JP4732800B2 - ジンバル機構を備えた転写装置及び同装置を用いた転写方法 - Google Patents

ジンバル機構を備えた転写装置及び同装置を用いた転写方法 Download PDF

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Publication number
JP4732800B2
JP4732800B2 JP2005152738A JP2005152738A JP4732800B2 JP 4732800 B2 JP4732800 B2 JP 4732800B2 JP 2005152738 A JP2005152738 A JP 2005152738A JP 2005152738 A JP2005152738 A JP 2005152738A JP 4732800 B2 JP4732800 B2 JP 4732800B2
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JP
Japan
Prior art keywords
gimbal
mold
transfer
gimbal member
movable body
Prior art date
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Expired - Fee Related
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JP2005152738A
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English (en)
Japanese (ja)
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JP2006326980A (ja
JP2006326980A5 (enExample
Inventor
光典 小久保
健太郎 石橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
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Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP2005152738A priority Critical patent/JP4732800B2/ja
Priority to US11/403,984 priority patent/US7648354B2/en
Priority to TW095114106A priority patent/TWI295623B/zh
Priority to KR1020060037888A priority patent/KR100747855B1/ko
Priority to DE102006019644.9A priority patent/DE102006019644B4/de
Publication of JP2006326980A publication Critical patent/JP2006326980A/ja
Publication of JP2006326980A5 publication Critical patent/JP2006326980A5/ja
Priority to US12/633,183 priority patent/US8318074B2/en
Application granted granted Critical
Publication of JP4732800B2 publication Critical patent/JP4732800B2/ja
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JP2005152738A 2005-04-28 2005-05-25 ジンバル機構を備えた転写装置及び同装置を用いた転写方法 Expired - Fee Related JP4732800B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005152738A JP4732800B2 (ja) 2005-05-25 2005-05-25 ジンバル機構を備えた転写装置及び同装置を用いた転写方法
US11/403,984 US7648354B2 (en) 2005-04-28 2006-04-14 Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
TW095114106A TWI295623B (en) 2005-04-28 2006-04-20 Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus
DE102006019644.9A DE102006019644B4 (de) 2005-04-28 2006-04-27 Übertragungseinrichung mit einem Kardangelenkmechanismus und Übertragungsverfahren unter Verwendung der Übertragungseinrichtung
KR1020060037888A KR100747855B1 (ko) 2005-04-28 2006-04-27 짐벌 기구를 구비한 전사 장치 및 전사 장치를 이용한 전사방법
US12/633,183 US8318074B2 (en) 2005-04-28 2009-12-08 Transfer apparatus having gimbal mechanism and transfer method using the transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005152738A JP4732800B2 (ja) 2005-05-25 2005-05-25 ジンバル機構を備えた転写装置及び同装置を用いた転写方法

Publications (3)

Publication Number Publication Date
JP2006326980A JP2006326980A (ja) 2006-12-07
JP2006326980A5 JP2006326980A5 (enExample) 2008-05-08
JP4732800B2 true JP4732800B2 (ja) 2011-07-27

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JP2005152738A Expired - Fee Related JP4732800B2 (ja) 2005-04-28 2005-05-25 ジンバル機構を備えた転写装置及び同装置を用いた転写方法

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Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63261405A (ja) * 1987-04-17 1988-10-28 Sanyo Mach Works Ltd 昇降位置決め装置
NL9100366A (nl) * 1991-02-28 1992-09-16 Philips & Du Pont Optical Werkwijze voor het vervaardigen van een schijfvormige informatiedrager, informatiedrager vervaardigd volgens de werkwijze en inrichting voor het uitvoeren van de werkwijze.
JPH08259245A (ja) * 1995-03-24 1996-10-08 Olympus Optical Co Ltd 光学素子成形装置の偏芯調整機構
JPH11314231A (ja) * 1998-03-06 1999-11-16 Toshiba Corp 光学部品製造方法及びその装置
JP3558936B2 (ja) * 1999-11-10 2004-08-25 日本電信電話株式会社 薄膜形成装置
JP3901529B2 (ja) * 2002-01-31 2007-04-04 東レエンジニアリング株式会社 接合装置
JP4395704B2 (ja) * 2002-05-17 2010-01-13 コニカミノルタホールディングス株式会社 成形装置
US6939120B1 (en) * 2002-09-12 2005-09-06 Komag, Inc. Disk alignment apparatus and method for patterned media production
JPWO2004093171A1 (ja) * 2003-04-11 2006-07-06 Ｓｃｉｖａｘ株式会社 パターン形成装置、パターン形成方法
JP4313109B2 (ja) * 2003-08-01 2009-08-12 明昌機工株式会社 高精度プレス機
JP2005101201A (ja) * 2003-09-24 2005-04-14 Canon Inc ナノインプリント装置
JP4713102B2 (ja) * 2004-07-29 2011-06-29 Ｓｃｉｖａｘ株式会社 傾き調整機能付きプレス装置、傾き調整機能付きパターン形成装置、型の傾き調整方法

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Publication number Publication date
JP2006326980A (ja) 2006-12-07

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