JP4840958B2 - 走査露光装置及びデバイス製造方法 - Google Patents

走査露光装置及びデバイス製造方法 Download PDF

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Publication number
JP4840958B2
JP4840958B2 JP2003361135A JP2003361135A JP4840958B2 JP 4840958 B2 JP4840958 B2 JP 4840958B2 JP 2003361135 A JP2003361135 A JP 2003361135A JP 2003361135 A JP2003361135 A JP 2003361135A JP 4840958 B2 JP4840958 B2 JP 4840958B2
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Japan
Prior art keywords
stage
substrate
focus
limit value
exposure apparatus
Prior art date
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Expired - Fee Related
Application number
JP2003361135A
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English (en)
Japanese (ja)
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JP2005129595A5 (enExample
JP2005129595A (ja
Inventor
智 秋元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003361135A priority Critical patent/JP4840958B2/ja
Priority to US10/968,046 priority patent/US7158212B2/en
Priority to EP04256481.5A priority patent/EP1526409B1/en
Publication of JP2005129595A publication Critical patent/JP2005129595A/ja
Publication of JP2005129595A5 publication Critical patent/JP2005129595A5/ja
Application granted granted Critical
Publication of JP4840958B2 publication Critical patent/JP4840958B2/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7034—Leveling

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2003361135A 2003-10-21 2003-10-21 走査露光装置及びデバイス製造方法 Expired - Fee Related JP4840958B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003361135A JP4840958B2 (ja) 2003-10-21 2003-10-21 走査露光装置及びデバイス製造方法
US10/968,046 US7158212B2 (en) 2003-10-21 2004-10-20 Scanning exposure apparatus and device manufacturing method
EP04256481.5A EP1526409B1 (en) 2003-10-21 2004-10-20 Scanning exposure apparatus and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003361135A JP4840958B2 (ja) 2003-10-21 2003-10-21 走査露光装置及びデバイス製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010141079A Division JP4869425B2 (ja) 2010-06-21 2010-06-21 走査型露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2005129595A JP2005129595A (ja) 2005-05-19
JP2005129595A5 JP2005129595A5 (enExample) 2006-12-07
JP4840958B2 true JP4840958B2 (ja) 2011-12-21

Family

ID=34386488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003361135A Expired - Fee Related JP4840958B2 (ja) 2003-10-21 2003-10-21 走査露光装置及びデバイス製造方法

Country Status (3)

Country Link
US (1) US7158212B2 (enExample)
EP (1) EP1526409B1 (enExample)
JP (1) JP4840958B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4424739B2 (ja) * 2004-10-19 2010-03-03 キヤノン株式会社 ステージ装置
DE102006059432B4 (de) 2006-12-15 2022-08-25 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zur Vermessung von Lithographiemasken
JP6066610B2 (ja) * 2012-07-31 2017-01-25 キヤノン株式会社 露光方法、露光装置及びデバイス製造方法
CN103592820B (zh) * 2012-08-13 2016-09-28 上海微电子装备有限公司 一种全局调平边沿扫描的装置和方法
CN103869634B (zh) * 2012-12-14 2015-08-05 北大方正集团有限公司 一种聚焦限位调节方法
JP7312053B2 (ja) * 2019-08-05 2023-07-20 キヤノン株式会社 露光装置、および物品の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0419705A1 (de) * 1989-09-27 1991-04-03 Siemens Aktiengesellschaft Verfahren zur Ruckbegrenzung von numerischen Antriebssystemen
US5343270A (en) 1990-10-30 1994-08-30 Nikon Corporation Projection exposure apparatus
KR100300618B1 (ko) * 1992-12-25 2001-11-22 오노 시게오 노광방법,노광장치,및그장치를사용하는디바이스제조방법
JP3521543B2 (ja) * 1994-05-18 2004-04-19 株式会社ニコン 走査露光方法及び装置
JP3781116B2 (ja) * 1994-05-18 2006-05-31 株式会社ニコン 走査露光方法及び走査露光装置
JPH09180989A (ja) * 1995-12-26 1997-07-11 Toshiba Corp 露光装置および露光方法
JPH1097987A (ja) 1996-09-25 1998-04-14 Canon Inc 走査型露光装置および方法
US5917580A (en) 1996-08-29 1999-06-29 Canon Kabushiki Kaisha Scan exposure method and apparatus
US6455214B1 (en) * 1997-03-24 2002-09-24 Nikon Corporation Scanning exposure method detecting focus during relative movement between energy beam and substrate
JP3408118B2 (ja) 1997-07-03 2003-05-19 キヤノン株式会社 投影露光方法および装置
JP4194160B2 (ja) 1998-02-19 2008-12-10 キヤノン株式会社 投影露光装置
US6008610A (en) 1998-03-20 1999-12-28 Nikon Corporation Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
JP2001223157A (ja) * 1999-11-30 2001-08-17 Canon Inc 投影露光装置、投影露光方法、及び半導体装置の製造方法
JP2002025886A (ja) 2000-07-03 2002-01-25 Canon Inc ステップ＆スキャン式投影露光装置、その保守方法並びに同装置を用いた半導体デバイス製造方法および半導体製造工場
EP1477852A1 (en) * 2003-05-16 2004-11-17 ASML Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby

Also Published As

Publication number Publication date
JP2005129595A (ja) 2005-05-19
EP1526409A2 (en) 2005-04-27
EP1526409A3 (en) 2009-01-14
US7158212B2 (en) 2007-01-02
US20050083501A1 (en) 2005-04-21
EP1526409B1 (en) 2015-08-26

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