JP4871651B2 - 非ニュートン流体を使用して基板を洗浄する方法及び装置 - Google Patents
非ニュートン流体を使用して基板を洗浄する方法及び装置 Download PDFInfo
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- JP4871651B2 JP4871651B2 JP2006164312A JP2006164312A JP4871651B2 JP 4871651 B2 JP4871651 B2 JP 4871651B2 JP 2006164312 A JP2006164312 A JP 2006164312A JP 2006164312 A JP2006164312 A JP 2006164312A JP 4871651 B2 JP4871651 B2 JP 4871651B2
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- 239000012530 fluid Substances 0.000 title claims description 125
- 238000000034 method Methods 0.000 title claims description 44
- 238000004140 cleaning Methods 0.000 title claims description 33
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- 239000006260 foam Substances 0.000 claims description 16
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- 239000000839 emulsion Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 24
- 239000004065 semiconductor Substances 0.000 description 22
- 230000035882 stress Effects 0.000 description 20
- 235000012431 wafers Nutrition 0.000 description 19
- 238000010586 diagram Methods 0.000 description 6
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
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- 230000008021 deposition Effects 0.000 description 2
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- 239000004094 surface-active agent Substances 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/003—Cleaning involving contact with foam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0014—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by incorporation in a layer which is removed with the contaminants
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- C11D2111/22—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Description
Claims (21)
- 基板を洗浄する方法であって、
チャンバに非ニュートン流体を充填するステップと、
前記チャンバ内に前記基板を配置するステップと、
少なくとも一部が栓流となる前記非ニュートン流体の流動を形成するために追加の非ニュートン流体を前記チャンバに押し入れるステップと、を備え、前記基板は栓流となる前記流動の一部内に位置するように前記チャンバ内に配置され、前記非ニュートン流体は前記基板の表面を移動して、前記表面からの粒子が除去される方法。 - 請求項1に記載の方法において、
前記基板は、前記非ニュートン流体が前記チャンバを流動可能である間、前記チャンバ内に保持される方法。 - 請求項1に記載の方法において、
前記基板は、前記非ニュートン流体中で浮遊しており、前記非ニュートン流体は、前記基板を支持可能である方法。 - 請求項1に記載の方法において、
栓流となる前記流動の一部内の流速は、実質的に均一である方法。 - 前記栓流は、前記流動の約全量にわたる、請求項1記載の方法。
- 請求項1に記載の方法において、前記非ニュートン流体は、軟質凝縮物質として定義される方法。
- 請求項1に記載の方法において、
前記非ニュートン流体の前記流動の方向は、前記基板の前記表面に対して実質的に平行である方法。 - 基板を洗浄する方法であって、
前記基板の表面上方に供給ユニットの表面を配置するステップと、
前記供給ユニットの前記表面と、前記基板の前記表面との間に非ニュートン流体の流動を供給するステップと、を備え、前記流動の少なくとも一部は栓流となり、栓流となる前記流動の一部は、前記基板の前記表面を移動して、前記基板の前記表面からの粒子の除去を可能にする方法。 - 請求項8に記載の方法において、
栓流となる前記流動の一部が、実質的に、前記供給ユニットの前記表面と前記基板の前記表面との間に広がる方法。 - 請求項8に記載の方法において、
前記非ニュートン流体は、フォーム、コロイド、及びエマルジョンの一つ以上として定義される方法。 - 請求項8に記載の方法において、
前記非ニュートン流体は、フォームの流出を制限するように構成されたフォームとして定義される方法。 - 基板を洗浄する方法であって、
少なくとも一部が栓流となる非ニュートン流体の流動を提供するステップと、
栓流となる前記流動の一部内に前記基板を配置し、栓流となる前記流動の一部に前記基板の表面を接触させ、栓流となる前記流動の一部が前記表面を移動して、前記表面からの粒子の除去を可能にするように配置するステップと、を備える方法。 - 請求項12に記載の方法において、
前記非ニュートン流体の前記流動の方向は、前記基板の前記表面に対して実質的に平行である方法。 - 基板を洗浄する装置であって、
前記基板の表面上方に配置されるように構成され、非ニュートン流体を受け入れるように構成された供給ユニットを備え、前記非ニュートン流体は、前記供給ユニットと前記表面との間に前記非ニュートン流体の流動を形成するために前記表面に供給可能であり、前記流動は、栓流となる部分を有し、前記栓流は前記表面を移動して、前記表面からの粒子の除去を可能にする装置。 - 請求項14に記載の装置において、
前記供給ユニットは、前記表面に近接して配置されるように構成される方法。 - 基板を洗浄する装置であって、
一部が栓流となるように非ニュートン流体の流動を輸送可能な導管状の空洞を有し、前記基板が栓流となる前記流動の一部内に配置されるよう前記基板を収容するチャンバを備え、前記栓流は前記基板の表面を移動して前記表面から粒子を除去する、装置。 - 請求項16に記載の装置において、
前記チャンバと前記基板の前記表面との間の隙間は、約50ミクロンから約10ミリメートルの範囲の高さを有する装置。 - 請求項16に記載の装置は更に、
前記チャンバの壁において、前記非ニュートン流体を前記チャンバへ注入するように構成された導入口を備える装置。 - 請求項16に記載の装置において、
前記チャンバは、前記基板を受け入れ可能な第一の開口部を定める導入端部と、前記基板を排出可能な第二の開口部を定める排出端部とを有する装置。 - 請求項19に記載の装置は更に、
前記第二の開口部に近接し、前記基板の縁部を受け、前記栓流が前記基板の前記表面を移動する間に、前記基板の移動を防止するように構成された、前記チャンバ内の保持ピンを備える装置。 - 請求項19に記載の装置は更に、
前記第一の開口部を密封するように構成された、前記第一の開口部に近接するパネルを備える、装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/153,957 US8043441B2 (en) | 2005-06-15 | 2005-06-15 | Method and apparatus for cleaning a substrate using non-Newtonian fluids |
US11/153,957 | 2005-06-15 |
Publications (2)
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JP2006352130A JP2006352130A (ja) | 2006-12-28 |
JP4871651B2 true JP4871651B2 (ja) | 2012-02-08 |
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JP2006164312A Expired - Fee Related JP4871651B2 (ja) | 2005-06-15 | 2006-06-14 | 非ニュートン流体を使用して基板を洗浄する方法及び装置 |
Country Status (8)
Country | Link |
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US (3) | US8043441B2 (ja) |
EP (1) | EP1734567A1 (ja) |
JP (1) | JP4871651B2 (ja) |
KR (2) | KR101150736B1 (ja) |
CN (2) | CN1897220B (ja) |
MY (1) | MY159175A (ja) |
SG (2) | SG128608A1 (ja) |
TW (1) | TWI330865B (ja) |
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KR20060131685A (ko) | 2006-12-20 |
US20060283486A1 (en) | 2006-12-21 |
SG128608A1 (en) | 2007-01-30 |
CN102688867A (zh) | 2012-09-26 |
KR101239509B1 (ko) | 2013-03-05 |
CN1897220B (zh) | 2012-07-04 |
KR20120026584A (ko) | 2012-03-19 |
US20120017950A1 (en) | 2012-01-26 |
KR101150736B1 (ko) | 2012-06-08 |
TW200721280A (en) | 2007-06-01 |
US20140158167A1 (en) | 2014-06-12 |
SG149849A1 (en) | 2009-02-27 |
EP1734567A1 (en) | 2006-12-20 |
US8671959B2 (en) | 2014-03-18 |
MY159175A (en) | 2016-12-30 |
CN1897220A (zh) | 2007-01-17 |
JP2006352130A (ja) | 2006-12-28 |
CN102688867B (zh) | 2015-01-07 |
US8043441B2 (en) | 2011-10-25 |
TWI330865B (en) | 2010-09-21 |
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