JP4891840B2 - 分光モジュール - Google Patents

分光モジュール Download PDF

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Publication number
JP4891840B2
JP4891840B2 JP2007152966A JP2007152966A JP4891840B2 JP 4891840 B2 JP4891840 B2 JP 4891840B2 JP 2007152966 A JP2007152966 A JP 2007152966A JP 2007152966 A JP2007152966 A JP 2007152966A JP 4891840 B2 JP4891840 B2 JP 4891840B2
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JP
Japan
Prior art keywords
light
wiring
spectroscopic
main body
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007152966A
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English (en)
Japanese (ja)
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JP2008304379A5 (enExample
JP2008304379A (ja
Inventor
勝己 柴山
テイチマン ヘルムート
隆文 能野
智史 鈴木
ヒラル ディエトマル
スタルケル ウルリッチ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007152966A priority Critical patent/JP4891840B2/ja
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to PCT/JP2008/060389 priority patent/WO2008149948A1/ja
Priority to KR1020157031223A priority patent/KR101705478B1/ko
Priority to KR1020097000422A priority patent/KR101721253B1/ko
Priority to US12/377,314 priority patent/US8049887B2/en
Priority to KR1020177003020A priority patent/KR101817911B1/ko
Priority to US12/377,350 priority patent/US8068223B2/en
Priority to US12/377,343 priority patent/US8045155B2/en
Priority to CN201310359016.7A priority patent/CN103424187B/zh
Priority to EP08765177.4A priority patent/EP2072978A4/en
Priority to CNA2008800005031A priority patent/CN101542246A/zh
Priority to PCT/JP2008/060379 priority patent/WO2008149941A1/ja
Priority to PCT/JP2008/060364 priority patent/WO2008149930A1/ja
Priority to CN200880000507XA priority patent/CN101542249B/zh
Priority to KR1020097000554A priority patent/KR20100017082A/ko
Priority to US12/377,336 priority patent/US8045157B2/en
Priority to CN201510551247.7A priority patent/CN105606215A/zh
Priority to EP08765192.3A priority patent/EP2075555A4/en
Priority to KR1020127015975A priority patent/KR101389171B1/ko
Priority to KR1020097000587A priority patent/KR20100017083A/ko
Priority to EP08765202.0A priority patent/EP2048484B1/en
Priority to EP08765191.5A priority patent/EP2063239A4/en
Priority to CN2008800005084A priority patent/CN101542250B/zh
Priority to PCT/JP2008/060378 priority patent/WO2008149940A1/ja
Priority to KR1020097001454A priority patent/KR20100017086A/ko
Priority to TW101122537A priority patent/TWI484144B/zh
Priority to TW097121324A priority patent/TW200916738A/zh
Priority to TW097121327A priority patent/TW200916739A/zh
Priority to TW97121291A priority patent/TWI468652B/zh
Priority to TW097121329A priority patent/TWI451072B/zh
Publication of JP2008304379A publication Critical patent/JP2008304379A/ja
Publication of JP2008304379A5 publication Critical patent/JP2008304379A5/ja
Application granted granted Critical
Publication of JP4891840B2 publication Critical patent/JP4891840B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2007152966A 2007-06-08 2007-06-08 分光モジュール Active JP4891840B2 (ja)

Priority Applications (30)

Application Number Priority Date Filing Date Title
JP2007152966A JP4891840B2 (ja) 2007-06-08 2007-06-08 分光モジュール
EP08765192.3A EP2075555A4 (en) 2007-06-08 2008-06-05 SPECTROSCOPIC MODULE
KR1020097000422A KR101721253B1 (ko) 2007-06-08 2008-06-05 분광 모듈
US12/377,314 US8049887B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
KR1020177003020A KR101817911B1 (ko) 2007-06-08 2008-06-05 분광 모듈
US12/377,350 US8068223B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
US12/377,343 US8045155B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
CN201310359016.7A CN103424187B (zh) 2007-06-08 2008-06-05 分光模块
EP08765177.4A EP2072978A4 (en) 2007-06-08 2008-06-05 SPECTROSCOPIC MODULE
CNA2008800005031A CN101542246A (zh) 2007-06-08 2008-06-05 分光模块
PCT/JP2008/060379 WO2008149941A1 (ja) 2007-06-08 2008-06-05 分光モジュール
PCT/JP2008/060364 WO2008149930A1 (ja) 2007-06-08 2008-06-05 分光モジュール
CN200880000507XA CN101542249B (zh) 2007-06-08 2008-06-05 分光模块
KR1020097000554A KR20100017082A (ko) 2007-06-08 2008-06-05 분광 모듈
US12/377,336 US8045157B2 (en) 2007-06-08 2008-06-05 Spectroscopic module
CN201510551247.7A CN105606215A (zh) 2007-06-08 2008-06-05 分光模块
PCT/JP2008/060389 WO2008149948A1 (ja) 2007-06-08 2008-06-05 分光モジュール
KR1020157031223A KR101705478B1 (ko) 2007-06-08 2008-06-05 분광 모듈
KR1020097000587A KR20100017083A (ko) 2007-06-08 2008-06-05 분광 모듈
EP08765202.0A EP2048484B1 (en) 2007-06-08 2008-06-05 Spectroscopic module
EP08765191.5A EP2063239A4 (en) 2007-06-08 2008-06-05 SPECTROSCOPIC MODULE
CN2008800005084A CN101542250B (zh) 2007-06-08 2008-06-05 分光模块
PCT/JP2008/060378 WO2008149940A1 (ja) 2007-06-08 2008-06-05 分光モジュール
KR1020097001454A KR20100017086A (ko) 2007-06-08 2008-06-05 분광 모듈
KR1020127015975A KR101389171B1 (ko) 2007-06-08 2008-06-05 분광 모듈
TW101122537A TWI484144B (zh) 2007-06-08 2008-06-06 Spectrometer and its manufacturing method
TW097121324A TW200916738A (en) 2007-06-08 2008-06-06 Spectroscopic module
TW097121327A TW200916739A (en) 2007-06-08 2008-06-06 Spectroscopic module
TW97121291A TWI468652B (zh) 2007-06-08 2008-06-06 Spectrometer and its manufacturing method
TW097121329A TWI451072B (zh) 2007-06-08 2008-06-06 Spectral module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007152966A JP4891840B2 (ja) 2007-06-08 2007-06-08 分光モジュール

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2011252646A Division JP4970616B2 (ja) 2011-11-18 2011-11-18 分光モジュール
JP2011252648A Division JP4966428B2 (ja) 2011-11-18 2011-11-18 分光モジュール

Publications (3)

Publication Number Publication Date
JP2008304379A JP2008304379A (ja) 2008-12-18
JP2008304379A5 JP2008304379A5 (enExample) 2009-02-05
JP4891840B2 true JP4891840B2 (ja) 2012-03-07

Family

ID=40093758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007152966A Active JP4891840B2 (ja) 2007-06-08 2007-06-08 分光モジュール

Country Status (7)

Country Link
US (1) US8045157B2 (enExample)
EP (1) EP2048484B1 (enExample)
JP (1) JP4891840B2 (enExample)
KR (4) KR101721253B1 (enExample)
CN (3) CN101542246A (enExample)
TW (2) TWI468652B (enExample)
WO (1) WO2008149948A1 (enExample)

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JP4891841B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
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JP4887221B2 (ja) * 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
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CN108956467B (zh) * 2018-08-09 2022-04-22 京东方科技集团股份有限公司 一种微流控芯片及其工作方法
KR102877637B1 (ko) 2019-03-29 2025-10-27 삼성전자주식회사 다파장 광을 이용한 광학 장치 및 그 동작 방법
CN110808259A (zh) * 2019-11-25 2020-02-18 华天慧创科技（西安）有限公司 一种晶圆透镜模组
KR102869875B1 (ko) 2019-12-20 2025-10-10 삼성전자주식회사 편분광 필터, 편분광 필터 어레이, 및 편분광 센서
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KR102883986B1 (ko) 2021-10-14 2025-11-07 삼성전자주식회사 이미지 획득 장치 및 방법, 이를 포함하는 전자 장치
CN113820790A (zh) * 2021-10-27 2021-12-21 华天慧创科技（西安）有限公司 一种微型光准直器透镜结构及制作方法
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JP4887221B2 (ja) * 2007-06-08 2012-02-29 浜松ホトニクス株式会社 分光モジュール
KR20100017083A (ko) * 2007-06-08 2010-02-16 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP4891841B2 (ja) * 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール

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KR101389171B1 (ko) 2014-04-24
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KR20100017079A (ko) 2010-02-16
CN105606215A (zh) 2016-05-25
CN103424187A (zh) 2013-12-04
KR101721253B1 (ko) 2017-03-29
KR20150127737A (ko) 2015-11-17
CN101542246A (zh) 2009-09-23
EP2048484A4 (en) 2014-01-01
TW201245675A (en) 2012-11-16
KR101705478B1 (ko) 2017-02-09
KR101817911B1 (ko) 2018-01-11
WO2008149948A1 (ja) 2008-12-11
US20100103412A1 (en) 2010-04-29
KR20120085922A (ko) 2012-08-01
US8045157B2 (en) 2011-10-25
TWI468652B (zh) 2015-01-11
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