JP4759079B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4759079B2 JP4759079B2 JP2009190917A JP2009190917A JP4759079B2 JP 4759079 B2 JP4759079 B2 JP 4759079B2 JP 2009190917 A JP2009190917 A JP 2009190917A JP 2009190917 A JP2009190917 A JP 2009190917A JP 4759079 B2 JP4759079 B2 JP 4759079B2
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- 239000004065 semiconductor Substances 0.000 title claims description 67
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 269
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 180
- 239000000243 solution Substances 0.000 claims description 154
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 93
- 239000000126 substance Substances 0.000 claims description 87
- 229910000510 noble metal Inorganic materials 0.000 claims description 70
- 239000000758 substrate Substances 0.000 claims description 70
- 238000000034 method Methods 0.000 claims description 69
- 239000011259 mixed solution Substances 0.000 claims description 69
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 66
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 51
- 239000007788 liquid Substances 0.000 claims description 38
- 229910021332 silicide Inorganic materials 0.000 claims description 35
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 32
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 27
- 229910017604 nitric acid Inorganic materials 0.000 claims description 27
- 230000008569 process Effects 0.000 claims description 26
- 239000000356 contaminant Substances 0.000 claims description 23
- 239000007800 oxidant agent Substances 0.000 claims description 23
- 238000002156 mixing Methods 0.000 claims description 22
- 230000003213 activating effect Effects 0.000 claims description 19
- VKJKEPKFPUWCAS-UHFFFAOYSA-M potassium chlorate Chemical compound [K+].[O-]Cl(=O)=O VKJKEPKFPUWCAS-UHFFFAOYSA-M 0.000 claims description 16
- 239000012286 potassium permanganate Substances 0.000 claims description 16
- 239000011229 interlayer Substances 0.000 claims description 15
- 239000010410 layer Substances 0.000 claims description 15
- 239000012285 osmium tetroxide Substances 0.000 claims description 14
- 229910000489 osmium tetroxide Inorganic materials 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229940117975 chromium trioxide Drugs 0.000 claims description 11
- WGLPBDUCMAPZCE-UHFFFAOYSA-N chromium trioxide Inorganic materials O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 11
- GAMDZJFZMJECOS-UHFFFAOYSA-N chromium(6+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+6] GAMDZJFZMJECOS-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- 238000010790 dilution Methods 0.000 claims description 6
- 239000012895 dilution Substances 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 239000003085 diluting agent Substances 0.000 claims description 4
- 229910000769 shakudō Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 239000008155 medical solution Substances 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 229910000487 osmium oxide Inorganic materials 0.000 claims 1
- JIWAALDUIFCBLV-UHFFFAOYSA-N oxoosmium Chemical compound [Os]=O JIWAALDUIFCBLV-UHFFFAOYSA-N 0.000 claims 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 72
- 238000005530 etching Methods 0.000 description 46
- 239000002245 particle Substances 0.000 description 37
- 238000001994 activation Methods 0.000 description 18
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- 230000004913 activation Effects 0.000 description 12
- 238000007796 conventional method Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000011109 contamination Methods 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 11
- 238000002360 preparation method Methods 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 230000007797 corrosion Effects 0.000 description 10
- 239000003990 capacitor Substances 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 8
- 238000007865 diluting Methods 0.000 description 8
- 238000004090 dissolution Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000002955 isolation Methods 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000001590 oxidative effect Effects 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 229910005883 NiSi Inorganic materials 0.000 description 4
- 239000004157 Nitrosyl chloride Substances 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- VPCDQGACGWYTMC-UHFFFAOYSA-N nitrosyl chloride Chemical compound ClN=O VPCDQGACGWYTMC-UHFFFAOYSA-N 0.000 description 4
- 235000019392 nitrosyl chloride Nutrition 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 229910019001 CoSi Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000033116 oxidation-reduction process Effects 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
- H01L21/28044—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer
- H01L21/28052—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a silicide layer formed by the silicidation reaction of silicon with a metal layer
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table the conductive layers comprising silicides
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- H01L28/60—Electrodes
- H01L28/65—Electrodes comprising a noble metal or a noble metal oxide, e.g. platinum (Pt), ruthenium (Ru), ruthenium dioxide (RuO2), iridium (Ir), iridium dioxide (IrO2)
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
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- Semiconductor Memories (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
本発明の第1の実施形態に係る半導体装置の製造方法について、図面を参照しながら説明する。
本発明の第2の実施形態に係る半導体装置の製造方法について、図面を参照しながら説明する。なお、第1の実施形態と重複する部分については同一符号を使用し、その説明は省略する。
2 素子分離領域
3 ゲート酸化膜
4 ゲート電極
5 サイドウォール
5a ソース・ドレイン拡散層
6 シリコン酸化膜
7 NiPt膜
8 TiN膜
9 シリサイド層
10 シリコン酸化膜
11 Pt粒子
13 第1の層間絶縁膜
14 コンタクトプラグ
15 下部電極
15a Pt膜
16 第2の層間絶縁膜
17 強誘電体膜
17a PZT膜
18 上部電極
18a Pt膜
19 第3の層間絶縁膜
20 開口部
21 上部配線
22 第4の層間絶縁膜
30、35、40 ハードマスク
32 Pt汚染物
Claims (17)
- シリコンを含む半導体層を有する基板上または前記基板上に形成されたシリコンを含む導電膜上に、白金を含む金属膜を形成する工程(a)と、
前記工程(a)の後、前記基板に対して熱処理を行って前記金属膜と前記半導体層または前記導電膜に含まれるシリコンとを反応させ、前記基板上または前記導電膜上に前記白金を含むシリサイド膜を形成する工程(b)と、
前記工程(b)の後、第1の薬液を用いて未反応の前記白金を活性化する工程(c)と、
第2の薬液を用いて前記工程(c)で活性化された未反応の前記白金を溶解する工程(d)とを備え、
前記工程(d)は、前記工程(c)から30分以内に行われ、
前記第1の薬液は硫酸系溶液と酸化剤との混合溶液であり、前記第2の薬液は塩酸系溶液と酸化剤との混合溶液であることを特徴とする半導体装置の製造方法。 - 前記第1の薬液は、硫酸と過酸化水素水との混合溶液、硫酸とオゾン水との混合溶液および電解硫酸水のうちから選ばれた1つであることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記工程(c)では、前記第1の薬液が、80℃以上の液温度で使用されることを特徴とする請求項2に記載の半導体装置の製造方法。
- 前記第1の薬液について、前記硫酸と過酸化水素との混合溶液における混合比は体積比で1〜5:1の比率であり、前記硫酸とオゾン水との混合溶液における混合比は1〜5:1の比率であることを特徴とする請求項2に記載の半導体装置の製造方法。
- 前記第2の薬液は、硝酸と塩酸との混合液、塩酸と過酸化水素水との混合液、塩酸とオゾン水との混合液、塩酸に過マンガン酸カリウムを混合した溶液、塩酸と三酸化クロムを混合した溶液、塩酸に塩素酸カリウムを混合した溶液、塩酸に四酸化オスミウムを混合した溶液およびそれらの希釈液のうちから選ばれた1つであることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記工程(d)では、前記第2の薬液が、40℃以上の液温度で使用されることを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記硝酸と塩酸との混合液における硝酸と塩酸の混合比は1:3〜7の比率であり、前記塩酸と過酸化水素水との混合液における塩酸と過酸化水素水との混合比は3〜5:1の比率であり、前記塩酸とオゾン水との混合液における塩酸とオゾン水との混合比は3〜5:1の比率であり、前記塩酸に過マンガン酸カリウムを混合した溶液は塩酸に過マンガン酸カリウムを1〜7wt%混入した溶液であり、前記塩酸に三酸化クロムを混合した溶液は塩酸に三酸化クロムを1〜5wt%混入した溶液であり、前記塩酸に塩素酸カリウムを混合した溶液は塩酸に塩素酸カリウムを1〜7wt%混入した溶液であり、前記塩酸に四酸化オスミウムを混合した溶液は塩酸に四酸化オスミウムを1〜6wt%混入した溶液であり、それらの希釈液における希釈度は7倍以下であることを特徴とする請求項5に記載の半導体装置の製造方法。
- 基板上に形成された層間絶縁膜上に、第1の貴金属を含む第1の金属膜を形成する工程(a)と、
前記工程(a)の後、前記基板の裏面に付着した前記第1の貴金属を含む汚染物を除去する工程(b)と、
前記工程(a)の後、前記第1の金属膜を選択的に除去して下部電極を形成する工程(c)と、
前記下部電極上に、容量絶縁膜を形成する工程(d)と、
前記容量絶縁膜上及び前記基板上に、第2の貴金属を含む第2の金属膜を形成する工程(e)と、
前記工程(e)の後、前記基板の裏面に付着した前記第2の貴金属を含む汚染物を除去する工程(f)と、
前記工程(e)の後、前記第2の金属膜を選択的に除去して上部電極を形成する工程(g)とを備え、
前記工程(b)と前記工程(c)とは同時に行い、前記工程(b)及び前記工程(c)では、第1の薬液として硫酸系溶液と酸化剤との混合溶液を用いて前記第1の貴金属を活性化した後、第2の薬液として塩酸系溶液と酸化剤との混合溶液を用いて前記第1の貴金属を溶解し、
前記工程(f)と前記工程(g)とは同時に行い、前記工程(f)及び前記工程(g)では、前記第1の薬液を用いて前記第2の貴金属を活性化した後、前記第2の薬液を用いて前記第2の貴金属を溶解することを特徴とする半導体装置の製造方法。 - 前記工程(b)および前記工程(c)において、前記第2の薬液を用いて前記第1の貴金属を溶解する処理は、前記第1の薬液を用いて前記第1の貴金属を活性化する処理から30分以内に行い、
前記工程(f)および前記工程(g)において、前記第2の薬液を用いて前記第2の貴金属を溶解する処理は、前記第1の薬液を用いて前記第2の貴金属を活性化する処理から30分以内に行うことを特徴とする請求項8に記載の半導体装置の製造方法。 - 基板上に形成された層間絶縁膜上に、下から順に、第1の貴金属を含む第1の金属膜、絶縁膜および第2の貴金属を含む第2の金属膜を形成する工程(a)と、
前記第2の金属膜、絶縁膜および第1の金属膜を一括して選択的に除去して、前記第1の金属膜から下部電極を、前記絶縁膜から容量絶縁膜を、前記第2の金属膜から上部電極をそれぞれ形成する工程(b)と、
前記工程(b)の後、前記基板の裏面に付着した前記第1の貴金属および前記第2の貴金属を含む汚染物を除去する工程(c)とを備え、
前記工程(c)では、第1の薬液として硫酸系溶液と酸化剤との混合溶液を用いて前記第1の貴金属および前記第2の貴金属を活性化し、第2の薬液として塩酸系溶液と酸化剤との混合溶液を用いて前記第1の貴金属及び前記第2の貴金属を溶解することを特徴とする半導体装置の製造方法。 - 前記工程(c)において、前記第2の薬液を用いて前記第1の貴金属及び前記第2の貴金属を溶解する処理は、前記第1の薬液を用いて前記第1の貴金属及び前記第2の貴金属を活性化する処理から30分以内に行うことを特徴とする請求項10に記載の半導体装置の製造方法。
- 前記第1の薬液は、硫酸と過酸化水素水との混合溶液、硫酸とオゾン水との混合溶液および電解硫酸水のうちから選ばれた1つであることを特徴とする請求項8または10に記載の半導体装置の製造方法。
- 前記第1の薬液は80℃以上の液温度で使用されることを特徴とする請求項8〜12のうちいずれか1つに記載の半導体装置の製造方法。
- 前記第1の薬液について、前記硫酸と過酸化水素との混合溶液における硫酸と過酸化水素との混合比は1〜5:1の比率であり、前記硫酸とオゾン水との混合溶液における硫酸とオゾン水との混合比は1〜5:1の比率であることを特徴とする請求項12に記載の半導体装置の製造方法。
- 前記第2の薬液は、硝酸と塩酸との混合液、塩酸と過酸化水素水との混合液、塩酸とオゾン水との混合液、塩酸に過マンガン酸カリウムを混合した溶液、塩酸と三酸化クロムを混合した溶液、塩酸に塩素酸カリウムを混合した溶液、塩酸に四酸化オスミウムを混合した溶液およびそれらの希釈液から選ばれた溶液であることを特徴とする請求項8〜14のうちいずれか1つに記載の半導体装置の製造方法。
- 前記第2の薬液は40℃以上の液温度で使用されることを特徴とする請求項15に記載の半導体装置の製造方法。
- 前記硝酸と塩酸との混合液における硝酸と塩酸の混合比は1:3〜7の比率であり、前記塩酸と過酸化水素水との混合液における塩酸と過酸化水素水との混合比は3〜5:1の比率であり、前記塩酸とオゾン水との混合液における塩酸とオゾン水との混合比は3〜5:1の比率であり、前記塩酸に過マンガン酸カリウムを混合した溶液は塩酸に過マンガン酸カリウムを1〜7wt%混入した溶液であり、前記塩酸に三酸化クロムを混合した溶液は塩酸に三酸化クロムを1〜5wt%混入した溶液であり、前記塩酸に塩素酸カリウムを混合した溶液は塩酸に塩素酸カリウムを1〜7wt%混入した溶液であり、前記塩酸に四酸化オスミウムを混合した溶液は塩酸に四酸化オスミウムを1〜6wt%混入した溶液であり、それらの希釈液における希釈度は7倍以下であることを特徴とする請求項15に記載の半導体装置の製造方法。
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US8784572B2 (en) * | 2011-10-19 | 2014-07-22 | Intermolecular, Inc. | Method for cleaning platinum residues on a semiconductor substrate |
US8835318B2 (en) * | 2012-03-08 | 2014-09-16 | Globalfoundries Inc. | HNO3 single wafer clean process to strip nickel and for MOL post etch |
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