JP2008185343A5 - - Google Patents

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Publication number
JP2008185343A5
JP2008185343A5 JP2007016475A JP2007016475A JP2008185343A5 JP 2008185343 A5 JP2008185343 A5 JP 2008185343A5 JP 2007016475 A JP2007016475 A JP 2007016475A JP 2007016475 A JP2007016475 A JP 2007016475A JP 2008185343 A5 JP2008185343 A5 JP 2008185343A5
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JP
Japan
Prior art keywords
element piece
gyro element
detection
gyro
detection axis
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Application number
JP2007016475A
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English (en)
Japanese (ja)
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JP2008185343A (ja
JP4893335B2 (ja
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Priority to JP2007016475A priority Critical patent/JP4893335B2/ja
Priority claimed from JP2007016475A external-priority patent/JP4893335B2/ja
Priority to US12/000,280 priority patent/US7814792B2/en
Publication of JP2008185343A publication Critical patent/JP2008185343A/ja
Publication of JP2008185343A5 publication Critical patent/JP2008185343A5/ja
Application granted granted Critical
Publication of JP4893335B2 publication Critical patent/JP4893335B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007016475A 2007-01-26 2007-01-26 ジャイロモジュール Expired - Fee Related JP4893335B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007016475A JP4893335B2 (ja) 2007-01-26 2007-01-26 ジャイロモジュール
US12/000,280 US7814792B2 (en) 2007-01-26 2007-12-11 Gyro-module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007016475A JP4893335B2 (ja) 2007-01-26 2007-01-26 ジャイロモジュール

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010039006A Division JP4893838B2 (ja) 2010-02-24 2010-02-24 ジャイロモジュール

Publications (3)

Publication Number Publication Date
JP2008185343A JP2008185343A (ja) 2008-08-14
JP2008185343A5 true JP2008185343A5 (enExample) 2010-05-13
JP4893335B2 JP4893335B2 (ja) 2012-03-07

Family

ID=39666432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007016475A Expired - Fee Related JP4893335B2 (ja) 2007-01-26 2007-01-26 ジャイロモジュール

Country Status (2)

Country Link
US (1) US7814792B2 (enExample)
JP (1) JP4893335B2 (enExample)

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US8797279B2 (en) 2010-05-25 2014-08-05 MCube Inc. Analog touchscreen methods and apparatus
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US8476129B1 (en) 2010-05-24 2013-07-02 MCube Inc. Method and structure of sensors and MEMS devices using vertical mounting with interconnections
US8553389B1 (en) 2010-08-19 2013-10-08 MCube Inc. Anchor design and method for MEMS transducer apparatuses
US8710597B1 (en) 2010-04-21 2014-04-29 MCube Inc. Method and structure for adding mass with stress isolation to MEMS structures
US8823007B2 (en) 2009-10-28 2014-09-02 MCube Inc. Integrated system on chip using multiple MEMS and CMOS devices
US8421082B1 (en) 2010-01-19 2013-04-16 Mcube, Inc. Integrated CMOS and MEMS with air dielectric method and system
US8477473B1 (en) 2010-08-19 2013-07-02 MCube Inc. Transducer structure and method for MEMS devices
US9709509B1 (en) 2009-11-13 2017-07-18 MCube Inc. System configured for integrated communication, MEMS, Processor, and applications using a foundry compatible semiconductor process
US8794065B1 (en) * 2010-02-27 2014-08-05 MCube Inc. Integrated inertial sensing apparatus using MEMS and quartz configured on crystallographic planes
US8936959B1 (en) 2010-02-27 2015-01-20 MCube Inc. Integrated rf MEMS, control systems and methods
JP2011220997A (ja) * 2010-03-26 2011-11-04 Seiko Epson Corp 物理量検出素子、物理量検出装置、および電子機器
US8367522B1 (en) 2010-04-08 2013-02-05 MCube Inc. Method and structure of integrated micro electro-mechanical systems and electronic devices using edge bond pads
US8928696B1 (en) 2010-05-25 2015-01-06 MCube Inc. Methods and apparatus for operating hysteresis on a hand held device
US8869616B1 (en) 2010-06-18 2014-10-28 MCube Inc. Method and structure of an inertial sensor using tilt conversion
US8652961B1 (en) 2010-06-18 2014-02-18 MCube Inc. Methods and structure for adapting MEMS structures to form electrical interconnections for integrated circuits
US8993362B1 (en) 2010-07-23 2015-03-31 MCube Inc. Oxide retainer method for MEMS devices
US8723986B1 (en) 2010-11-04 2014-05-13 MCube Inc. Methods and apparatus for initiating image capture on a hand-held device
US8969101B1 (en) 2011-08-17 2015-03-03 MCube Inc. Three axis magnetic sensor device and method using flex cables
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JP2014021038A (ja) 2012-07-23 2014-02-03 Seiko Epson Corp 振動片、振動片の製造方法、振動子、電子デバイス、電子機器、および移動体
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JP2018112466A (ja) * 2017-01-11 2018-07-19 ソニーセミコンダクタソリューションズ株式会社 センサデバイス及び電子機器
JP6939007B2 (ja) * 2017-03-28 2021-09-22 セイコーエプソン株式会社 センサー、電子機器および移動体
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CN108225295B (zh) * 2017-12-11 2021-01-05 东南大学 基于音叉驱动效应的三轴微陀螺仪
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