JP4893335B2 - ジャイロモジュール - Google Patents

ジャイロモジュール Download PDF

Info

Publication number
JP4893335B2
JP4893335B2 JP2007016475A JP2007016475A JP4893335B2 JP 4893335 B2 JP4893335 B2 JP 4893335B2 JP 2007016475 A JP2007016475 A JP 2007016475A JP 2007016475 A JP2007016475 A JP 2007016475A JP 4893335 B2 JP4893335 B2 JP 4893335B2
Authority
JP
Japan
Prior art keywords
gyro element
element piece
gyro
axis
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007016475A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008185343A (ja
JP2008185343A5 (enExample
Inventor
光普 米田
菊池　　尊行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007016475A priority Critical patent/JP4893335B2/ja
Priority to US12/000,280 priority patent/US7814792B2/en
Publication of JP2008185343A publication Critical patent/JP2008185343A/ja
Publication of JP2008185343A5 publication Critical patent/JP2008185343A5/ja
Application granted granted Critical
Publication of JP4893335B2 publication Critical patent/JP4893335B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2007016475A 2007-01-26 2007-01-26 ジャイロモジュール Expired - Fee Related JP4893335B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007016475A JP4893335B2 (ja) 2007-01-26 2007-01-26 ジャイロモジュール
US12/000,280 US7814792B2 (en) 2007-01-26 2007-12-11 Gyro-module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007016475A JP4893335B2 (ja) 2007-01-26 2007-01-26 ジャイロモジュール

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010039006A Division JP4893838B2 (ja) 2010-02-24 2010-02-24 ジャイロモジュール

Publications (3)

Publication Number Publication Date
JP2008185343A JP2008185343A (ja) 2008-08-14
JP2008185343A5 JP2008185343A5 (enExample) 2010-05-13
JP4893335B2 true JP4893335B2 (ja) 2012-03-07

Family

ID=39666432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007016475A Expired - Fee Related JP4893335B2 (ja) 2007-01-26 2007-01-26 ジャイロモジュール

Country Status (2)

Country Link
US (1) US7814792B2 (enExample)
JP (1) JP4893335B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10690500B2 (en) 2017-03-28 2020-06-23 Seiko Epson Corporation Sensor element, sensor, electronic apparatus, and vehicle
US20220236057A1 (en) * 2019-07-30 2022-07-28 Seiko Epson Corporation Vibrator Device, Electronic Apparatus, And Vehicle

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008023566A1 (en) * 2006-08-21 2008-02-28 Panasonic Corporation Angular velocity sensor
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8141424B2 (en) 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US8250921B2 (en) * 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
JP2008180511A (ja) * 2007-01-23 2008-08-07 Fujitsu Media Device Kk 角速度センサ
JP2008190972A (ja) * 2007-02-05 2008-08-21 Matsushita Electric Ind Co Ltd 角速度センサ
JP2009074979A (ja) * 2007-09-21 2009-04-09 Toshiba Corp 半導体装置
EP2255157A1 (de) * 2008-03-11 2010-12-01 Continental Teves AG & Co. oHG Sensoreinrichtung zum erfassen wenigstens einer drehrate einer drehbewegung
US8928602B1 (en) 2009-03-03 2015-01-06 MCube Inc. Methods and apparatus for object tracking on a hand-held device
US8797279B2 (en) 2010-05-25 2014-08-05 MCube Inc. Analog touchscreen methods and apparatus
JP5368181B2 (ja) * 2009-06-12 2013-12-18 セイコーエプソン株式会社 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法
US8421082B1 (en) 2010-01-19 2013-04-16 Mcube, Inc. Integrated CMOS and MEMS with air dielectric method and system
US8477473B1 (en) 2010-08-19 2013-07-02 MCube Inc. Transducer structure and method for MEMS devices
US8553389B1 (en) 2010-08-19 2013-10-08 MCube Inc. Anchor design and method for MEMS transducer apparatuses
US8476129B1 (en) 2010-05-24 2013-07-02 MCube Inc. Method and structure of sensors and MEMS devices using vertical mounting with interconnections
US8823007B2 (en) 2009-10-28 2014-09-02 MCube Inc. Integrated system on chip using multiple MEMS and CMOS devices
US8710597B1 (en) 2010-04-21 2014-04-29 MCube Inc. Method and structure for adding mass with stress isolation to MEMS structures
US9709509B1 (en) 2009-11-13 2017-07-18 MCube Inc. System configured for integrated communication, MEMS, Processor, and applications using a foundry compatible semiconductor process
US8794065B1 (en) * 2010-02-27 2014-08-05 MCube Inc. Integrated inertial sensing apparatus using MEMS and quartz configured on crystallographic planes
US8936959B1 (en) 2010-02-27 2015-01-20 MCube Inc. Integrated rf MEMS, control systems and methods
JP2011220997A (ja) * 2010-03-26 2011-11-04 Seiko Epson Corp 物理量検出素子、物理量検出装置、および電子機器
US8367522B1 (en) 2010-04-08 2013-02-05 MCube Inc. Method and structure of integrated micro electro-mechanical systems and electronic devices using edge bond pads
US8928696B1 (en) 2010-05-25 2015-01-06 MCube Inc. Methods and apparatus for operating hysteresis on a hand held device
US8652961B1 (en) 2010-06-18 2014-02-18 MCube Inc. Methods and structure for adapting MEMS structures to form electrical interconnections for integrated circuits
US8869616B1 (en) 2010-06-18 2014-10-28 MCube Inc. Method and structure of an inertial sensor using tilt conversion
US8993362B1 (en) 2010-07-23 2015-03-31 MCube Inc. Oxide retainer method for MEMS devices
US8723986B1 (en) 2010-11-04 2014-05-13 MCube Inc. Methods and apparatus for initiating image capture on a hand-held device
US8969101B1 (en) 2011-08-17 2015-03-03 MCube Inc. Three axis magnetic sensor device and method using flex cables
US9581445B2 (en) 2012-06-04 2017-02-28 Systron Donner Inertial, Inc. Torsional rate measuring gyroscope
JP2014021038A (ja) 2012-07-23 2014-02-03 Seiko Epson Corp 振動片、振動片の製造方法、振動子、電子デバイス、電子機器、および移動体
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
US11054259B2 (en) * 2016-07-26 2021-07-06 Kyocera Corporation Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
JP2018112466A (ja) * 2017-01-11 2018-07-19 ソニーセミコンダクタソリューションズ株式会社 センサデバイス及び電子機器
JP6939007B2 (ja) * 2017-03-28 2021-09-22 セイコーエプソン株式会社 センサー、電子機器および移動体
JP6911446B2 (ja) * 2017-03-28 2021-07-28 セイコーエプソン株式会社 センサー素子、センサー、電子機器および移動体
CN108225295B (zh) * 2017-12-11 2021-01-05 东南大学 基于音叉驱动效应的三轴微陀螺仪
EP3872878B1 (en) * 2018-11-30 2023-04-19 Kyocera Corporation Multi-axial angular velocity sensor
JP7177918B2 (ja) 2019-04-23 2022-11-24 京セラ株式会社 配線基板、電子装置及び電子モジュール
US12164103B2 (en) 2020-12-16 2024-12-10 STMicroelectronics (Research &Develoment) Limited Compact line scan MEMS time of flight system with actuated lens
US11747611B2 (en) 2020-12-16 2023-09-05 Stmicroelectronics (Research & Development) Limited Compact line scan mems time of flight system with actuated lens

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4896268A (en) * 1987-11-25 1990-01-23 Sundstrand Data Control, Inc. Apparatus and method for processing the output signals of a coriolis rate sensor
US4996877A (en) * 1989-02-24 1991-03-05 Litton Systems, Inc. Three axis inertial measurement unit with counterbalanced mechanical oscillator
JPH02306111A (ja) * 1989-05-19 1990-12-19 Matsushita Electric Ind Co Ltd 角速度検出装置
JP3630712B2 (ja) * 1994-02-03 2005-03-23 キヤノン株式会社 ジェスチャー入力方法及びその装置
JPH07306047A (ja) 1994-05-10 1995-11-21 Murata Mfg Co Ltd 多軸検出型振動ジャイロ
JP3492010B2 (ja) * 1995-03-29 2004-02-03 キヤノン株式会社 振動ジャイロおよび防振装置
JPH08152328A (ja) * 1995-07-04 1996-06-11 Nippondenso Co Ltd 角速度センサ及びその使用方法
JP4263790B2 (ja) * 1998-11-13 2009-05-13 株式会社ワコー 角速度センサ
JP2000180178A (ja) * 1998-12-15 2000-06-30 Ngk Insulators Ltd 振動体および振動型ジャイロスコープ
JP2000206141A (ja) * 1999-01-20 2000-07-28 Miyota Kk 運動量センサ
JP2002257548A (ja) * 2001-02-27 2002-09-11 Ngk Insulators Ltd 角速度測定装置
JP2003028646A (ja) 2001-07-17 2003-01-29 Canon Inc 多軸半導体センサ
JP2003248015A (ja) * 2002-02-25 2003-09-05 Fujitsu Media Device Kk 加速度センサ
JP4305623B2 (ja) * 2002-03-13 2009-07-29 セイコーエプソン株式会社 振動子および振動型ジャイロスコープ
US6837107B2 (en) * 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
JP2005069801A (ja) * 2003-08-22 2005-03-17 Toyo Commun Equip Co Ltd 圧電振動ジャイロセンサ
JP4356881B2 (ja) * 2004-02-05 2009-11-04 日本碍子株式会社 振動型ジャイロスコープ
US7237169B2 (en) * 2004-07-26 2007-06-26 Bei Technologies, Inc. Cross-monitoring sensor system and method
JP2006145420A (ja) * 2004-11-22 2006-06-08 Nissin Kogyo Co Ltd 角速度検出装置
JP2006266984A (ja) * 2005-03-25 2006-10-05 Seiko Epson Corp 振動ジャイロ素子

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10690500B2 (en) 2017-03-28 2020-06-23 Seiko Epson Corporation Sensor element, sensor, electronic apparatus, and vehicle
US20220236057A1 (en) * 2019-07-30 2022-07-28 Seiko Epson Corporation Vibrator Device, Electronic Apparatus, And Vehicle
US11940275B2 (en) * 2019-07-30 2024-03-26 Seiko Epson Corporation Vibrator device, electronic apparatus, and vehicle

Also Published As

Publication number Publication date
JP2008185343A (ja) 2008-08-14
US20080178673A1 (en) 2008-07-31
US7814792B2 (en) 2010-10-19

Similar Documents

Publication Publication Date Title
JP4893335B2 (ja) ジャイロモジュール
JP4915246B2 (ja) ジャイロモジュール
CN102478401B (zh) 振动片、传感器单元及其制造方法、电子设备
CN103376100B (zh) 振动片和陀螺传感器、以及电子设备和移动体
WO2011102121A1 (ja) 角速度センサおよび角速度および加速度検出用複合センサ
US20110232383A1 (en) Vibration piece, angular velocity sensor, and electronic apparatus
KR20110088437A (ko) 물리량 검출 소자, 물리량 검출 장치, 및 전자기기
KR20110108288A (ko) 물리량 검출 소자, 물리량 검출 장치, 및 전자 기기
CN102840858B (zh) 弯曲振动片以及电子设备
US9140549B2 (en) Physical quantity detection element, physical quantity detection device, and electronic apparatus
CN103363976A (zh) 振动片、振动片的制造方法、传感器单元、电子设备
US8453503B2 (en) Vibrating reed, vibrator, physical quantity sensor, and electronic apparatus
JP4893838B2 (ja) ジャイロモジュール
CN106017448B (zh) 角速度检测元件、角速度检测装置、电子设备以及移动体
KR100719203B1 (ko) 진동편, 진동자 및 응용기기
JP6517553B2 (ja) 角速度センサ
CN103389083A (zh) 振动片及其制造方法以及陀螺传感器、电子设备、移动体
JP5131491B2 (ja) ジャイロモジュール
JP2011017580A (ja) 物理量検出装置
JP2011117858A (ja) 物理量検出装置
JP7786125B2 (ja) 慣性計測装置
JP2017078630A (ja) 物理量検出装置、電子機器および移動体
JP2009122039A (ja) ２軸及び３軸検出型角速度センサ

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090918

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100326

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20110729

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20110729

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110819

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110915

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111117

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111122

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111205

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150106

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees