JP4890419B2 - 窒化物半導体発光素子及び製造方法 - Google Patents
窒化物半導体発光素子及び製造方法 Download PDFInfo
- Publication number
- JP4890419B2 JP4890419B2 JP2007281667A JP2007281667A JP4890419B2 JP 4890419 B2 JP4890419 B2 JP 4890419B2 JP 2007281667 A JP2007281667 A JP 2007281667A JP 2007281667 A JP2007281667 A JP 2007281667A JP 4890419 B2 JP4890419 B2 JP 4890419B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light emitting
- emitting device
- semiconductor light
- nitride semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 150000004767 nitrides Chemical class 0.000 title claims description 70
- 239000004065 semiconductor Substances 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims description 124
- 239000010410 layer Substances 0.000 claims description 61
- 238000000034 method Methods 0.000 claims description 40
- 230000008569 process Effects 0.000 claims description 26
- 238000005498 polishing Methods 0.000 claims description 16
- 229910052594 sapphire Inorganic materials 0.000 claims description 15
- 239000010980 sapphire Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 11
- 238000005468 ion implantation Methods 0.000 claims description 9
- 238000007517 polishing process Methods 0.000 claims description 6
- 238000001039 wet etching Methods 0.000 claims description 6
- 239000012790 adhesive layer Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 229910010093 LiAlO Inorganic materials 0.000 claims description 4
- 229910020068 MgAl Inorganic materials 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- 229910003465 moissanite Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910017464 nitrogen compound Inorganic materials 0.000 claims 1
- 150000002830 nitrogen compounds Chemical class 0.000 claims 1
- 238000000149 argon plasma sintering Methods 0.000 description 11
- 238000000605 extraction Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000003115 biocidal effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Description
22、32 発光構造物
23、33 導電性接着層
24、34 導電性基板
25、35 電極
31 光散乱層
D 凹凸
Claims (11)
- サファイア、SiC、MgAl 2 O 4 、MgO、LiAlO 2 及びLiGaO 2 から構成される群より選択された物質から成る窒化物単結晶成長用の予備基板上に第1導電型窒化物層、活性層及び第2導電型窒化物層を順次成長させることによって発光構造物を形成するステップと、
前記発光構造物を、窒化物半導体発光素子の最終的な大きさに応じて分離するステップと、
前記発光構造物が窒素物半導体発光素子の最終的な大きさに応じて分離された状態で前記発光構造物上に導電性基板を形成するステップと、
前記予備基板の厚さが減少するように前記予備基板の下面を研磨するステップと、
前記予備基板の結晶性が崩壊するように前記予備基板の下面にイオン注入工程を適用するステップと、
結晶性が崩壊された前記予備基板を加工して凹凸を形成するステップと、
前記第1導電型窒化物層の一部領域が露出するように前記予備基板の一部領域を除去するステップと、
前記第1導電型窒化物層のうち前記予備基板が除去されて露出させられた領域に電極を設けるステップと、を含む窒化物半導体発光素子の製造方法。 - 前記予備基板を加工して凹凸を形成するステップは、前記予備基板の下面を研磨するステップで実行する研磨工程によって行われることを特徴とする、請求項1記載の窒化物半導体発光素子の製造方法。
- 前記予備基板を加工して凹凸を形成するステップは、前記電極を形成するステップの後に、残存した前記予備基板上に凹凸を形成することを含むことを特徴とする、請求項1又は2に記載の窒化物半導体発光素子の製造方法。
- 前記予備基板を加工して凹凸を形成するステップは、ウェットエッチング工程を含むことを特徴とする、請求項1から3のいずれか1つに記載の窒化物半導体発光素子の製造方法。
- 前記ウェットエッチング工程の前に、前記予備基板の結晶性が崩壊するように前記予備基板の下面にイオン注入工程を適用するステップをさらに含むことを特徴とする、請求項4記載の窒化物半導体発光素子の製造方法。
- 前記予備基板の下面を研磨するステップは、前記予備基板の減少させられた厚さが50〜200μmの範囲になるように実施されることを特徴とする、請求項1から5のいずれか1つに記載の窒化物半導体発光素子の製造方法。
- 前記予備基板上に発光構造物を形成するステップの前に、前記予備基板上にアンドープのGaN層を形成するステップをさらに含み、
前記予備基板の一部領域を除去するステップの後に、前記アンドープのGaN層の露出させられた領域を除去するステップをさらに含むことを特徴とする、請求項1から6のいずれか1つに記載の窒化物半導体発光素子の製造方法。 - 前記発光構造物を分離するステップは、分離のための溝部分で前記予備基板上に前記第1導電型窒化物層の一部が残存するように、窒化物半導体発光素子の最終的な大きさに応じて前記発光構造物を分離することを特徴とする、請求項1から7のいずれか1つに記載の窒化物半導体発光素子の製造方法。
- 前記発光構造物上に導電性基板を形成するステップは、導電性接着層を利用して前記発光構造物の上面に前記導電性基板を接着することによって実施されることを特徴とする、請求項1から8のいずれか1つに記載の窒化物半導体発光素子の製造方法。
- 前記導電性基板は、Si、Ge、SiC、ZnO及びGaAsから構成される群より選択された物質から成ることを特徴とする、請求項1から9のいずれか1つに記載の窒化物半導体発光素子の製造方法。
- 前記電極は、Cr、Au、Ti、Al、Rh、Pt、Ni、W、Ir、V、ITO、CIO、IZOから構成される群より選択された物質、または該群より選択された2種以上の物質の組み合わせから成ることを特徴とする、請求項1から10のいずれか1つに記載の窒化物半導体発光素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060108553A KR100826412B1 (ko) | 2006-11-03 | 2006-11-03 | 질화물 반도체 발광 소자 및 제조방법 |
KR10-2006-0108553 | 2006-11-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008118134A JP2008118134A (ja) | 2008-05-22 |
JP4890419B2 true JP4890419B2 (ja) | 2012-03-07 |
Family
ID=39358990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007281667A Active JP4890419B2 (ja) | 2006-11-03 | 2007-10-30 | 窒化物半導体発光素子及び製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7727787B2 (ja) |
JP (1) | JP4890419B2 (ja) |
KR (1) | KR100826412B1 (ja) |
CN (1) | CN100530728C (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100999793B1 (ko) * | 2009-02-17 | 2010-12-08 | 엘지이노텍 주식회사 | 반도체 발광소자 제조방법 |
CN101807648B (zh) * | 2010-03-19 | 2012-12-26 | 厦门市三安光电科技有限公司 | 引入式粗化氮极性面氮化镓基发光二极管及其制作方法 |
CN105158831B (zh) * | 2015-10-23 | 2018-11-30 | 深圳市华星光电技术有限公司 | 一种柔性板 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3764792B2 (ja) * | 1997-02-20 | 2006-04-12 | シャープ株式会社 | 窒化物半導体のエッチング方法 |
JPH11135889A (ja) * | 1997-10-30 | 1999-05-21 | Kyocera Corp | 結晶成長用基板及びそれを用いた発光装置 |
JP2000133837A (ja) | 1998-10-23 | 2000-05-12 | Sanyo Electric Co Ltd | 半導体発光素子及びその製造方法 |
JP4223797B2 (ja) * | 2002-12-19 | 2009-02-12 | 株式会社東芝 | 窒化物系半導体発光素子およびその製造方法 |
JP2004296702A (ja) | 2003-03-26 | 2004-10-21 | Kyocera Corp | 半導体発光素子の製造方法 |
KR100483049B1 (ko) | 2003-06-03 | 2005-04-15 | 삼성전기주식회사 | 수직구조 질화갈륨계 발광다이오드의 제조방법 |
JP4371714B2 (ja) * | 2003-06-16 | 2009-11-25 | 日亜化学工業株式会社 | 窒化物半導体レーザ素子 |
US6972438B2 (en) * | 2003-09-30 | 2005-12-06 | Cree, Inc. | Light emitting diode with porous SiC substrate and method for fabricating |
JP2005150675A (ja) * | 2003-11-18 | 2005-06-09 | Itswell Co Ltd | 半導体発光ダイオードとその製造方法 |
KR100486177B1 (ko) * | 2004-03-25 | 2005-05-06 | 에피밸리 주식회사 | Ⅲ-질화물 반도체 발광소자 |
US7332365B2 (en) * | 2004-05-18 | 2008-02-19 | Cree, Inc. | Method for fabricating group-III nitride devices and devices fabricated using method |
KR100730537B1 (ko) * | 2004-06-25 | 2007-06-20 | 학교법인 성균관대학 | 질화갈륨계 수직구조 발광다이오드 및 그 제조방법 |
US7161188B2 (en) * | 2004-06-28 | 2007-01-09 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light emitting element, semiconductor light emitting device, and method for fabricating semiconductor light emitting element |
KR100649494B1 (ko) * | 2004-08-17 | 2006-11-24 | 삼성전기주식회사 | 레이저를 이용하여 발광 다이오드 기판을 표면 처리하는발광 다이오드 제조 방법 및 이 방법에 의해 제조된 발광다이오드 |
US7256483B2 (en) * | 2004-10-28 | 2007-08-14 | Philips Lumileds Lighting Company, Llc | Package-integrated thin film LED |
JP4687109B2 (ja) * | 2005-01-07 | 2011-05-25 | ソニー株式会社 | 集積型発光ダイオードの製造方法 |
US7335920B2 (en) | 2005-01-24 | 2008-02-26 | Cree, Inc. | LED with current confinement structure and surface roughening |
KR20060097512A (ko) | 2005-03-11 | 2006-09-14 | 김성진 | 질화물 반도체 수직 전극형 발광 다이오드 및 그 제조방법 |
KR100631981B1 (ko) | 2005-04-07 | 2006-10-11 | 삼성전기주식회사 | 수직구조 3족 질화물 발광 소자 및 그 제조 방법 |
KR100638730B1 (ko) * | 2005-04-14 | 2006-10-30 | 삼성전기주식회사 | 수직구조 3족 질화물 발광 소자의 제조 방법 |
KR100896576B1 (ko) * | 2006-02-24 | 2009-05-07 | 삼성전기주식회사 | 질화물계 반도체 발광소자 및 그 제조방법 |
KR100844722B1 (ko) * | 2006-03-07 | 2008-07-07 | 엘지전자 주식회사 | 나노콘 성장방법 및 이를 이용한 발광 다이오드의제조방법 |
US20080042149A1 (en) * | 2006-08-21 | 2008-02-21 | Samsung Electro-Mechanics Co., Ltd. | Vertical nitride semiconductor light emitting diode and method of manufacturing the same |
JP2008091862A (ja) * | 2006-09-08 | 2008-04-17 | Sharp Corp | 窒化物半導体発光素子および窒化物半導体発光素子の製造方法 |
US20090121250A1 (en) * | 2006-11-15 | 2009-05-14 | Denbaars Steven P | High light extraction efficiency light emitting diode (led) using glass packaging |
-
2006
- 2006-11-03 KR KR1020060108553A patent/KR100826412B1/ko active IP Right Grant
-
2007
- 2007-10-29 US US11/976,791 patent/US7727787B2/en active Active
- 2007-10-30 JP JP2007281667A patent/JP4890419B2/ja active Active
- 2007-11-02 CN CNB2007101659158A patent/CN100530728C/zh active Active
-
2010
- 2010-04-08 US US12/756,528 patent/US8124997B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8124997B2 (en) | 2012-02-28 |
CN100530728C (zh) | 2009-08-19 |
US20100193823A1 (en) | 2010-08-05 |
KR100826412B1 (ko) | 2008-04-29 |
CN101174664A (zh) | 2008-05-07 |
US7727787B2 (en) | 2010-06-01 |
JP2008118134A (ja) | 2008-05-22 |
US20080105889A1 (en) | 2008-05-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100867541B1 (ko) | 수직형 발광 소자의 제조 방법 | |
TWI423473B (zh) | 形成具有排熱結構的垂直結構發光二極體的方法 | |
JP5301418B2 (ja) | 半導体発光装置および半導体発光装置の製造方法 | |
JP2006352129A (ja) | 発光ダイオードの製造方法 | |
JP4489747B2 (ja) | 垂直構造の窒化物半導体素子の製造方法 | |
US9691815B2 (en) | Method for producing an optoelectronic semiconductor component, and optoelectronic semiconductor component | |
JP2009295611A (ja) | 半導体発光素子及びその製造方法 | |
CN101273467A (zh) | 氮化物半导体发光器件的制造方法 | |
US7564069B2 (en) | Light-emitting diode including pit therein | |
JP2012028773A (ja) | 半導体発光素子及びその製造方法 | |
CN102903814A (zh) | 制造半导体发光器件的方法 | |
US20070128750A1 (en) | Method for manufacturing high efficiency light-emitting diodes | |
JP4890419B2 (ja) | 窒化物半導体発光素子及び製造方法 | |
KR100815226B1 (ko) | 질화갈륨계 발광 다이오드 소자의 제조방법 | |
JP2008277323A (ja) | 半導体発光素子およびウエハ | |
TWI758996B (zh) | 發光二極體及發光二極體陣列 | |
TWI693725B (zh) | 發光元件及發光元件的製造方法 | |
JP5165633B2 (ja) | 化合物半導体発光素子及びその製造方法 | |
JP2008251605A (ja) | 発光素子の製造方法 | |
KR20100046619A (ko) | 질화물 반도체 발광 소자 및 이의 제조 방법 | |
JP2002208541A (ja) | 窒化物系半導体装置及びその製造方法 | |
CN110581207A (zh) | 发光组件及其制造方法 | |
TWI398018B (zh) | 一種製造發光元件陣列之方法 | |
JP5535213B2 (ja) | オプトエレクトロニクスデバイスおよびオプトエレクトロニクスデバイスの製造方法 | |
KR20120029279A (ko) | 질화물 단결정 및 질화물 반도체 발광소자 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20091126 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20100107 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100108 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100831 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20100930 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20101021 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20101028 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101130 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101203 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110118 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110518 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20110526 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110712 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110927 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111115 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20111214 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4890419 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
S633 | Written request for registration of reclamation of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313633 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141222 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |