JP4731495B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP4731495B2 JP4731495B2 JP2006548593A JP2006548593A JP4731495B2 JP 4731495 B2 JP4731495 B2 JP 4731495B2 JP 2006548593 A JP2006548593 A JP 2006548593A JP 2006548593 A JP2006548593 A JP 2006548593A JP 4731495 B2 JP4731495 B2 JP 4731495B2
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- solder
- pad
- semiconductor chip
- semiconductor device
- substrate
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3463—Solder compositions in relation to features of the printed circuit board or the mounting process
Description
Claims (6)
- 半導体チップと、
前記半導体チップを搭載するパッケージ基板と、
前記半導体チップと前記パッケージ基板とを電気的に接続し、半田合金としてPbを含まない半田バンプと、
前記半導体チップと前記パッケージ基板との間に充填されたアンダーフィル樹脂と、
前記パッケージ基板を外部と電気的に接続し、半田合金としてPbを含まない半田ボールとを備え、
前記半田バンプの弾性率が、前記半田ボールの弾性率よりも低く、
前記半田バンプおよび前記半田ボールは、AgおよびCuを含み残部はSnで構成され、
前記半田バンプにおけるAgの質量の割合は、前記半田ボールにおけるAgの質量の割合よりも小さい
ことを特徴とする半導体装置。 - 前記半田バンプにおけるAgの割合は、1.5質量%以下である
ことを特徴とする請求項1記載の半導体装置。 - 前記半田ボールにおけるAgの割合は、2.5質量%以上である
ことを特徴とする請求項1記載の半導体装置。 - 前記パッケージ基板を実装する実装基板をさらに備え、
前記実装基板は、前記半田ボールを介して前記パッケージ基板に電気的に接続し、
前記実装基板と前記パッケージ基板との間には、アンダーフィル樹脂が設けられていない
ことを特徴とする請求項1記載の半導体装置。 - 前記半導体チップは、前記半田バンプと電気的に接続する第1パッドを有し、
前記パッケージ基板は、前記半田バンプと電気的に接続する第2パッドを有し、
前記第1パッド表面における前記半田バンプへの電気的な接続面積は、前記第2パッド表面における前記半田バンプへの電気的な接続面積よりも小さい
ことを特徴とする請求項1記載の半導体装置。 - 前記半導体チップは、前記半田バンプに電気的に接続する第1パッドを有し、
前記パッケージ基板は、前記半田バンプに電気的に接続する第2パッドを有し、
前記第1パッドは、表面に所定の第1金属膜が形成されており、当該第1金属膜を介して前記半田バンプに接続し、
前記第2パッドは、表面に所定の第2金属膜が形成されており、当該第2金属膜を介して前記半田バンプに接続し、
前記第1パッドと前記第1金属膜との界面の面積は、前記第2パッドと前記第2金属膜との界面の面積よりも小さい
ことを特徴とする請求項1記載の半導体装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/018579 WO2006064534A1 (ja) | 2004-12-13 | 2004-12-13 | 半導体装置 |
Publications (2)
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JPWO2006064534A1 JPWO2006064534A1 (ja) | 2008-08-07 |
JP4731495B2 true JP4731495B2 (ja) | 2011-07-27 |
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US (3) | US7759793B2 (ja) |
JP (1) | JP4731495B2 (ja) |
WO (1) | WO2006064534A1 (ja) |
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US20090184416A1 (en) * | 2008-01-22 | 2009-07-23 | Yinon Degani | MCM packages |
CN102017111B (zh) * | 2008-03-05 | 2013-01-16 | 千住金属工业株式会社 | 无铅焊料连接构造体和焊料球 |
JP2012503309A (ja) * | 2008-09-16 | 2012-02-02 | アギア システムズ インコーポレーテッド | 改良された機械的特性を有するPbフリーのハンダ・バンプ |
JP2010287710A (ja) * | 2009-06-11 | 2010-12-24 | Renesas Electronics Corp | 半導体装置およびその製造方法 |
US11181688B2 (en) | 2009-10-13 | 2021-11-23 | Skorpios Technologies, Inc. | Integration of an unprocessed, direct-bandgap chip into a silicon photonic device |
US8630326B2 (en) * | 2009-10-13 | 2014-01-14 | Skorpios Technologies, Inc. | Method and system of heterogeneous substrate bonding for photonic integration |
US9923105B2 (en) | 2013-10-09 | 2018-03-20 | Skorpios Technologies, Inc. | Processing of a direct-bandgap chip after bonding to a silicon photonic device |
US9316785B2 (en) | 2013-10-09 | 2016-04-19 | Skorpios Technologies, Inc. | Integration of an unprocessed, direct-bandgap chip into a silicon photonic device |
TWI399974B (zh) * | 2010-03-12 | 2013-06-21 | Primax Electronics Ltd | 攝像模組之組裝方法 |
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US9922967B2 (en) | 2010-12-08 | 2018-03-20 | Skorpios Technologies, Inc. | Multilevel template assisted wafer bonding |
US20120188721A1 (en) * | 2011-01-21 | 2012-07-26 | Nxp B.V. | Non-metal stiffener ring for fcbga |
US9977188B2 (en) | 2011-08-30 | 2018-05-22 | Skorpios Technologies, Inc. | Integrated photonics mode expander |
US8796133B2 (en) | 2012-07-20 | 2014-08-05 | International Business Machines Corporation | Optimization metallization for prevention of dielectric cracking under controlled collapse chip connections |
US9831190B2 (en) * | 2014-01-09 | 2017-11-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device package with warpage control structure |
US9664855B2 (en) | 2014-03-07 | 2017-05-30 | Skorpios Technologies, Inc. | Wide shoulder, high order mode filter for thick-silicon waveguides |
US9673171B1 (en) * | 2014-03-26 | 2017-06-06 | STATS ChipPAC Pte. Ltd. | Integrated circuit packaging system with coreless substrate and method of manufacture thereof |
EP3149522A4 (en) | 2014-05-27 | 2018-02-21 | Skorpios Technologies, Inc. | Waveguide mode expander using amorphous silicon |
CN107667306B (zh) | 2015-04-20 | 2021-12-21 | 斯考皮欧技术有限公司 | 用于光子器件的垂直输出耦合器 |
US10649148B2 (en) | 2017-10-25 | 2020-05-12 | Skorpios Technologies, Inc. | Multistage spot size converter in silicon photonics |
CN110660747A (zh) | 2018-06-28 | 2020-01-07 | 晟碟信息科技(上海)有限公司 | 包含加固角部支撑件的半导体装置 |
US11360263B2 (en) | 2019-01-31 | 2022-06-14 | Skorpios Technologies. Inc. | Self-aligned spot size converter |
US11335571B2 (en) * | 2020-07-15 | 2022-05-17 | Renesas Electronics Corporation | Semiconductor device including a package substrate and a semiconductor chip |
US20220021179A1 (en) * | 2020-07-20 | 2022-01-20 | Apple Inc. | Photonic Integrated Circuits with Controlled Collapse Chip Connections |
TWI750080B (zh) * | 2021-04-15 | 2021-12-11 | 鎂輪全球股份有限公司 | 具散熱裝置的晶片模組及其製作方法 |
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JP2000040713A (ja) * | 1998-07-23 | 2000-02-08 | Citizen Watch Co Ltd | 半導体パッケージの製造方法 |
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JP2000040713A (ja) * | 1998-07-23 | 2000-02-08 | Citizen Watch Co Ltd | 半導体パッケージの製造方法 |
JP2003168706A (ja) * | 2001-11-30 | 2003-06-13 | Hitachi Ltd | 電子回路形成方法、配線基板およびその製造方法並びにマルチチップモジュールの製造方法 |
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WO2006064534A1 (ja) | 2006-06-22 |
JPWO2006064534A1 (ja) | 2008-08-07 |
US20080128887A1 (en) | 2008-06-05 |
US20100255673A1 (en) | 2010-10-07 |
US20110163444A1 (en) | 2011-07-07 |
US8101514B2 (en) | 2012-01-24 |
US7951701B2 (en) | 2011-05-31 |
US7759793B2 (en) | 2010-07-20 |
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