JP4830074B2 - 圧電デバイスおよび電子デバイスの製造方法 - Google Patents

圧電デバイスおよび電子デバイスの製造方法 Download PDF

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Publication number
JP4830074B2
JP4830074B2 JP2006108884A JP2006108884A JP4830074B2 JP 4830074 B2 JP4830074 B2 JP 4830074B2 JP 2006108884 A JP2006108884 A JP 2006108884A JP 2006108884 A JP2006108884 A JP 2006108884A JP 4830074 B2 JP4830074 B2 JP 4830074B2
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Prior art keywords
lid
infrared
package base
film
vibrating piece
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Expired - Fee Related
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JP2006108884A
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Japanese (ja)
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JP2007281370A5 (cg-RX-API-DMAC10.html
JP2007281370A (ja
Inventor
菊池　　尊行
誠一郎 小倉
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Seiko Epson Corp
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Seiko Epson Corp
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  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2006108884A 2006-04-11 2006-04-11 圧電デバイスおよび電子デバイスの製造方法 Expired - Fee Related JP4830074B2 (ja)

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JP2006108884A JP4830074B2 (ja) 2006-04-11 2006-04-11 圧電デバイスおよび電子デバイスの製造方法

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JP2006108884A JP4830074B2 (ja) 2006-04-11 2006-04-11 圧電デバイスおよび電子デバイスの製造方法

Publications (3)

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JP2007281370A JP2007281370A (ja) 2007-10-25
JP2007281370A5 JP2007281370A5 (cg-RX-API-DMAC10.html) 2009-06-18
JP4830074B2 true JP4830074B2 (ja) 2011-12-07

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JP2006108884A Expired - Fee Related JP4830074B2 (ja) 2006-04-11 2006-04-11 圧電デバイスおよび電子デバイスの製造方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5417737B2 (ja) * 2008-04-23 2014-02-19 パナソニック株式会社 慣性力センサ
JP2011049992A (ja) * 2009-08-28 2011-03-10 Seiko Instruments Inc 圧電デバイス及び圧電デバイスの製造方法
WO2018078680A1 (ja) * 2016-10-24 2018-05-03 三菱電機株式会社 半導体装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63168088A (ja) * 1986-12-29 1988-07-12 株式会社デンソー 物品の加熱方法
JPH02198435A (ja) * 1989-01-27 1990-08-06 Konica Corp ストロボ付カメラ
JP3034370B2 (ja) * 1991-12-26 2000-04-17 株式会社東芝 固体撮像装置及びその製造方法
JP3434406B2 (ja) * 1996-03-01 2003-08-11 パイオニア株式会社 パッケージの製造方法
JP2000151336A (ja) * 1998-11-05 2000-05-30 Seiko Epson Corp 圧電振動子及び圧電発振器とこれらの製造方法
JP2000165189A (ja) * 1998-11-27 2000-06-16 Seiko Epson Corp 圧電振動子及び圧電発振器とこれらの製造方法
JP2001068577A (ja) * 1999-06-22 2001-03-16 Seiko Epson Corp 電子部品用パッケージ及びその製造方法
JP2001326290A (ja) * 2000-03-10 2001-11-22 Seiko Epson Corp パッケージの封止方法、電子素子モジュールの製造方法、封止装置並びにパッケージ品
JP4089149B2 (ja) * 2000-10-25 2008-05-28 セイコーエプソン株式会社 圧電デバイス
JP2002353352A (ja) * 2001-05-30 2002-12-06 Kyocera Corp 撮像素子収納用パッケージ
JP2003017607A (ja) * 2001-06-28 2003-01-17 Kyocera Corp 撮像素子収納用パッケージ
JP3786097B2 (ja) * 2002-03-25 2006-06-14 セイコーエプソン株式会社 圧電デバイスの蓋封止方法及び圧電デバイスの製造方法並びに圧電デバイスの蓋封止装置
JP3965685B2 (ja) * 2002-08-30 2007-08-29 株式会社大真空 表面実装型圧電振動デバイス
JP2006005019A (ja) * 2004-06-15 2006-01-05 Seiko Epson Corp 電子デバイスの製造方法

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