JP4730904B2 - 基板検査装置及び基板検査方法 - Google Patents

基板検査装置及び基板検査方法 Download PDF

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Publication number
JP4730904B2
JP4730904B2 JP2006127107A JP2006127107A JP4730904B2 JP 4730904 B2 JP4730904 B2 JP 4730904B2 JP 2006127107 A JP2006127107 A JP 2006127107A JP 2006127107 A JP2006127107 A JP 2006127107A JP 4730904 B2 JP4730904 B2 JP 4730904B2
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JP
Japan
Prior art keywords
wiring pattern
signal
voltage
determined
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006127107A
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English (en)
Japanese (ja)
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JP2007298422A (ja
Inventor
宗寛 山下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Read Corp
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Nidec Read Corp
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Publication date
Application filed by Nidec Read Corp filed Critical Nidec Read Corp
Priority to JP2006127107A priority Critical patent/JP4730904B2/ja
Priority to KR1020070036241A priority patent/KR101296460B1/ko
Publication of JP2007298422A publication Critical patent/JP2007298422A/ja
Application granted granted Critical
Publication of JP4730904B2 publication Critical patent/JP4730904B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/42—Measurement or testing during manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/24—Testing of discharge tubes
    • G01R31/25—Testing of vacuum tubes
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
JP2006127107A 2006-04-28 2006-04-28 基板検査装置及び基板検査方法 Expired - Fee Related JP4730904B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006127107A JP4730904B2 (ja) 2006-04-28 2006-04-28 基板検査装置及び基板検査方法
KR1020070036241A KR101296460B1 (ko) 2006-04-28 2007-04-13 기판 검사 장치 및 기판 검사 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006127107A JP4730904B2 (ja) 2006-04-28 2006-04-28 基板検査装置及び基板検査方法

Publications (2)

Publication Number Publication Date
JP2007298422A JP2007298422A (ja) 2007-11-15
JP4730904B2 true JP4730904B2 (ja) 2011-07-20

Family

ID=38768030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006127107A Expired - Fee Related JP4730904B2 (ja) 2006-04-28 2006-04-28 基板検査装置及び基板検査方法

Country Status (2)

Country Link
JP (1) JP4730904B2 (ko)
KR (1) KR101296460B1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5698436B2 (ja) * 2008-08-06 2015-04-08 株式会社フジクラ 回路断線検査装置
JP5391819B2 (ja) * 2009-05-14 2014-01-15 日本電産リード株式会社 タッチパネル検査装置
JP6182974B2 (ja) * 2013-05-20 2017-08-23 日本電産リード株式会社 基板検査方法
JP6014950B1 (ja) * 2015-12-22 2016-10-26 オー・エイチ・ティー株式会社 導電体パターン検査装置
JP6014951B1 (ja) * 2015-12-22 2016-10-26 オー・エイチ・ティー株式会社 導電体パターン検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000221227A (ja) * 1999-01-30 2000-08-11 Koperu Denshi Kk 導電パターン検査装置及び方法
JP2001084904A (ja) 1999-09-14 2001-03-30 Dainippon Printing Co Ltd 電極検査装置及び電極検査方法
JP4246987B2 (ja) * 2002-11-27 2009-04-02 日本電産リード株式会社 基板検査装置および基板検査方法
KR101013243B1 (ko) * 2002-11-30 2011-02-09 오에이치티 가부시끼가이샤 회로 패턴 검사 장치 및 회로 패턴 검사 방법
JP4562358B2 (ja) * 2003-07-04 2010-10-13 株式会社ユニオンアロー・テクノロジー 導電パターン検査装置
JP4394980B2 (ja) * 2004-01-30 2010-01-06 日本電産リード株式会社 基板検査装置及び基板検査方法

Also Published As

Publication number Publication date
KR101296460B1 (ko) 2013-08-13
JP2007298422A (ja) 2007-11-15
KR20070106399A (ko) 2007-11-01

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