JP4767859B2 - コヒーレントな波形ナノ構造の形成方法 - Google Patents
コヒーレントな波形ナノ構造の形成方法 Download PDFInfo
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Description
シリコンを分子状窒素イオンN2 +の均一なイオン流束によりスパッタリングして、周期的な波状ナノ構造を、イオン入射面に対して垂直なナノ構造波峰(crest)配向で形成する方法において;
まず最初に、現われる波状ナノ構造の形状(またはジオメトリ)と、ナノ構造の波振幅(または高さ)の成長(または増大)の開始および終了に対応するスパッタリング深さDmおよびDFとを規定するパラメータを選択し:イオンエネルギー、シリコンの初期表面に対するイオン入射角度、シリコン温度、およびシリコン中へのイオンの侵入深さを該ナノ構造の波長に基づいて決める。
V=(IL・Y・A)/(ρ・DF・NA・e)
式中、
ILはシート状イオンビームの直線電流密度(A/cm)であり;
Yは1個の窒素原子について算出されるスパッタリング量(yield)であり;
Aはシリコンの分子量(g)であり;
ρはシリコンの密度(g/cm3)であり;
DFはコヒーレントな波状構造の形成深さ(cm)であり;
NAはアボガドロ数(6.022×1023モル−1)であり;
eは電荷(1.6×10−19クーロン)である。
実施例5:線状化学的−機械的研磨のための装置は半導体製造において基板を研磨するのに広範に使用されており、これは連続走行ベルトを含んで成る(米国特許出願公開第2002/0142704号)。実験を行うことにより、そのような装置をわずかに設計変更することで基板の方向性研磨を実施できるという結論に達した。例えば、この変更は、基板ホルダを軸廻りに回転させないものとし、かつホルダをベルトの走行方向に対して一定の向きに維持することである。図5は方向性基板研磨のための装置を示す。この装置は基板を設置するように設計された基板ホルダ1(非運転状態にある場合を示す)より構成される。運転状態2では、このホルダは基板3を連続ベルト4に対して押圧し、連続ベルト4はロール5により動かされる。基板ホルダにより、基板3はベルト4の走行方向に対して一定の位置(または状態)に維持される。支持体6はベルト4および基板ホルダを運転状態で保持する。この支持体は圧縮空気を通過させる開口部のシステムを有し、これにより、ベルトに対する基板の圧力を一様に分配する。加えて、研磨スラリーをベルト上に供給する(図5にはスラリーを供給するための装置を図示せず)。ロール5はベルト4の下側部分と共に研磨スラリー浴に沈めてよい。研磨スラリーに用いるのに適切な研磨剤、例えば製造の際に一般的に使用されているシリカまたはアルミナなどを選択することは、実施例3にて示したように、基板のその後のイオンスパッタリングにおいて波状ナノ構造のコヒーレンスを最大限にして得るのに有用なことがわかるであろう。
Claims (15)
- 半導体材料を分子状窒素イオンN2 +の均一な流束によりスパッタリングして、材料表面に周期的な波状ナノ構造をイオン入射面に対して垂直な波峰配向で形成することを含むコヒーレントな波状ナノ構造の形成方法であって、半導体材料としてガリウムヒ素を用い、N2 +窒素イオンによるスパッタリングの後、形成された波状ナノ構造をO2 +酸素イオン流束により更にスパッタリングし、このとき酸素イオンの入射面を窒素イオンの入射面と一致させ、および窒素イオンおよび酸素イオンを単独で照射する場合に波状ナノ構造の波長が一致するようにイオン入射のエネルギーおよび角度を選択することを特徴とする方法。
- ガリウムヒ素としてアモルファスガリウムヒ素の層を用いることを特徴とする請求項1に記載の方法。
- アモルファスガリウムヒ素の層をマグネトロンスパッタリング法により形成することを特徴とする、請求項2に記載の方法。
- N2 +イオン入射角度をガリウムヒ素の初期表面の法線に対して55〜60度の範囲にあるように選択すること、およびN2 +イオンのエネルギーを6〜8keVの範囲にあるように選択すること、ならびにガリウムヒ素をN2 +イオンにより深さDF=1ミクロンまでスパッタリングすることを特徴とする、請求項3に記載の方法。
- 波状ナノ構造の振幅の成長を二次放出信号により制御することを特徴とする、請求項1〜4のいずれかに記載の方法。
- 二次放出信号として二次電子、イオンおよびフォトン放出の信号を用いることを特徴とする、請求項5に記載の方法。
- O2 +イオンによる照射を二次放出信号が飽和する時点まで実施することを特徴とする、請求項5に記載の方法。
- コヒーレントな波状ナノ構造の形成方法であって、振幅の小さな波状ナノ構造が形成されるまで、シリコン表面をO2 +イオン流束によりスパッタリングし、その後、波状ナノ構造の振幅が成長して飽和するまで、シリコン表面にN2 +イオン流束を、そのボンバードメント面をO2 +イオンのボンバードメント面に一致させて照射し、O 2 + イオンによるときとN 2 + イオンによるときとで同一の波長を有する波状ナノ構造を形成するようにイオンボンバードメントのエネルギーおよび角度を選択することを含む方法。
- シリコンとしてアモルファスシリコンの層を用いることを特徴とする、請求項8に記載の方法。
- 波状ナノ構造の振幅の成長および飽和を、二次放出信号により制御することを特徴とする、請求項8に記載の方法。
- 半導体材料をN2 +窒素イオンの均一な流束によりスパッタリングして、材料表面に周期的な波状ナノ構造をイオン入射面に対して垂直な波峰配向で形成することを含むコヒーレントな波状ナノ構造の形成方法であって、半導体材料としてガリウムヒ素を用い、分子状窒素イオンによるスパッタリングに先立って、ガリウムヒ素表面を方向性研磨し、ガリウムヒ素表面への波状構造の形成を、波峰配向を研磨方向に一致させて実施し、N2 +分子状窒素イオンによるスパッタリングの後、形成された波状ナノ構造をO2 +酸素イオン流束により更にスパッタリングし、このとき酸素イオンの入射面を窒素イオンの入射面と一致させ、および波状ナノ構造の波長が窒素イオンおよび酸素イオンを単独で照射する場合で一致するようにイオン入射のエネルギーおよび角度を選択することを特徴とする方法。
- 研磨にアルミニウム、シリコンまたはクロムの酸化物の粒子を含む研磨剤を用いることを特徴とする、請求項11に記載の方法。
- コヒーレントな波状ナノ構造の形成方法であって、シリコン表面を方向性研磨し、その後、振幅の小さな波状ナノ構造が形成されるまで、シリコン表面をO2 +イオン流束でスパッタリングすることによりシリコン表面に波状ナノ構造を研磨方向と一致する波峰配向で形成し、その後、波状ナノ構造の振幅が成長して飽和するまで、シリコン表面にN2 +イオン流束を、そのボンバードメント面をO2 +イオンによるボンバードメント面に一致させて照射し、O 2 + イオンによるときとN 2 + イオンによるときとで同一の波長を有する波状ナノ構造を形成するようにイオンボンバードメントのエネルギーおよび角度を選択すること含む方法。
- 方向性研磨が、酸化物の粒子を含むスラリーを用いて実施されることを特徴とする、請求項13に記載の方法。
- 酸化物の粒子は、シリカ、アルミナ、および酸化クロムを含む群から選択される、請求項14に記載の方法。
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RU2003129927/28A RU2240280C1 (ru) | 2003-10-10 | 2003-10-10 | Способ формирования упорядоченных волнообразных наноструктур (варианты) |
PCT/RU2004/000396 WO2005050697A2 (en) | 2003-10-10 | 2004-10-08 | Method for forming wavy nanostructures |
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US7768018B2 (en) * | 2003-10-10 | 2010-08-03 | Wostec, Inc. | Polarizer based on a nanowire grid |
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WO2005050697A2 (en) | 2005-06-02 |
KR20110125275A (ko) | 2011-11-18 |
WO2005050697A3 (en) | 2005-08-11 |
CN1894157A (zh) | 2007-01-10 |
US20130228780A1 (en) | 2013-09-05 |
CN1894157B (zh) | 2010-08-11 |
RU2240280C1 (ru) | 2004-11-20 |
US8859440B2 (en) | 2014-10-14 |
US7977252B2 (en) | 2011-07-12 |
US8426320B2 (en) | 2013-04-23 |
EP1681262A2 (en) | 2006-07-19 |
KR101160321B1 (ko) | 2012-06-26 |
KR20060113664A (ko) | 2006-11-02 |
JP2007512682A (ja) | 2007-05-17 |
EP1681262A4 (en) | 2012-02-29 |
KR101160308B1 (ko) | 2012-06-26 |
US20080119034A1 (en) | 2008-05-22 |
EP1681262B1 (en) | 2016-03-30 |
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