JP4740004B2 - 半導体装置におけるCu合金配線の製造方法 - Google Patents
半導体装置におけるCu合金配線の製造方法 Download PDFInfo
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- 229910000881 Cu alloy Inorganic materials 0.000 title claims description 131
- 239000004065 semiconductor Substances 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 title description 15
- 238000010438 heat treatment Methods 0.000 claims description 61
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 238000003825 pressing Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000010408 film Substances 0.000 description 74
- 239000010410 layer Substances 0.000 description 44
- 239000010409 thin film Substances 0.000 description 30
- 239000007789 gas Substances 0.000 description 25
- 230000004888 barrier function Effects 0.000 description 17
- 229910052692 Dysprosium Inorganic materials 0.000 description 16
- 239000013078 crystal Substances 0.000 description 16
- 229910010413 TiO 2 Inorganic materials 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000000203 mixture Substances 0.000 description 9
- 230000007423 decrease Effects 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 6
- 229910020177 SiOF Inorganic materials 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000006104 solid solution Substances 0.000 description 4
- 229910011208 Ti—N Inorganic materials 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000004993 emission spectroscopy Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 229910002070 thin film alloy Inorganic materials 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 229910001279 Dy alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005194 fractionation Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- RSAZYXZUJROYKR-UHFFFAOYSA-N indophenol Chemical compound C1=CC(O)=CC=C1N=C1C=CC(=O)C=C1 RSAZYXZUJROYKR-UHFFFAOYSA-N 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76882—Reflowing or applying of pressure to better fill the contact hole
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76867—Barrier, adhesion or liner layers characterized by methods of formation other than PVD, CVD or deposition from a liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53233—Copper alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
(1)Nを0.4〜2.0原子%、
(2)Dyを0.1〜3原子%、或いは
(3)Nを0.4〜2.0原子%およびDyを0.01〜3原子%、
を含有するCu合金を形成することが重要である。NやDyを含有することで高温に加熱したときのリフロー性が向上する理由は以下の通りである。
Nを強制固溶させたCu合金薄膜は、加熱加圧前の状態で結晶粒の微細化を実現できると共に、加熱により著しい結晶粒成長をおこすため、高温流動性に優れている。Cu−Ti−N系合金薄膜がこのような結晶粒成長挙動を示すのは、加熱過程でCu合金からN2ガスが放出されることによる急激な応力状態の変化によるものと考えられる。Cu−Ti−N系合金薄膜の場合、加熱過程において、結晶粒の回復が生じる温度域(300〜500℃)に到達する前の200℃付近でN2ガスが放出するため、膜中に欠陥(例えば、点欠陥、クラスター原子空孔欠陥など)が増加し、この欠陥が多数存在することで、Cuの回復温度域(300〜500℃)で激しい原子拡散が生じ、Cuの軟化・変形が促進されるため、高温流動性が向上するものと考えられる。
Dyは、Cu薄膜中に結晶歪を生じてCuの結晶粒を微細化する元素であり、加熱加圧前の状態で貫通粒界を形成せず、結晶粒界を不安定な状態にする元素である。そのためDyを含有するCu合金は、加熱しても結晶粒成長をほとんど起こさず、微細結晶組織を維持する一方で、加熱によって粒界すべりを起こすため、高温流動性が出現する。その結果、半導体基板に設けられた凹部の幅が狭い場合であっても、凹部にCu合金を埋め込むことができる。
上記Cu合金は、Tiと、NまたはDyを含有するものであるが、NとDyは併用してもよい。
シリコンウェハー表面に絶縁膜(TEOS膜:SiOF膜)を形成した基板の表面に、下記表1に示した成分組成の純Cu薄膜またはCu合金薄膜を、DCマグネトロンスパッタリング法で膜厚が500nmとなるように成膜した。
シリコンウェハー表面に形成した絶縁膜(TEOS膜:SiOF膜)に、幅0.13μm、深さ0.3μm、長さ2.0mmの配線パターン(ストライプパターン)を設けた評価素子(TEG)を用いた。このTEGの表面に、下記表2に示す成分組成の純Cu薄膜またはCu合金薄膜を、スパッタリング法で膜厚が750nmとなるように形成し、配線パターン部分を薄膜で覆った。スパッタリング条件は、雰囲気ガスの組成を下記表2に示すように、Arガス雰囲気またはArとN2の混合ガス雰囲気とする以外は、上記実験例1と同じ条件とした。なお、スパッタリングして成膜した薄膜の成分(N)は、蒸留分留後インドフェノール吸光光度法で定量分析した。
埋め込み率(%)=[(配線パターンに埋め込まれている純CuまたはCu合金の断面積)/(配線パターンの断面積)]×100
シリコンウェハー表面に形成した絶縁膜(TEOS膜:SiOF膜)に、下記表3に示すように最小幅が0.05〜0.13μm、深さが0.3μm、長さが2.0mmの溝または直径が0.05〜0.13μm、深さが0.3μmの孔を設けた評価素子(TEG)を用いた。このTEGの表面に、Tiを1.0原子%,Dyを0.5原子%,およびNを0.4原子%含有するCu合金薄膜を、スパッタリング法で膜厚が750nmとなるように形成し、配線パターン部分を薄膜で覆った。スパッタリングは、Nを2.5体積%含むArガス(ArとN2の混合ガス)雰囲気下で行う以外は、上記実験例1と同じ条件とした。
実験例2のNo.12、実験例2のNo.13、実験例3のNo.42に示した試料について、膜の積層状態が観察できる断面を透過型電子顕微鏡(TEM)で20万〜50万倍で観察した。その結果、絶縁膜とCu合金の間には、Ti濃化層としてTiO2層が生成していた。
シリコンウェハー表面に絶縁膜(TEOS膜:SiOF膜)を形成した基板の表面に、下記4に示した成分組成のCu合金薄膜を、DCマグネトロンスパッタリング法で膜厚が300nmとなるように成膜した。スパッタリング条件は、雰囲気ガスの組成を下記表4に示すように、Arガス雰囲気またはArとN2の混合ガス雰囲気とする以外は、上記実験例1と同じ条件とした。
2 絶縁膜
3 凹部
4 Cu合金
5 Ti濃化層
Claims (5)
- 半導体基板上の絶縁膜に設けられた凹部にCu合金が埋め込まれたCu合金配線を製造する方法であって、
前記凹部は、最小幅が0.15μm以下で、該最小幅に対する深さの比[深さ/最小幅比]が1以上であり、
この凹部の表面にTiを0.5〜3原子%とNを0.4〜2.0原子%含有するCu合金を形成した後、
200℃以上、50MPa以上に加熱加圧して前記凹部内に前記Cu合金を埋め込むことによってCu合金配線を形成することを特徴とする半導体装置におけるCu合金配線の製造方法。 - 半導体基板上の絶縁膜に設けられた凹部にCu合金が埋め込まれたCu合金配線を製造する方法であって、
前記凹部は、最小幅が0.15μm以下で、該最小幅に対する深さの比[深さ/最小幅比]が1以上であり、
この凹部の表面にTiを0.5〜3原子%とDyを0.1〜3原子%を含有するCu合金を形成した後、
400℃以上、50MPa以上に加熱加圧して前記凹部内に前記Cu合金を埋め込むことによってCu合金配線を形成することを特徴とする半導体装置におけるCu合金配線の製造方法。 - 前記Cu合金として、Nを0.4〜2.0原子%含有するCu合金を形成する請求項2に記載の製造方法。
- 前記Cu合金を、N2を2.5〜12.5体積%含む不活性ガス雰囲気下で、スパッタリング法で形成する請求項1または3に記載の製造方法。
- 前記Cu合金をスパッタリング法で形成し、成膜時の基板温度を室温(20℃)とする請求項1〜4のいずれかに記載の製造方法。
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JP5722427B2 (ja) | 2011-03-01 | 2015-05-20 | Jx日鉱日石金属株式会社 | 銅チタン合金製スパッタリングターゲット、同スパッタリングターゲットを用いて形成した半導体配線並びに同半導体配線を備えた半導体素子及びデバイス |
US8492274B2 (en) | 2011-11-07 | 2013-07-23 | International Business Machines Corporation | Metal alloy cap integration |
CN103160783B (zh) * | 2013-03-26 | 2014-10-08 | 沈阳金锋特种刀具有限公司 | 一种TiCuN纳米复合涂层及其制备方法 |
CN103489902B (zh) * | 2013-09-30 | 2016-01-06 | 京东方科技集团股份有限公司 | 一种电极及其制作方法、阵列基板及显示装置 |
US10332793B2 (en) * | 2015-11-30 | 2019-06-25 | Infineon Technologies Austria Ag | Self-organizing barrier layer disposed between a metallization layer and a semiconductor region |
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