JP4838622B2 - 圧電振動子の製造方法 - Google Patents
圧電振動子の製造方法 Download PDFInfo
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- JP4838622B2 JP4838622B2 JP2006114222A JP2006114222A JP4838622B2 JP 4838622 B2 JP4838622 B2 JP 4838622B2 JP 2006114222 A JP2006114222 A JP 2006114222A JP 2006114222 A JP2006114222 A JP 2006114222A JP 4838622 B2 JP4838622 B2 JP 4838622B2
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- lead
- inner lead
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- piezoelectric
- plasma arc
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- Expired - Fee Related
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- 238000000034 method Methods 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 30
- 238000005304 joining Methods 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 23
- 238000010891 electric arc Methods 0.000 claims description 22
- 229910052786 argon Inorganic materials 0.000 claims description 15
- 230000005284 excitation Effects 0.000 claims description 10
- 238000005476 soldering Methods 0.000 claims description 6
- 238000007747 plating Methods 0.000 description 58
- 229910000679 solder Inorganic materials 0.000 description 50
- 239000013078 crystal Substances 0.000 description 25
- 235000014676 Phragmites communis Nutrition 0.000 description 24
- 230000008569 process Effects 0.000 description 20
- 238000007789 sealing Methods 0.000 description 20
- 239000000463 material Substances 0.000 description 17
- 238000012545 processing Methods 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- 229910008433 SnCU Inorganic materials 0.000 description 11
- 238000004891 communication Methods 0.000 description 11
- 239000010408 film Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 230000010355 oscillation Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000002844 melting Methods 0.000 description 9
- 230000008018 melting Effects 0.000 description 9
- 238000012546 transfer Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 239000011651 chromium Substances 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 238000007667 floating Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 244000273256 Phragmites communis Species 0.000 description 2
- 229910007637 SnAg Inorganic materials 0.000 description 2
- 229910001080 W alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 210000000707 wrist Anatomy 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000905 alloy phase Inorganic materials 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- JWVAUCBYEDDGAD-UHFFFAOYSA-N bismuth tin Chemical compound [Sn].[Bi] JWVAUCBYEDDGAD-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000007716 flux method Methods 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000005433 ionosphere Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010587 phase diagram Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 229910000597 tin-copper alloy Inorganic materials 0.000 description 1
- 229910001174 tin-lead alloy Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49128—Assembling formed circuit to base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49139—Assembling to base an electrical component, e.g., capacitor, etc. by inserting component lead or terminal into base aperture
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Description
〔加熱温度を高くする場合の問題点〕
窒素等の熱風による加熱方式では、圧電振動片が水晶の場合には、熱風が水晶にもあたって、振動片自体の温度を過渡に上昇させてしまう。この場合、水晶の結晶に双晶などの歪みが生じて、クリスタルインピーダンス値や温度係数などの特性を大幅に劣化させる懸念がある。特に、圧電振動片及び気密端子の小型化が急速に進行している今日は、組合される部材の熱容量に注意し、工程の途中で部材を劣化させないような配慮が必要となっている。
〔励起活性種を利用する方法の問題点〕
特許文献1には、熱風に励起活性種を混合させてマウント工程を行う方法が図17に開示されている。ここで、励起活性種を生成するためにCF4を放電ガスとして選択し、放電管の中で生成したフッ素の励起活性種を、加熱された窒素の熱風に混合して、マウントする該当部に噴射する。インナーリード表面のハンダメッキ層とマウントする電極面に薄いフッ化層を形成すると同時に、ハンダメッキ層を溶融させて濡れ性の優れた接合が実現できるとしている。
2、2a、2b インナーリード
3 アウターリード
3a 中央部
4 圧電振動片
4a 励振電極
5 封止管
6 圧電振動子
7、7a、7b マウント電極
8 ステム
10 圧電振動子搬送用パレット(位置決め手段)
11 切り込み部
12 圧電振動片整列治具(整列手段)
13 プラズマアーク電極
14 アルゴンガス
15 プラズマアーク
16 プラズマアーク用電源
17 ハンダ
18 従来の圧電振動子搬送用パレット
19 従来の圧電振動子搬送用パレットの固定用バネ
51 音叉型水晶振動子
52 基板
53 集積回路
54 電子部品
101 電源部
102 制御部
103 計時部
104 通信部
104a 無線部
104b 音声処理部
104c 増幅部
104d 音声入出力部
104e 着信音発生部
104f 切替部
104g 呼制御メモリ部
104h 電話番号入力部
105 電圧検出部
106 電源遮断部
107 表示部
200 電波時計
201 アンテナ
202 アンプ回路
203 フィルタ部
204、205 水晶振動子
206 検波、整流回路+
207 波形整形回路
208 CPU
209 RTC
Claims (2)
- 2本のリード端子を有する気密端子と、圧電体からなり表面に励振電極とマウント電極とが形成された圧電振動片とを有し、
前記リード端子のインナーリードと前記マウント電極とが接合された圧電振動子の製造方法であって、
前記インナーリードと前記マウント電極とを接合する際に、一方の前記リード端子のアウターリードをプラズマアーク用電源の出力端子に接続し、前記一方のリード端子のインナーリードと、前記一方のリード端子のインナーリードと前記マウント電極の接合部近傍に配置したプラズマアーク電極との間に電圧を印加することにより、前記一方のリード端子のインナーリードと前記マウント電極との接合部に対してアルゴンガス中でプラズマアーク放電させてハンダ接合した後に、
前記一方のリード端子のアウターリードを前記プラズマアーク用電源の出力端子から外し、他方の前記リード端子のアウターリードを前記プラズマアーク用電源の出力端子に接続し、前記他方のリード端子のインナーリードと、前記他方のリード端子のインナーリードと前記マウント電極の接合部近傍に配置したプラズマアーク電極との間に電圧を印加することにより、前記他方のリード端子のインナーリードと前記マウント電極との接合部に対してアルゴンガス中でプラズマアーク放電させてハンダ接合することを特徴とする圧電振動子の製造方法。 - 前記インナーリードと前記マウント電極とを接合する際に、前記リード端子のアウターリードを切り込み部が形成された位置決め手段で挟持し、整列手段により整列された前記圧電振動片の前記マウント電極に前記インナーリードを位置合わせする請求項1に記載の圧電振動子の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006114222A JP4838622B2 (ja) | 2005-04-25 | 2006-04-18 | 圧電振動子の製造方法 |
TW095114124A TWI411228B (zh) | 2005-04-25 | 2006-04-20 | 壓電振動器及其製造方法、壓電振盪器、電子裝置及無線電波時計 |
MYPI20061867A MY142169A (en) | 2005-04-25 | 2006-04-24 | Method of fabricating piezoelectric vibrator and electronic apparatus and radio wave timepiece having piezoelectric vibrator |
US11/409,653 US7581297B2 (en) | 2005-04-25 | 2006-04-24 | Method of fabricating piezoelectric vibrator and electronic apparatus and radio wave timepiece having piezoelectric vibrator |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005126706 | 2005-04-25 | ||
JP2005126706 | 2005-04-25 | ||
JP2006114222A JP4838622B2 (ja) | 2005-04-25 | 2006-04-18 | 圧電振動子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006333447A JP2006333447A (ja) | 2006-12-07 |
JP4838622B2 true JP4838622B2 (ja) | 2011-12-14 |
Family
ID=37186135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006114222A Expired - Fee Related JP4838622B2 (ja) | 2005-04-25 | 2006-04-18 | 圧電振動子の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7581297B2 (ja) |
JP (1) | JP4838622B2 (ja) |
MY (1) | MY142169A (ja) |
TW (1) | TWI411228B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100680307B1 (ko) * | 2005-05-20 | 2007-02-07 | 삼성전기주식회사 | 압전 진동자 및 이를 구비한 초음파 모터 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57152210A (en) * | 1981-03-16 | 1982-09-20 | Matsushima Kogyo Co Ltd | Joining method for element |
JPS63133475A (ja) * | 1986-11-25 | 1988-06-06 | 株式会社日立製作所 | 被覆線のワイヤボンデイング装置 |
JPH08250957A (ja) * | 1995-03-09 | 1996-09-27 | Miyota Kk | 水晶振動子の半田付け装置 |
JPH08290266A (ja) * | 1995-04-21 | 1996-11-05 | Matsushita Electric Ind Co Ltd | ロウ付け方法 |
JPH09312545A (ja) * | 1996-03-18 | 1997-12-02 | Seiko Epson Corp | 圧電素子、その製造方法、及び圧電振動片のマウント装置 |
JPH10163781A (ja) * | 1996-11-28 | 1998-06-19 | Miyota Co Ltd | 水晶振動子の製造方法及び製造装置 |
JPH11136079A (ja) * | 1997-10-28 | 1999-05-21 | Miyota Kk | 音叉型水晶振動子 |
KR100306633B1 (ko) * | 1998-11-11 | 2001-11-17 | 윤종용 | 도어 개폐에 따라 고압트랜스로의 전원공급을 단속하는 도전부재를 구비한 전자렌지 |
JP2002050941A (ja) * | 2000-08-01 | 2002-02-15 | Seiko Epson Corp | 圧電振動子とその電極接合方法 |
US6350960B1 (en) * | 2000-11-28 | 2002-02-26 | Thermal Dynamics Corporation | Parts-in-place safety reset circuit and method for contact start plasma-arc torch |
US6555778B1 (en) * | 2001-11-19 | 2003-04-29 | Geomat Insights, Llc | Plasma enhanced sheet bonding method and device |
US6521857B1 (en) * | 2001-11-19 | 2003-02-18 | Geomat Insights, Llc | Plasma enhanced bonding method and device |
JP2003258589A (ja) * | 2002-02-26 | 2003-09-12 | Seiko Epson Corp | 圧電デバイスと圧電デバイスを利用した電波時計、及び圧電デバイスを利用した携帯電話装置ならびに圧電デバイスを利用した電子機器 |
-
2006
- 2006-04-18 JP JP2006114222A patent/JP4838622B2/ja not_active Expired - Fee Related
- 2006-04-20 TW TW095114124A patent/TWI411228B/zh not_active IP Right Cessation
- 2006-04-24 MY MYPI20061867A patent/MY142169A/en unknown
- 2006-04-24 US US11/409,653 patent/US7581297B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20060238076A1 (en) | 2006-10-26 |
TWI411228B (zh) | 2013-10-01 |
JP2006333447A (ja) | 2006-12-07 |
TW200705807A (en) | 2007-02-01 |
US7581297B2 (en) | 2009-09-01 |
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