JP4838571B2 - 発光表示装置およびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000003990 capacitor Substances 0.000 claims description 143
- 239000002184 metal Substances 0.000 claims description 41
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 26
- 229920005591 polysilicon Polymers 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 24
- 239000004020 conductor Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
- G09G3/3233—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the current through the light-emitting element
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0819—Several active elements per pixel in active matrix panels used for counteracting undesired variations, e.g. feedback or autozeroing
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0852—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor being a dynamic memory with more than one capacitor
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0861—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor with additional control of the display period without amending the charge stored in a pixel memory, e.g. by means of additional select electrodes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2310/00—Command of the display device
- G09G2310/02—Addressing, scanning or driving the display screen or processing steps related thereto
- G09G2310/0243—Details of the generation of driving signals
- G09G2310/0251—Precharge or discharge of pixel before applying new pixel voltage
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2320/00—Control of display operating conditions
- G09G2320/04—Maintaining the quality of display appearance
- G09G2320/043—Preventing or counteracting the effects of ageing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Control Of El Displays (AREA)
Description
110 画素
120 第1電源線
200 データ駆動部
300 走査駆動部
OLED 発光素子
Claims (21)
- 走査信号を伝達する複数の走査線と;
データ信号を伝達する複数のデータ線と;
画素電源を伝達する複数の画素電源線と;
前記走査信号,前記データ信号および前記画素電源が伝達されることにより発光する複数の画素と;
を含み,
前記画素は,前記複数の画素電源線と交差して前記複数の画素電源線に電気的に連結される金属ラインを各々に含み,
前記画素は,第1および第2電極を備えるキャパシタを含み,前記第1電極がポリシリコンからなり,前記第2電極が前記金属ラインであり,
前記画素電源線と交差して配列される前記複数の画素は,前記第2電極を介して連結されることを特徴とする,発光表示装置。 - 前記金属ラインと前記画素電源線とは,コンタクトホールを介して連結されることを特徴とする,請求項1に記載の発光表示装置。
- 前記キャパシタの第1電極は,第2のトランジスタのチャネル領域と電気的に連結され,前記第2のトランジスタのチャネル領域は,第1のトランジスタのゲート電極に電気的に連結されることを特徴とする,請求項1または2に記載の発光表示装置。
- 前記画素の前記キャパシタの第2電極は隣合う他の画素の前記キャパシタの第2電極に電気的に連結され,前記金属ラインは前記複数の第2電極が電気的に連結されていることを特徴とする,請求項1〜3のいずれかに記載の発光表示装置。
- 前記キャパシタの第1電極は,ドーピングされたポリシリコンまたは真性ポリシリコンのいずれかからなることを特徴とする,請求項1〜4のいずれかに記載の発光表示装置。
- 前記画素は,前記複数のデータ線と交差して前記複数の画素電源線に電気的に連結される金属ラインを各々に含み,
前記金属ラインは,前記データ線と交差する部分の幅が交差しない部分の幅より小さく形成されることを特徴とする,請求項1〜5のいずれかに記載の発光表示装置。 - 前記画素は,
前記データ信号に対応する第1電圧に応じて,前記画素電源により電流を生成する第1トランジスタと;
前記走査信号に応じて,前記第1トランジスタに前記データ信号を伝達する第2トランジスタと;
前記第1電圧を所定の期間にわたって維持するキャパシタと;
前記第1トランジスタから電流が伝達されることにより発光する発光素子と;
を含むことを特徴とする,請求項1〜6のいずれかに記載の発光表示装置。 - 前記データ信号を伝達するデータ駆動部と;
前記走査信号を伝達する走査駆動部と;
をさらに含むことを特徴とする,請求項1〜7のいずれかに記載の発光表示装置。 - 走査信号を伝達する複数の走査線と;
発光制御信号を伝達する複数の発光制御線と;
データ信号を伝達する複数のデータ線と;
画素電源を伝達する複数の画素電源線と;
前記走査信号,前記発光制御信号,前記データ信号および前記画素電源が伝達されることにより発光する複数の画素と;
を含み,
前記画素は,前記複数の画素電源線と交差して前記複数の画素電源線に電気的に連結される金属ラインを各々に含み,
前記画素は,第1および第2電極を備える第1のキャパシタを含み,前記第1のキャパシタの前記第1電極がポリシリコンからなり,前記第1のキャパシタの前記第2電極が前記金属ラインであり,
前記画素電源線と交差して配列される前記複数の画素は,前記第1のキャパシタの第2電極を介して連結されることを特徴とする,発光表示装置。 - 前記金属ラインと前記画素電源線とは,コンタクトホールを介して連結されることを特徴とする,請求項9に記載の発光表示装置。
- 前記画素は,
発光素子と;
前記データ信号に対応する第1電圧に応じて,前記画素電源により電流を生成する第1トランジスタと;
第1走査信号に応じて,前記第1トランジスタに前記データ信号を伝達する第2トランジスタと;
前記第1電圧を所定の期間にわたって格納する前記第1キャパシタと;
前記第1トランジスタの閾値電圧を所定の期間にわたって格納する第2キャパシタと;
前記第1トランジスタの閾値電圧を所定の期間にわたって格納する第3キャパシタと;
第2走査信号に応じて,前記第1トランジスタがダイオード接続されるようにする第3トランジスタと;
前記第2走査信号に応じて,前記画素電源を前記第2キャパシタの第1電極に伝達する第4トランジスタと;
前記発光制御信号に応じて,前記電流を前記発光素子に伝達する第5トランジスタと;
を含むことを特徴とする,請求項9または10に記載の発光表示装置。 - 前記画素の前記第1キャパシタの第2電極は,隣り合う他の画素の前記第1キャパシタの第2電極に電気的に連結され,前記金属ラインは前記複数の第1キャパシタの第2電極が電気的に連結されていることを特徴とする,請求項9〜11のいずれかに記載の発光表示装置。
- 前記第1キャパシタの第1電極は,ドーピングされたポリシリコンまたは真性シリコンのいずれかからなることを特徴とする,請求項9〜12のいずれかに記載の発光表示装置。
- 前記第1トランジスタのゲート/ソース間の電圧範囲は,前記第3キャパシタの容量に応じて調節されることを特徴とする,請求項11に記載の発光表示装置。
- 一つの画素電源線は,隣り合う2個の前記第1キャパシタの第2電極に連結されていることを特徴とする,請求項9〜14のいずれかに記載の発光表示装置。
- 前記データ信号を伝達するデータ駆動部と;
前記第1および第2走査信号と前記発光制御信号とを伝達する走査駆動部と;
をさらに含むことを特徴とする,請求項11に記載の発光表示装置。 - ポリシリコンを用いてトランジスタのチャネル領域とキャパシタの第1電極とを基板上に形成し,前記基板の上部に第1絶縁膜を形成する段階と;
前記第1絶縁膜の上部に走査線と前記キャパシタの第2電極とを形成し,前記走査線に対して平行方向に隣り合うキャパシタの第2電極が互いに連結され,前記走査線と前記キャパシタの第2電極との上部に第2絶縁膜を形成する段階と;
前記第2絶縁膜にコンタクトホールを形成し,前記コンタクトホールにより前記キャパシタの第2電極の上部が露出されるようにする段階と;
前記第2絶縁膜の上部に第2金属層をパターニングすることにより,データ線および画素電源線を形成し,前記画素電源線が前記コンタクトホールを介して前記キャパシタの第2電極に連結されるようにする段階と;
を含むことを特徴とする,発光表示装置の製造方法。 - ポリシリコンを用いて第1〜第5トランジスタのチャネル領域と,第1および第2キャパシタの第1電極とを基板上に形成し,前記基板の上部に第1絶縁膜を形成する段階と;
前記第1絶縁膜の上部に走査線と,発光制御線と,前記第1および第2キャパシタの第2電極とを形成し,前記走査線に対して平行方向に隣り合う第1キャパシタの第2電極が互いに連結され,前記走査線,前記発光制御線,ならびに前記第1および第2キャパシタの第2電極の上部に第2絶縁膜を形成する段階と;
前記第2絶縁膜の上部にコンタクトホールを形成し,前記コンタクトホールにより前記第1キャパシタの第2電極が露出されるようにする段階と;
前記第2絶縁膜の上部に第2金属層をパターニングすることにより,データ線,画素電源線および第3キャパシタの第1電極を形成し,前記画素電源線が前記コンタクトホールを介して前記第1キャパシタの第2電極に連結されるようにする段階と;
を含むことを特徴とする,発光表示装置の製造方法。 - 前記第2キャパシタの第2電極は,前記第3キャパシタの第2電極であることを特徴とする,請求項18に記載の発光表示装置の製造方法。
- 一つの前記発光制御線には,行方向に隣り合う二つの画素が連結されることを特徴とする,請求項18に記載の発光表示装置の製造方法。
- 前記第1キャパシタの第2電極は,前記データ線と交差し,前記データ線と交差する部分の幅が交差しない部分の幅より小さく形成されることを特徴とする,請求項18に記載の発光表示装置の製造方法。
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Application Number | Priority Date | Filing Date | Title |
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KR10-2004-0103816 | 2004-12-09 | ||
KR1020040103816A KR100698697B1 (ko) | 2004-12-09 | 2004-12-09 | 발광표시장치 및 그의 제조방법 |
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JP2006163384A JP2006163384A (ja) | 2006-06-22 |
JP4838571B2 true JP4838571B2 (ja) | 2011-12-14 |
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US (1) | US20060132055A1 (ja) |
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CN (1) | CN100525566C (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US11837142B2 (en) | 2021-02-04 | 2023-12-05 | Boe Technology Group Co., Ltd. | Array substrate and display device |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
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US6965124B2 (en) * | 2000-12-12 | 2005-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method of fabricating the same |
US20060221005A1 (en) * | 2005-03-31 | 2006-10-05 | Kazuyoshi Omata | Display, array substrate, and method of driving display |
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US20060132055A1 (en) | 2006-06-22 |
CN1787706A (zh) | 2006-06-14 |
CN100525566C (zh) | 2009-08-05 |
JP2006163384A (ja) | 2006-06-22 |
KR20060065083A (ko) | 2006-06-14 |
KR100698697B1 (ko) | 2007-03-23 |
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