JP4898472B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP4898472B2
JP4898472B2 JP2007023610A JP2007023610A JP4898472B2 JP 4898472 B2 JP4898472 B2 JP 4898472B2 JP 2007023610 A JP2007023610 A JP 2007023610A JP 2007023610 A JP2007023610 A JP 2007023610A JP 4898472 B2 JP4898472 B2 JP 4898472B2
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JP
Japan
Prior art keywords
holding member
infiltration
electromagnetic wave
porous material
line
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Expired - Fee Related
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JP2007023610A
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English (en)
Japanese (ja)
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JP2007304084A5 (cg-RX-API-DMAC10.html
JP2007304084A (ja
Inventor
信太郎 笠井
敏彦 尾内
健明 井辻
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007023610A priority Critical patent/JP4898472B2/ja
Priority to US11/727,673 priority patent/US7560695B2/en
Priority to EP20070105871 priority patent/EP1845364A3/en
Priority to CN2007100965349A priority patent/CN101059454B/zh
Publication of JP2007304084A publication Critical patent/JP2007304084A/ja
Priority to US12/429,939 priority patent/US7745791B2/en
Publication of JP2007304084A5 publication Critical patent/JP2007304084A5/ja
Application granted granted Critical
Publication of JP4898472B2 publication Critical patent/JP4898472B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0346—Capillary cells; Microcells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N2021/0346—Capillary cells; Microcells
    • G01N2021/035—Supports for sample drops

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2007023610A 2006-04-11 2007-02-02 検査装置 Expired - Fee Related JP4898472B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007023610A JP4898472B2 (ja) 2006-04-11 2007-02-02 検査装置
US11/727,673 US7560695B2 (en) 2006-04-11 2007-03-28 Detecting apparatus, and detecting method
EP20070105871 EP1845364A3 (en) 2006-04-11 2007-04-10 Detecting apparatus and method
CN2007100965349A CN101059454B (zh) 2006-04-11 2007-04-11 检测装置和检测方法
US12/429,939 US7745791B2 (en) 2006-04-11 2009-04-24 Detecting apparatus, and detecting method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006108563 2006-04-11
JP2006108563 2006-04-11
JP2007023610A JP4898472B2 (ja) 2006-04-11 2007-02-02 検査装置

Publications (3)

Publication Number Publication Date
JP2007304084A JP2007304084A (ja) 2007-11-22
JP2007304084A5 JP2007304084A5 (cg-RX-API-DMAC10.html) 2010-03-25
JP4898472B2 true JP4898472B2 (ja) 2012-03-14

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Family Applications (1)

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JP2007023610A Expired - Fee Related JP4898472B2 (ja) 2006-04-11 2007-02-02 検査装置

Country Status (4)

Country Link
US (2) US7560695B2 (cg-RX-API-DMAC10.html)
EP (1) EP1845364A3 (cg-RX-API-DMAC10.html)
JP (1) JP4898472B2 (cg-RX-API-DMAC10.html)
CN (1) CN101059454B (cg-RX-API-DMAC10.html)

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JP4807707B2 (ja) * 2007-11-30 2011-11-02 キヤノン株式会社 波形情報取得装置
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JP5328319B2 (ja) * 2008-01-29 2013-10-30 キヤノン株式会社 テラヘルツ波を用いた検査装置及び検査方法
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Also Published As

Publication number Publication date
CN101059454A (zh) 2007-10-24
US7560695B2 (en) 2009-07-14
CN101059454B (zh) 2011-04-27
US20090236529A1 (en) 2009-09-24
EP1845364A2 (en) 2007-10-17
US7745791B2 (en) 2010-06-29
US20070235718A1 (en) 2007-10-11
EP1845364A3 (en) 2010-02-10
JP2007304084A (ja) 2007-11-22

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