通。因此，盒内吸引部536係於 上段盒部532内部，將傾斜面538之上部空間的氣體等從 該傾斜面538之谷底侧沿著該傾斜面538而吸引。 96149871 26 200911388 i〇所示之上段盒部532之構造，於液體接受部 間中，52一出之有㈣頻塗 ’文3)係介隔者狹縫開口部533a而全部塗覆於谷 型之傾斜面538上。另外，如_ 1Λ ^ 復、 ^ 卜如圖10所不，塗覆於傾斜面 上述連接沿著傾斜面538朝其谷底方向流下， 述1接構件係介隔著氣液分離± 55以及排出管線 上Γ二接受部531流下。χ ’存在於谷型之傾斜面 H空間之氣體係介隔著上述連接構件及氣液分離盒 55,從盒内吸引部536之吸引口被吸引。亦即，盒内吸引 538 5.52c吐出之有機EL材料所塗覆之 引氣流。 &lt; 座王次 在此’傾斜面538亦配置於較液體接受部53之上部* 間中從喷嘴52a〜52c吐出之右嬙p了从土丨Ββ 工 有機£L·材料開始從液柱狀態 /刀裂之高度更上方處。另外，傾斜面538相對於水平方向 (傾斜角度，為了使塗覆之有機EL材料迅速地流下，亦以 儘可能接近垂直方向為佳。然』，傾斜面538肖上述傾斜 面537相同，為了避免與喷喈^ 町X-、賀％ 52a〜52c之干涉，配置方式 必須為從喷嘴52a〜52c各自的前端部與傾斜面⑽之距離 為最長的喷嘴52a〜咖所吐出之有機此材料係以液柱狀 .態恆常塗覆。因此’傾斜面538亦在滿足此種條件之範圍 内，儘可能以接近垂直方向之傾斜角度設置。 圖11中’上段盒部532係於其内部固^設置有山型之 傾斜面539 (以山型之-傾斜面為_，另一傾斜面為 96149871 27 200911388 ㈣）。傾斜面539係與傾斜面5 於上段盒部⑽之狹縫開口部5==地’設置 單元進行往返移動之Μ方向二=^置:喷嘴 斜面伽係_於與対單元外，傾 直之-水平方向（圖 仃在返移動之方向垂 又，傾斜面539b相對於與噴嘴單元5方二：下方傾斜。 向垂直之另一水平方向（圖u中為n返=之方 傾斜。另外，藉由！組的傾斜面5咖及53^2 = 539。例如，傾斜面伽及伽㈣ 表面平滑之實心構件的？侗加I J办烕於 構件戎矣而&gt; '所構成，例如係由不銹鋼 :或表面被咖旨被覆之構件 板狀構件而成之構件或中空構件的2個側面所構成。 X二Γ斜面539之兩側部係分別接合於上段盒部532之 軸方向側的側面。又，傾斜面伽及_之下端（亦 p :裙）係與上段盒部532之丫軸方向侧 =隔著該間隊’於上段盒部532之内部空間1 及5咖之上部空間與上段盒部532之下部空間 ,、、通。另外，位於較傾斜面53仏及539b更為 之側面（圖U中為γ轴負方向側之側面），係 盒^j部536 _卜又，位於較傾斜面咖 &quot;、、下方之上段盒部532之侧面係連接著排出管 線咖。因此，盒内吸引部536係於上段盒部532内部出中吕， 將相對於山型傾斜面539之下部空間的氣體等，從該傾斜 9614987] 28 200911388 面539之山裙側進行吸引。又，從傾斜面53仏及53牝朝 上段盒部532之底面流下之有機EL材料係從排出管線挪 朝下段接受部5 31流下。 藉由圖11所示之上段盒部532之構造，液體接受部53 之上部空間中，從喷嘴52a〜52c吐出之有機EL材料（塗 佈液L1〜L3)係介隔著狹縫開口部533a，全部塗覆於山型 之傾斜面539。另外，如圖11所示，塗覆於傾斜面539 之有機EL材料係沿著傾斜面539朝其山裙方向流下，從 排出管線535朝下段接受部531流下。又，當在傾斜面 二上產生靄狀之有機EL材料之情況，被靄化之有機乩 ^斗係被朝上段盒部532之下部空間引入，從盒内吸引部 536之吸引口被吸引。 在此’傾斜面539亦配置於較液體接受部53之上部空 =攸喷嘴52a〜52c吐出之有機EL材料從液柱狀態開始 /刀裂之兩度更為上方處。另夕卜傾斜面咖相對於水平方 向之傾斜角度’為了使塗覆之有機EL材料迅速流下，亦 以儘可能地接近垂直方向為佳。然而，傾斜面539亦與上 述傾斜面537及538同樣，必須配置為迴避與喷嘴似〜52c 之干涉’且從喷嘴52a〜52c各自的前端部與傾斜面5如之 距離最長的噴嘴52a〜52c吐出之右嫵u &quot; 狀態進行塗覆。因此，傾斜面539有^在^才料值常以液柱 R ^亦在滿足此種條件之範 圍内，儘可能以接近垂直方向之傾斜角度設置。 斜面使本^月中所使用之上段盒部532内所設置之傾 斜面’可以1個傾斜面、谷型傾斜面以及山型傾斜面等各 96149871 29 200911388 種心樣的傾斜面實現。此 ^ ^ ^ ia ^ 卜本案發明所使用之傾斜面並 不限於相對於水平方向傾 ^ turn ^ ύ Α 钟之1個平面（傾斜面537 )或 複敦個+面之組合（倾斜 , λg 斜面538、539 )，亦可以相對於水 十方向傾斜之曲面構成。 ^ ^ ^ ^ 成例如，如傾斜面537般以1個平 面構成之恶樣中，亦可蔣贫 ^ ,, 、5Λ 1個的平面以凸或凹形狀之1 個曲面構成而形成傾斜 又，如傾斜面538般將2個平 ::為合型而構成之態樣中，亦可將該2個平面以凹形The material is: a: the inclined square crucible, the organic EL J flows downward, and the substream flows down to the lower receiving portion 53i. The organic t is coated on the inclined surface 537 of the organic material in a liquid column state, and ^^ does not remain in the state of accumulation (liquid accumulation). That is, the effusion accumulated on the inclined surface 537, the organic ancestors of the column state, ·^ &amp; L / the organic coating material which continues to apply the liquid into the sputum column state into a 霭 shape Production of organic EL materials. Further, in the case where the organic EL material which is in the form of a ruthenium is poured, it is also attracted to the case 96149871 24 200911388 = two 536, so that the organic ε of the 霭-shaped liquid receiving portion 53 can be surely prevented. Thus, the coating of the present embodiment Each of the upper portions of the cloth device is provided with an inclined surface 537, so that the upper portion of the box portion = 5 = the material does not fly to the outside again. Further, by attracting the inclined surface 537^= the EL material of the machine In the case of the upper box portion 532 f, it is also possible to surely prevent the outer portion = the inner portion of the upper box portion attracted by the in-box suction portion 536 from being defined by the inclined surface 537, so that the == efficient The organic EL material is recovered from the hegemony. The organic EL material attached to the second and fourth plates is dropped onto the substrate p and attached to the substrate to prevent poor coating. Second: ===对"口... Face, toward (4) One tilt of the square tilt n &amp; an inclined plane of other aspects. In the following, an example of another example of the inclined surface of the case will be described with reference to the Japanese Patent Application Serial No. 1-10, and the other embodiment of the inclined surface of the slanted surface 539. The slanted surface of the valley-shaped 538b) _ is 538a'. The position below the slit opening 5 of the slit is extended in the x-axis direction of the return movement. In addition, the inclined surface: two: 96149871 25 200911388 For the side perpendicular to the nozzle unit 50 to reciprocate (the positive direction of the Y-axis in Fig. 10), a horizontal direction inclined downward is inclined with respect to the nozzle unit 5 Face 5 coffee. Direction (4). ...axis negative direction), under the movement::: direction • The slope 5 coffee and 538b form a valley-shaped inclined surface (10). The tilting member 2 is a plate-like member having a smooth surface, and is formed, for example, of a stainless steel sheet or a sheet whose surface is covered with a fluororesin. Further, the tilting is not limited to the plate member, and may be formed by two side faces which are respectively formed as a solid member or a hollow member. Further, the upper surface of the upper surface of the upper plate member 533 or the side surface of the upper casing portion 532 on the side of the axial direction of the upper plate member 533 is joined to the upper surface of the upper surface of the upper plate member 533. The respective side portions of the inclined faces 538a and 538b are joined to the side faces on the X-axis direction side of the upper casing portion 532, respectively. In addition, a slit-like gap is formed between the inclined surfaces 538 & and the lower end of the 53 (ie, the bottom of the valley), and the connecting member is connected from the lower end of the inclined surfaces 53 仏 and 538 b to the gas-liquid separation cartridge 55 . Connected. By the connecting member, the slit-like gap formed at the lower end of the inclined surfaces 538a and 53 is communicated with the gas-liquid separation cartridge 55. Further, the upper portion of the gas-liquid separation cartridge 55 is connected to the suction port of the cartridge suction portion 536, and the lower portion of the gas-liquid separation cartridge 55 is connected to the discharge line 535 of the lower portion receiving portion 531. Thereby, the slit-like gap formed at the lower end of the inclined surfaces 538a and 538b is communicated with the suction port of the in-casret suction portion 536 via the gas-liquid separation cartridge 55 and the connecting member. Therefore, the in-cylinder suction portion 536 is attached to the inside of the upper casing portion 532, and the gas or the like in the upper space of the inclined surface 538 is sucked from the valley bottom side of the inclined surface 538 along the inclined surface 538. 96149871 26 200911388 The structure of the upper box portion 532 shown in Fig. , is formed between the liquid receiving portions, 52 (4), and the slit opening portion 533a is applied to the valley type. The inclined surface 538 is on. In addition, as shown in FIG. 10, the above-mentioned connection applied to the inclined surface flows down the inclined surface 538 toward the bottom of the valley, and the connecting member is separated by the gas-liquid separation ± 55 and the discharge pipe. The online second receiving unit 531 flows down. χ ‘ exists in the inclined surface of the valley type The air system of the H space is sucked from the suction port of the inside of the cassette suction unit 536 via the connecting member and the gas-liquid separation box 55. That is, the inside of the box attracts the bleed air flow coated by the organic EL material discharged by 538 5.52c. &lt; The seat of the seat is also disposed on the right side of the liquid receiving portion 53 from the nozzles 52a to 52c. / The height of the knife crack is higher. In addition, the inclined surface 538 is inclined with respect to the horizontal direction (inclination angle, in order to make the coated organic EL material flow rapidly, as close as possible to the vertical direction. However), the inclined surface 538 is the same as the inclined surface 537, in order to avoid It is necessary to interfere with the squirting of the shovel X-, X-%, 52a to 52c, and the arrangement of the nozzles 52a to 52c must be the longest nozzle 52a to the inclined surface (10). The liquid column is constantly coated. Therefore, the 'inclined surface 538 is also disposed within an angle close to the vertical direction as far as possible within such a condition. In Fig. 11, the upper box portion 532 is attached to the inside thereof. The inclined surface 539 of the mountain type is provided (the mountain type - the inclined surface is _, and the other inclined surface is 96149871 27 200911388 (4)). The inclined surface 539 and the inclined surface 5 are in the slit opening portion of the upper box portion (10) 5 = = ground 'set unit to make a round-trip movement direction 2 = ^ set: nozzle slope galactic _ outside the 対 unit, tilt straight - horizontal direction (Figure 垂 in the direction of the return movement, inclined surface 539b relative to the nozzle Unit 5 side 2: Tilt down. In the other horizontal direction of the vertical direction (the angle in the figure u is n back = square. In addition, the inclined surface 5 of the ! group is 53^2 = 539. For example, the inclined surface gamma and the gamma (four) surface smooth solid member The structure is composed of stainless steel: a member made of stainless steel: or a member having a surface coated with a member, or two sides of a hollow member. The both sides of the inclined surface 539 are respectively joined to the side surface on the axial direction side of the upper casing portion 532. Further, the inclined surface _ lower end (also p: skirt) and the upper casing portion 532 are in the axial direction side = partition The space between the upper space 1 and the upper space of the upper box portion 532 and the lower space of the upper box portion 532 is connected to the space of the upper box portion 532. In addition, it is located on the side of the inclined surface 53仏 and 539b (Fig. U In the middle side of the negative side of the γ-axis, the box 536 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The portion 536 is in the middle of the upper box portion 532, and the gas is in the space below the mountain-shaped inclined surface 539. In addition, the attraction of the organic EL material flowing down from the inclined surfaces 53A and 53牝 toward the bottom surface of the upper casing portion 532 is shifted from the discharge line to the lower portion receiving portion 5. 31. The organic EL material (coating liquids L1 to L3) discharged from the nozzles 52a to 52c in the upper space of the liquid receiving portion 53 is interspersed with the slit by the structure of the upper box portion 532 shown in Fig. 11 . The opening portion 533a is entirely coated on the mountain-shaped inclined surface 539. Further, as shown in Fig. 11, the organic EL material applied to the inclined surface 539 flows down the inclined surface 539 toward the mountain skirt direction from the discharge line 535. The lower portion receiving portion 531 flows down. Further, when a green EL material having a meandering shape is formed on the inclined surface 2, the deuterated organic crucible is introduced into the lower space of the upper casing portion 532, and is sucked from the suction port of the inside of the casing suction portion 536. Here, the inclined surface 539 is also disposed above the liquid receiving portion 53. The organic EL material discharged from the nozzles 52a to 52c is more than two degrees from the liquid column state/blade. Further, the inclined angle of the inclined coffee face with respect to the horizontal direction is preferably as close as possible to the vertical direction in order to allow the coated organic EL material to flow down rapidly. However, the inclined surface 539 is also required to be disposed so as to avoid the interference with the nozzles like the above-mentioned inclined surfaces 537 and 538, and the nozzles 52a to 52c having the longest distance from the front end portions of the nozzles 52a to 52c and the inclined surface 5, respectively. Spit out the right 妩u &quot; state to apply. Therefore, the inclined surface 539 has a value of the liquid material R ^ and the liquid column R ^ is also within the range satisfying such a condition, and is disposed as close as possible to the vertical direction. The inclined surface is such that the inclined surface provided in the upper box portion 532 used in the present month can be realized by an inclined surface such as one inclined surface, a valley inclined surface, and a mountain inclined surface. The inclined surface used in the invention of the present invention is not limited to the one plane (inclined surface 537) or the combination of the Fudeng + surface with respect to the horizontal direction (turning, λg bevel) 538, 539) can also be formed with a curved surface that is inclined with respect to the water ten direction. ^ ^ ^ ^ For example, in a bad form composed of one plane like the inclined surface 537, the plane of the poor, ^, and 5Λ may be formed by a curved surface of a convex or concave shape to form a slope. In the case where the two flat faces are formed by the inclined surface 538, the two flat surfaces may be concave.

I 、構成而形成傾斜面。又，如傾斜面539般將 個平面組合為山型而構成 僻取&lt;&lt; 態樣中，亦可將該2個平面 以凸形狀之1個曲面構成而形成傾斜面。I, formed to form an inclined surface. Further, in the case of the inclined surface 539, the planes are combined into a mountain shape to form a secluded &lt;&lt;&gt;, and the two planes may be formed by a convex curved surface to form an inclined surface.

又’藉由將上述傾斜面53?設置於上段盒部⑽之内 4會成為對盒内吸引部536被傾斜自537限定之空間進 行吸引的狀態，故較不設置該傾斜面聊而吸引上段盒部 532之内部空㈤，可更為提升吸引效率。然而，藉由於上 段盒部532之内部中設置區隔構件54Q，可進—步提升盒 内吸引部536之吸引效率。以下參照圖12，針對區隔構 件540進行說日月。另外，目12係顯示區隔構件54〇之一 例的上段盒部5 3 2之剖面圖。 圖12中，區隔構件540係固定設置於上段盒部532之 内部。區隔構件540係將上段盒部532之内部中的傾斜面 5 3 7之上部空間，進一步進行分割’更減小盒内吸引部5 3 6 所吸引之空間。具體而言，區隔構件54〇係進一步具有第 1區隔面5 4 0 a，其係设置於傾斜面5 3 7之上部，與該傾斜 面537平行地延伸設置於X軸方向上。第1區隔面54〇a 96149871 30 200911388 之下端係接合於位在盒内吸引部536之吸引口的上部之 上段盒部532之Y軸方向側的側面。又，第1區隔面54〇a 之上端係以第1區隔面54〇a不進入狹縫開口部533a之下 4置的方式，配a又於狹縫開口部533&amp;之一端部（圖a 中為Y軸負方向側之端部）的垂直方向位置。另外，區隔 構件540係具有第2區隔面540b，其接合第i區隔面54〇a 之上端與狹縫開口部533a之上述一端部。 Γ人藉由將此種區隔構件540設置於上段盒部532之内部， ^内吸引部536所吸引之空間變成包夾於傾斜面537與區 隔構件540之狹窄空間。因此，藉由設置區隔構件54〇， 進ν限疋了益内吸引部536所吸引之空間，因此可提升 盈内吸引部536之吸引效率。亦即，可以更大的吸引力對 傾斜面537上塗覆有機此材料之部位進行吸引，即使於 有機EL材料在上段盒部532内靄化之情況，仍可更確實 地防止靄化之有機乩材料漏至外部。 I /又雖如使用圖3等進行說明般，係將盒内吸引部536 從上#又盒部532之内部進行吸引之吸引口於上段盒部532 之側面中央位置附近設置丨個，但吸引口之設置位置及數 1並不限定於此。例如，盒内吸引部536之吸引口亦可在 領斜面537之下端與上段盒部532之側面之接合部上侧附 •近^在有機EL材料塗覆於傾斜面537之位置的下方處， 沿著傾斜面537之下端而設置多個。此情況，只要是可在 ^機EL材料塗覆在傾斜面537之部位有效率地產生吸引 氣抓的位置’上述吸引口不設置於上段盒部532之側面中 96149871 31 200911388 央位置亦可。又，亦可形成於傾斜面537之下端與上段盒 部532之側面的接合部上侧附近，且有機紅材料塗覆ς 傾斜面537之位置的下方處，使盒内吸引部536從具有愈 傾斜面537之下端長度同樣的長軸長度的狹縫狀吸引 口，吸引上段盒部532内。 又，上述實施形態中’係將上板構件533設置為覆蓋上 段盒部532之頂面，但亦可不設置上板構件咖。上板構 :f3係為了在上段盒部532内部產生靄狀之有機EL材 ； 防止11亥靄狀之有機EL材料飛濺至上段盒部532之 外4而》又置。又’藉由縮小開放上段盒部⑽之頂面的面 積，亦可期待提升盒内吸引部⑽之吸引效率的效果。然 而’上述實施形態中，藉由設於上段盒部532之内部的傾 面537〜539，可防止產生靄狀之有機EL材料，藉由盒 内吸引部536，當產生雩壯夕古m ϋτ 皿 ^ ^ 即便上段盒部532之頂面為開 夕冰Γ㉟大之有機EL材料仍不會飛錢至上段盒部5犯 之接j纟不期待上述之上板構件533所造成之吸引效率 升效果的情況’亦可不設置上板構件533。 二2述實施形態中’每當嘴嘴單元50於X轴方向上 嗜嘴嚴-ς便使°座21朝Y轴方向移動既定之間距，使 喷單7L 50與台座21 ；!：日#] V ± m ^ 相對於5亥Y軸方向之相對位置關係 50於X鮎古發明並不限於此。例如亦可為每當喷嘴單元 向僅務叙肖上直線移動，便使該噴嘴單元50朝Y軸方 動既定間距（亦即使有機乩塗佈機構5朝丫轴方 96149871 32 200911388 向移動），使喷嘴單元5G與台座21相對於該方向之 相對位置關係變化。此情況，液體接受部53係與有機此 塗佈機構5 —起朝γ軸方向僅移動間距。 又，上述實施形態、中，於紅、、綠及藍色中，係使紅色之 有機EL材料利用3個！組的喷嘴似〜取而流入基板p 之溝内，但該塗佈步驟係為製造有機EL顯示裝置之中間 步驟。製造有機EL顯示裝置時之處理順序為電洞輸送材 料（PEDOT)塗佈—乾燥—紅色有機EL材料塗佈—乾燥— ^色有機EL材料塗佈—乾燥一藍色有機乩材料塗佈一乾 燥之順序此情;兄，本發明之塗佈裝置可使用於分別塗佈 電洞輸送材料、紅色有機EL材料、綠色有機壯材料以及 藍色有機EL材料之步驟。 又，、亦可從喷嘴52a〜52c分別吐出紅 ' 綠及藍色之有機 E+L材料。此情況’係卩i個塗佈步驟來形成依紅、綠及 藍色之順序排列之所謂條狀排列。又，上述實施形態中， 係利用3個1組的嘴嘴52a〜伽，使有機el材料^入基 板P之各溝内，亦可設置多組之該3個〗組的喷嘴 他〜52c ’使有機EL材料流入基板p之各溝内。此情況， 右各，嘴組分別設置對應於朝X軸方向動作之位置的液 體接又。卩53，則可縮短塗佈處理所耗費之時間，並且 得本發明之效果。 &amp; 、又’上述實施形態中，舉出以有機此材料作為塗佈液 或以電洞輸送材料作為塗佈液之有機EL顯示裝置的製造 裝置為例進行說明，但本發明亦可應用於其他塗佈裝置。 96149871 33 200911388 例如亦可應用於阻劑液或製造S〇G ( Spin On Glass，旋 塗式玻璃）液或PDP (電漿顯示器面板）所使用之塗佈螢 光材料的裝置。又，亦可應用於將製造用以對液晶彩色顯 示器進行色彩顯示而構成於液晶單元内之彩色濾光片所 使用之色材予以塗佈之裝置。 本發明之塗佈裝置可確實回收吐出至作為被塗佈體之 基板之外的塗佈液’作為對基板塗佈液柱狀態之塗佈液的 裝置係為有用的。 以上係詳細說明本發明，但上述說明僅用以例示本發 明，並非用於限定其範圍。只要不脫離本發明之範圍，當 然可進行各種改良與變化。 【圖式簡單說明】_ 圖1係顯示本發明之一實施形態的塗佈裝置】之重要部 位概略構成的平面圖及正面圖。 圖2係顯示圖！之途佈裝置i的控制機能的方塊圖。 圖3係顯示圖！之液體接受部53之構造的立體圖。 =4係由圖3之D方向所見之液體接受部53之側面概 固 ◊ ，„行mi &quot;工百機！ 接受部53之位置關係的立體圖。 圖6係顯示噴嘴52a〜52c移動時與液體接受 置關係的立體圖。 5 3之七 圖7係圖3之剖面A-A由B方向所見 剖面圖。 又識部532 s 96149871 34 200911388 圖8係削除上段盒部⑽之一部分的側面及上板構件 533之一部分的液體接受部53之立體圖。 圖9係顯不嘴嘴52a〜52c與傾斜面537之位置關係的概 要圖。 圖10係顯示形成為谷型之傾斜面538的一例之上段盒 部5 3 2之剖面圖。Further, by providing the inclined surface 53? in the upper portion of the upper casing portion (10), the inner suction portion 536 is attracted to the space defined by the 537. Therefore, the inclined surface is less likely to be attracted to attract the upper portion. The inner space (5) of the box portion 532 can further improve the attraction efficiency. However, by providing the partition member 54Q in the interior of the upper casing portion 532, the suction efficiency of the suction portion 536 in the casing can be further improved. Referring now to Figure 12, the day and month are referred to for the partitioning member 540. Further, the item 12 shows a cross-sectional view of the upper box portion 523 of one of the partition members 54. In Fig. 12, the partition member 540 is fixedly disposed inside the upper box portion 532. The partition member 540 further divides the upper space of the inclined surface 533 in the inside of the upper box portion 532 to further reduce the space attracted by the in-cartridge suction portion 536. Specifically, the partition member 54 further has a first-region partition surface 510a, which is provided on the upper portion of the inclined surface 533, and extends in the X-axis direction in parallel with the inclined surface 537. The first-stage partition surface 54〇a 96149871 30 200911388 is joined to the side surface on the Y-axis direction side of the upper casing portion 532 located at the upper portion of the suction port of the cartridge inner suction portion 536. Further, the upper end surface of the first-region partition surface 54A is such that the first-region partition surface 54A does not enter the lower portion of the slit opening portion 533a, and the a-side portion is at one end of the slit opening portion 533&amp; In Fig. a, the vertical position of the end portion on the negative side of the Y-axis is shown. Further, the partition member 540 has a second zone partition surface 540b that engages the upper end of the i-th partition surface 54A and the one end of the slit opening 533a. By providing such a partition member 540 inside the upper casing portion 532, the space attracted by the inner suction portion 536 becomes a narrow space that is sandwiched between the inclined surface 537 and the partition member 540. Therefore, by providing the partition member 54, the space in which the inner suction portion 536 is attracted is limited, so that the suction efficiency of the inner suction portion 536 can be improved. That is, it is possible to attract the portion of the inclined surface 537 coated with the organic material with greater attraction, and even if the organic EL material is deuterated in the upper casing portion 532, the organic bismuth can be more reliably prevented. The material leaked to the outside. I / /, as shown in Fig. 3 and the like, the suction port that sucks the inside of the box suction portion 536 from the inside of the upper box portion 532 is provided near the center of the side surface of the upper box portion 532, but attracts The position and number of the mouth are not limited to this. For example, the suction opening of the in-box suction portion 536 may also be attached to the upper side of the joint portion of the lower end of the collar slope 537 and the side of the upper box portion 532 at a position where the organic EL material is applied to the inclined surface 537. A plurality are provided along the lower end of the inclined surface 537. In this case, as long as it is possible to efficiently generate the suction grip at the portion where the EL material is applied to the inclined surface 537, the suction port is not provided in the side surface of the upper casing portion 532. 96149871 31 200911388 Further, it may be formed in the vicinity of the upper side of the joint portion between the lower end of the inclined surface 537 and the side surface of the upper casing portion 532, and the position where the organic red material is applied to the inclined surface 537, so that the inner suction portion 536 is more The slit-shaped suction opening having the same long axis length as the lower end of the inclined surface 537 is sucked into the upper casing portion 532. Further, in the above embodiment, the upper plate member 533 is disposed so as to cover the top surface of the upper casing portion 532, but the upper plate member may not be provided. The upper plate structure: f3 is for the purpose of generating a meandering organic EL material inside the upper casing portion 532; and preventing the 11-inch organic EL material from splashing to the outside of the upper casing portion 532. Further, by reducing the area of the top surface of the upper casing portion (10), it is also expected to improve the suction efficiency of the suction portion (10) in the casing. However, in the above-described embodiment, by the inclined surfaces 537 to 539 provided inside the upper casing portion 532, it is possible to prevent the generation of the organic EL material in the shape of a beak, and the suction portion 536 in the casing can generate the m 夕 m m ϋ ϋ Dish ^ ^ Even if the top surface of the upper box portion 532 is an organic EL material of the 35th eve of the eve, it will not fly to the upper part of the box 5, and will not expect the suction efficiency of the upper plate member 533. In the case of the effect, the upper plate member 533 may not be provided. In the second embodiment, each time the nozzle unit 50 is in the X-axis direction, the mouth 21 is moved in the Y-axis direction by a predetermined distance, so that the spray sheet 7L 50 and the pedestal 21; The relative positional relationship of V ± m ^ with respect to the 5-axis Y-axis direction is not limited to this. For example, the nozzle unit 50 may be moved linearly toward the Y-axis every time the nozzle unit moves linearly (only if the organic crucible coating mechanism 5 moves toward the crucible side 96149871 32 200911388), The relative positional relationship of the nozzle unit 5G and the pedestal 21 with respect to the direction is changed. In this case, the liquid receiving portion 53 moves only in the γ-axis direction with the organic coating mechanism 5. Further, in the above-described embodiment, three red organic EL materials are used in red, green, and blue! The nozzles of the group are taken into the grooves of the substrate p, but the coating step is an intermediate step of manufacturing the organic EL display device. The processing sequence for manufacturing an organic EL display device is a hole transporting material (PEDOT) coating-drying-red organic EL material coating-drying-color organic EL material coating-drying-blue organic cerium material coating-drying The order of this; brother, the coating device of the present invention can be used to separately apply the steps of coating the hole transporting material, the red organic EL material, the green organic material, and the blue organic EL material. Further, red 'green and blue organic E+L materials may be ejected from the nozzles 52a to 52c, respectively. In this case, a coating step is formed to form a so-called strip arrangement in the order of red, green and blue. Further, in the above embodiment, the organic EL materials are inserted into the respective grooves of the substrate P by using the three nozzles 52a to 380, and a plurality of sets of the nozzles of the three groups may be provided. The organic EL material is caused to flow into the respective grooves of the substrate p. In this case, the right and the mouth groups are respectively provided with a liquid connection corresponding to the position in the X-axis direction. Further, the time taken for the coating treatment can be shortened, and the effects of the present invention can be obtained. In the above-described embodiment, a manufacturing apparatus of an organic EL display device using a material of the organic material as a coating liquid or a hole transporting material as a coating liquid will be described as an example, but the present invention can also be applied to Other coating devices. 96149871 33 200911388 For example, it can be applied to a resist liquid or a device for coating a fluorescent material used in S〇G (Spin On Glass) or PDP (plasma display panel). Further, it can be applied to a device for applying a color material used for color filters formed in a liquid crystal cell for color display of a liquid crystal color display. In the coating apparatus of the present invention, it is useful to reliably collect the coating liquid discharged to the substrate other than the substrate to be coated as a coating liquid for coating the liquid column state of the substrate. The invention is described in detail above, but is not intended to limit the scope of the invention. Various modifications and changes can be made without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view and a front view showing a schematic configuration of important portions of a coating device according to an embodiment of the present invention. Figure 2 shows the diagram! A block diagram of the control function of the device i. Figure 3 is a display! A perspective view of the structure of the liquid receiving portion 53. =4 is a perspective view of the side of the liquid receiving portion 53 as seen in the direction of D in Fig. 3, and is a perspective view of the positional relationship of the receiving portion 53. Fig. 6 shows the movement of the nozzles 52a to 52c. Fig. 8 is a cross-sectional view of the section AA of Fig. 3 as seen from the direction B. Fig. 8 is a side view of a part of the upper box portion (10) and an upper plate member. Fig. 9 is a schematic view showing the positional relationship between the nozzles 52a and 52c and the inclined surface 537. Fig. 10 is a view showing an example of the upper portion of the inclined surface 538 formed as a valley. 5 3 2 section view.

圖11係顯示形成為山型之傾斜面539的一例之上段盒 部532之剖面圖。 I 圖12係顯示區隔構件54〇之一例的上段盒部532之 面圖。 /圖13係顯示習知之塗佈裝置的噴嘴1〇2〜1〇4與液體接 文部10 5之位置關係的側面概要圖。 圖14係顯示習知之液體接受部106之構造的立體圖。 【主要元件符號說明】 1 塗佈裝置 2 基板載置裝置 3 控制部 5 有機EL塗佈機構 21 台座 22 旋轉部 23 平行移動台 24 導引接受部 25 導引構件 50 噴嘴單元 96149871 35 200911388 51 喷嘴移動機構部 52a 喷嘴 52b 喷嘴 52c 喷嘴 53 液體接受部 53L 液體接受部 53R 液體接受部 54a 第1供給部 54b 第2供給部 54c 第3供給部 55 氣液分離盒 101 台座 102 喷嘴 103 喷嘴 104 喷嘴 105 液體接受部 106 液體接受部 511 導引構件 521a 過濾部 521b 過濾部 521c 過濾部 531 下段接受部 532 上段盒部 533 上板構件 96149871 36 200911388 533a 狹縫開口部 534 上段支持構件 535 排出管線 536 盒内吸引部 537 傾斜面 538 傾斜面 538a 傾斜面 538b 傾斜面 539 傾斜面 539a 傾斜面 539b 傾斜面 540 區隔構件 540a 第1區隔面 540b 第2區隔面 541a 供給源 541b 供給源 541c 供給源 542a 泵 542b 泵 542c 泵 543a 流量計 543b 流量計 543c 流量計 LI 塗佈液 96149871 37 200911388 L2 塗佈液 L3 塗佈液 P 基板 S 狹縫 a 傾斜角度 96149871 38Fig. 11 is a cross-sectional view showing an example of the upper case portion 532 formed as a mountain-shaped inclined surface 539. I Fig. 12 is a plan view showing the upper case portion 532 of an example of the partition member 54'. Fig. 13 is a side elevational view showing the positional relationship between the nozzles 1〇2 to 1〇4 of the conventional coating apparatus and the liquid interface unit 105. Fig. 14 is a perspective view showing the configuration of a conventional liquid receiving portion 106. [Description of main component symbols] 1 Coating device 2 Substrate mounting device 3 Control portion 5 Organic EL coating mechanism 21 pedestal 22 Rotating portion 23 Parallel moving table 24 Guide receiving portion 25 Guide member 50 Nozzle unit 96149871 35 200911388 51 Nozzle Movement mechanism portion 52a Nozzle 52b Nozzle 52c Nozzle 53 Liquid receiving portion 53L Liquid receiving portion 53R Liquid receiving portion 54a First supply portion 54b Second supply portion 54c Third supply portion 55 Gas-liquid separation cartridge 101 Base 102 Nozzle 103 Nozzle 104 Nozzle 105 Liquid receiving portion 106 liquid receiving portion 511 guiding member 521a filtering portion 521b filtering portion 521c filtering portion 531 lower receiving portion 532 upper portion box portion 533 upper plate member 96149871 36 200911388 533a slit opening portion 534 upper portion supporting member 535 discharge line 536 in the box Suction portion 537 inclined surface 538 inclined surface 538a inclined surface 538b inclined surface 539 inclined surface 539a inclined surface 539b inclined surface 540 partition member 540a first area partition surface 540b second area partition surface 541a supply source 541b supply source 541c supply source 542a pump 542b pump 542c pump 543a flow Meter meter 543b 543c coating liquid meter LI 96149871 37 200911388 L2 L3 liquid coating the coating liquid P substrate S a slit inclination angle 9614987138

Claims (1)

200911388 十、申請專利範圍： 1. 一種塗佈裝置，係將朝垂直下方向之直線棒狀液柱狀 態的塗佈液吐出於基板上，並塗佈該塗佈液者；其特徵為 具備： 喷嘴’其係將上述塗佈液以上述液柱狀態自纟前端部吐 出； 台座’其係將上述基板載置於其頂面； 噴嘴移動機構，其係於上述台座上之空間中，於橫斷該 台座面之方向上，使上述喷嘴往返移動；以及 液體接受部，其係在上述喷嘴移動機構沿著上述橫斷方 向而於離開上述台座上之位置，由上述噴嘴吐出上述塗佈 液並移動該喷嘴時，接受由該喷嘴吐出至上述台座外之上 述塗佈液； 上述液體接受部係包含傾斜面，其係由離開上述台座上 之位置所配置之上述喷嘴的前端部，於垂直下方向之位置 向上述杈斷方向延伸設置，相對於垂直於該橫斷方向的水 平方向傾斜； 上述液體接受部係將從離開上述台座上之位置所配置 之上述噴嘴吐出之塗佈液，以上述液柱狀態塗附於上述傾 斜面並回收。 I•，申請專利範圍第1項之塗佈裝置，其中，上述液體 接文部係進-步含有吸引手段’其係吸引上述傾斜面上塗 附塗佈液之位置附近的空間之氣體。 3.如申請專利範圍第2項之塗佈裝置，其中，上述吸引 96149871 39 200911388 手段係具有至少1個之吸引口，其係在上述傾斜面上塗附 塗佈液之位置的下方，吸引該傾斜面上部空間之氣體。 4·如申請專利範圍第3項之塗佈裝置，其中，上述液體 接受部係進一步含有區隔構件，其係相對於上述傾斜面， 介隔既定的空隙，平行地固設於上述傾斜面之上部空間的 一部份； 上述吸引口係配設於上述傾斜面之下端與上述區隔 件之間。 5. 如申請專利範圍第2項之塗佈裝置，其t，上述吸引 ^段係將上述傾斜面上塗附塗佈液之位置附近的空間之 氣體，朝沿著該傾斜面之頂面的下方吸引。 6. 如申請專利範圍第15戈2項之塗佈裝置，|中，上述 ::面係配設於下述位置:上述塗佈液塗附之位置較上述 喷鳥。土出之塗佈液從上述液柱狀態開始分裂之高度更靠 該喷嘴側之上述垂直下方向位置。 如申請專利範圍第6項之塗佈震置 神衮置，其_，上述傾 由1個平面所形成，該平面係相對於垂直於上述橫 方向之水平方向’往—個方向傾斜。Μ上⑽ 8.如申請專利範圍第6項之塗佈裝置，其中 面係由2個平面所構成之谷型， #、 ’ 上述k斷方向之水平方向，分別往雙方。 9·如申請專利範圍第6項之塗佈 面係由2個平面所構成之山型，該等、：’上述傾Λ 上诚户齡古Αι + I, τ . + ®係' 相對於垂直戈 上糊方向之水平方向’分別往雙方向傾斜。 96149871200911388 X. Patent Application Range: 1. A coating device for discharging a coating liquid in a state of a straight rod-shaped liquid column in a vertical downward direction onto a substrate and coating the coating liquid; a nozzle that ejects the coating liquid from the tip end portion in the liquid column state; a pedestal that mounts the substrate on a top surface thereof; and a nozzle moving mechanism that is attached to a space on the pedestal Disposing the nozzle in a direction to break the pedestal surface; and the liquid receiving portion is disposed at a position away from the pedestal in the transverse direction along the traverse direction, and the coating liquid is discharged by the nozzle When the nozzle is moved, the coating liquid discharged from the nozzle to the outside of the pedestal is received; the liquid receiving portion includes an inclined surface which is vertically disposed under a tip end portion of the nozzle disposed at a position apart from the pedestal a position of the direction extending in the direction of the breaking direction, inclined with respect to a horizontal direction perpendicular to the transverse direction; the liquid receiving portion is to be separated from The coating liquid discharged from the nozzle disposed at the position on the pedestal is applied to the inclined surface in the liquid column state and collected. The coating apparatus according to the first aspect of the invention, wherein the liquid receiving portion further includes a suction means for sucking a gas in a space near a position where the coating liquid is applied to the inclined surface. 3. The coating apparatus according to claim 2, wherein the attraction 96149871 39 200911388 has at least one suction port which is below the position where the coating liquid is applied to the inclined surface, and attracts the inclination. Gas in the upper space. 4. The coating apparatus according to claim 3, wherein the liquid receiving portion further includes a partitioning member that is fixed to the inclined surface in parallel with respect to the inclined surface with a predetermined gap therebetween. a portion of the upper space; the suction port is disposed between the lower end of the inclined surface and the partition. 5. The coating device according to claim 2, wherein the suction portion is a gas that is in a space near a position where the coating liquid is applied on the inclined surface, and is located below a top surface of the inclined surface. attract. 6. In the coating apparatus of the 15th item of the patent application, the above-mentioned :: surface is disposed at a position where the coating liquid is applied at a position higher than that of the above-mentioned spray bird. The height at which the coating liquid of the soil is split from the state of the liquid column is further higher than the position in the vertical downward direction of the nozzle side. According to the sixth application of the patent application scope, the tilting is formed by a plane which is inclined with respect to a horizontal direction perpendicular to the horizontal direction. (10) 8. The coating device according to claim 6, wherein the surface is a valley formed by two planes, and #, 'the horizontal direction of the k-cut direction is respectively directed to both sides. 9. If the coated surface of item 6 of the scope of application for patent application is a mountain type consisting of two planes, such as: 'The above-mentioned Λ 上 上 上 上 Α + + + I, τ . + ® series 'relative to vertical The horizontal direction of the direction of the paste is tilted in both directions. 96149871
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