JP4841844B2 - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
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- JP4841844B2 JP4841844B2 JP2005000481A JP2005000481A JP4841844B2 JP 4841844 B2 JP4841844 B2 JP 4841844B2 JP 2005000481 A JP2005000481 A JP 2005000481A JP 2005000481 A JP2005000481 A JP 2005000481A JP 4841844 B2 JP4841844 B2 JP 4841844B2
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- 239000004065 semiconductor Substances 0.000 title claims description 65
- 239000013078 crystal Substances 0.000 claims description 45
- -1 nitride compound Chemical class 0.000 claims description 25
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 150000004767 nitrides Chemical class 0.000 claims description 15
- 239000010955 niobium Substances 0.000 claims description 14
- 150000001875 compounds Chemical class 0.000 claims description 12
- 229910052726 zirconium Inorganic materials 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 10
- 239000011780 sodium chloride Substances 0.000 claims description 10
- 229910052715 tantalum Inorganic materials 0.000 claims description 10
- 229910052735 hafnium Inorganic materials 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 229910052758 niobium Inorganic materials 0.000 claims description 9
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 9
- 239000010937 tungsten Substances 0.000 claims description 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 8
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 8
- 239000011733 molybdenum Substances 0.000 claims description 8
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 48
- 229910002601 GaN Inorganic materials 0.000 description 46
- 229910010271 silicon carbide Inorganic materials 0.000 description 12
- 230000004888 barrier function Effects 0.000 description 11
- 239000010408 film Substances 0.000 description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000005546 reactive sputtering Methods 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000001420 photoelectron spectroscopy Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
- H01L21/28581—Deposition of Schottky electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Description
図1(a)は、本実施の形態における電極を備えた半導体素子の断面図である。また、図1(b)は図1(a)の平面図である。
本実施の形態の半導体素子は、実施の形態1におけるWNx層がTaNx層に置き換わった構造の電極を有する。
2,22 i型GaN層
3,23 n型GaN層
4 WNx層
5,25 Au層
6,26 ショットキー電極
7,27 Ti層
8,28 Al層
9,29 オーミック電極
24 TaNx層
Claims (3)
- n型窒化物系化合物半導体と、
前記n型窒化物系化合物半導体の上に形成されたショットキー電極とを備えた半導体素子であって、
前記ショットキー電極は、前記n型窒化物系化合物半導体の上に形成されて、ジルコニウム、ハフニウム、ニオブ、タンタル、モリブデンおよびタングステンよりなる群から選ばれる少なくとも1種の元素と、窒素および炭素の少なくとも一方の元素とからなる塩化ナトリウム型構造の電極層を有し、
前記n型窒化物系化合物半導体と前記電極層とが接触する面において、前記n型窒化物系化合物半導体の結晶面が六方晶の(0001)面であり、前記電極層の結晶面が(111)面に配向していることを特徴とする半導体素子。 - 前記電極層の格子定数が、前記n型窒化物系化合物半導体におけるa軸格子定数を2(1/2)倍した値の0.95倍〜1.05倍である請求項1に記載の半導体素子。
- 前記ショットキー電極は、前記電極層の上に、金、銅およびアルミニウムよりなる群から選ばれる少なくとも1種の元素を主成分とし、抵抗率が5×10−8Ωm以下である他の電極層を有する請求項1または2に記載の半導体素子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005000481A JP4841844B2 (ja) | 2005-01-05 | 2005-01-05 | 半導体素子 |
US11/290,603 US7598548B2 (en) | 2005-01-05 | 2005-12-01 | Semiconductor device and field-effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005000481A JP4841844B2 (ja) | 2005-01-05 | 2005-01-05 | 半導体素子 |
Publications (2)
Publication Number | Publication Date |
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JP2006190749A JP2006190749A (ja) | 2006-07-20 |
JP4841844B2 true JP4841844B2 (ja) | 2011-12-21 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2005000481A Active JP4841844B2 (ja) | 2005-01-05 | 2005-01-05 | 半導体素子 |
Country Status (2)
Country | Link |
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US (1) | US7598548B2 (ja) |
JP (1) | JP4841844B2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4557879B2 (ja) | 2005-12-09 | 2010-10-06 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP4059276B2 (ja) * | 2006-03-24 | 2008-03-12 | トヨタ自動車株式会社 | 動力伝達装置およびその組立方法 |
JP5183913B2 (ja) * | 2006-11-24 | 2013-04-17 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
JP5358893B2 (ja) * | 2007-04-03 | 2013-12-04 | 三菱電機株式会社 | トランジスタ |
JP5324076B2 (ja) * | 2007-11-21 | 2013-10-23 | シャープ株式会社 | 窒化物半導体用ショットキー電極および窒化物半導体装置 |
DE102009028241A1 (de) * | 2009-08-05 | 2011-02-10 | Robert Bosch Gmbh | Halbleiteranordnung |
JP5375497B2 (ja) | 2009-10-01 | 2013-12-25 | トヨタ自動車株式会社 | 半導体装置、及び、半導体装置の製造方法 |
JP5437114B2 (ja) * | 2010-03-02 | 2014-03-12 | 次世代パワーデバイス技術研究組合 | 半導体トランジスタの製造方法 |
US9236441B2 (en) * | 2012-11-22 | 2016-01-12 | Seoul National University R&Db Foundation | Nitride-based semiconductor device and method for manufacturing the same |
JPWO2014167876A1 (ja) * | 2013-04-12 | 2017-02-16 | シャープ株式会社 | 窒化物半導体装置 |
KR101450263B1 (ko) | 2013-07-15 | 2014-10-22 | 전북대학교산학협력단 | 쇼트키 다이오드 및 그 제조방법 |
DE102014118874A1 (de) | 2014-12-17 | 2016-06-23 | Infineon Technologies Austria Ag | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
WO2023008308A1 (ja) | 2021-07-27 | 2023-02-02 | ヌヴォトンテクノロジージャパン株式会社 | 半導体装置 |
Family Cites Families (15)
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KR0153878B1 (ko) * | 1994-06-07 | 1998-10-15 | 쿠미하시 요시유키 | 탄화규소반도체장치와 그 제조방법 |
JPH0864802A (ja) * | 1994-06-07 | 1996-03-08 | Mitsubishi Materials Corp | 炭化珪素半導体装置及びその製造方法 |
DE19514081A1 (de) | 1995-04-13 | 1996-10-17 | Siemens Ag | Verfahren zum Herstellen eines elektrischen Kontakts auf einer SiC-Oberfläche |
KR100200739B1 (ko) * | 1996-10-16 | 1999-06-15 | 윤종용 | 장벽금속막 형성방법 |
JP3813740B2 (ja) * | 1997-07-11 | 2006-08-23 | Tdk株式会社 | 電子デバイス用基板 |
JPH11330546A (ja) * | 1998-05-12 | 1999-11-30 | Fuji Electric Co Ltd | Iii族窒化物半導体およびその製造方法 |
JP3512659B2 (ja) | 1998-12-28 | 2004-03-31 | シャープ株式会社 | 窒化物系iii−v族化合物半導体装置 |
JP4742399B2 (ja) * | 1999-03-12 | 2011-08-10 | 住友化学株式会社 | 3−5族化合物半導体の製造方法 |
JP3846150B2 (ja) | 2000-03-27 | 2006-11-15 | 豊田合成株式会社 | Iii族窒化物系化合物半導体素子および電極形成方法 |
JP3960815B2 (ja) * | 2002-02-12 | 2007-08-15 | シャープ株式会社 | 半導体発光素子 |
JP2004014716A (ja) * | 2002-06-05 | 2004-01-15 | Matsushita Electric Ind Co Ltd | 半導体装置 |
US7034330B2 (en) * | 2002-10-22 | 2006-04-25 | Showa Denko Kabushiki Kaisha | Group-III nitride semiconductor device, production method thereof and light-emitting diode |
US7112860B2 (en) * | 2003-03-03 | 2006-09-26 | Cree, Inc. | Integrated nitride-based acoustic wave devices and methods of fabricating integrated nitride-based acoustic wave devices |
JP4869563B2 (ja) * | 2004-04-21 | 2012-02-08 | 新日本無線株式会社 | 窒化物半導体装置及びその製造方法 |
TWI258183B (en) * | 2004-04-28 | 2006-07-11 | Showa Denko Kk | Compound semiconductor light-emitting device |
-
2005
- 2005-01-05 JP JP2005000481A patent/JP4841844B2/ja active Active
- 2005-12-01 US US11/290,603 patent/US7598548B2/en active Active
Also Published As
Publication number | Publication date |
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US20060145201A1 (en) | 2006-07-06 |
JP2006190749A (ja) | 2006-07-20 |
US7598548B2 (en) | 2009-10-06 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |