JP2009195851A - Coating machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating machine which prevents application displacement by external force from piping to be connected. <P>SOLUTION: A coating solution is discharged from the tip of a nozzle. A substrate is mounted on the upper part of a stage. A nozzle moving mechanism reciprocates the nozzle to cross the surface of the stage in a space over the stage. A first guide member is installed to cross the surface of the stage in a space over the stage. A slide support member supports the nozzle and can move in the transverse direction along the first guide member. A driving mechanism reciprocates the slide support member along the first guide member. Flexible piping or wiring is tensioned in the reciprocation direction of the slide support member and moved in the reciprocation direction with the slide support member with the reciprocation of the slide support member. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a coating apparatus, and more specifically, to a coating apparatus that applies and applies a coating liquid such as an organic EL material from a nozzle to a substrate.

  2. Description of the Related Art Conventionally, various coating apparatuses that apply a coating liquid to a target object such as a substrate have been developed. For example, in an apparatus for manufacturing an organic EL (Electro Luminescence) display device, coating is performed by applying a hole transport material or an organic EL material in a predetermined pattern shape to the main surface of a substrate such as a glass substrate placed on a stage. A device is used. In this coating apparatus, a coating liquid (organic EL material or hole transport material) is discharged from a nozzle at a predetermined pressure. Specifically, after the coating liquid is stored in a supply source such as a tank provided in the coating apparatus, the coating liquid supplied from the supply source is increased in pressure by a pump, and foreign matter is removed by a filter provided in the pipe , Discharged from the nozzle. For example, there has been disclosed a coating apparatus that continuously applies a coating liquid onto a wafer like a single stroke while discharging the coating liquid from a nozzle (see, for example, Patent Document 1).

  In the coating apparatus disclosed in Patent Document 1, the substrate is placed on the upper surface of the stage. The coating apparatus applies the coating liquid to the substrate by reciprocating a plurality of nozzles that discharge the coating liquid in the space on the substrate in a direction crossing the stage surface. Specifically, in the coating apparatus, a guide member extends in a direction crossing the stage surface in a space on the stage, and the slide support member that supports the nozzle slides along the guide member. To do.

  Here, in the coating apparatus disclosed in Patent Document 1, in order to enable high-speed movement of the nozzle on the substrate, for example, a hydrostatic bearing (for example, an air static bearing) is provided between the slide support member and the guide member. Pressure bearing). Therefore, it is necessary to supply air to the slide support member from the outside. It is also necessary to supply the coating liquid to each of the plurality of nozzles supported by the slide support member.

  FIG. 16A is a schematic side view showing a structural example of supplying air and a coating liquid in the coating apparatus. FIG. 16B is a schematic front view showing a structural example of supplying air and a coating liquid in the coating apparatus. As shown in FIGS. 16A and 16B, the coating apparatus includes a guide member 101, a slide support member 102, a nozzle holder 103, a plurality of nozzles 104, a weight 105, a coating liquid pipe 106, and an air pipe 107.

  The nozzles 104 are composed of, for example, 16 nozzles (three nozzles 104 are representatively shown in FIG. 16), and are each supported by the slide support member 102 via the nozzle holder 103. Then, the coating liquid is supplied to each nozzle 104 via 16 coating liquid pipes 106. The coating liquid is increased in pressure by a pump (not shown) and supplied to a coating liquid supply port (point G in the drawing) provided on the outer surface of the coating apparatus, and the coating liquid pipe 106 is connected to the coating liquid supply port and the nozzle. It is passed between the holder 103. Note that the coating liquid pipe 106 is equal to or longer than the distance between the coating liquid supply port and the nozzle holder 103 even when the slide support members 102 are disposed at both ends of the guide member 101 (the state of FIG. 16B). Adjust to length.

The slide support member 102 is configured to be slidable along a guide member 101 installed on a stage (not shown), and an aerostatic bearing is provided between the slide support member 102 and the guide member 101. Is configured. And the air used for the said aerostatic bearing is supplied via the air piping 107. FIG. The air is pressurized by a pump (not shown) and supplied to an air supply port (point G in the drawing) provided on the outer surface of the coating apparatus, and an air pipe 107 is connected to the air supply port and the slide support member 102. It is handed over between. The air pipe 107 is also adjusted to have a length equal to or longer than the distance between the air supply port and the slide support member 102 even when the slide support member 102 is disposed at both ends of the guide member 101. Is done. The slide support member 102 is provided with a weight 105 on the other side in order to balance the weight between the nozzle holder 103 and the nozzle 104 provided on one side.
JP 2007-144312 A

  However, in the coating apparatus disclosed in Patent Document 1, external force received from the coating liquid pipe 106 and / or the air pipe 107 may act on the slide support member 102 and affect the drive of the slide support member 102. . For example, as shown in FIGS. 17A and 17B, when the slide support member 102 is disposed near the center of the guide member 101, the slide support member 102 approaches the point G in the drawing as compared to both ends of the guide member 101. Surplus occurs in the coating liquid piping 106 and / or the air piping 107. Then, deflection, vibration or the like is generated in the coating liquid pipe 106 and / or the air pipe 107, and their restoring force or vibration is applied to the slide support member 102. On the other hand, an air gap for forming the aerostatic bearing is formed between the slide support member 102 and the guide member 101. Therefore, the slide support member 102 may be displaced in a direction in which the air gap is shifted to one side due to the force received from the coating liquid pipe 106 and / or the air pipe 107. Due to the displacement of the slide support member 102, the position of the nozzle 104 supported by the slide support member 102 is also displaced, and the application position of the coating liquid discharged from the nozzle 104 is also displaced. As described above, in the above-described coating apparatus, there may be a problem in coating liquid application deviation due to the behavior of the coating liquid pipe 106 and / or the air pipe 107.

  SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a coating apparatus that prevents coating deviation due to external force from a connected pipe.

In order to achieve the above object, the present invention has the following features.
1st invention is the coating device which apply | coats a coating liquid on a board | substrate. The coating apparatus includes a nozzle, a stage, and a nozzle moving mechanism. The nozzle discharges the coating liquid from its tip. The stage places the substrate on its upper surface. The nozzle moving mechanism reciprocates the nozzle in a direction crossing the stage surface in the space on the stage. The nozzle moving mechanism includes a first guide member, a slide support member, a drive mechanism, and flexible piping or wiring. The first guide member extends in a direction crossing the stage surface in the space on the stage. The slide support member supports the nozzle and is movable in a direction transverse to the first guide member. The drive mechanism reciprocates the slide support member along the first guide member. The flexible piping or wiring is stretched along the reciprocating direction of the slide support member, and moves in the reciprocating direction together with the slide support member as the slide support member reciprocates.

  In a second aspect based on the first aspect, the pipe or the wiring includes at least a coating liquid pipe for supplying the coating liquid to the nozzle.

  In a third aspect based on the first aspect or the second aspect, a hydrostatic bearing is configured between the slide support member and the first guide member. The pipe or the wiring includes at least a gas pipe that supplies a gas used in the hydrostatic bearing to the slide support member.

  In a fourth aspect based on the first aspect or the second aspect, a magnetic bearing is configured between the slide support member and the first guide member. The piping or wiring includes at least wiring for supplying electric power used in the magnetic bearing to the slide support member.

  In a fifth aspect based on the first or second aspect, the nozzle moving mechanism includes a second guide member, a slide member, and a drive belt. The second guide member extends in a direction crossing the stage surface in parallel with the first guide member in the space on the stage. The slide member forms a hydrostatic bearing with the second guide member, and is movable along the second guide member. The drive belt is coupled to the slide support member and the slide member at positions symmetrically spanned by the pair of pulleys, and transmits the drive force from a predetermined drive source, thereby causing the slide support member to move to the first guide member. The slide member is reciprocated along the second guide member in a direction opposite to the direction in which the slide support member moves. The drive mechanism drives the drive belt by rotating the pulley.

  In a sixth aspect based on the fifth aspect, the nozzle moving mechanism further includes a fixed pulley. The fixed pulley is provided outside the space in which the first guide member and the second guide member are extended, and is rotatable about a predetermined rotation axis. The pipe or the wiring is stretched between the slide support member and the slide member via the fixed pulley.

  In a seventh aspect based on the sixth aspect, a hydrostatic bearing is configured between the slide support member and the first guide member. The piping or wiring is extended from the coating liquid and gas supply port of the coating device to the slide member, and then stretched to the slide support member via the fixed pulley. The piping or wiring extending from the coating liquid and gas supply port to the slide member includes the coating liquid piping for supplying the coating liquid to the nozzle, the gas piping for supplying the gas used in the static pressure bearing of the slide support member, and the slide And a gas pipe for supplying a gas used in the hydrostatic bearing of the member. The piping or wiring that is stretched between the slide support member and the slide member includes a coating liquid piping and a gas piping that supplies gas used in the static pressure bearing of the slide support member.

  In an eighth aspect based on the sixth aspect, the fixed pulley is rotatable in a horizontal direction around a vertical rotation axis.

  In a ninth aspect based on the sixth aspect, the nozzle moving mechanism further includes a pair of guide rollers. The pair of guide rollers are provided between the space where the first guide member and the second guide member are extended and the fixed pulley. The pipe or the wiring is stretched from the slide member in order of one guide roller, the fixed pulley, and the other guide roller, and is stretched to the slide support member. In the fixed pulley, the diameter of the circumferential surface in contact with the pipe or the wiring is larger than the distance between the pair of guide rollers.

  In a tenth aspect based on the second aspect, a hydrostatic bearing is configured between the slide support member and the first guide member. The pipe or the wiring is configured by a pipe group in which a coating liquid pipe and a gas pipe that supplies gas used in the hydrostatic bearing to the slide support member are integrally bundled.

  In an eleventh aspect based on the first or second aspect, the nozzle moving mechanism further includes a constant pulley and a tension adjusting mechanism. The fixed pulley is provided outside the space in which the first guide member is extended, and is rotatable about a predetermined rotation axis. The tension adjusting mechanism adjusts the tension in the reciprocating direction of the slide support member applied to the pipe or the wiring to be constant through the fixed pulley. The piping or wiring is stretched from the slide support member to the tension adjusting mechanism via the fixed pulley.

  In a twelfth aspect based on the first or second aspect, the nozzle moving mechanism further includes a moving pulley and a moving pulley moving mechanism. The movable pulley is provided outside the space in which the first guide member is extended, and is rotatable about a predetermined rotation axis. The moving pulley moving mechanism moves the rotating shaft of the moving pulley in a direction perpendicular to the reciprocating direction of the slide support member. The pipe or the wiring is stretched along the reciprocating direction of the slide support member via the moving pulley. The moving pulley moving mechanism moves the rotating shaft of the moving pulley at a speed that is half the speed at which the slide support member reciprocates.

  According to the first aspect of the invention, when the slide support member reciprocates, the piping or wiring connected to the slide support member is always kept stretched along the moving direction. The slide support member is not affected by vibration or vibration. That is, since the position of the nozzle supported by the slide support member is stabilized, it is possible to prevent the application deviation of the application liquid due to the behavior of the pipe or the wiring, and a highly accurate application operation is possible.

  According to the second aspect of the present invention, it is possible to prevent the application liquid from being displaced due to the behavior of the application liquid piping that supplies the application liquid to the nozzle, and a highly accurate application operation is possible. For example, in the case where a plurality of nozzles are provided in the coating apparatus, the influence of deflection, vibration, etc. of the coating liquid piping is increased and application defects are likely to occur, but such application defects can also be prevented.

  According to the third aspect of the present invention, it is possible to prevent the application liquid from being displaced due to the behavior of the gas pipe that supplies gas such as air or nitrogen gas to the hydrostatic bearing, and high-precision application work is possible. It becomes.

  According to the fourth aspect of the present invention, it is possible to prevent the coating liquid from being displaced due to the behavior of the wiring that supplies power to a magnetic bearing such as a linear motor, and a highly accurate coating operation is possible.

  According to the fifth aspect of the present invention, by providing the slide member that moves in synchronization with the direction opposite to the direction of movement of the slide support member, the movement position of the slide support member is stabilized, thereby preventing application deviation of the coating liquid. can do.

  According to the sixth aspect, by using the slide member that moves in synchronization with the direction opposite to the moving direction of the slide support member, the piping or wiring connected to the slide support member can be easily moved along the movement direction. Can be tensioned with a certain tension.

  According to the seventh aspect, the coating liquid pipe for supplying the coating liquid to the nozzle, the gas pipe for supplying the gas to the static pressure bearing of the slide support member, and the gas pipe for supplying the gas to the static pressure bearing of the slide member. The application deviation of the coating liquid caused by the behavior can be prevented, and a highly accurate coating operation can be performed.

  According to the eighth aspect, it is possible to stabilize the state of the internal carrier substance such as the coating liquid and the gas propagated in the pipe.

  According to the ninth aspect, the radius of curvature of the pipe when stretched between the slide member and the slide support member can be increased, and the coating liquid is bent when the pipe contacts the pulley. And the influence on internal carrier substances such as gas can be reduced.

  According to the tenth aspect, since deformation of the coating liquid piping is suppressed, uniform coating liquid application is possible.

  According to the eleventh aspect of the invention, the pipe or wiring connected to the slide support member is easily stretched along the moving direction by using a tension adjusting mechanism represented by a general air cylinder, hydraulic cylinder, spring or the like. Can be set.

  According to the twelfth aspect, by moving the movable pulley at half the moving speed of the slide support member, the tension in the reciprocating direction of the slide support member applied to the pipe or the wiring can be adjusted to be constant. .

  Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to the drawings. In order to make the description more specific, the following description will be given using an example in which the coating apparatus is applied to a coating apparatus that manufactures an organic EL display device that uses an organic EL material, a hole transport material, or the like as a coating liquid. . The coating device is for manufacturing an organic EL display device by coating an organic EL material, a hole transport material, or the like in a predetermined pattern shape on a glass substrate placed on a stage. FIG. 1 is a plan view and a front view illustrating a schematic configuration of a main part of the coating apparatus 1. Note that the coating apparatus 1 uses a plurality of coating liquids such as an organic EL material and a hole transport material as described above, and the organic EL material will be described as a coating liquid as a representative thereof.

  In FIG. 1, the coating device 1 generally includes a substrate mounting device 2 and an organic EL coating mechanism 5. The organic EL coating mechanism 5 includes a nozzle moving mechanism 51, a nozzle unit 50, and liquid receivers 53L and 53R. The nozzle unit 50 holds a plurality of nozzles 52 that discharge organic EL materials of any one of red, green, and blue in a state where they are arranged in parallel. For example, the nozzle unit 50 includes 16 nozzles 52, and three nozzles 52a, 52b, and 52c are shown as representatives in FIG. To each of the nozzles 52a to 52c, an organic EL material of any one color of red, green, and blue is supplied from a supply unit (see FIG. 2). Thus, although the organic EL material of the same color is discharged from the plurality of nozzles 52, an example in which the red organic EL material is discharged from the three nozzles 52a to 52c will be used for specific description. In addition, since the nozzles 52a to 52c have the same structure, the reference numeral “52” is used for the description in the generic description.

  The nozzle moving mechanism 51 has pulley covers 514L and 514R at both ends, and one concave guide member 511 and two round bar guide members 512 are horizontally disposed between the pulley covers 514L and 514R (X in the drawing). Axial direction). Then, the slide support member 510 that supports the nozzle unit 50 reciprocates along the concave guide member 511 in the illustrated X-axis direction, and the counter 513 reciprocates along the round bar guide member 512 in the illustrated X-axis direction. In the following description, the horizontal direction in which the slide support member 510 reciprocates is the X-axis direction, and the direction from the pulley cover 514L toward the pulley cover 514R (the right direction in the drawing) is the X-axis positive direction.

  The substrate mounting apparatus 2 includes a stage 21, a turning unit 22, a parallel movement table 23, a guide receiving unit 24, and a guide member 25. The stage 21 places a substrate P such as a glass substrate to be coated on the upper surface of the stage. The lower part of the stage 21 is supported by the turning unit 22, and the stage 21 is configured to be rotatable in the θ direction shown in the figure by the turning operation of the turning unit 22. In addition, a heating mechanism for preheating the substrate P coated with the organic EL material on the stage surface, a suction mechanism for the substrate P, a delivery pin mechanism, and the like are provided inside the stage 21.

  The guide member 25 is extended and fixed in the illustrated Y-axis direction perpendicular to the X-axis direction so as to pass under the nozzle moving mechanism 51. On the lower surface of the parallel movement table 23, a guide receiving portion 24 that is in contact with the guide member 25 and slides on the guide member 25 is fixed. In addition, the swivel unit 22 is fixed on the upper surface of the translation table 23. Accordingly, the parallel movement table 23 can be moved in the Y-axis direction along the guide member 25 by receiving a driving force from, for example, a linear motor (not shown), and the stage 21 supported by the turning unit 22 can be moved. Movement is also possible.

  When the substrate P is placed on the stage 21 via the delivery pin mechanism, the substrate P is sucked and fixed, and the parallel movement table 23 moves below the nozzle movement mechanism 51, the substrate P is red organic. This is the position where the application of the EL material is received from the nozzles 52a to 52c. Then, the control unit (see FIG. 2) controls the nozzle moving mechanism unit 51 to reciprocate the nozzle unit 50 in the X-axis direction, and moves the stage 21 by a predetermined pitch in the Y-axis direction for each linear movement. The parallel movement table 23 is controlled to discharge the organic EL material at a predetermined flow rate from the nozzles 52a to 52c. Further, at the discharge positions in the X-axis direction of the nozzles 52a to 52c, in both side spaces deviating from the substrate P placed on the stage 21, a liquid receiving portion 53L that receives the organic EL material discharged and discharged from the substrate P, and 53R is respectively fixed. The nozzle moving mechanism 51 is arranged so as to cross the substrate P from the upper space of the liquid receiver 53 disposed outside one side of the substrate P and be disposed outside the other side of the substrate P. The nozzle unit 50 is reciprocated to the upper space. The translation table 23 moves the stage 21 by a predetermined pitch in a predetermined direction (Y-axis direction in the drawing) perpendicular to the nozzle reciprocating direction when the nozzle unit 50 is disposed in the upper space of the liquid receiving portion 53. Let Simultaneously with the operation of the nozzle moving mechanism 51 and the parallel moving table 23, the organic EL material is ejected from the nozzles 52a to 52c in a liquid column state, whereby the red organic EL material is formed in a stripe shape formed on the substrate P. A so-called stripe arrangement arranged for each groove is formed on the substrate P.

  Next, with reference to FIG. 2, the schematic configuration of the control function, the coating liquid supply unit, and the air supply unit in the coating apparatus 1 will be described. FIG. 2 is a block diagram illustrating the control function of the coating apparatus 1, the coating liquid supply unit, and the air supply unit.

  In FIG. 2, the coating apparatus 1 includes a control unit 3, a coating liquid supply unit 54, an air supply unit 55, an air pipe 5222, and a coating liquid pipe 5223 in addition to the components described above. The coating liquid supply unit 54 supplies the red organic EL material to the plurality of nozzles 52 via the coating liquid piping 5223. The air supply unit 55 supplies air to the counter 513 and the slide support member 510 via the air pipe 5222. The control unit 3 controls operations of the coating liquid supply unit 54, the air supply unit 55, the turning unit 22, the parallel movement table 23, and the nozzle movement mechanism unit 51.

  The coating liquid supply unit 54 includes an organic EL material supply source 541, a pump 542 for taking out the organic EL material from the supply source 541, and a flow meter 543 that detects the flow rate of the organic EL material supplied to the nozzle 52. ing. In addition, the coating liquid supply part 54 may provide the supply source 541, the pump 542, and the flowmeter 543 separately for every nozzle 52, respectively.

  The air supply unit 55 includes a pump 551 that increases the pressure of air, and a pressure gauge 552 that detects the air pressure that is increased by the pump 551 and supplied to the counter 513 and the slide support member 510.

  Each of the plurality of nozzles 52 includes a filter 521 for removing foreign substances in the organic EL material supplied from the coating liquid supply unit 54.

  Here, on the surface of the substrate P to which the red organic EL material is applied, a plurality of stripe-shaped grooves corresponding to a predetermined pattern shape to which the organic EL material is to be applied are formed in parallel. . As the organic EL material, for example, an organic EL material having a viscosity enough to flow in a groove on the substrate P is used, and specifically, a polymer type organic EL material for each color is used. It is done. The nozzle unit 50 is rotatably supported around a predetermined support shaft, and is rotated around the support shaft under the control of the control unit 3 to change the parallel arrangement direction of the plurality of nozzles 52 to be held. Therefore, the coating pitch interval by the plurality of nozzles 52 can be adjusted.

  Based on the position and direction of the substrate P placed on the stage 21, the control unit 3 adjusts the angle of the swivel unit 22 so that the direction of the groove formed in the substrate P becomes the X-axis direction, and the coating is performed. , That is, a coating start position at which coating is started at one end side of the groove formed in the substrate P is calculated. The application start position is an upper space of one liquid receiving portion 53. Then, the control unit 3 drives the parallel movement table 23 and the nozzle movement mechanism unit 51 as described above.

  At the application start position, the control unit 3 instructs the pump 542 to start discharging the organic EL material from each nozzle 52. At this time, the controller 3 applies the organic EL material according to the moving speed of the nozzle 52 so that the application amount of the organic EL material at each point of the striped groove becomes uniform and the organic EL material is discharged in a liquid column state. The amount is controlled, and the flow rate information from the flow meter 543 is fed back and controlled. Then, in order to flow the organic EL material into the groove on the substrate P, the control unit 3 moves the nozzle unit 50 along the groove on the substrate P while pouring the nozzle unit 50 into the groove. It controls to move along 511. By this operation, the red organic EL material discharged from each nozzle 52 in the liquid column state is poured into each groove at the same time.

  When the control unit 3 is positioned on the other liquid receiving portion 53 fixed on the outside of the other end portion of the groove across the substrate P, the control unit 3 moves the organic EL material from the plurality of nozzles 52. While the discharge is continued, the movement of the nozzle unit 50 by the nozzle movement mechanism 51 is stopped. By this single movement, the application of the organic EL material to the grooves corresponding to the number of nozzles 52 is completed. Specifically, since the organic EL material of the same color is discharged from each nozzle 52, the organic EL material is applied to the grooves corresponding to the total number of nozzles in which one row of grooves is applied every three rows.

  Next, the control unit 3 pitches the translation table 23 by a predetermined distance (for example, 48 rows of grooves) in the Y-axis direction so that the organic EL material can be applied to the groove to be applied next. To. Then, when the control unit 3 positions the nozzle unit 50 across the substrate P in the opposite direction from the upper space of the other liquid receiving unit 53 on the one liquid receiving unit 53, the organic EL material from the nozzle 52 is obtained. The movement of the nozzle unit 50 by the nozzle moving mechanism 51 is stopped while the discharge is continued. By this second movement, the application of the organic EL material to the grooves for the next number of nozzles is completed. By repeating such an operation, the red organic EL material is poured into the groove for applying red. Note that when the control unit 3 controls the nozzle unit 50 to move along the concave guide member 511, the control unit 3 controls the rotation operation of the drive source that drives the drive pulley 517 included in the nozzle moving mechanism unit 51.

  Hereinafter, the structure of the nozzle moving mechanism 51 will be described with reference to FIGS. FIG. 3 is a perspective view illustrating a schematic configuration of the nozzle moving mechanism unit 51. FIG. 4 is a cross-sectional view of the nozzle moving mechanism 51 when the cross section AA of FIG. 1 is viewed from the B direction. FIG. 5 is a cross-sectional view of the nozzle moving mechanism 51 when the cross-section CC of FIG. 1 is viewed from the D direction. FIG. 6 is a schematic front view of the nozzle movement mechanism 51 schematically showing the operation of the nozzle movement mechanism 51. 7 to 9 are schematic top views of the nozzle moving mechanism unit 51 schematically showing the operation of the nozzle moving mechanism unit 51.

  In FIG. 3, the nozzle moving mechanism 51 includes a slide support member 510, a concave guide member 511, two round bar guide members 512, a counter 513, pulley covers 514L and 514R, a drive belt 515, and a piping group. 522 and a pulley 523. The pulley covers 514L and 514R are fixed to both ends on the fixed member of the nozzle moving mechanism 51, and a driving pulley 517 and a driven pulley 518 (see FIG. 6) are provided inside each.

  The concave guide member 511 extends in the X-axis direction between the pulley covers 514L and 514R. The two round bar guide members 512 are provided between the pulley covers 514L and 514R so as to be juxtaposed above the concave guide member 511 in the X-axis direction in the drawing. The drive belt 515 is stretched between the pair of drive pulleys 517 and the driven pulley 518 in the X-axis direction shown in the drawing. Specifically, since the rotation shafts of the drive pulley 517 and the driven pulley 518 are provided in the Y-axis direction in the figure, the lower portion of the drive belt 515 with respect to the rotation shaft is positioned directly below the upper portion of the rotation shaft ( That is, the entire drive belt 515 is stretched so as to be parallel to the XZ plane shown in the drawing. Hereinafter, in the driving belt 515 in which the pair of driving pulleys 517 and the driven pulley 518 are stretched in the vertical (Z-axis direction in the drawing) position, the portion of the driving belt 515 stretched below the rotating shaft is referred to as the lower driving belt. 515. The portion of the driving belt 515 that is stretched on the upper side of the rotating shaft is referred to as an upper driving belt 515. As will be apparent from the description below, when the slide support member 510 moves in the positive direction of the X axis in the figure, the lower drive belt 515 means the tension side of the belt, and the upper drive belt 515 indicates the loose side of the belt. means. Further, the drive belt 515 corresponds to a belt-like member of the present invention, and is constituted by a timing belt (toothed belt) in which a plurality of peaks are formed perpendicular to the rotation direction, for example.

  The slide support member 510 supports the nozzle unit 50 (nozzles 52a to 52c). The slide support member 510 is connected to a part of the lower drive belt 515 and configured to be movable along the concave guide member 511. That is, when the drive belt 515 rotates in response to the rotation of the drive pulley 517, the slide support member 510 also reciprocates in the X-axis direction along the concave guide member 511 in accordance with the movement of the drive belt 515. When the slide support member 510 reciprocates along the concave guide member 511, the coating liquid is supplied to each nozzle 52 via the coating liquid piping 5223 included in the piping group 522. The configuration and connection method of the piping group 522 will be described later.

  The counter 513 is connected to a symmetrical position of the position where the slide support member 510 is connected to the drive belt 515, and penetrates the two round bar guide members 512. That is, the counter 513 is connected to a part of the upper drive belt 515. Accordingly, when the drive belt 515 rotates in response to the rotation of the drive pulley 517, the counter 513 also moves in the opposite direction to the slide support member 510 along the two round bar guide members 512 in accordance with the movement of the drive belt 515. Reciprocates in the X-axis direction.

  In FIG. 4, the concave guide member 511 is formed with a groove G having an upper surface opened in the major axis direction, and a substantially U-shaped (a pie-shaped shape) having a cross section opened on the upper surface. Become. The slide support member 510 is fitted and disposed so as to cover the outer surface of the concave guide member 511 excluding the groove G and a predetermined gap. Then, one outer surface of the slide support member 510 supports the nozzle unit 50. The other outer surface of the slide support member 510 is provided with a weight 525 for balancing the weight with the nozzle unit 50 with respect to the illustrated Y-axis direction with the concave guide member 511 as a reference.

  Air supply ports Ah are provided at a plurality of locations (for example, 6 locations) on the inner surface of the slide support member 510 facing the concave guide member 511. When the slide support member 510 reciprocates along the concave guide member 511, air is supplied to the slide support member 510 via the air pipe 5222 included in the pipe group 522. An air hydrostatic bearing is formed between the slide support member 510 and the concave guide member 511 by supplying the air from the air supply port Ah to the gap.

  The lower drive belt 515 is disposed in a space in the groove G formed in the concave guide member 511. The lower drive belt 515 and the slide support member 510 are connected via a connecting member 519. With these configurations, when the drive belt 515 rotates, the slide support member 510 moves along the concave guide member 511 via the connecting member 519, and the nozzle unit 50 supported by the slide support member 510 moves.

  In FIG. 5, the counter 513 is configured by two members, for example. Hereinafter, these members are distinguished as a counter 513a and a counter 513b. Each of the counters 513a and 513b has a through hole. The counter 513a is inserted into the one round bar guide member 512 with a predetermined gap, and the counter 513b is inserted into the other round bar guide member 512 with a predetermined gap. Air supply ports Ah are provided on the inner peripheral surfaces of the through holes of the counters 513a and 513b. When the counters 513 a and 513 b reciprocate along the round bar guide member 512, air is supplied to the counters 513 a and 513 b via the air pipe 5222 included in the pipe group 522. An air hydrostatic bearing is formed between the counters 513a and 513b and the round bar guide member 512 by supplying the air from the air supply port Ah to the gap.

  The counter 513a and the counter 513b are connected by a connecting member 516. The upper drive belt 515 is disposed in a space between the two round bar guide members 512, and a part thereof is connected to the connecting member 516. With these configurations, when the drive belt 515 rotates, the counters 513 a and 513 b move along the round bar guide member 512 via the connecting member 516.

  In FIG. 6, a drive pulley 517 is provided inside the pulley cover 514 </ b> R with the Y-axis direction in the drawing as the rotation axis. Further, a driven pulley 518 having a Y-axis direction in the drawing as a rotation axis is provided inside the pulley cover 514L, and the driving belt 515 is stretched between the pair of driving pulleys 517 and the driven pulley 518. The driving pulley 517 receives a driving force from a driving source (not shown) such as a servo motor and rotates in both directions (in the direction of a double arrow in the drawing) around the rotation axis. Here, the rotation direction, rotation speed, and rotation angle of the drive pulley 517 are controlled by the control unit 3 controlling the operation of the drive source to rotate the drive pulley 517. Note that the position at which the slide support member 510 is closest to the pulley cover 514L (that is, the point turned back on the X axis negative direction side in the above-described reciprocating movement) is the upper space of one liquid receiving portion 53L (see FIG. 1). The control part 3 controls so that it may become. Further, the position at which the slide support member 510 is closest to the pulley cover 514R (that is, the point returned on the X axis positive direction side in the reciprocating motion described above) is the upper space of one liquid receiving portion 53R (see FIG. 1). The control part 3 controls so that it may become.

  The slide support member 510 and the counter 513 are connected to symmetrical positions on the drive belt 515. When the driving pulley 517 rotates counterclockwise in FIG. 6, the driving belt 515 also rotates counterclockwise at the same phase. Then, the slide support member 510 moves between the pulley covers 514L and 514R along the concave guide member 511 in the X axis positive direction, and the counter 513 moves along the round bar guide member 512 in the X axis negative direction along the pulley covers 514L and 514R. Move between. On the other hand, when the drive pulley 517 rotates clockwise in FIG. 6, the drive belt 515 also rotates clockwise in the same phase. Then, the slide support member 510 moves between the pulley covers 514L and 514R along the concave guide member 511 in the X axis negative direction, and the counter 513 moves along the round bar guide member 512 in the X axis positive direction along the pulley covers 514L and 514R. Move between. As described above, the slide support member 510 and the counter 513 slide in the X-axis direction while maintaining a symmetrical position in accordance with the drive of the drive belt 515.

  As shown in FIGS. 3 and 6 to 9, the pipe group 522 is provided between the coating liquid / air supply port provided on the outer surface of the coating apparatus 1 and the counter 513 and fixed to the counter 513. Connected. The counter 513 constitutes an air hydrostatic bearing with the round bar guide member 512 using the air supplied from the air pipe 5222 included in the connected pipe group 522.

  A pulley 523 that is rotatable in the horizontal direction is provided on the left outer side of the pulley cover 514L. The pipe group 522 connected to the counter 513 is stretched with a predetermined tension applied from the counter 513 to the pulley 523 in the negative X-axis direction (the sliding movement direction of the counter 513), and further from the pulley 523 to the X-axis. A predetermined tension is applied to the slide support member 510 in the positive direction (the slide movement direction of the slide support member 510), and is fixedly connected to the slide support member 510. Accordingly, the pipe group 522 is stretched between the counter 513 and the slide support member 510 with a predetermined tension via the pulley 523. The slide support member 510 constitutes an aerostatic bearing with the concave guide member 511 using the air supplied from the air pipe 5222 included in the connected pipe group 522. A plurality of nozzles 52 (only nozzles 52 a to 52 c are shown in FIGS. 3 and 6 to 9) supported by the slide support member 510 are supplied from a coating liquid pipe 5223 included in the connected pipe group 522. The coating solution is discharged using each coating solution.

  Here, the movement of the pipe group 522 when the slide support member 510 and the counter 513 slide are described with reference to FIGS. For example, the slide support member 510 is disposed on the most negative X-axis direction side (pulley cover 514L side) on the concave guide member 511, and the counter 513 is on the most X-axis positive direction side (pulley cover 514R side) on the round bar guide member 512. ) Is considered (state shown in FIG. 7). At this time, the pipe group 522 connected to the counter 513 is stretched between the counter 513 and the slide support member 510 with a predetermined tension via the pulley 523. In this state, the length of the piping group 522 stretched between the counter 513 and the slide support member 510 is defined as a length L.

  From the state shown in FIG. 7, the slide support member 510 moves along the concave guide member 511 in the X axis positive direction, and the counter 513 moves along the round bar guide member 512 in the X axis negative direction. At this time, since the slide support member 510 and the counter 513 are connected to the same drive belt 515 and moved, the distance that the slide support member 510 moves in the positive direction of the X axis and the counter 513 moves in the negative direction of the X axis. The distance is the same. Further, according to the movement of the counter 513, the pipe group 522 from the portion connected to the counter 513 to the portion provided on the pulley 523 moves in the negative direction of the X axis together with the counter 513. Further, in accordance with the movement of the slide support member 510, the pipe group 522 from the portion provided on the pulley 523 to the portion connected to the slide support member 510 moves together with the slide support member 510 in the X-axis positive direction. To do. On the other hand, since the position of the pulley 523 that stretches the piping group 522 is rotatably fixed, the pulley 523 rotates in the counterclockwise direction in accordance with the movement of the piping group 522 and forwards the piping group 522. . Therefore, the piping group 522 moves in a state where the length of the piping group 522 between the counter 513 and the slide support member 510 is kept at the length L. In other words, the piping group 522 moves while maintaining a state of being stretched with a predetermined tension between the counter 513 and the slide support member 510 via the pulley 523 (state of FIG. 8).

  From the state shown in FIG. 8, the slide support member 510 further moves along the concave guide member 511 in the X-axis positive direction, and the counter 513 further moves along the round bar guide member 512 in the X-axis negative direction. The slide support member 510 is disposed on the most X axis positive direction side (pulley cover 514R side) on the concave guide member 511, and the counter 513 is on the most X axis negative direction side (pulley cover 514L side) on the round bar guide member 512. ) (State of FIG. 9). As for the movement up to this arrangement state, the piping group 522 moves while maintaining a state in which the pipe group 522 is stretched between the counter 513 and the slide support member 510 via the pulley 523 with a predetermined tension. Will do. Also, when the slide support member 510 and the counter 513 move in the opposite direction, the piping group 522 maintains a state in which the pipe group 522 is stretched between the counter 513 and the slide support member 510 via the pulley 523 with a predetermined tension. Needless to say, it will move. That is, when the slide support member 510 slides, the piping group 522 always maintains a state of being stretched along the slide movement direction with respect to the slide support member 510.

  Next, a configuration example of the pipe group 522 will be described with reference to FIGS. FIG. 10 is a perspective view showing a cross section of a first configuration example of the pipe group 522. FIG. FIG. 11 is a perspective view showing a cross section of a second configuration example of the piping group 522. FIG. 12 is a perspective view showing a cross section of a third configuration example of the piping group 522.

  In FIG. 10, the first configuration example of the piping group 522 includes an outer membrane piping 5221, an air piping 5222 a, and a coating liquid piping 5223. The air pipe 5222a is a pipe material made of a flexible material, and is made of, for example, urethane resin. The air pipe 5222a supplies the air supplied from the air supply port provided on the outer surface of the coating apparatus 1 to the counter 513 and the slide support member 510. The coating liquid pipe 5223 is a pipe made of a flexible material. For example, PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer), PTFE (polytetrafluoroethylene), PE (polyethylene), It is composed of a material such as PP (polypropylene). The coating liquid pipes 5223 are provided by the number of nozzles 52 installed in the coating apparatus 1, and in the configuration example of FIG. 10, 16 coating liquid pipes 5223 are provided. The plurality of coating liquid pipes 5223 are densely arranged at equiangular intervals along the outer peripheral surface of the air pipe 5222a. The coating liquid pipe 5223 supplies the coating liquid supplied from the coating liquid supply port provided on the outer surface of the coating apparatus 1 to the nozzle 52. Furthermore, the outer membrane pipe 5221 is provided so as to bundle a bundle of pipes constituted by the air pipe 5222a and the coating liquid pipe 5223 and cover the outer periphery thereof, and the first configuration example of the pipe group 522 is formed. The outer membrane pipe 5221 is made of a heat shrinkable tube made of a flexible material.

  In FIG. 11, the second configuration example of the pipe group 522 includes an air pipe 5222b, a coating liquid pipe 5223, and a connection pipe 5224. The air pipe 5222b is a pipe material made of a flexible material like the air pipe 5222a, and is made of, for example, urethane resin. The air pipe 5222 b supplies air supplied from an air supply port provided on the outer surface of the coating apparatus 1 to the counter 513 and the slide support member 510. The connecting pipe 5224 is also a pipe material having the same shape and the same material as the air pipe 5222a, and a plurality of coating liquid pipes 5223 are bundled and inserted therein. In the configuration example of FIG. 11, since four coating liquid pipes 5223 are inserted into the connection pipe 5224, four coating liquids 5223 are included in the pipe group 522 so that four coating liquid pipes 5223 are included. There are four sets (connection pipes 5224a to 5224d) into which the liquid pipe 5223 is inserted. Then, the connecting pipes 5224a to 5224d and the air pipe 5222b are arranged side by side in a plane and are bonded and fixed to each other to form a second configuration example of the pipe group 522.

  In FIG. 12, the third configuration example of the piping group 522 includes air piping 5222 c and 5222 d, a coating liquid piping 5223, and a connecting piping 5224. Each of the air pipes 5222c and 5222d is a tube material made of a flexible material, like the air pipe 5222a, and is made of, for example, urethane resin. The air pipe 5222 c supplies air supplied from an air supply port provided on the outer surface of the coating apparatus 1 to the counter 513. Further, the air pipe 5222 d supplies air supplied from an air supply port provided on the outer surface of the coating apparatus 1 to the slide support member 510. The connection pipe 5224 in the third configuration example is also a pipe material having the same shape and the same material as the air pipes 5222c and 5222d, and a plurality of coating liquid pipes 5223 are bundled and inserted therein. In the configuration example of FIG. 12, since four coating liquid pipes 5223 are inserted into the connection pipe 5224, four coating liquids 5223 are included in the pipe group 522 so that four coating liquid pipes 5223 are included. Four sets (connection piping 5224e to 5224h) in which the liquid piping 5223 is inserted are provided. Then, the connection pipes 5224e to 5224h and the air pipes 5222c and 5222d are arranged in parallel in two stages (3 × 2) and bonded and fixed to each other, and a third configuration example of the pipe group 522 Is formed.

  Thus, according to the coating apparatus according to this embodiment, when the slide support member 510 slides, the pipe group 522 always keeps the state in which the slide support member 510 is stretched along the slide movement direction. Therefore, the slide support member 510 is not affected by the deflection or vibration of the piping group 522. That is, it is possible to prevent application deviation of the application liquid caused by the behavior of the pipe group 522, and high-precision application work is possible. Further, since the number of pipes provided from the coating liquid / air supply port provided on the outer surface of the coating apparatus 1 to the nozzle moving mechanism unit 51 is one pipe group 522, the assembling work of the coating apparatus 1 is easy. At the same time, it can be expected to reduce the generation of dust inside the apparatus due to the behavior of the pipe, and to improve the durability of the pipe itself and reduce the cost.

  In the above description, the piping group 522 is stretched between the counter 513 and the slide support member 510 via the pulley 523, but the piping group 522 is stretched with another element interposed therebetween. It doesn't matter. For example, as shown in FIG. 13, a pipe group 522 may be stretched between the counter 513 and the slide support member 510 via a pair of guide rollers 5231 and a pulley 523.

  In FIG. 13, between a left outer side of the pulley cover 514L and the pulley 523, a pair of guide rollers 5231 whose cylindrical surfaces (roller surfaces) are rotatable about the Z-axis direction shown in the drawing as rotation axes are provided at predetermined intervals. Opposed. Specifically, one of the pair of guide rollers 5231 is disposed so that the cylindrical surface on the side facing the other is in a position in contact with the pipe group 522 that extends from the counter 513 in the negative direction of the X axis. The other of the pair of guide rollers 5231 is disposed such that the cylindrical surface on the opposite side is in a position in contact with the pipe group 522 extending from the slide support member 510 in the negative X-axis direction.

  The piping group 522 is provided between the coating solution / air supply port provided on the outer surface of the coating apparatus 1 and the counter 513 and is fixedly connected to the counter 513. The pipe group 522 connected to the counter 513 is stretched in a state where a predetermined tension is applied from the counter 513 to one guide roller 5231 in the X-axis negative direction, and comes into contact with the cylindrical surface of the guide roller 5231. The pulley is stretched up to the pulley 523. Furthermore, the pipe group 522 is stretched in a state in which a predetermined tension is applied to the slide support member 510 in the positive direction of the X axis after contacting the cylindrical surface of the other guide roller 5231 from the pulley 523, and the slide support member 510. It is fixedly connected to. Accordingly, the pipe group 522 is stretched between the counter 513 and the slide support member 510 with a predetermined tension via the pulley 523 and the pair of guide rollers 5231.

  Thus, by adding a pair of guide rollers 5231, the diameter of the connecting portion between the counter 513 and the piping group 522 and the connecting portion between the slide support member 510 and the piping group 522 is larger than the illustrated Y-axis direction interval. A large pulley 523 can be used. Therefore, the piping group 522 can increase the radius of curvature when it is stretched between the counter 513 and the slide support member 510, and the internal conveyance by bending when the piping group 522 contacts the pulley 523. The influence on substances (coating liquid and air) can be reduced.

  In the above description, the pipe group 522 is connected to the counter 513 and then stretched on the slide support member 510 via the pulley 523. However, the pipe group 522 is stretched along the slide movement direction with respect to the slide support member 510. As long as the pipe group 522 always keeps this state, it may not be connected to the counter 513. As an example, as shown in FIG. 14, a tension adjusting mechanism 524 represented by a general air cylinder, hydraulic cylinder, spring or the like may be used to keep the pipe group 522 in the above-described stretched state. Absent. For example, the piping group 522 is stretched from the pulley 523 to the slide support member 510 in the X-axis positive direction and fixedly connected to the slide support member 510, but the tension is adjusted to be constant by the tension adjustment mechanism 524. Is done.

  As another example, as shown in FIGS. 15A and 15B, a pipe group 522 may be maintained in the above-described stretched state using a pulley 523m configured to be reciprocally movable in the Y-axis direction. It doesn't matter. For example, the pulley 523m is configured to be rotatable in the horizontal direction, and is configured to be reciprocally movable in the Y-axis direction in the figure according to the control of the control unit 3 (see FIG. 2). Further, the guide roller 5232 is disposed so that its cylindrical surface is in contact with the pipe group 522 extending in the negative X-axis direction from the slide support member 510. The pipe group 522 comes into contact with the circumferential surface of the pulley 523m and the cylindrical surface of the guide roller 5232 from the coating liquid / air supply port provided on the outer surface of the coating apparatus 1, and then slides in the X axis positive direction. And is fixedly connected to the slide support member 510.

  In such a connected state of the piping group 522, the pulley 523m moves in the Y-axis positive direction (direction approaching the guide roller 5232) in response to the slide support member 510 sliding in the X-axis positive direction at a moving speed of 2V. It moves at the moving speed V (moves from the state of FIG. 15A to the state of FIG. 15B). Further, in response to the slide support member 510 slidingly moving in the negative X-axis direction at a moving speed 2V, the pulley 523m moves in the negative Y-axis direction (the direction away from the guide roller 5232) at the moving speed V (FIG. 15B). To the state of FIG. 15A). In this way, the piping group 522 is stretched along the slide movement direction with respect to the slide support member 510 by moving the pulley 523m at a speed ½ of the slide movement speed of the slide support member 510. To be kept.

  In the above description, an aerostatic bearing is configured between the slide support member 510 and the concave guide member 511, and the slide support member 510 is slid along the concave guide member 511. Another type of bearing may be configured between the member and the guide member. For example, a guide member (for example, a round bar shape) that generates magnetic flux from the inside is extended in the X-axis direction (see FIG. 3) between the pulley covers 514L and 514R in the same manner as the concave guide member 511. The magnetic bearing may be configured using a linear motor that floats the slide support member on the guide member with a magnetic force and slides the guide member along the guide member. In this case, since the slide support member is driven by a built-in coil, a drive belt 515 and a mechanism for driving the drive belt 515 are not required. Further, the counter 513 is not required, and the air pipe 5222 for supplying air to the slide support member 510 and the counter 513 is also unnecessary. However, by using the method of stretching the pipe group 522 illustrated in FIGS. 14, 15A, and 15B, the slide support member configured by another bearing method such as a linear motor and the guide member may be used. Similarly, the present invention can be applied. When the slide support member is slid using a linear motor, the piping group 522 connected to the slide support member has a plurality of coating liquid pipings 5223 and / or power / control wiring for driving and controlling the linear motors. Will be included.

  In the above description, an air hydrostatic bearing is configured between the slide support member 510 and the concave guide member 511 and between the counter 513 and the two round bar guide members 512 to supply air (air), respectively. However, a hydrostatic bearing that supplies other gas to the slide support member 510 and the counter 513 may be configured. For example, other gas such as nitrogen gas may be supplied to the slide support member 510 and the counter 513 to constitute a static pressure bearing.

  In the above description, the pipe group 522 including the air pipe 5222 and the coating liquid pipe 5223 is connected to the slide support member 510. However, the pipe type included in the pipe group 522 may have other configurations. For example, the pipe group 522 including only the plurality of coating liquid pipes 5223 may be connected to the slide support member 510, and the air pipe 5222 may be connected to the slide support member 510 using another method. In this case, the external force received from the plurality of coating liquid pipes 5223 is reduced as compared with the conventional connection method, so that an effect on coating deviation can be expected. Further, only the air pipe 5222 may be connected to the slide support member 510, and the plurality of coating liquid pipes 5223 may be connected to the slide support member 510 using other methods. Also in this case, since the external force received from the air pipe 5222 is reduced as compared with the conventional connection method, an effect against application deviation can be expected.

  In the above description, the example in which the piping group 522 is stretched horizontally with the rotation axis of the pulley 523 as the vertical direction has been described. However, the state of the coating liquid and air propagated through the piping group 522 is thereby described. It can be stabilized. However, when such an effect is not expected, the rotation direction of the pulley 523 may be another direction. For example, the rotation direction of the pulley 523 may be the vertical direction (that is, the rotation axis of the pulley 523 is horizontal) or the rotation of the pulley 523 according to the connection position of the pipe group 522 connected to the slide support member 510 and the counter 513, respectively. The direction may be an oblique direction between the horizontal direction and the vertical direction. If the slide support member 510 always maintains the state where the pipe group 522 is stretched along the slide movement direction, the rotation direction of the pulley 523 may be any direction.

  In the above description, the pulley covers 514L and 514R are provided so as to cover the drive pulley 517 and the driven pulley 518. However, a cover is also provided in a space where the slide support member 510 and the like reciprocate and a space where the pulley 523 is provided. It doesn't matter. Further, the pulley cover 514L and 514R may not be provided in the coating apparatus 1.

  Further, in the above-described embodiment, red organic EL material of red, green, and blue is poured into the groove of the substrate P from the plurality of nozzles 52. This coating process produces an organic EL display device. It is an intermediate process. For example, the processing procedure for manufacturing an organic EL display device is as follows: hole transport material (PEDOT) coating → drying → red organic EL material coating → drying → green organic EL material coating → drying → blue organic EL material coating → The procedure is drying. In this case, the coating apparatus of the present invention can be used in a step of coating a hole transport material, a red organic EL material, a green organic EL material, and a blue organic EL material, respectively.

  Further, red, green, and blue organic EL materials may be discharged from the plurality of nozzles 52, respectively. In this case, a so-called stripe arrangement arranged in the order of red, green, and blue is formed in one coating process.

  In the above description, an example in which a plurality of stripe-shaped grooves corresponding to a predetermined pattern shape on which the organic EL material is to be applied is formed on the surface of the substrate P is used. A substrate on which a stripe-shaped groove is not formed may be used as an object to be coated.

  In the above-described embodiment, the manufacturing apparatus of an organic EL display device using an organic EL material or a hole transport material as a coating liquid has been described as an example. However, the present invention can also be applied to other coating apparatuses. . For example, the present invention can be applied to an apparatus for applying a fluorescent material used to manufacture a resist solution, a SOG (Spin On Glass) solution, or a PDP (plasma display panel). Further, the present invention can also be applied to an apparatus for applying a color material used for manufacturing a color filter configured in a liquid crystal cell in order to perform color display on a liquid crystal color display.

  The coating apparatus according to the present invention can prevent application deviation due to external force from a pipe connected to a member that drives the nozzle, and is useful as an apparatus that discharges a coating liquid from a nozzle and applies it to a substrate.

The top view and front view which show the principal part schematic structure of the coating device 1 which concerns on one Embodiment of this invention. The block diagram which shows the control function of the coating device 1, a coating liquid supply part, and an air supply part The perspective view which shows schematic structure of the nozzle moving mechanism part 51 of FIG. Sectional drawing of the nozzle moving mechanism part 51 which looked at the cross section AA of FIG. 1 from the B direction Sectional drawing of the nozzle moving mechanism part 51 which looked at the cross section CC of FIG. 1 from D direction 1 is a schematic front view of the nozzle moving mechanism 51 schematically illustrating the operation of the nozzle moving mechanism 51 in FIG. 1. FIG. 1 is a schematic top view of the nozzle movement mechanism 51 schematically showing the operation of the nozzle movement mechanism 51 in FIG. 1. FIG. 1 is a schematic top view of the nozzle movement mechanism 51 schematically showing the operation of the nozzle movement mechanism 51 in FIG. 1. FIG. 1 is a schematic top view of the nozzle movement mechanism 51 schematically showing the operation of the nozzle movement mechanism 51 in FIG. 1. The perspective view which shows the cross section of the 1st structural example of the piping group 522 of FIG. The perspective view which shows the cross section of the 2nd structural example of the piping group 522 of FIG. The perspective view which shows the cross section of the 3rd structural example of the piping group 522 of FIG. Upper surface schematic diagram of nozzle movement mechanism 51 schematically showing an example in which piping group 522 is stretched through a pair of guide rollers 5231 and pulleys 523. Upper surface schematic diagram of nozzle moving mechanism 51 schematically showing an example in which piping group 522 is stretched using tension adjusting mechanism 524 Upper surface schematic diagram of nozzle moving mechanism 51 schematically showing an example in which piping group 522 is stretched using pulley 523m. Upper surface schematic diagram of nozzle moving mechanism 51 schematically showing an example in which piping group 522 is stretched using pulley 523m. Schematic side view showing a structural example of supplying air and coating liquid in a conventional coating apparatus Schematic front view showing a structural example for supplying air and coating liquid in a conventional coating apparatus Schematic side view showing a structural example when the slide support member 102 is arranged near the center of the guide member 101 in the conventional coating apparatus Schematic front view showing a structural example when the slide support member 102 is arranged near the center of the guide member 101 in the conventional coating apparatus

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Coating apparatus 2 ... Substrate mounting apparatus 21 ... Stage 22 ... Turning part 23 ... Parallel movement table 24 ... Guide receiving part 25, 511 ... Guide member 3 ... Control part 5 ... Organic EL coating mechanism 50 ... Nozzle unit 51 ... Nozzle Moving mechanism 510 ... Slide support member 511 ... Concave guide member 512 ... Round bar guide member 513 ... Counter 514 ... Pulley cover 515 ... Drive belt 516, 519 ... Connection member 517 ... Drive pulley 518 ... Driven pulley 52 ... Nozzle 521 ... Filter 522 ... Piping group 5221 ... Outer membrane pipe 5222 ... Air pipe 5223 ... Application liquid pipe 5224 ... Connection pipe 523 ... Pulleys 5231 and 5232 ... Guide rollers 524 ... Tension adjusting mechanism 525 ... Weight 53 ... Liquid receiving part 54 ... Application liquid supply part 55 ... Air supply unit 541 ... Supply source 542, 551 ... Pump 543 ... Flow rate 552 ... pressure gauge

Claims (12)

A coating apparatus for coating a coating liquid on a substrate,
A nozzle for discharging the coating liquid from the tip,
A stage for placing the substrate on its upper surface;
A nozzle moving mechanism that reciprocally moves the nozzle in a direction across the stage surface in a space on the stage;
The nozzle moving mechanism is
A first guide member extending in a direction crossing the stage surface in the space on the stage;
A slide support member that supports the nozzle and is movable in the transverse direction along the first guide member;
A drive mechanism for reciprocating the slide support member along the first guide member;
A coating apparatus that includes a flexible pipe or wiring that is stretched along the reciprocating direction of the slide support member and moves in the reciprocating direction together with the slide support member as the slide support member reciprocates. .   The coating apparatus according to claim 1, wherein the pipe or the wiring includes at least a coating liquid pipe that supplies the coating liquid to the nozzle. A hydrostatic bearing is configured between the slide support member and the first guide member,
The said piping or wiring is a coating device of Claim 1 or 2 containing at least gas piping which supplies the gas used with the said static pressure bearing to the said slide support member. A magnetic bearing is configured between the slide support member and the first guide member,
The said piping or wiring is a coating device of Claim 1 or 2 containing the wiring which supplies the electric power used with the said magnetic bearing to the said slide support member at least. The nozzle moving mechanism is
A second guide member extending in a direction crossing the stage surface in parallel with the first guide member in the space on the stage;
A hydrostatic bearing between the second guide member and a slide member movable along the second guide member;
The slide support member and the slide member are respectively connected to a symmetrical position spanned by a pair of pulleys, and a driving force from a predetermined drive source is transmitted to thereby connect the slide support member to the first guide member. And a drive belt that reciprocates the slide member along the second guide member in a direction opposite to the direction in which the slide support member moves.
The coating device according to claim 1, wherein the drive mechanism drives the drive belt by rotating the pulley. The nozzle moving mechanism further includes a fixed pulley that is provided outside the space in which the first guide member and the second guide member are extended and is rotatable about a predetermined rotation axis.
The coating apparatus according to claim 5, wherein the pipe or the wiring is stretched between the slide support member and the slide member via the fixed pulley. A hydrostatic bearing is configured between the slide support member and the first guide member,
The piping or wiring is extended from the coating liquid and gas supply port of the coating apparatus to the slide member, and then stretched to the slide support member via the fixed pulley.
The piping or wiring extending from the coating liquid and gas supply port to the slide member supplies the coating liquid piping for supplying the coating liquid to the nozzle and the gas used in the hydrostatic bearing of the slide support member. And a gas pipe for supplying a gas used in the hydrostatic bearing of the slide member,
The pipe or wiring stretched between the slide support member and the slide member includes the coating liquid pipe and a gas pipe for supplying a gas used in a static pressure bearing of the slide support member. Item 7. The coating apparatus according to Item 6.   The coating apparatus according to claim 6, wherein the fixed pulley is rotatable in a horizontal direction around a vertical rotation axis. The nozzle moving mechanism further includes a pair of guide rollers between a space in which the first guide member and the second guide member are extended and the fixed pulley.
The piping or wiring is stretched from the slide member to the one support roller, the fixed pulley, and the other guide roller in this order, and stretched to the slide support member,
The said fixed pulley is a coating device of Claim 6 whose diameter of the circumferential surface which contacts the said piping or wiring is larger than the space | interval of a pair of said guide roller. A hydrostatic bearing is configured between the slide support member and the first guide member,
The said piping or wiring is comprised by the piping group which bundled together the said coating liquid piping and the gas piping which supplies the gas used by the said static pressure bearing to the said slide support member. Coating device. The nozzle moving mechanism is
A fixed pulley provided outside the space in which the first guide member is extended, and rotatable around a predetermined rotation axis;
A tension adjusting mechanism that adjusts the tension in the reciprocating direction of the slide support member applied to the pipe or the wiring to the constant through the fixed pulley; and
The coating apparatus according to claim 1, wherein the pipe or the wiring is stretched from the slide support member to the tension adjusting mechanism via the fixed pulley. The nozzle moving mechanism is
A movable pulley provided outside the space in which the first guide member is extended, and rotatable around a predetermined rotation axis;
A moving pulley moving mechanism for moving a rotating shaft of the moving pulley in a direction perpendicular to a reciprocating direction of the slide support member;
The piping or wiring is stretched along the reciprocating direction of the slide support member via the movable pulley,
The coating apparatus according to claim 1, wherein the moving pulley moving mechanism moves a rotating shaft of the moving pulley at a speed that is half of a speed at which the slide support member reciprocates.

Images