JP4868270B2 - 圧電アクチュエータ素子 - Google Patents
圧電アクチュエータ素子 Download PDFInfo
- Publication number
- JP4868270B2 JP4868270B2 JP2000157075A JP2000157075A JP4868270B2 JP 4868270 B2 JP4868270 B2 JP 4868270B2 JP 2000157075 A JP2000157075 A JP 2000157075A JP 2000157075 A JP2000157075 A JP 2000157075A JP 4868270 B2 JP4868270 B2 JP 4868270B2
- Authority
- JP
- Japan
- Prior art keywords
- actuator element
- piezoelectric actuator
- sintered
- piezoelectric
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005245 sintering Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 17
- 238000012545 processing Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 description 23
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000010410 layer Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000012805 post-processing Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000157075A JP4868270B2 (ja) | 2000-05-26 | 2000-05-26 | 圧電アクチュエータ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000157075A JP4868270B2 (ja) | 2000-05-26 | 2000-05-26 | 圧電アクチュエータ素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001339106A JP2001339106A (ja) | 2001-12-07 |
| JP2001339106A5 JP2001339106A5 (enExample) | 2007-06-14 |
| JP4868270B2 true JP4868270B2 (ja) | 2012-02-01 |
Family
ID=18661771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000157075A Expired - Fee Related JP4868270B2 (ja) | 2000-05-26 | 2000-05-26 | 圧電アクチュエータ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4868270B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009099438A1 (en) * | 2008-02-05 | 2009-08-13 | Morgan Advanced Ceramics, Inc. | Encapsulation coating to reduce particle shedding |
| CN104662608B (zh) | 2012-09-27 | 2017-05-03 | 株式会社村田制作所 | 压电促动器及其制造方法、磁盘装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146082A (ja) * | 1984-08-10 | 1986-03-06 | Nippon Telegr & Teleph Corp <Ntt> | 圧電アクチユエ−タ |
| JPH10136665A (ja) * | 1996-10-31 | 1998-05-22 | Tdk Corp | 圧電アクチュエータ |
| JP4020454B2 (ja) * | 1997-03-31 | 2007-12-12 | Ｔｄｋ株式会社 | 圧電セラミックスの製造方法 |
| JPH10275439A (ja) * | 1997-03-31 | 1998-10-13 | Chichibu Onoda Cement Corp | クランプ治具とその製造方法 |
| US6465934B1 (en) * | 1997-09-08 | 2002-10-15 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
| JP3592057B2 (ja) * | 1997-12-22 | 2004-11-24 | 株式会社リコー | 圧電ユニットの製造方法及びインクジェットヘッドの製造方法 |
| JPH11322424A (ja) * | 1998-05-20 | 1999-11-24 | Matsushita Electric Ind Co Ltd | 圧電材料並びにそれを用いた圧電振動子、発音体、音声検出器、アクチュエータ及び圧電トランス |
-
2000
- 2000-05-26 JP JP2000157075A patent/JP4868270B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001339106A (ja) | 2001-12-07 |
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