JP4922582B2 - 電荷伝送効率を向上させたイメージセンサ及びその製造方法 - Google Patents
電荷伝送効率を向上させたイメージセンサ及びその製造方法 Download PDFInfo
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- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
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- H01L31/035236—Superlattices; Multiple quantum well structures
Description
上記の問題を解決するために、p0領域のプロファイルを変化させ、フォトダイオードの電位分布を変化させようとする工夫がなされた(以下、改善された従来技術と記す)。
101 P型エピタキシャル層
102 素子分離膜
103 ゲート絶縁膜
104 ゲート導電膜
105 n−領域
108 p01領域
109 第1スペーサ
110 フローティング拡散領域
113 p02領域
114 第2スペーサ
117 p03領域
Claims (13)
- 第1導電型の半導体層の表面上に形成されたゲート電極と、
前記半導体層内の、所定の深さの領域に形成され、フォトダイオードを構成する、第2導電型の第1不純物領域と、
前記ゲート電極の一方の端部にアラインメントされ、前記半導体層の表面から第1深さに拡散され、フォトダイオードを構成する、第1導電型の第2不純物領域と、
前記ゲート電極の側壁に形成された第1スペーサと、
該第1スペーサにアラインメントされ、前記半導体層の表面から第1深さよりも深い第2深さに拡散され、前記フォトダイオードを構成する、第1導電型の第3不純物領域と、
前記第1スペーサの側壁に形成された第2スペーサと、
該第2スペーサにアラインメントされ、前記半導体層の表面から第2深さよりも深い第3深さに拡散され、前記フォトダイオードを構成する、第1導電型の第4不純物領域と
を備えることを特徴とするイメージセンサ。 - 第1導電型の半導体層の表面上に形成されたゲート電極と、
半導体層内部に形成され、フォトダイオードを構成する、第2導電型の第1不純物領域と、
前記ゲート電極の一方の端部にアラインメントされ、前記半導体層の表面から第1深さに拡散され、フォトダイオードを構成する、第1導電型の第2不純物領域と、
前記ゲート電極の側壁に形成された第1スペーサと、
該第1スペーサにアラインメントされて、前記半導体層の表面から第1深さよりも深い第2深さに拡散されて形成された、フォトダイオードを構成する、第3不純物領域と、
前記第1スペーサを含んで全面に500Å以上1000Å以下の厚さに形成されたスクリーン用絶縁膜と、
該スクリーン用絶縁膜が、前記第1スペーサにオーバーラップされた上部構造にアラインメントされ、半導体層の表面から第2深さよりも深い第3深さに拡散されて形成された、フォトダイオードを構成する、第1導電型の第4不純物領域と
を備えることを特徴とするイメージセンサ。 - 前記第2スペーサが、500Å以上1000Å以下の厚さであることを特徴とする請求項1に記載のイメージセンサ。
- 前記第1及び第2スペーサが、酸化膜または窒化膜の絶縁膜であることを特徴とする請求項1に記載のイメージセンサ。
- 前記第1スペーサが、酸化膜または窒化膜の膜であり、
前記スクリーン用絶縁膜が、酸化膜の膜であることを特徴とする請求項2に記載のイメージセンサ。 - 前記ゲート電極の他方の端部にアラインメントされ、前記半導体層の表面から所定の深さに拡散されて形成された第2導電型のフローティング拡散領域をさらに備えることを特徴とする請求項1または請求項2に記載のイメージセンサ。
- 前記半導体層は、第1導電型の基板と前記基板上の第1導電型のエピタキシャル層とを備えることを特徴とする請求項1または請求項2に記載のイメージセンサ。
- 第1導電型の半導体層の表面上にゲート電極を形成する第1ステップと、
イオン注入を行い、半導体層に、フォトダイオードを構成する、第2導電型の第1不純物領域を形成する第2ステップと、
イオン注入を行い、前記ゲート電極の一方の端部にアラインメントされ、前記半導体層の表面から第1深さに拡散され、前記フォトダイオードを構成する第1導電型の第2不純物領域を形成する第3ステップと、
前記ゲート電極の側壁に第1スペーサを形成する第4ステップと、
イオン注入を行って、前記第1スペーサにアラインメントされ、前記半導体層の表面から第1深さよりも深い第2深さに拡散され、前記フォトダイオードを構成する、第1導電型の第3不純物領域を形成する第5ステップと、
前記第1スペーサの側壁に第2スペーサを形成する第6ステップと、
イオン注入を行い、前記第2スペーサにアラインメントされ、前記半導体層の表面から前記第2深さよりも深い第3深さに拡散された、前記フォトダイオードを構成する、第1導電型の第4不純物領域を形成する第7ステップと
を含むことを特徴とするイメージセンサの製造方法。 - 第1導電型の半導体層の表面上にゲート電極を形成する第1ステップと、
イオン注入を行い、半導体層に、フォトダイオード用を構成する、第2導電型の第1不純物領域を形成する第2ステップと、
イオン注入を行い、前記ゲート電極の一方の端部にアラインメントされ、前記半導体層の表面から第1深さに拡散され、前記フォトダイオードを構成する、第1導電型の第2不純物領域を形成する第3ステップと、
前記ゲート電極の側壁に第1スペーサを形成する第4ステップと、
イオン注入を行い、前記第1スペーサにアラインメントされ、前記半導体層の表面から前記第1深さよりも深い第2深さに拡散され、前記フォトダイオードを構成する、第1導電型の第3不純物領域を形成する第5ステップと、
前記第1スペーサが形成されたプロファイルに沿って、スクリーン用絶縁膜を形成する第6ステップと、
イオン注入を行い、前記スクリーン用絶縁膜にアラインメントされ、前記半導体層の表面から前記第2深さよりも深い第3深さに拡散された、前記フォトダイオードを構成する第1導電型の第4不純物領域を形成する第7ステップと
を含むことを特徴とするイメージセンサの製造方法。 - 前記第2スペーサを形成する第6ステップが、
前記第1スペーサが形成されたプロファイルに沿って、前記第2スペーサ用の絶縁膜を、蒸着によって3000Å以上5000Å以下の厚さに形成する第8ステップと、
前記絶縁膜に対して全面エッチングを行い、前記第1スペーサの側壁に500Å以上1000Å以下の厚さの前記第2スペーサを形成する第9ステップと
を含むことを特徴とする請求項8に記載のイメージセンサの製造方法。 - 前記第2スペーサ用絶縁膜が、窒化膜または酸化膜の絶縁膜であることを特徴とする請求項10に記載のイメージセンサの製造方法。
- 前記スクリーン用絶縁膜を500Å以上1000Å以下の厚さに形成することを特徴とする請求項9に記載のイメージセンサの製造方法。
- 前記第1スペーサを形成する第4ステップの後に、
イオン注入を行い、前記ゲート電極の他方の端部にアラインメントされ、前記半導体層の表面から所定の深さに拡散された第2導電型のフローティング拡散領域を形成する第10ステップをさらに含むことを特徴とする請求項8または請求項9に記載のイメージセンサの製造方法。
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JP2912533B2 (ja) * | 1993-11-12 | 1999-06-28 | シャープ株式会社 | 固体撮像装置 |
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US20080197389A1 (en) | 2008-08-21 |
US7344964B2 (en) | 2008-03-18 |
TW200620640A (en) | 2006-06-16 |
KR101115092B1 (ko) | 2012-02-28 |
TWI278106B (en) | 2007-04-01 |
US20060022205A1 (en) | 2006-02-02 |
US8541825B2 (en) | 2013-09-24 |
JP2006041541A (ja) | 2006-02-09 |
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